• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.257-257
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• 2012

Fault detection was carried out in a etcher of capacitive coupled plasma with OES (Optical Emission Spectroscopy) and impedance by VI probe that are widely used for process control and monitoring at semiconductor industry. The experiment was operated at conventional Ar and Fluorocarbon plasma with variable change such as pressure and addition of N2 and O2 to assume atmospheric leak, RF power and pressure that are highly possible to impact wafer yield during wafer process, in order to observe OES and VI Probe signals. The sensitivity change on OES and Impedance by VI probe was analyzed by statistical method including PCA to determine healthy of process. The main goal of this study is to find feasibility and limitation of OES and Impedances for fault detection by shift of plasma characteristics and to enhance capability of fault detection using PCA.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.6
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• pp.1170-1176
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• 2007

The conventional urodynamic monitoring is fulfilled by artificially filling a bladder with saline. Generally. it is difficult to evaluate the physiological functions of the storage and voiding of a bladder. With this aim, we constructed an ambulatory urodynamic monitoring (AUM) system and proposed a novel method estimating abdominal pressure by measuring bio-impedance variations. Our system was clinically evaluated for 10 patients. It turned out to be that as the intensity of the abdomen contraction increased, the amplitude of bio-impedance signal and the RMS value of EMG increased more as compared to those who observed during the rest mode. Also, we determined the optimum electrode pair for estimating the abdominal pressure using bio-impedance method and consequently compared with the conventional methods. Because impedance changes differ from a weight, a height, contractile force, volume of muscle and blood other or whatever of individuals, it was quantified in terms of impedance change, correlation coefficient and SNR Our results showed the optimum electrode pair (1,9) which could detect impedance changes due to the increase of the intensity in the abdominal pressure. The correlation coefficient and quadratic function between the RMS values of EMG and the impedance changes were 0.87 and $y=0.0014x^2+0.0620x+0.6958$, respectively. Thus, our system demonstrated that the abdominal pressure could be measured noninvasively and conveniently by simply estimating bio-impedance values. We propose that this optimum electrode configuration would be useful for the future studies involving the handy measurements of abdominal pressure with our suggested ambulatory urodynamics monitoring system.

• Journal of Biomedical Engineering Research
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• v.5 no.1
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• pp.15-18
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• 1984

In this paper we developed a respiration monitor by an impedane pneumography. This technique, measuring the electrical impedance change of the lungs due to breath, provides the accurate data for the respiration trend and rates. To measure the small impedance difference we designed a special current source which was considered the electrical safety and the interference with the ECG signal.

• Journal of Radiation Protection and Research
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• v.38 no.4
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• pp.202-207
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• 2013

Bioimpedance involves a lot of information related to living tissue. If there is alteration in bio tissue, its electrical characteristics also change. It is to study electrical characteristics of pork tenderlion in using a HP-4194A Impedance/Gain-phase analyzer instrument and electrical characteristics changes by graded radiation exposure dose. The results were as follow 1. Electrical characteristics of pork tenderlion in repeated measurement had high precision within ${\pm}5$% of coefficiency of variability. 2. During the measurement impedance absolute value and phase alteration did not show statistically significant difference.(p>0.05) 3. While impedance phase of electrical characteristics associated with frequency change was almost stable, impedance absolute value was in inverse proportion to frequency that means high inverse correlation of -0.096(r). 4. Impedance absolute value dropped in radiation exposure dose. The alteration of the value did not show statistically significant difference in 1 Gy, 2 Gy and 4 Gy.(p>0.05) However in radiation exposure dose of 10 Gy, the decrease of impedance absolute value was significantly different.(p<0.05) 5. Impedance phase according to radiation exposure dose change did not show statistically significant difference in 1 Gy, 2 Gy, 4 Gy, and 10 Gy(p>0.05).

• Smart Structures and Systems
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• v.5 no.1
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• pp.81-94
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• 2009

A vibration-impedance-based monitoring method is proposed to predict the loss of prestress forces in prestressed concrete (PSC) girder bridges. Firstly, a global damage alarming algorithm using the change in frequency responses is formulated to detect the occurrence of damage in PSC girders. Secondly, a local damage detection algorithm using the change in electro-mechanical impedance features is selected to identify the prestress-loss in tendon and anchoring members. Thirdly, a prestress-loss prediction algorithm using the change in natural frequencies is selected to estimate the extent of prestress-loss in PSC girders. Finally, the feasibility of the proposed method is experimentally evaluated on a scaled PSC girder model for which acceleration responses and electro-mechanical impedances were measured for several damage scenarios of prestress-loss.

• Journal of the Earthquake Engineering Society of Korea
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• v.10 no.6 s.52
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• pp.57-65
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• 2006

This paper presents hybrid structural damage monitoring system which performs both global damage assessment of structure and damage detection of local structural joints. Hybrid damage monitoring system is composed of vibration-based technique and electro/mechanic impedance technique. Vibration-based technique detects global characteristic change ot structure using modal characteristic change of structure, and electro/mechanical impedance technique detects damage existence of local structural joints using impedance change of PZT sensor. For the verification of the proposed hybrid monitoring system, a series of damage scenarios are designed to loosened bolts situations of the structural joints, and acceleration response and impedance response signatures are measured. The proposed hybrid monitoring system is implemented to monitor global damage-state and local damages in structural joints.

• Proceedings of the IEEK Conference
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• 2003.07c
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• pp.2891-2894
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• 2003

This paper describes the possibility of analyzing gait pattern from the variation of the lower leg electrical impedance. This impedance is measured by the four-electrode method. Two current electrodes are applied to the thigh and foot., and two potential electrodes are applied to the lateral aspect. medial aspect, and posterior position of lower leg. We found the optimal electrode position for knee and ankle joint movements based on high correlation coefficient, least Interference, and maximum magnitude of impedance change. From such features of the lower leg impedance, it has been made clear that different movement patterns exhibit different impedance patterns and impedance level.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.05a
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• pp.184-187
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• 2005

Physical changes in a structural system may cause changes in mechanical impedance of the system. Due to the electro-mechanical coupling effect in piezoelectric materials, this change can be monitoring by the electrical impedance of the piezoelectric sensor. In this paper, the variability of electro-mechanical impedance caused by temperature effect is assessed to adjust impedance data used for EMI based damage detection in beams. First experiments on beams are described. Next, experiments were performed under the temperature varying condition, in the range of $3^{\circ}C\;to\;23^{\circ}C$. Finally, the relationship between temperatures and impedance signatures is analyzed empirically temperature-frequency patten for the test structure.

• Proceedings of the KIEE Conference
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• 2002.11c
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• pp.414-417
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• 2002

This paper describes the possibility of analyzing gait pattern from the variation of the lower leg electrical impedance. This impedance is measured by the four-electrode method. Two current electrodes are applied to the thigh and foot., and two potential electrodes are applied to the lateral aspect, medial aspect, and posterior position of lower leg. We found the optimal electrode position for knee and ankle joint movements based on high correlation coefficient, least interference, and maximum magnitude of impedance change. From such features of the lower leg impedance, it has been made clear that different movement patterns exhibit different impedance patterns and impedance level.

• Smart Structures and Systems
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• v.30 no.5
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• pp.463-477
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• 2022

In this paper, a hybrid vibration-impedance-based damage monitoring approach is experimentally evaluated for prestressed concrete (PSC) structures with local strand breakage. Firstly, the hybrid monitoring scheme is designed to alert damage occurrence from changes in vibration characteristics and to localize strand breakage from changes in impedance signatures. Secondly, a full-scale PSC anchorage is experimented to measure global vibration responses and local impedance responses under a sequence of simulated strand-breakage events. Finally, the measured data are analyzed using the hybrid monitoring framework. The change of structural condition (i.e., damage extent) induced by the local strand breakage is estimated by changes in a few natural frequencies obtained from a few accelerometers in the structure. The damaged strand is locally identified by tomography analysis of impedance features measured via an array of PZT (lead-zirconate-titanate) sensors mounted on the anchorage. Experimental results demonstrate that the strand breakage in the PSC structure can be accurately assessed by using the combined vibration and impedance features.