• 한국전자파학회:학술대회논문집
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• 한국전자파학회 2003년도 종합학술발표회 논문집 Vol.13 No.1
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• pp.178-182
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• 2003

This paper presents the embedded inductors in PCB (Printed Circuit Board) for PAM(Power Amplifier Module) of mobile terminations. The inductors are designed, simulated, and compared to conventional chip inductors. The Quality factor(Q) and self-resonance frequency(SRF) of the inductors are evaluated. The quality factors of the inductors are two times higher than those of the chip inductors, and the self-resonance frequency is 1.3 times higher than those of chip inductors at the inductance of 2.7 nH and 3.3 nH respectively.

• 한국전기전자재료학회논문지
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• 제19권8호
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• pp.780-784
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• 2006

We present high aspect ratio air-core solenoid inductors with $100{\mu}m\;and\;200{\mu}m$ tall via structures on Pyrex wafer. The effect of various parameters such as different number of turns, via heights, pitch distance between turns on inductor's radio frequency (RF) characteristics have been studied. The highest Q factor we obtained from various solenoid inductors is 72.8 at 9.7 GHz, which was produced by a 3-turn inductor.

• 대한전자공학회논문지SD
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• 제37권6호
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• pp.34-42
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• 2000

우수한 성능을 가지며 소형${\cdot}$경량인 무선통신기기를 구현하기 위해서는 GHz 대의 고주파수에서 동작하는 소형 RF chip 인덕터의 개발은 중요한 연구분야가 되어왔다. 또한 최근 많이 사용되는 자성 ferrite core 재료는 300MHz 이상의 주파수영역에서 자화율이 급속하게 감소하여 고성능 RF chip 인덕터 개발에 큰 장애가 되고 있다. 따라서 본 논문에서는 비정질 $Al_2O_3$ 코아 재료를 응용한 단순 solenoid 형태의 소형${\cdot}$고성능 RF chip 인덕터를 연구하였다. Cu를 코일 (직경=40${\mu}m$)로 사용하였고 인덕터 크기는 $2.1mm{\times}1.5mm{\times}1.0mm$였다. 외부 전류원은 코일의 양단을 코아 가장자리에 적층된 Au 막에 본딩시킨 후 인가되었다. 코아의 성분은 EDX를 사용하여 분석하였다 개발된 인덕터의 인덕턴스 (L), quality factor (Q), 인피던스(Z)등의 주파수 특성은 RF impedance/Material Analyzer (HP16193A test fixture가 장착된 HP4291B)로 측정되었다. 인덕터들의 인덕턴스 값은 22 nH ~ 150 nH 범위를 가지며, 이들의 자기공진주파수 (SRF)는 1~3.5GHz 영역을 나타낸다. 또한 자기공진주파수가 증가함에 따라 인덕턴스 값이 감소하는 경향을 보이고 있다. 임피던스는 공진주파수에서 최대 값을 가지며 Q-factor의 값은 500 MHz ~ 1.5 GHz 주파수 범위에서 최대 70~97까지 얻어졌다.

• 한국통신학회논문지
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• 제25권5B호
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• pp.985-991
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• 2000

본 논문에서는 인덕터의 면적을 극소화시키고 인덕턴스와 Q값을 극대화시키기 위한 최적구조의 2GHz 자성박막 인덕터를 설계하고 제작하였다. Eddy-current 표피효과를 위해서 Co90Fe10와 SiO2의 multilayer를 사용하고, multilayer를 적용한 새로운 lumped 소자모델을 고려하여 최적설계를 수행하였다. 2GHz에서 동작하는 새로운 자성박막 인덕터는 photo-lithography와 lift-off기술을 이용하여 Si 기판위에 제작되었다. 50개 이상의 동일한 인덕터들의 주파수 특성은 RF Impedance Analyzer로, 자기공진주파수는 Vector Network 분석기(HP8510)로 측정되었다. 개발된 인덕터들은 1.8~2.3GHz 범위의 자기공진주파수, 47~68nH 범위의 L값, 그리고 1GHz이상의 주파수에서 70~80정도의 Q값을 가지므로 L과 Q가 극대화된 아주 우수한 최적구조의 소형(면적=30.8$\times$30.8mil2) 박막인덕터가 성공적으로 제작되었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1996년도 추계학술대회 논문집
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• pp.291-294
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• 1996

We present the experimental results of high quality factor (Q) inductors fabricated on high-resistivity silicon wafer using standard CMOS process without any modificatons such as thick gold layer or multilayer interconnection. This demonstrates the possibility of building high Q inductors using lower cost technologies, compared with previous results using complicated process. The comparative analysis is carried out to find the optimized inductor shape for the maximum performance by varying the thickness of metal and number of turns with rectangular shape.

• Journal of Electrical Engineering and Technology
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• 제9권2호
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• pp.569-575
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• 2014

A highly efficient class E power amplifier is demonstrated for application to wireless power transfer system. The amplifier is designed with an L-type matching at the output for harmonic rejection and output matching. The power loss and the effect of each component in the amplifier with the matching circuit are analyzed with the current ratio transmitted to the output load. Inductors with a quality factor of more than 120 are used in a dc feed and the matching circuit to improve transmission efficiency. The single-ended amplifier with 20 V supply voltage shows 7.7 W output power and 90.8% power added efficiency at 6.78 MHz. The wireless power transfer (WPT) system with the amplifier shows 5.4 W transmitted power and 82.3% overall efficiency. The analysis and measurements show that high-Q inductors are required for the amplifier design to realize highly efficient WPT system.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권5호
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• pp.283-288
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• 2000

In this work, small-size, high-performance simple solenoid-type RF chip inductors utilizing an Al2O3 core material were investigated. Copper (Cu) wire with $40\mum$ diameter was used as the coils and the size of the chip inductor fabricated in this work was $2.1mm\times1.5mm\times1.0mm$. The external current source was applied after bonding Cu coil leads to gold pads electro-plated on each end of backsides of a core material. High frequency characteristics of the inductance (L), quality factor (Q), and impedance (Z) of developed inductors were measured using an RF Impedance/Material Analyzer (HP4291B with HP16193A test fixture). This HP4291B was also used to obtain the equivalent circuit and its circuit parameters of the chip inductors. This HP4291B was also used to obtain the equivalent circuit and its circuit parameters of the chip inductors. The developed inductors have the self-resonant frequency (SRF) of 1.1 to 3.1 GHz and exhibit L of 22 to 150 nH. The L of the inductors decreases with increasing the SRF. The Z of the inductors has the maximum value at the SRF and the inductors have the quality factor of 70 to 97 in the frequency range of 500 MHz to 1.5 GHz.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2002년도 하계종합학술대회 논문집(2)
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• pp.233-236
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• 2002

This paper has been designed and fabricated C-type micro, high-performance solenoid RF chip inductors with the size of 1.58$\times$0.82r0.94m0. The high frequency characteristics of simulated results obtained by HFSS were compared to those of measured results obtained by RF Impedance/Material Analyzer (HP16193A). Although the simulated inductance values were two times larger than the measured values and there are discrepancies in SRFs between simulated and measured values, it was observed that tile Q-factor values for fabricated inductors could be predicted from the simulated values.

• JSTS:Journal of Semiconductor Technology and Science
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• 제1권1호
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• pp.70-83
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• 2001

In this paper, the recent progress of RF MEMS research for wireless/mobile communications is reviewed. The RF MEMS components reviewed in this paper include RF MEMS switches, tunable capacitors, high Q inductors, and thin film bulk acoustic resonators (TFBARs) to become core components for constructing miniaturized on chip RF transceiver with multi-band and multi-mode operation. Specific applications are also discussed for each of these components with emphasis on for miniaturization, integration, and performance enhancement of existing and future wireless transceiver developments.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권7호
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• pp.339-343
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• 2006

In this study, the variations of the important characteristics of solenoid-type RF chip inductors utilizing a low-loss A1203 core material on inductor dimensions were investigated systematically. Four dimensions of the chip inductors fabricated in this work were $1.0\times0.5\times0.5mm^3,\;1.5\times1.0\times0.7mm^3,\;2.1\times1.5\times1.0mm^3,\;and\;2.4\times2.0\times1.4mm^3$ and copper (Cu) wire with $40{\mu}m$ diameter was used as the coils. High frequency characteristics of the inductance, quality factor, and impedance of developed inductors as a function of inductor dimensions were measured using an RF Impedance/Material Analyzer (HP4291B with HP16193A test fixture). It was observed that the developed inductors with the number of turns of 6 have the inductance (L) of 12 to 82 nH and exhibit the self-resonant frequency (SRE) of 3.6 to 1.2 GHz. The SRF of inductors decreases with increasing the inductor size while the L increases with the inductor size. The smallest inductors of $1.0\times0.5\times0.5mm^3$ exhibited the L of 12 nH, SRF of 3.6 GHz, and the quality factor of 67 near the frequency of 1.1 GHz. The calculated data predicted the high-frequency data of the L, and Q of the developed inductors well.