• 한국가스학회지
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• 제20권1호
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• pp.62-67
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• 2016

가장 깨끗한 화석연료 가운데 하나인 천연가스는 장거리 수송 시 부피를 줄이기 위해 액화된다. 그 중 소형 해양 천연가스 액화 플랜트는 면적이 작기 때문에 안전문제가 크게 대두된다. 하지만, 기존에 쓰이는 DMR (Dual Mixed Refrigerants) 공정은 가연성 냉매를 사용함으로써 화재의 위험이 있으며, N2 Expander 공정은 안전하지만 압축 에너지 효율이 낮다는 문제점이 있다. 따라서 안전하면서도 압축 에너지 효율 또한 높은 공정의 개발이 지속적으로 요구되는 상황이다. 본 연구에서는 DMR 공정에 비가연성 냉매인 Hydrofluorocarbon을 사용하여 안전성을 높임으로써 기존 공정들에 대한 대안을 제시하였다. 그 결과, 화재위험이 있는 DMR 공정보다 34.8% 낮은 압축에너지 효율을 보였으나, Single N2 Expander 공정보다 42.6% 향상된 압축 에너지 효율을 나타내었다. 결론적으로 이 연구에서는 안전하면서도 높은 에너지 효율을 내는 소형 해양 천연가스 액화 플랜트 공정을 설계하였다.

• 설비공학논문집
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• 제12권3호
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• pp.315-324
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• 2000

R-410A, R-407C, and four refrigerant mixtures composed of R-32, R-l34a, R-l43a, R-l52a, R-600(butane), and R-600a(isobutane) were tested in an attempt to replace R-22 used in most of the residential air conditioners. The performance evaluation was carried out in a psychrometric calorimeter test facility using a residential spilt type air conditioner under the KS rating conditions. Except for the lubricant and hand-operated expansion valve, the other parts of the air conditioner were the same with the commercial system. Performance characteristics were measured; COP, capacity, compressor power, and VCR. R-410A was shown to have 5.5% higher COP and 3.5% lower capacity than R-22. R-32/134a/600a (42.8/ 46.0/11.2 wt%) mixture have the best performance among the four refrigerant mixtures composed of hydrofluorocarbon and hydrocarbon. This inixture have 3.0% lower COP and 1.6% lower capacity than R-22.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.132-132
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• 2010

In the nano-scale Si processing, patterning processes based on multilevel resist structures becoming more critical due to continuously decreasing resist thickness and feature size. In particular, highly selective etching of the first dielectric layer with resist patterns are great importance. In this work, process window for the infinitely high etch selectivity of silicon oxynitride (SiON) layers and silicon nitride (Si3N4) with EUV resist was investigated during etching of SiON/EUV resist and Si3N4/EUV resist in a CH2F2/N2/Ar dual-frequency superimposed capacitive coupled plasma (DFS-CCP) by varying the process parameters, such as the CH2F2 and N2 flow ratio and low-frequency source power (PLF). It was found that the CH2F2/N2 flow ratio was found to play a critical role in determining the process window for ultra high etch selectivity, due to the differences in change of the degree of polymerization on SiON, Si3N4, and EUV resist. Control of N2 flow ratio gave the possibility of obtaining the ultra high etch selectivity by keeping the steady-state hydrofluorocarbon layer thickness thin on the SiON and Si3N4 surface due to effective formation of HCN etch by-products and, in turn, in continuous SiON and Si3N4 etching, while the hydrofluorocarbon layer is deposited on the EUV resist surface.

• 설비공학논문집
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• 제12권3호
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• pp.258-266
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• 2000

Experimental investigation and cycle simulation of a capacity modulation of a heat pump system using a hydrofluorocarbon (HFC) refrigerant mixture, R32/134a as an alternative to R22, have been done. In the cycle simulation, the refrigeration system was operated by assigning the temperatures of the external heat transfer fluids with the heat exchangers generalized by an average effective temperature difference. Heating capacity, cooling capacity, and coefficient of performance (COP) of the system were investigated at several operating conditions. Experimental apparatus which had a refrigeration part and a composition changing part was built, and the performance of the heat pump system filled with R32/134a mixture was investigated. A gas-liquid separator was used in the experiment to change the composition by collecting the vapor and the liquid Phase separately, The mass fraction of the charged refrigerant in the heat pump system was 40/60 and 70/30 by weight percentage. The composition of the refrigerant with initial composition of 40/60 varied from 29/71 to 41/59 in the refrigeration cycle. For the refrigerant with initial composition of 70/30, the composition varied from 65/35 to 75/25.

• Korean Chemical Engineering Research
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• 제55권5호
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• pp.704-710
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• 2017

가스 하이드레이트 형성원리를 이용한 해수담수화는 이미 상용화된 역삼투 방식에 비하여 아직 실증화 단계이지만 그 공정이 비교적 단순하고 특히 냉매를 객체가스로 사용할 경우 아주 낮은 공정 온도가 필요하지 않아 에너지 소비량(thermal budget)이 향상될 가능성이 있기 때문에 여전히 많은 관심을 받고 있다. 따라서 본 연구에서는 수소불화탄소(HFC, hydrofluorocarbon) 및 수소염화불화탄소(HCFC, hydrochlorofluorocarbon) 계열의 냉매들을 객체가스로 한 가스 하이드레이트 형성 거동을 에너지적인 관점에서 해석하고자 하였고 이를 위해 밀도 범함수(DFT, density functional method) 이론을 기반으로 한 분자모델링을 도입하였다. 객체가스(guest gas)로 R-134a, R-227ea, R-236fa, R-141b를 선정하였으며 계산을 위하여 물 분자로 이루어진 $5^{12}$, $5^{12}6^2$, $5^{12}6^4$의 세가지 구조의 동공들(cavities)을 구성하였다. 동공, 객체가스, 그리고 객체가스가 삽입된 동공의 구조를 분자모델링을 이용하여 각각 최적화하였고 계산된 각 구조의 에너지로부터 동공과 객체가스의 결합에너지(binding energy)를 계산하였다. 마지막으로 결합에너지를 비교함으로써 어느 냉매가 가장 유리한 조건에서 가스하이드레이트를 형성할 지를 판단하였다. 결과적으로 R-236fa가 가장 자발적(spontaneous)으로 가스 하이드레이트를 형성할 것으로 예상되었고 사람에 대한 낮은 독성과 물에 대한 작은 용해도 측면에서도 가장 적절한 선택으로 평가되었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.458-458
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• 2010

The process window for the etch selectivity of silicon nitride ($Si_3N_4$) layers to extreme ultra-violet (EUV) resist and variation of line edge roughness (LER) of EUV resist were investigated durin getching of $Si_3N_4$/EUV resist structure in a dual-frequency superimposed capacitive coupled plasma (DFS-CCP) etcher by varying the process parameters, such as the $CH_2F_2$ and $N_2$ gas flow rate in $CH_2F_2/N_2$/Ar plasma. The $CH_2F_2$ and $N_2$ flow rate was found to play a critical role in determining the process window for infinite etch selectivity of $Si_3N_4$/EUV resist, due to disproportionate changes in the degree of polymerization on $Si_3N_4$ and EUV resist surfaces. The preferential chemical reaction between hydrogen and carbon in the hydrofluorocarbon ($CH_xF_y$) polymer layer and the nitrogen and oxygen on the $Si_3N_4$, presumably leading to the formation of HCN, CO, and $CO_2$ etch by-products, results in a smaller steady-state hydrofluorocarbon thickness on $Si_3N_4$ and, in turn, in continuous $Si_3N_4$ etching due to enhanced $SiF_4$ formation, while the $CH_xF_y$ layer is deposited on the EUV resist surface. Also critical dimension (and line edge roughness) tend to decrease with increasing $N_2$ flow rate due to decreased degree of polymerization.

• 설비공학논문집
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• 제13권10호
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• pp.993-1001
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• 2001

Experimental investigation on the performance of dual-evaporator refrigeration system with an ejector has been carried out. In this study, a hydrofluorocarbon (HFC) refrigerant R134a is chosen as a working fluid. The condenser and two-evaporators are made as concentric double pipes with counter-flow type heat exchangers. Experiments were performed by changing the inlet and outlet temperatures of secondary fluids entering condenser, high-pressure evaporator and low-pressure evaporator at test conditions keeping a constant compressor speed. When the external conditions (inlet temperatures of secondary fluid entering condenser and one evaporator) are fixed, results show that coefficient of performance (COP) increases as the inlet temperature of the other evaporator rises. It is also shown that the COP decreases as the mass flaw rate ratio of suction fluid to motive fluid increases. The COP of dual-evaporator refrigeration system with an ejector is superior to that of a single-evaporator vapor compression system by 3 to 6%.

• International Journal of Air-Conditioning and Refrigeration
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• 제10권4호
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• pp.201-210
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• 2002

Experimental investigation on the performance of dual-evaporator refrigeration system with an ejector has been carried out. In this study, a hydrofluorocarbon (HFC) refrigerant R134a is chosen as a working fluid. The condenser and two-evaporators are made as concentric double pipes with counter-flow type heat exchangers. Experiments were peformed by changing the inlet and outlet temperatures of secondary fluids entering condenser, high-pressure evaporator and low-pressure evaporator at test conditions keeping a constant compressor speed. When the external conditions (inlet temperatures of secondary fluid entering condenser and one of the evaporators) are fixed, results show that coefficient of performance (COP) increases as the inlet temperature of the other evaporator rises. It is also shown that the COP decreases as the mass flow rate ratio of suction fluid to motive fluid increases. The COP of dual-evapo-rator refrigeration system with an ejector is superior to that of a single-evaporator vapor compression system by 3 to 6%.

• 폴리머
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• 제29권5호
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• pp.457-462
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• 2005

Polymeric 4,4'-diphenylmethane diisocyanate(PMDI), OH 값이 480인 혼합 폴리올, 실리콘 계면활성제, 세 종류의 촉매 그리고 발포제로 불화탄화수소계를 사용하여 폴리우레탄 발포체(PUF)를 제조하였다. 촉매로는 balance 촉매(PC-8), 젤 화촉매(33LV) 그리고 삼량화 촉매(TMR-2)가 이용되었으며, 이소시아네이트(NCO) 인덱스(index)와 노화시간에 따른 PUF의 물성에 대한 촉매의 영향을 조사하였다. PC-8과 33LV를 이용한 PUF의 압축강도는 NCO 인덱스에 따라 큰 변화를 보이지 않은 반면 발포셀의 크기는 약간 증가하였다. 삼량화 촉매의 경우에, PUF의 압축강도는 NCO인덱스에 따라 8.75에서 $10.5 kg_f/cm^2$으로 증가하였고 발포셀의 크기는 감소하였다. 33LV를 이용한 PUF의 압축강도는 노화시간이 증가함에 따라 9.21에서 $10.15 kg_f/cm^2$으로 증가하였으나 삼량화 촉매인 TMR-2를 이용한 경우에는 거의 변화가 나타나지 않았다. 이는 미반응 MDI에 의한 추가적인 가교반응에 의해 설명할 수 있고 FTIR의 결과로 확인하였다.

• Journal of Advanced Marine Engineering and Technology
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• 제28권5호
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• pp.728-734
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• 2004

Environmentally friendly refrigerants with zero ozone layer depletion potential are required to be used in refrigerators and air conditioners due to the difficulties related to ozone layer depletion and global warming. A rigorous study for the system performance with new refrigerants having zero ozone layer depletion potential is inevitable before adopting that as a new fluid. The HFC(Hydrofluorocarbon) potential has been recommended as alternatives. In this paper. system performance in the heat pump facilities were studied using R-290, R-600a. R-1270 as an environment friendly refrigerant. R-22 as a HCFC's refrigerant. The experimental apparatus has been set-up as a conventional vapor compression type heat Pump system. The test section is a horizontal double pipe heat exchanger. A tube diameter of 12.70mm with 1.315mm wall thickness is used for this investigation. The test results showed that the COP of hydrocarbon refrigerants were superior to that of R-22 and the maximum increasing rate of COP was found in R-1270. The refrigeration capacity of hydrocarbon refrigerants were higher than that of R-22. The compressor work was obtained with the maximum value in R-1270 and the minimum one in R-22.