• Journal of the Korean Institute of Gas
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• v.20 no.1
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• pp.62-67
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• 2016

Natural gas, one of the cleanest fossil fuel, is liquefied to reduce its volume for the long distance transportation. Small size floating liquefied natural gas plant has small area that safe issue is highly considered. However, Dual Mixed Refrigerants (DMR) process has fire potential by using flammable refrigerants and N2 Expander process has low compressed energy efficiency which has high inherent process safety. Therefore, safe process with high compressed energy efficiency is constantly needed. This study suggested an alternative refrigerants to existing DMR process by using Hydrofluorocarbon which has high safety due to its non-flammable properties. As a result, it showed 34.8% lower compressed energy efficiency than DMR process that contains fire potential whereas 42.6% improved compressed energy efficiency than Single N2 Expander process. In conclusion, this research proposed safe process for small size floating liquefied natural gas plant while having high efficiency.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.12 no.3
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• pp.315-324
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• 2000

R-410A, R-407C, and four refrigerant mixtures composed of R-32, R-l34a, R-l43a, R-l52a, R-600(butane), and R-600a(isobutane) were tested in an attempt to replace R-22 used in most of the residential air conditioners. The performance evaluation was carried out in a psychrometric calorimeter test facility using a residential spilt type air conditioner under the KS rating conditions. Except for the lubricant and hand-operated expansion valve, the other parts of the air conditioner were the same with the commercial system. Performance characteristics were measured; COP, capacity, compressor power, and VCR. R-410A was shown to have 5.5% higher COP and 3.5% lower capacity than R-22. R-32/134a/600a (42.8/ 46.0/11.2 wt%) mixture have the best performance among the four refrigerant mixtures composed of hydrofluorocarbon and hydrocarbon. This inixture have 3.0% lower COP and 1.6% lower capacity than R-22.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.132-132
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• 2010

In the nano-scale Si processing, patterning processes based on multilevel resist structures becoming more critical due to continuously decreasing resist thickness and feature size. In particular, highly selective etching of the first dielectric layer with resist patterns are great importance. In this work, process window for the infinitely high etch selectivity of silicon oxynitride (SiON) layers and silicon nitride (Si3N4) with EUV resist was investigated during etching of SiON/EUV resist and Si3N4/EUV resist in a CH2F2/N2/Ar dual-frequency superimposed capacitive coupled plasma (DFS-CCP) by varying the process parameters, such as the CH2F2 and N2 flow ratio and low-frequency source power (PLF). It was found that the CH2F2/N2 flow ratio was found to play a critical role in determining the process window for ultra high etch selectivity, due to the differences in change of the degree of polymerization on SiON, Si3N4, and EUV resist. Control of N2 flow ratio gave the possibility of obtaining the ultra high etch selectivity by keeping the steady-state hydrofluorocarbon layer thickness thin on the SiON and Si3N4 surface due to effective formation of HCN etch by-products and, in turn, in continuous SiON and Si3N4 etching, while the hydrofluorocarbon layer is deposited on the EUV resist surface.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.12 no.3
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• pp.258-266
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• 2000

Experimental investigation and cycle simulation of a capacity modulation of a heat pump system using a hydrofluorocarbon (HFC) refrigerant mixture, R32/134a as an alternative to R22, have been done. In the cycle simulation, the refrigeration system was operated by assigning the temperatures of the external heat transfer fluids with the heat exchangers generalized by an average effective temperature difference. Heating capacity, cooling capacity, and coefficient of performance (COP) of the system were investigated at several operating conditions. Experimental apparatus which had a refrigeration part and a composition changing part was built, and the performance of the heat pump system filled with R32/134a mixture was investigated. A gas-liquid separator was used in the experiment to change the composition by collecting the vapor and the liquid Phase separately, The mass fraction of the charged refrigerant in the heat pump system was 40/60 and 70/30 by weight percentage. The composition of the refrigerant with initial composition of 40/60 varied from 29/71 to 41/59 in the refrigeration cycle. For the refrigerant with initial composition of 70/30, the composition varied from 65/35 to 75/25.

• Korean Chemical Engineering Research
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• v.55 no.5
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• pp.704-710
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• 2017

Although the desalination technique using gas hydrate formation is at a development stage compared to the commercially well-established reverse osmosis (RO), it still draws attention because of its simplicity and moderate operational conditions especially when using refrigerants for guest gases. In this study, DFT (density functional theory)-based molecular modeling was employed to explain the energetics of the gas hydrate formation using HFC (hydrofluorocarbon) and HCFC (hydrochlorofluorocarbon) refrigerants. For guest gases, R-134a, R-227ea, R-236fa, and R-141b were selected and three cavity structures ($5^{12}$, $5^{12}6^2$, and $5^{12}6^4$) composed of water molecules were constructed. The geometries of guest gas, cavity, and cavity encapsulating guest gas were optimized by molecular modeling respectively and their located energies were then used for the calculation of binding energy between the guest gas and cavity. Finally, the comparison of binding energies was used to propose which refrigerant is more favorable for the gas hydrate formation energetically. In conclusion, R-236fa was the best choice in terms of thermodynamic spontaneity, less toxicity, and low solubility in water.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.458-458
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• 2010

The process window for the etch selectivity of silicon nitride ($Si_3N_4$) layers to extreme ultra-violet (EUV) resist and variation of line edge roughness (LER) of EUV resist were investigated durin getching of $Si_3N_4$/EUV resist structure in a dual-frequency superimposed capacitive coupled plasma (DFS-CCP) etcher by varying the process parameters, such as the $CH_2F_2$ and $N_2$ gas flow rate in $CH_2F_2/N_2$/Ar plasma. The $CH_2F_2$ and $N_2$ flow rate was found to play a critical role in determining the process window for infinite etch selectivity of $Si_3N_4$/EUV resist, due to disproportionate changes in the degree of polymerization on $Si_3N_4$ and EUV resist surfaces. The preferential chemical reaction between hydrogen and carbon in the hydrofluorocarbon ($CH_xF_y$) polymer layer and the nitrogen and oxygen on the $Si_3N_4$, presumably leading to the formation of HCN, CO, and $CO_2$ etch by-products, results in a smaller steady-state hydrofluorocarbon thickness on $Si_3N_4$ and, in turn, in continuous $Si_3N_4$ etching due to enhanced $SiF_4$ formation, while the $CH_xF_y$ layer is deposited on the EUV resist surface. Also critical dimension (and line edge roughness) tend to decrease with increasing $N_2$ flow rate due to decreased degree of polymerization.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.13 no.10
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• pp.993-1001
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• 2001

Experimental investigation on the performance of dual-evaporator refrigeration system with an ejector has been carried out. In this study, a hydrofluorocarbon (HFC) refrigerant R134a is chosen as a working fluid. The condenser and two-evaporators are made as concentric double pipes with counter-flow type heat exchangers. Experiments were performed by changing the inlet and outlet temperatures of secondary fluids entering condenser, high-pressure evaporator and low-pressure evaporator at test conditions keeping a constant compressor speed. When the external conditions (inlet temperatures of secondary fluid entering condenser and one evaporator) are fixed, results show that coefficient of performance (COP) increases as the inlet temperature of the other evaporator rises. It is also shown that the COP decreases as the mass flaw rate ratio of suction fluid to motive fluid increases. The COP of dual-evaporator refrigeration system with an ejector is superior to that of a single-evaporator vapor compression system by 3 to 6%.

• International Journal of Air-Conditioning and Refrigeration
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• v.10 no.4
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• pp.201-210
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• 2002

Experimental investigation on the performance of dual-evaporator refrigeration system with an ejector has been carried out. In this study, a hydrofluorocarbon (HFC) refrigerant R134a is chosen as a working fluid. The condenser and two-evaporators are made as concentric double pipes with counter-flow type heat exchangers. Experiments were peformed by changing the inlet and outlet temperatures of secondary fluids entering condenser, high-pressure evaporator and low-pressure evaporator at test conditions keeping a constant compressor speed. When the external conditions (inlet temperatures of secondary fluid entering condenser and one of the evaporators) are fixed, results show that coefficient of performance (COP) increases as the inlet temperature of the other evaporator rises. It is also shown that the COP decreases as the mass flow rate ratio of suction fluid to motive fluid increases. The COP of dual-evapo-rator refrigeration system with an ejector is superior to that of a single-evaporator vapor compression system by 3 to 6%.

• Polymer(Korea)
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• v.29 no.5
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• pp.457-462
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• 2005

Polyurethane foams (PUFs) were prepared from polymeric 4,4'-diphenylmethane diisocyanate (PMDI), mixed polyol with OH value of 480, silicone surfactant, three catalysts, and hydrofluorocarbon(HFC) as blowing agent. Balance (PC-8), gelling (33LV), and trimerization (TMR-2) catalysts were used. The effect of the catalysts on the physical properties of PUF with increase of isocyanate (NCO) index and aging time was investigated. The cell size of the PUF with PC-8 and 33LV slightly increased with an increase in NCO index from 100 to 170 but compressive strength did not change significantly. In case of trimerization catalyst, the compressive strength of PUF increased from 8.75 to 1$10.5 kg_f/cm^2$ and the cell size decreased with an increase in NCO index. The compressive strength of the PUF with 33LV increased from 9.21 to $10.15 kg_f/cm^2$ with an increase in aging time. However, there was no detectable change in the compressive strength of PUF with TMR-2. A possible interpretation of the results includes an additional cross-link reaction of non-reacted MDI and FTIR spectrum illustrated the change of NCO peak.

• Journal of Advanced Marine Engineering and Technology
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• v.28 no.5
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• pp.728-734
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• 2004

Environmentally friendly refrigerants with zero ozone layer depletion potential are required to be used in refrigerators and air conditioners due to the difficulties related to ozone layer depletion and global warming. A rigorous study for the system performance with new refrigerants having zero ozone layer depletion potential is inevitable before adopting that as a new fluid. The HFC(Hydrofluorocarbon) potential has been recommended as alternatives. In this paper. system performance in the heat pump facilities were studied using R-290, R-600a. R-1270 as an environment friendly refrigerant. R-22 as a HCFC's refrigerant. The experimental apparatus has been set-up as a conventional vapor compression type heat Pump system. The test section is a horizontal double pipe heat exchanger. A tube diameter of 12.70mm with 1.315mm wall thickness is used for this investigation. The test results showed that the COP of hydrocarbon refrigerants were superior to that of R-22 and the maximum increasing rate of COP was found in R-1270. The refrigeration capacity of hydrocarbon refrigerants were higher than that of R-22. The compressor work was obtained with the maximum value in R-1270 and the minimum one in R-22.