• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.11a
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• pp.662-667
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• 1996

For compensating the error motion of hydrostatic guideways, the structure and the theoretical design method of ACC(Active Controlled Capillary) are proposed. The maximum controllable range, micro step response and dynamic characteristics of ACC are analyzed experimentally for verifing the availability. The experimental results showed that by the use of ACC, the error motion within 2.7${\mu}{\textrm}{m}$ of a hydrostatic guideway can be compensated with the resolution of 27nm, 1/100 of uncontolled error, and the frequency band of 5.5Hz. From these results, it Is confirmed that the ACC is very effect to improve the moving accuracy of high or ultra precision hydrostatic guideways.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.8
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• pp.130-136
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• 1997

For compensating the error motion of hydrostatic guideways, we introduce a way that the clearance of table is actively controlled corresponding to the amount of error with the variable capillary. The structure and the theoretical design method of active controlled capillary using piezo actuator, named ACC, are proposed in this paper. Basic characteristics such as the maximum controllable range, micro step response and available dynamic bandwidth are tested for confirmation of structural suitability of ACC, and these characteristics are also tested on the table mounted with ACC for verifying the availability. The experimental result showed that by the use of ACC, the error motion within 2.7 .mu. m of a hydrostatic guideway can be compensated with the resolution of 2.7nm, 1/100 contollable range, and the frequency bandwidth of 5.5 Hz. From these results, it is confirmed that the ACC is very effective to improve the motion accuracy of high or ultra precision hydrostatic guideways.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.127-128
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• 2007

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.2
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• pp.55-60
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• 2005

In order to develop the hydrostatic guideways driven by a core less linear motor for ultra precision machine tools, a prototype of guideway is designed and tested. A coreless linear DC motor with a continuous force of 156 N and a laser scale with a resolution of 0.01 ㎛ are used in the system. Experimental analysis on the static stiffness, motion errors, positioning error and its repeatability, micro step response and velocity variation of the guideway are performed. The guideway shows infinite stiffness within 50 N applied load in the feed direction, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ㎛ linear motion error and 0.1 arcsec angular motion error are acquired. The guideway also reveals 0.21 ㎛ positioning error and 0.09 ㎛ repeatability, and it shows stable responses following a 0.01 ㎛ resolution step command. The velocity variation of feeding system is less than 0.6 ％. From these results, it is estimated that the hydrostatic guideway driven by a coreless linear motor is very useful for the ultra precision machine tools.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.6
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• pp.139-144
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• 2004

In order to discuss the availability of hydrostatic guideways driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156 N and a laser scale with the resolution of 0.01 ${\mu}{\textrm}{m}$ are used as the feeding system. The experiments are performed on the static stuffiness, motion accuracy, positioning accuracy, microstep response and variation of velocity. The guideway has the infinite axial stillness within 50 N of applied load, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ${\mu}{\textrm}{m}$ of linear motion error and 0.1 arcsec of angular motion error are acquired. The guideway also has 0.21 ${\mu}{\textrm}{m}$ of positioning error and 0.09 ${\mu}{\textrm}{m}$ of repeatability, and it shows the stable response against the 0.01 ${\mu}{\textrm}{m}$ resolution step command. The velocity variation of feeding system is less than 0.6 %. From these results, it is confirmed that the hydrostatic guideway driven by the coreless linear motor is very useful fur the ultra precision machine tools.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.6
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• pp.703-713
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• 2011

In this study, to minimize trial and error in the design and manufacturing processes of a high-precision large-surface micro-grooving machine which is able to fabricate the molds for 42 inch LCD light guide panels, the effects of the structural deformation of the micro-grooving machine according to the positions of the X-axis, Y-axis and Z-axis feed systems were examined on the tool tip displacement errors associated with the machining accuracy. The virtual prototype (finite element model) of the micro-grooving machine was constructed to include the joint stiffnesses of the hydrostatic bearings, hydrostatic guideways and linear motors, and then the tool tip displacement errors were measured from the virtual prototype. Especially, to establish the prediction model of the tool tip displacement errors, which was constructed using the positions of the X-axis, Y-axis and Z-axis feed systems as independent variables, the response surface method based on the central composite design was introduced. The reliability of the prediction model was verified by the fact that the tool tip displacement errors obtained from the prediction model coincided well those measured from the virtual prototype. And the causes of the tool tip displacement errors were identified through the analysis of interactions between the positions of the X-axis, Y-axis and Z-axis feed systems.