• Korean Journal of Materials Research
• /
• v.31 no.3
• /
• pp.162-171
• /
• 2021

Dry etching of copper thin films is performed using high density plasma of ethylenediamine (EDA)/hexafluoroisopropanol (HFIP)/Ar gas mixture. The etch rates, etch selectivities and etch profiles of the copper thin films are improved by adding HFIP to EDA/Ar gas. As the EDA/HFIP concentration in EDA/HFIP/Ar increases, the etch rate of copper thin films decreases, whereas the etch profile is improved. In the EDA/HFIP/Ar gas mixture, the optimal ratio of EDA to HFIP is investigated. In addition, the etch parameters including ICP source power, dc-bias voltage, process pressure are varied to examine the etch characteristics. Optical emission spectroscopy results show that among all species, [CH], [CN] and [H] are the main species in the EDA/HFIP/Ar plasma. The X-ray photoelectron spectroscopy results indicate the formation of CuCN compound and C-N-H-containing polymers during the etching process, leading to a good etch profile. Finally, anisotropic etch profiles of the copper thin films patterned with 150 nm scale are obtained in EDA/HFIP/Ar gas mixture.

• Bulletin of the Korean Chemical Society
• /
• v.33 no.8
• /
• pp.2581-2584
• /
• 2012

Hexafluoroisopropanol (HFIP) is explored as an effective medium for the synthesis of quinoxaline derivatives in high yields at room temperature. The solvent (HFIP) can be readily separated from reaction products and recovered in excellent purity for direct reuse.

• Journal of Marine Bioscience and Biotechnology
• /
• v.11 no.2
• /
• pp.36-41
• /
• 2019

This study was conducted to analyze the difference in mechanically improved properties by distinguishing α-chitin and β-chitin for Poly(L-lactic acid)(PLLA). First, dissolution of chitins was established by mixing polar solvents hexafluoroisopropanol (HFIP) and trifluoroacetic acid (TFA) in appropriate proportions. Under these conditions, the dissolved chitin was used for electrospinning with other polymers. The electrospun nanofibers of the PLLA and chitins were successfully produced. Compared to the pristine state, when chitin was added to PLLA, the tensile strength increased 1.41 times (α-chitin), by 1.61 times (β- chitin), respectively. Based on this, it was confirmed that α- and β- chitin could be strategically used for different polymers. The results also suggest that chitin can be applied to various fields as good reinforcing material as well as electrospinning.

• Macromolecular Research
• /
• v.17 no.11
• /
• pp.850-855
• /
• 2009

Keratin is an important protein used in wound healing and tissue recovery. In this study, keratin was modified chemically with iodoacetic acid (IAA) to enhance its solubility in organic solvent. Poly(hydroxybutylate-co-hydroxyvalerate) (PHBV) and modified keratin were dissolved in hexafluoroisopropanol (HFIP) and electrospun to produce nanofibrous mats. The resulting mats were surface-characterized by ATR-FTIR, field-emission scanning electron microscopy (FE-SEM) and electron spectroscopy for chemical analysis (ESCA). The pure m-keratin mat was cross-linked with glutaraldehyde vapor to make it insoluble in water. The biodegradation test in vitro showed that the mats could be biodegraded by PHB depolymerase and trypsin aqueous solution. The results of the cell adhesion experiment showed that the NIH 3T3 cells adhered more to the PHBV/m-keratin nanofibrous mats than the PHBV film. The BrdU assay showed that the keratin and PHBV/m-keratin nanofibrous mats could accelerate the proliferation of fibroblast cells compared to the PHBV nanofibrous mats.