• International Journal of Precision Engineering and Manufacturing
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• v.5 no.3
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• pp.19-25
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• 2004

Pitch measurements of 150 nm one-dimensional grating standards were carried out using a contact mode atomic force microscopy with a high resolution three-axis laser interferometer. This measurement technique was named as the 'nano-metrological AFM'. In the nano-metrological AFM, three laser interferometers were aligned precisely to the end of an AFM tip. Laser sources of the three-axis laser interferometer in the nano-metrological AFM were calibrated with an I$_2$ stabilized He-Ne laser at a wavelength of 633 nm. Therefore, the Abbe error was minimized and the result of the pitch measurement using the nano-metrological AFM could be used to directly measure the length standard. The uncertainty in the pitch measurement was estimated in accordance with the Guide to the Expression of Uncertainty in Measurement (GUM). The primary source of uncertainty in the pitch-measurements was derived from the repeatability of the pitch-measurements, and its value was about 0.186 nm. The average pitch value was 146.65 nm and the combined standard uncertainty was less than 0.262 nm. It is suggested that the metrological AFM is a useful tool for the nano-metrological standard calibration.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.241-244
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• 1997

This paper proposes Electronic Speckle Pattern Interferometry(ESPI) for the quantitative buckling analysis of square tube, which is unable to be measured with previous methods. The quantitative buckling analysis in elasticity is important part to study strain-stress analysis of thick-plated tube and fatigue analysis. However, it is unsolved problem with theory and previous experimental method. The merits of ESPI, Whole-filed measurement and high accurate 3D-displacement measurement make it possible to determinate the buckling analysis in elasticity quantitatively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.128-131
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• 2002

Three Dimensional measuring system using optical interference is greatly needed for semiconductor surface or optical surface. The application of this system are : MEMS product, semiconductor surfaces, optical components, precise machined surface, etc. In this paper, Interferometry based measurement system is introduced, which is nondestructive and noncontact inspection system. This system have relatively many advantage, compared with AFM/STM, SEM, Stylus, etc. The developed system can measure the surface topography with high precision and resolution, and with few seconds. And the associated software algorithm is also developed for the ultra precision 3D measuring surface. Various samples that is measured using this system is showed in the latter of this paper.

• Proceedings of the Korean Society of Surveying, Geodesy, Photogrammetry, and Cartography Conference
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• 2004.11a
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• pp.99-104
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• 2004

Recently, the old surveying method for acquiring surveying-geo information results had a low economic efficiency and a low dependence of precision because it took much times and high costs. So, we acquired law data by execution of control surveying through Static positioning of DGPS(Ashtech). It is computed plainmetric(X, Y) positioning through postprocessing by Prism S/W. And we computed height(Z) through control surveying by ring-closed leveling surveying. After control surveying execution, we built DEM(Digital Elevation Model) using LDT S/W and accuracy 3D detail surveying by EDM(Electronic Distance Measurement) surveying. The purpose of this study was to yield automated digital mapping and the automated amount of materials using ahead data. The conclusions were as follows; First, we built the automated amount of materials system and got high efficiency about personnel, times and precision. Second, when, people precisely positioned on railroads of a high-speed railroad and used GPS surveying, the result was permitted. Finally, it was possible to draw automated profile and cross-section using the 3D terrain model build with the DEM technique.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.397-401
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• 1995

ESPI(Electronic Speckle Pattern Interfermetry) is an optical technique to measure surface deforamtion of engineering components and materials in industrial ares. This optical method is capable of providing full-field results with high spatial resolution, high speed and is the non-contact technique. One of important application aspects using electronic speckle pattern interferometry is to generate contours of a diffuse object in order to provide data for 3-D shape analysis and topography measurement. The contouring method by modified dual-beam speckle pattern interferometry is proposed. We introduce a shift of the illumination beams through optical fiber in order to obtain the contour fringe patterns. The speckle pattern correlation technique is suitable for providing measurement range from millimeters to several centimeters. The complete geometric analysis of the contoretical and experimental results are obtained.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.3
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• pp.199-205
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• 2014

We propose a new variant of lateral shearing interferometer with a tunable laser source that enables 3D surface profile measurements of freeform optics with high speed, high vertical resolution, large departure, and large field-of-view. We have verified the proposed technique by comparing our measurement result with that of an existing technique and measuring a representative sample of freeform optics. Moreover, we propose a new algorithm that is able to compensate the rotational inaccuracy.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.119-124
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• 2001

Currently knowledge of strain in welds has mainly been obtained form strain gaging method:; that is directly attaching most of the material to the gate. The very few non-contact method are still in the early stage. One of the non-contact methods is by the use of the laser that has high-level of the accuracy for the measurement, and this laser also has excellent characteristics on which many studies for its applications are focused throughout the many fields. The dissertation is on the measurement of the strain caused by the characteristics and the temperature changes of the TIG welded zone which is used with 3D ESPI system that is functionally modified through the laser ESPI system. This system employed the aluminum sheet-metal which are mainly used for the steel plate such as for the electronics, chemisry, food instrument and electronic appliances.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.29 no.3
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• pp.277-283
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• 2016

A high-precision force-feedback 3-axes accelerometer developed in Korea has been investigated and studied for the verification of feasibility in the computational analysis and health monitoring of civil infrastructures. Through a series of experiment, the nonlinearity, bandwidth, low-frequency signal measurement accuracy and bias characteristics of the accelerometer has been thoroughly compared to those of two accelerometers produced by two market leaders in domestic and global accelerometer market. The experiment results shows that the overall measurement performance of the accelerometer has superiority over the performance of the two accelerometers from global market leader companies. Especially, the accelerometer shows a better low-frequency signal measurement accuracy and constant bias characteristic, which are mostly required in the computational analysis and the long-term health monitoring of large-scale civil infrastructures.

• Journal of the Korean Society of Safety
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• v.36 no.5
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• pp.71-78
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• 2021

There are regularly planned overhaul periods in thermal power plants, which involve the maintenance of the boiler of the power plants. However, thermal power plants workers are always exposed to risk during overhaul periods owing to the narrow space and significant dust inside the boiler. Therefore, it is essential to develop a safety monitoring system that is suitable for operating in this type of environment. In this study, we developed not only a worker three-dimensional (3D)-location monitoring system that can monitor and record the entry/exit of workers, their 3D-location, and fall accidents but also a method to secure the working environment and operation efficiency. This system comprises of a worker tag, which was equipped with an inertial measurement unit, a barometric pressure sensor, and a Bluetooth low energy (BLE), and the tags were given to each worker. In addition, the location of workers inside the boiler was measured using a pedestrian dead reckoning (PDR) method and BLE beacons. The location data of the workers tag were transmitted to the integrated database (DB) server through a gateway, and to the administrator monitoring system. The performance of the system was demonstrated inside an actual thermal power plant boiler, and the accuracy and reliability of the system were verified through a number of repeated tests. These results provide insights on designing a new system for monitoring enclosed spaces.

• Journal of the Optical Society of Korea
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• v.9 no.1
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• pp.22-25
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• 2005

The differential heterodyne interferometer (DHI) is suitable for precise measurement of step height and line width, since its differential configuration can significantly reduce disturbances from the environment [1,2]. Like most phase measuring interferometers, however, the DHI is limited, in that it can obtain only the phase from 0 to 2π, because of the sinusoidal nature of the optical interference involved. Thus, the measurable step height is limited to one quarter of the wavelength of the light source. This study describes a confocal differential heterodyne interferometer (CDHI) for measuring step heights of several micrometers, with a high resolution and line width with high repeatability. The CDHI has a simple structure and rapid measurement speed.