• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2011년도 춘계학술대회 및 Fine pattern PCB 표면 처리 기술 워크샵
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• pp.141-141
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• 2011

DLC(Diamond Like Carbon) 박막은 높은 경도, 낮은 마찰계수, 내화학성 등의 우수한 트라이볼로지적 특성을 가지고 있기 때문에 다양한 산업분야에서 적용되고 있다. 이러한 DLC 박막은 합성기구나 구조의 관점에서 몇 가지 다른 이름으로 불려지기도 한다. 밀도와 경도가 높기 때문에 경질탄소(Hard Carbon)라고도 불려지며, 수소를 함유한 경우에는 수소함유 비정질 탄소(Hydrogenated Amorphous Carbon)이라는 이름이 사용되며, 고밀도 탄소(Dense Carbon) 또는 고밀도 탄화수소(Dense Hydrocarbon)라고 불리기도 한다. 이렇듯 DLC 박막은 합성방법에 따라 함유된 수소와 탄소의 결합구조의 차이가 있다. 수소 함유한 DLC 박막은 20~50%까지 수소를 함유하며, DLC막의 기계적, 광학적, 전기적 특성들이 수소함량과 밀접한 관계를 가지고 있는 것으로 알려져 있다. 그러나 함유된 수소가 $300^{\circ}C$ 이상의 온도에서는 쉽게 결합에서 이탈되면서 흑연화와 더불어 마찰마모시 코팅층의 파손이 발생한다고 보고되고 있고, 또한 수소량이 증가함에 따라 DLC 박막의 경도는 감소하게 되는데, 이는 수소에 의해 dangling bond가 Passivation되면 탄화수소의 3차원적인 Crosslinking은 그만큼 감소하게 되기 때문이라고 알려져 있다. 본 연구에서는 PECVD를 이용하여 여러 가지 공정에 따른 DLC 박막을 증착시켰으며, 수소함유량에 따른 DLC막의 구조와 그에 따른 경도 변화를 살펴보았다. FTIR(Furier Transform Infrared Spectroscopy)과 Raman Spectroscopy을 이용하여 DLC막의 수소의 결합상태를 관찰하였으며, Nano Indentation을 사용하여 미소경도를 측정하였고, FE-SEM을 이용하여 표면과 단면을 관찰하였다. 막의 두께 측정에는 ${\alpha}$-Step을 사용하였으며, Ball-on-Disk 타입의 Tribo-meter을 이용하여, 모재의 경도에 따른 마찰계수 변화를 관찰하였다.

• 한국재료학회지
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• 제30권5호
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• pp.262-266
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• 2020

In this paper, we investigated the effect of the passivation stack with Al₂O₃, hydrogenated silicon nitride (SiN_x:H) stack and Al₂O₃, silicon oxynitride (SiON_x) stack in the n type bifacial solar cell on monocrystalline silicon. SiNx:H and SiON_x films were deposited by plasma enhanced chemical vapor deposition on the Al₂O₃ thin film deposited by thermal atomic layer deposition. We focus on passivation properties of the two stack structure after laser ablation process in order to improve bifaciality of the cell. Our results showed SiN_x:H with Al₂O₃ stack is 10 mV higher in implied open circuit voltage and 60 ㎲ higher in minority carrier lifetime than SiON_x with Al₂O₃ stack at Ni silicide formation temperature for 1.8% open area ratio. This can be explained by hydrogen passivation at the Al₂O₃/Si interface and Al₂O₃ layer of laser damaged area during annealing.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.151-151
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• 2010

In this paper, the electrically properties of nonvolatile memory (NVM) using multi-stacks gate insulators of oxide-nitride-oxynitride (ONOn) and active layer of the low temperature polycrystalline silicon (LTPS) were investigated. From hydrogenated amorphous silicon (a-Si:H), the LTPS thin films with high crystalline fraction of 96% and low surface's roughness of 1.28 nm were fabricated by the metal induced crystallization (MIC) with annealing conditions of $650^{\circ}C$ for 5 hours on glass substrates. The LTPS thin film transistor (TFT) or the NVM obtains a field effect mobility of ($\mu_{FE}$) $10\;cm^2/V{\cdot}s$, threshold voltage ($V_{TH}$) of -3.5V. The results demonstrated that the NVM has a memory window of 1.6 V with a programming and erasing (P/E) voltage of -14 V and 14 V in 1 ms. Moreover, retention properties of the memory was determined exceed 80% after 10 years. Therefore, the LTPS fabricated by the MIC became a potential material for NVM application which employed for the system integration of the panel display.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.193-193
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• 2013

실리콘 박막 태양전지는 광 흡수층에서 형성된 정공과 전자를 효과적으로 분리하기 위해 p형과 n형으로 도핑된 층을 형성하는 p-i-n구조를 갖게 된다. 이러한 도핑 층을 형성하기 위해 B2H6와 PH3와 같은 독성 가스를 사용하기 때문에, 공정 안정성과 환경적인 이슈가 대두된다. 또한 도핑은 추가적으로 실리콘 박막 태양전지의 안정화 효율을 지속적으로 저하시키는 요인이 된다. 이러한 문제점을 개선하기 위하여, 창층으로 MoO3, V2O5, WO3 등과 같이 높은 일함수를 갖는 전이금속 산화물을 사용하고, 광 흡수층으로 i-Si:H을, 후면 전극으로 낮은 일함수를 나타내는 LiF/Al을 사용하였다. 전이금속 산화물과 LiF/Al의 큰 일함수 차이에 의해서 흡수층인 i-Si:H 에서 생성된 캐리어들은 효과적으로 분리되고 수집이 된다. 금속 산화물은 스퍼터링 공정에 의하여 이루어졌으며, 스퍼터링 공정조건에 따라 산화도가 조절되며, 이러한 산화도에 따라 태양전지의 셀 특성이 결정된다. 도핑 층이 없는 새로운 형태의 실리콘 박막 태양전지는 기존 비정질 실리콘 박막 태양전지에 비해 높은 안정화 효율을 나타내며, 이는 도핑 층이 없기 때문에 기존 실리콘 박막 태양전지의 열화현상에 따른 효율저하가 발생하지 않는 장점을 지내고 있다.

• Applied Science and Convergence Technology
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• 제26권6호
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• pp.174-178
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• 2017

The reactions of thermal hydrogen atoms H(g) with the Ge(100) surface were examined with temperature-programmed desorption (TPD) mass spectrometry. Concomitant $H_2$ and $CH_4$ TPD spectra taken from the H(g)-irradiated Ge(100) surface were distinctly different for low and high H(g) doses/substrate temperatures. Reactions suggested by our data are: (1) adsorbed mono(${\beta}_1$)-/di-hydride(${\beta}_2$)-H(a) formation; (2) H(a)-by-H(g) abstraction; (3) $GeH_3$(a)-by-H(g) abstraction (Ge etching); and (4) hydrogenated amorphous germanium a-Ge:H formation. While all these reactions occur, albeit at higher temperatures, also on Si(100), H(g) absorption by Ge(100) was not detected. This is in contrast to Si(100) which absorbed H(g) readily once the surface roughened on the atomic scale. While this result is rather against expectation from its weaker and longer Ge-Ge bond as well as a larger lattice constant, we attribute the absence of direct H(g) absorption to insufficient atomic-scale surface roughening and to highly efficient subsurface hydrogenation at moderate (>300 K) and low (${\leq}300K$) temperatures, respectively.

• 대한화장품학회지
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• 제34권3호
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• pp.175-181
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• 2008

생체 친화성 에칠셀룰로오스 막제를 사용하여 자발적인 유화확산에 의하여 레티닐 팔미테이트를 봉입한 나노입자를 제조하였다. 분산매인 유화제로는 폴리소로베이트 20, 폴리소르베이트 60, 피피지 26-부테스-26/피이지-40 하이드로제네이티드캐스터오일를 이용하여 제조하였으며, 본 결과로서 나노크기 입자를 제조하기에 가장 적절하며 안정한 조건은 1w/v% 에칠셀룰로오스와 3w/v% 폴리소그베이트 60 수용액을 이용한 것이었으며, 레티닐 팔미테이트의 봉입률을 최대화하기 위한 조건은 2w/v% 에칠셀룰로오스와 1w/v% 폴리소르베이트 60 수용액을 이용한 제조 조건이었다. 또한 이 최적 조건에 다른 유효성분에도 적용 가능한 것을 확인하였다.

• 한국자기학회지
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• 제5권5호
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• pp.432-436
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• 1995

The hydrogen decrepitation behaviour of the $Sm_{2}Fe_{17} alloy containing 4at%Nb was examined by means of DTA and SEM metallography, and the magnetic properties of the alloy were studied by means of VSM or TMA. It has been found that a simple hydrogenation and degassing treatment for the alloy caused a poor hydrogen decrepitation. The cycle treatment consisting of repeated hydrogenation and degassing, however, caused a severe hydrogen decrepitation with a combination of intergranular and transgranular failure. The disproportionation temperature of the hydrogenated $Sm_{2}Fe_{17}-type alloy was enhanced significantly by small addition of Nb. It has also been found that the Curie temperature of $Sm_{2}Fe_{17} matrix phase in the Nb-containing alloy has been enhanced by the hydrogenation, and this was attributed to the increase in interatomic distance between the neighbouring iron atoms caused by the interstitial occupancy of the hydrogen atom into the $Sm_{2}Fe_{17}-type lattice. The magnetisation of the $Sm_{2}Fe_{17} alloy containing Nbwas found to be lower than that of the Nb-free alloy, and this was explained by the dilution effect due to the presence of the paramagnetic $Sm_{2}Fe_{17} phase.

• 약학회지
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• 제21권3호
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• pp.167-171
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• 1977

A new assay method for delta-l-dehydrogenated-3-ketoco-rticosteroid in the presence of proteinous material or whole-cell-enzyme and 3-ketocorticosteroid has been developed. This method makes use of the linear relationship between the ratio of absorbances at 265 nm and at 242 nm and the fractional concentration of delta-1-3-ketosteroid. Theoretical values were calculated based on the absorbances of proteinous material at fixed concentrations of the 3-ketosteroid and delta-1-dehydrogenated-3-ketosteroid. The values obtained experimentally showed good agreement with the values obtained experimentally showed good agreement with the values theoretically predicted. The new assay method developed for the steroid mixtiure containing proteinous material is of some practical importance. The use of such assay method enables one to determine the enzyme activity and the rate of enzyme reaction or conversion rather quickly, easily and accurately. By the use of this assay method, the reaction kinetics of whole-cell-enzyme has also been studied. It was found that it followed the simple Michaelis-Menten type enzyme kinetics. Also the reversibility of this reaction with actively metabolizing cell was examined. It was found that delta-l-dehydrogenated-3-ketosteroid could not be hydrogenated reversibly to 3-ketosteroid by this enzyme system.

• 약학회지
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• 제50권6호
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• pp.403-408
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• 2006

1-Amino-5,6-dimethoxyindan hydrochloride was synthesized from 3- (3,4-dirnethoxyphenyl)propionic acid by intramolecular Friedel-Crafts acylation, oximation with hydroxylamine, and reduction with an overall yield of 74%. 2-Amino-5,6-dimethoxyindan hydrochloride was synthesized from 3-(3,4-dirnethoxyphenyl)propionic acid by intramolecular Friedel-Crafts acylation, oximation with isoamylnitrite, reduction in NaOH and reaction with HCI to form 5,6-dimethoxy-2-indanone, which was reacted with hydroxylamine and reduced with an overall yield of 42%. 5,6-Dimethoxyindan-1,2-dione-2-oxime, which was catalytically hydrogenated to afford cis-, and trans-1-amino-5,6-dimethoxyindan-1-ol as 3 : 1 ratio. This mixture was treated with Li and reacted with chloroacetyl chloride. Cis isomer was acylated and cyclized to synthesize rir -( ${\pm}$ )-7,8-dimethoxy-4,4a,5,9b-tetrahydroindeno[1,2-b][1,4]oxazin-3(2H)-one, but trans isomer was just acylated to form amide.

• Bulletin of the Korean Chemical Society
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• 제8권4호
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• pp.324-328
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• 1987

Reaction of Rh $(ClO_4)(CO)(PPh_3)_2$ (1) with trans-$C_6H_5CH = CHCH_2OH$ (2) produces a new cationic rhodium(Ⅰ) complex, $[Rh(trans-C_6H_5CH = CHCHO)(CO)(PPh_3)_2]ClO_4$ (3) where 2 is coordinated through the oxygen atom but not through the olefinic group. At room temperature under nitrogen, complex 1 catalyzes dehydrogenation, hydrogenolysis, and isomerization of 2 to give $trans-C_6H_5CH$ = CHCHO (4), trans-$C_6H_5CH = CHCH_3$ (5) and $C_6H_5CH_2CH_2CHO$ (6), respectively, and oligomerization of 2 whereas under hydrogen, complex 1 catalyzes hydrogenation of 2 to give $C_6H_5CH_2CH_2CH_2OH$ (7) and hydrogenolysis of 2 to 5 which is further hydrogenated to $C_6H_5CH_2CH_2CH_3$ (8). The dehydrogenation and hydrogenolysis of 2 with 1 suggest an interaction between the rhodium and the oxygen atom of 2, whereas the isomerization and hydrogenation of 2 with 1 indicate an interaction between the rhodium and the olefinic system of 2.