• Title/Summary/Keyword: impurity removal

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리모트 수소 플라즈마를 이용한 Si 기판 위의 Cu 불순물 제거 (A Study on the Removal of Cu Impurity on Si Substrate and Mechanism Using Remote Hydrogen Plasma)

  • 이종무;전형탁;박명구;안태항
    • 한국재료학회지
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    • 제6권8호
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    • pp.817-824
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    • 1996
  • 리모트 수소 플라즈마를 이용하여 Si 기판 위의 구리 오염의 제거 효과에 관하여 조사하였다. 최적의 공정 조건을 찾기 위하여 Si 기판을 1ppm ${CuCI}_{2}$ 표준 화학 용액으로 인위적으로 오염시킨 후 rf power와 세정시간, 거리 (수소플라즈마 중심에서 Si 기판표면까지의 거리)등의 공정 변수를 변화시키며 리모트 수소 플라즈마 세정을 실시하였다. 리모트 수소 플라즈마 세정 후 Si 표면의 분석을 위하여 TXRF(total x-ray reflection fluorescence)와 AFM(atomic force microscope)측정을 실시하였다. 리모트 수소 플라즈마 세정이 Cu의 제거에 효과적이며 Si 표면의 거칠기에 나쁜 영향을 주지 않음을 TXRF와 AFM 분석결과로부터 알 수 있었다. Cu 불순물의 흡착 메커니즘은 산화 환원 전위 이론으로 설명될 수 있으며, Cu 불순물의 제거 메커니즘은 XPS(x-ray photoelectron spectroscopy)분석결과를 근거로 하여 다음과 같이 설명할 수 있다. :먼저 Cu 이온이 Si 표면에 흡착되어 화학적 산화막을 생성한다. 그 다음, 수소 플라즈마 중의 반응성이 강한 수소이온이 이 산화막을 분해시켜 제거하며 Cu 불순물은 산화막이 제거될 때 함께 제거된다.

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실리카광물의 산침출 정제방법에 따른 불순물 변화 연구 (Impurity variation in high purity silica mineral with different leaching methods)

  • 윤윤열;이길용;조수영;정수복;채영배
    • 분석과학
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    • 제21권4호
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    • pp.332-337
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    • 2008
  • 실리카 광물의 정제를 위해 다양한 침출방법을 사용하여 침출특성을 비교하였다. 2.5% HF/HCl 산 침출용액을 사용하여 진동, 젓기, 초음파를 이용한 침출실험에서 초음파에 의한 침출방법이 가장 좋은 불순물 제거 효율을 나타내었다. 실험결과 Al, Ca, Fe, K, Na 등이 주 불순물로 존재하고 있었으며, 그 외 미량의 불순물로 Ba, Cu, Sr, Ti 등이 존재하였다. 실리카 광물중의 불순물 함량은 침출법에 의해 대부분 감소되었다. 또한 주 불순물인 Al, Fe의 경우 침출방법에 따라 제거율이 크게 차이나지 않았으나, Ca, Mn, Na 등은 제거율이 현저히 다른 양상을 나타내었다. 물리적 정제과정을 거친 4종류의 실리카 광물(순도 99% 이상)을 초음파를 이용한 산 침출법으로 정제한 결과, 총 불순물의 양은 NK-Si와 GR-Si이 적었으나 산 침출과정을 거친 후에는 IN-Si 실리카의 불순물 량이 가장 적게 나타났다. 불순물 중 Ca, Cr, K, Zn 등은 거의 80% 이상 초음파 침출법에 의해 제거되었고, 주 불순물인 Al의 경우 시료에 따라 10~60%의 제거율 차이를 나타내며 Fe는 모든 시료에서 60% 이상 제거되었다.

주축 전면부 칩 제거를 위한 압축공기 구멍 설계에 관한 연구 (A Study on the Design of Compression Air Hole in Front of Spindle for Chip Removal)

  • 강동위;이춘만
    • 한국정밀공학회지
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    • 제30권3호
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    • pp.278-283
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    • 2013
  • While Built-in Spindle is working in machining center, the tool is changed by ATC(Automatic Tool Changer) automatically. However, impurities could be stacked in front of spindle because of chips formation while machining, and positional error between spindle and tool could be generated. Compressed air holes are necessary for removal of the impurities. But, the diameter and number of compressed air hole are different for each built-in spindle in market. In this paper, flow analysis is carried out to find out the efficient figuration of the compressed air hole by using velocity and pressure distributions.

압출공정에 의한 수 처리용 평관형알루미나 필터의 미세구조와 특성평가 (Characterization and Microstructure of an Extruded Flat-Tubular-Type Alumina Filter)

  • 배병서;하장훈;송인혁
    • 한국세라믹학회지
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    • 제51권5호
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    • pp.406-412
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    • 2014
  • In this study, flat-tubular-type alumina filters were manufactured using alumina powder of two sizes ($2.4{\mu}m$ ALM-44 and $0.4{\mu}m$ AP 400) by an extrusion process. The manufactured alumina filter was sintered at $1200-1600^{\circ}C$ for 1 h. As particle size increased, the largest pore size, average pore size and porosity increased; but density and linear shrinkage decreased. The alumina filter fabricated using ALM-44 powder sintered at $1500^{\circ}C$ was confirmed as the best water treatment filter after investigation of the bending strength, water permeability and impurity-removal efficiency of the experimental filters. This flat-tubular-type alumina filter is expected to be useful not only for direct water treatment, but also for use as a support filter during coating processes, to control pore size.

Study on Recycling of Scraps from Process of Silicon-single-crystal for Semiconductor

  • Lee, Sang-Hoon;Lee, Kwan-Hee;Hiroshi Okamoto
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2001년도 The 6th International Symposium of East Asian Resources Recycling Technology
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    • pp.705-710
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    • 2001
  • So for the quartz-glassy crucible wastes which was used for pulling up silicon-single-crystal ingot have simply reused for refractory raw-materials, or exhausted. This study is concerned on the advanced recycling-technology that is obtained by the proper micro-particle preparation process in order to fabricate fine amorphous silica filler for EMC (Epoxy Molding Compound). Therefore, this paper will deal with the physical, chemical and thermal pre-treatment process for efficient impurity removal and with the proper micro-particle process for producing the amorphous silicafiller. In view of the results, if the chemical, physical and thermal pre-treatment process for efficient elimination of impurity was passed, the purity of wasted fused glassy crucible is almost equal to the its of first anhydrous quartz glass. Thus, it was understood that this wasted fused glassy crucible was sufficient value of recycling, though it was damaged. When the ingot was fabricated, Phase transformation of crystallization by heat treatment (heat hysteresis phenomenon) was not changed. So, it was understood that as fused silica in the amorphous state, as It is, recycling possibility was very high

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압력식 급속 자동 여과장치의 여과성능 평가 (The Performance Estimation of Pressure-Type Rapid Automatic Filter)

  • 김덕진;유해성;신상윤
    • 대한설비공학회:학술대회논문집
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    • 대한설비공학회 2006년도 하계학술발표대회 논문집
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    • pp.607-612
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    • 2006
  • A pressure-type rapid automatic filter of 2000mm diameter and 170 ton/h filtering capacity was fabricated. In case of no external impurity inflow, the turbidity removal efficiency on raw water was experimented and the numbers of impurities of each sizes were analyzed by particle counter. As the result of circulated filtering, the raw water of 40 NTU was filtered to 0.44 NTU and the numbers of impurities above $1{\mu}m$ were removed by approximately 95%. With the filtering efficiency experimented and the mathematical method, the turbidity change of circulation water were calculated according to the inflow rate of external impurity and water treatment method of blow-down or filtering. The cost of blow-down water was calculated from above results. And simple payback period for this filter is calculated as about one year. Nowadays, as the cost of water is continuously increasing and environment regulations will be more strict, the water quality control using this filter will be expected to satisfy the user requirement.

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Cationic Dye (Methylene Blue) Removal from Aqueous Solution by Montmorillonite

  • Fil, Baybars Ali;Ozmetin, Cengiz;Korkmaz, Mustafa
    • Bulletin of the Korean Chemical Society
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    • 제33권10호
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    • pp.3184-3190
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    • 2012
  • Color impurity in industrial effluents pose a significant risk to human health and the environment, so much effort has been expended to degrade them using various methods, including the use of clay minerals as adsorbent. The purpose of this study was to advance understanding of the mechanisms for the removal of methylene blue (MB) from aqueous solutions onto montmorillonite as an adsorbent. Preliminary experiments showed that montmorillonite was effective for this purpose and adsorption equilibrium could be reached in about 24 h. Adsorption capacity of the clay decreased with increase in temperature and ionic strength, and increased with in pH. The fitness of equilibrium data to common isotherm equations such as the Langmuir, Freundlich, Elovich, Temkin and Dubinin-Radushkevich were tested. The Langmuir equation fitted to equilibrium data better than all tested isotherm models. Thermodynamic activation parameters such as ${\Delta}G^0$, ${\Delta}S^0$ and ${\Delta}H^0$ were also calculated and results were evaluated. As result montmorillonite clay was found as effective low cost adsorbent for removal of cationic dyes from waste waters.

대마섬유의 정련 방법에 관한 비교 연구 (Comparative Study on the Degumming Methods of Hemp Fiber)

  • 임형규;김희숙
    • 한국의류산업학회지
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    • 제22권4호
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    • pp.523-533
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    • 2020
  • Previous studies are used to examine cellulose content, degumming period, fiber quality, production yield, production cost, development limit of fiber according to physical, chemical, and microbial degumming methods. Three types of degumming methods are used to measure surface condition after degumming, necessity of additional degumming and degree of impurity removal. First, previous studies confirmed that the microbial degumming method is superior in terms of cellulose content, fiber quality, production yield, production cost, and fiber development possibility. Second, surface condition and the necessity of additional degumming were analyzed by SEM. The black skin binding material was removed in the case of the Sangnangyi and chemical degumming; however, it was insufficient and further degumming was required. Skin fiber binding material was removed in the case of microbial degumming and the surface was cleanest after degumming; in addition, most showed the form of yarn decomposition. The FT-IR spectrum determined the degree of removal of impurities and showed that it can utilize inherent physical properties as the best degumming method. The degree of removal of pectin and lignin by microbial degumming was cleanest with hemicellulose also reduced by microbial degumming.

싸이클론 전해환원방법을 이용한 LiBr 용액내의 Cu 불순물 제거에 관한 연구 (Removal of Cu impurities in LiBr solution using cyclone electrowinning method)

  • 박다정;이규환
    • 한국표면공학회지
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    • 제57권2호
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    • pp.92-97
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    • 2024
  • The LiBr aqueous solution, which is the absorption liquid of absorption refrigerator, must be replaced periodically because the concentration of impurities such as Cu2+, Fe2+, Ca2+, etc., increases due to corrosion of the tubes as the period of use increases, and the refrigeration efficiency decreases significantly. In order to reuse the waste absorption liquid, flocculation-precipitation method is mainly applied to precipitate the impurities, which requires hundreds of times the concentration of impurities and generates additional waste. In this study, a process for removing Cu ion impurities from cyclone electrolyzer by electrolytic reduction is presented in a small-scale facility without additional waste. It was confirmed that Cu ion impurities can be removed down to 1 ppm by electrolytic reduction process, and to further improve the removal rate, the mass transfer rate was increased by using a cyclone electrolyzer. The removal rate of Cu ions increased with the increase of flow rate and current density, and it was confirmed that Cu was removed at a rate of 1.48 ppm/h under the condition of 330 mL/sec and 2.5 mA/cm2.

폐 LCD 유리 재활용을 위한 용매 별 유기물 제거 효율에 대한 연구 (A Study of Organic Impurity Removal Efficiency for Waste LCD Touch Panel Glass by Solvents Types)

  • 강유빈;최진주;박재량;이찬기
    • 자원리싸이클링
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    • 제29권6호
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    • pp.57-64
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    • 2020
  • 본 연구에서는 LCD 터치 패널 유리의 재활용을 위해 기계적 방법과 화학적 용해법을 혼용하여 OCA 및 유기 불순물을 제거하는 실험을 진행하였다. 터치 패널의 기계적 파분쇄를 위해 cut mill과 oscillation mill을 이용하였으며, OCA와 유기 불순물의 제거를 위해 물, 에탄올, 디클로로메탄을 이용하여 터치 패널 파쇄물을 세정하였다. 세정 이후 TGA를 통해 유기 불순물의 제거 효율을 평가한 결과 디클로로메탄 단일 용매를 사용한 경우 세정 효과가 가장 뛰어났으며, 세정 온도가 증가함에 따라 유기 불순물의 제거 효과가 증가함을 확인하였다. 제타 전위 측정을 통해 터치 패널 유리 파쇄물의 용매 내 분산도를 평가한 결과, 세정 효과가 가장 낮은 물의 제타 전위 절대값이 타용매에 비해 낮았으며, 유기물의 제거 효과는 화학적인 용해 특성뿐 아니라 용매 내 물리적인 분산 특성에 의해서도 영향을 받을 수 있음을 확인하였다.