• Title/Summary/Keyword: in situ monitoring

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Measurement of Particles Generated from PECVD Process using ISPM (ISPM을 이용한 PECVD 공정 내 발생입자 측정 연구)

  • Kim, Dongbin;Mun, Jihun;Kim, HyeongU;Kang, Byung Soo;Yun, JuYoung;Kang, SangWoo;Kim, Taesung
    • Particle and aerosol research
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    • v.11 no.4
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    • pp.93-98
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    • 2015
  • Particles which generated from plasma enhanced chemical vapor deposition (PECVD) during thin film deposition process can affect to the process yield. By using light extinction method, ISPM can measure particles in the large-diameter pipe (${\leq}300mm$). In our research, in-situ particle monitor (ISPM) sensor was installed at the 300 mm diameter exhaust-line to count the particles in each size. In-house flange for mounting the transmitting and receiving parts of ISPM was carefully designed and installed at a certain point of exhaust line where no plasma light affect to the light extinction measurement. Measurement results of trend changes on particle count in each size can confirm that ISPM is suitable for real-time monitoring of vacuum process.

Removal of Cadmium from Clayey Soil by Electrokinetic Method

  • Niinae, Masakazu;Sugano, Tsuyoshi;Aoki, Kenji
    • Proceedings of the IEEK Conference
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    • 2001.10a
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    • pp.91-96
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    • 2001
  • Restoration of contaminated soils to an environmentally acceptable condition is important. One of the newer techniques in soil remediation is a method based on electrokinetic phenomena in soils. The technology uses electricity to affect chemical concentrations and water flow through the pores of soils. An important advantage of electrokinetic soil remediation over other in-situ processes such as soil flushing is the capability of control over the movement of the contaminants. Because the migration of the contaminants is confined by the electric field, there is little dispersion outside the treatment zone. Furthermore, the process is effective for soils with low and variable permeability. In the present study, the distributions of cadmium in the electrokinetic processing of kaolinite under the condition of constant applied voltage are investigated. Cadmium accumulates near the cathode without reducing the diffusion of hydroxide ion into the soil. In keeping the catholyte pH at neutrality, cadmium migrates toward the cathode without any accumulation of cadmium near the cathode and is successfully removed at the cathode reservoir. It was also found that the progress of electrokinetic processing of cadmium could be gasped to a certain extent by monitoring the local voltage and the current density.

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Non-contact monitoring of 3-dimensional vibrations of bodies using a neural network

  • Ha, Sung Chul;Cho, Gyeong Rae;Doh, Deog-Hee
    • Journal of Advanced Marine Engineering and Technology
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    • v.39 no.10
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    • pp.1011-1016
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    • 2015
  • Gas piping systems in power plants and factories are always influenced by the mechanical vibrations of rotational machines such as pumps, blowers, and compressors. Unusual vibrations in a gas piping system influence possible leakages of liquids or gases, which can lead to large explosive accidents. Real-time measurements of unusual vibrations in piping systems in situ prohibit them from being possible leakages owing to the repeated fatigue of vibrations. In this paper, a non-contact 3-dimensional measurement system that can detect the vibrations of a solid body and monitor its vibrational modes is introduced. To detect the displacements of a body, a stereoscopic camera system is used, through which the major vibration types of solid bodies (such as X-axis-major, Y-axis-major, and Z-axis-major vibrations) can be monitored. In order to judge the vibration types, an artificial neural network is used. The measurement system consists of a host computer, stereoscopic camera system (two-camera system, high-speed high-resolution camera), and a measurement target. Through practical application on a flat plate, the measured data from the non-contact measurement system showed good agreement with those from the original vibration mode produced by an accelerator.

Design of Vertical Drain in Consideration of Smear Effect and Well Resistance (교란효과와 배수저항을 고려한 연직 배수재 설계)

  • 이달원
    • Magazine of the Korean Society of Agricultural Engineers
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    • v.42 no.4
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    • pp.115-123
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    • 2000
  • This study compared the degree of consolidation by hyperbolic, curve fitting , Asaoka's and methods using values measured with a theoretical curve in consideration of smear effect and well resistance. The degree of consolidation by the Hyperboilc method was underestimated than the degree of consolidation by Curve fitting. Asaoka's , and Monden's methods. The typical range of the coefficient of horizontal consolidation was Ch=(2-3)Cv in the case considering smear effect and well resistance, and Ch =(0.5-2.1) Cv in the case disregarding smear effect and well resistance. The degree of consolidation obtained by ground settlement monitoring was nearly the same value when the coefficient of smear zone permeability by back analysis was shown to be half that of in-situ and the diameter of the smear zone was shown to be double that of mandrel. By increasing the diameter reduction ratio of the drain, the time of consolidation was delayed. The effect of well resistance showed that the case of a small coefficient of permeability was much more than in the case of a large coefficient of permeability . It was recommended that when designing diameter reduction of a drain, well resistance should be considered.

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Water table: The dominant control on CH4 and CO2 emission from a closed landfill site

  • Nwachukwu, Arthur N.;Nwachukwu, Nkechinyere V.
    • Advances in environmental research
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    • v.9 no.2
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    • pp.123-133
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    • 2020
  • A time series dataset was conducted to ascertain the effect of water table on the variability in and emission of CH4 and CO2 concentrations at a closed landfill site. An in-situ data of methane/carbon dioxide concentrations and environmental parameters were collected by means of an in-borehole gas monitor, the Gasclam (Ion Science, UK). Linear regression analysis was used to determine the strength of the correlation between ground-gas concentration and water table. The result shows CH4 and CO2 concentrations to be variable with strong negative correlations of approximately 0.5 each with water table over the entire monitoring period. The R2 was slightly improved by considering their concentration over single periods of increasing and decreasing water table, single periods of increasing water table, and single periods of decreasing water table; their correlations increased significantly at 95% confidence level. The result revealed that fluctuations in groundwater level is the key driving force on the emission of and variability in groundgas concentration and neither barometric pressure nor temperature. This finding further validates the earlier finding that atmospheric pressure - the acclaimed major control on the variability/migration of CH4 and CO2 concentrations on contaminated sites, is not always so.

Stress evaluation of tubular structures using torsional guided wave mixing

  • Ching-Tai, Ng;Carman, Yeung;Tingyuan, Yin;Liujie, Chen
    • Smart Structures and Systems
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    • v.30 no.6
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    • pp.639-648
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    • 2022
  • This study aims at numerically and experimentally investigating torsional guided wave mixing with weak material nonlinearity under acoustoelastic effect in tubular structures. The acoustoelastic effect on single central frequency guided wave propagation in structures has been well-established. However, the acoustoelastic on guided wave mixing has not been fully explored. This study employs a three-dimensional (3D) finite element (FE) model to simulate the effect of stress on guided wave mixing in tubular structures. The nonlinear strain energy function and theory of incremental deformation are implemented in the 3D FE model to simulate the guided wave mixing with weak material nonlinearity under acoustoelastic effect. Experiments are carried out to measure the nonlinear features, such as combinational harmonics and second harmonics in related to different levels of applied stresses. The experimental results are compared with the 3D FE simulation. The results show that the generation combinational harmonic at sum frequency provides valuable stress information for tubular structures, and also useful for damage diagnosis. The findings of this study provide physical insights into the effect of applied stresses on the combinational harmonic generation due to wave mixing. The results are important for applying the guided wave mixing for in-situ monitoring of structures, which are subjected to different levels of loadings under operational condition.

A Preliminary Study on Polishing Process using Magnetorheological Fluid (자기유변유체를 활용한 연마공정에 대한 기초연구)

  • Hwang B.H.;Min B.K.;Lee S.J.;Seok J.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.464-467
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    • 2005
  • Among several polishing techniques for micro structures, polishing process using magnetorheological(MR) fluid has advantages in the finishing process of 3-D micro structures because abrasives in the fluid can reach surfaces with complex feature and play their role. Although many researchers have been trying to reveal its polishing mechanism of the MR polishing, it has not been successful because in-situ measurement of state variables is difficult and process parameters are complex. In fact, one of the key factors for applying process control methodologies, such as Run-to-Run control, is the measuring and monitoring of slurry quality because the process strongly depends on the fluid property. Therefore, it is necessary to maintain consistent slurry quality to guarantee the process repeatability. The proposed equipment achieves the longer life cycle of MR fluid and reduces the variability of products. A new method to measure the material removal rate in MRF polishing process is also proposed and discussed.

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Metal-insulator Transition in $(Sr_{0.75},\;La_{0.25})TiO_3$ Ultra-thin Films

  • Choi, Jae-Du;Choi, Eui-Young;Lee, Yun-Sang;Lee, Jai-Chan
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.10a
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    • pp.19.2-19.2
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    • 2011
  • The $(Sr_{0.75},\;La_{0.25})TiO_3$ (SLTO) ultra-thin films with various thicknesses have been grown on Ti-O terminated $SrTiO_3$(100) substrate using Laser-Molecular Beam Epitaxy (Laser MBE). By monitoring the in-situ specular spot intensity oscillation of reflection high energy electron diffraction (RHEED), we controlled the layer-by-layer film growth. The film structure and topography were verified by atomic force microscopy (AFM) and high resolution thin film x-ray diffraction by the synchrotron x-ray radiation. We have also investigated the electronic band structure using x-ray absorption spectroscopy (XAS). The ultra thin SLTO film exhibits thickness driven metal-insulator transition around 8 unit cell thickness when the film thickness progressively reduced to 2 unit cell. The SLTO thin films with an insulating character showed band splitting in Ti $L_3-L_2$ edge XAS spectrum which is attributed to Ti 3d band splitting. This narrow d band splitting could drive the metal-insulator transition along with Anderson Localization. In optical conductivity, we have found the spectral weight transfer from coherent part to incoherent part when the film thickness was reduced. This result indicates the possibility of enhanced electron correlation in ultra thin films.

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STATE-OF-THE-ART TECHNOLOGY USING GENETICALLY-ENGINEERED BIOLUMINESCENT BACTERIA AS ENVIRONMENTAL BIOSENSORS

  • Gu, Man-Bock
    • Proceedings of the Korean Society for Applied Microbiology Conference
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    • 2000.04a
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    • pp.94-99
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    • 2000
  • Bioluminescence is being used as a prevailing reporter of gene expression in microorganisms and mammalian cells. Bacterial bioluminescence draws special attention from environmental biotechnologists since it has many advantageous characteristics, such as no requirement of extra substractes, highly sensitive, and on-line measurability. Using bacterial bioluminescence as a reporter of toxicity has replaced the classical toxicity monitoring technology of using fish or daphnia with a cutting-edge technology. Fusion of bacterial stress promoters, which control the transcription of stress genes corresponding to heat-shock, DNA-, or oxidative-damaging stress, to the bacterial lux operon has resulted in the development of novel toxicity biosensors with a short measurement time, enhanced sensitivity, and ease and convenient usage. Therefore, these recombinant bioluminescent bacteria are expected to induce bacterial bioluminescence when the cells are exposed to stressful conditions, including toxic chemicals. We have used these recombinant bioluminescent bacteria in order to develop toxicity biosensors in a continuous, portable, or in-situ measurement from for air, water, and soil environments. All the data obtained from these toxicity biosensors for these environments were found to be repeatable and reproducible, and the minimum detection level of toxicity was found to be ppb (part per billion) levels for specific chemicals.

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REINFORCING EFFECTS OF MICRO-PILES (억지말뚝의 억제효과)

  • Jung, Sung-Yun;Chang, Ki-Tae;Han, Heui-Soo
    • Journal of the Korean Geophysical Society
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    • v.7 no.4
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    • pp.305-311
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    • 2004
  • Several sensor systems are used to estimate the reinforceing effect of pile in hihg cut slopes, and to find a failure zone in slopes effectively. Inclinometer, extensometer and V/W sensor have shown a great potentiality to serve real time health monitoring of the slope structures. They were embedded or attached to the structures, we conducted field tests and test results have shown great solutions for sensor systems of Civil Engineering Smart Structures. This research is to seek for the relationships among the slope movement and the reinforceing effect of pile, and the strain distribution in a active zone by analyzing the data from the in-situ measurement so that the possible failure zone should be well defined based on the relationships. Also, the relationships between temperature and reinforceing effect of pile, and the strain distribution are estimated in this paper.

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