• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 하계학술대회 논문집
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• pp.569-572
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• 2000

This paper presents the optimized fabrication and thermal characteristics of micro-heaters for thermal MEMS applications using a SDB SOI substrate. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10$\mu\textrm{m}$ thick silicon membrane with oxide-filled trenches in the SOI membrane rim. The micro-heater was fabricated with Pt-RTD(Resistance Thermometer Device)on the same substrate by using MgO as medium layer. The thermal characteristics of the micro-heater with the SOI membrane is 280$^{\circ}C$ at input Power 0.9 W; for the SOI membrane with 10 trenches, it is 580$^{\circ}C$ due to reduction of the external thermal loss. Therefore, the micro-heater with trenches in SOI membrane rim provides a powerful and versatile alternative technology for improving the performance of micro thermal sensors and actuators.

• 반도체디스플레이기술학회지
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• 제20권2호
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• pp.14-18
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• 2021

Electric Vehicle industry requires high technologies to stabilize apparatuses for the Coolant heater manufacturing. Vibrations of Leak Machine are one of the most critical factors for causing delivered of the defective product or poor inspection, which are the main reasons of the defects. In this study, the structure of the Leak Machine was analyzed through the experiment and the computer simulation to investigate the main reasons of the vibrations, and further to alter the design for the improved stability. And that design alterations were applied to the machine to identify the effects of those alterations. The result of the study shows that design alterations of the Leak Machine can effectively suppress about 97.8% of the vibrations, and further can improving the Inspection precision of the Coolant heater.

• 대한기계학회논문집B
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• 제30권7호
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• pp.646-655
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• 2006

The present research is an experimental study on characteristics of cooling behavior for the adjacent copper blocks with surface roughness or micro-porous coated surface. The experiments were carried out at saturation state or within subcooled states of PF5060. The effects of heater orientation and the intervals between heating surfaces or substrates were investigated under various heat flux conditions. The boiling performance of copper block with micro-porous coated surface was better than that of copper block with surface roughness. It is understood that the bubble sweeping enhances boiling performance for the heaters with inclinations of $\theta=45^{\circ}\;and\;\theta=90^{\circ}$, where as the bubble flattening decreases boiling performance for the heaters with inclinations of $\theta=135^{\circ}\;and\;\theta=180^{\circ}$. In comparison to upper heater and below heater with orientation, the upper heater has lower superheat temperature than the below heater due to the bubble sweeping. It is also found that boiling performance decreases in the case of adjacent double heaters with only 0.2cm substrate interval.

• 동력기계공학회지
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• 제9권2호
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• pp.73-80
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• 2005

Both theoretical and experimental investigations were conducted to analyze defrosting behavior of a window heater operating in the low outdoor temperature($-20^{\circ}C$). To achieve this purpose, first a warm-chamber experiment($23^{\circ}C$) was performed to measure inner and outer surface temperature of the rear window(heated by the electric heater supplying 195 W) as functions of both time and position. Secondly, a cold chamber experiment was made to continuously record defrosting process of the frosted window. From the comparisons of the two experimental results, it was found that there was a similarity between the spatial distributions of both temperature and remaining frost. Thus, the temperature data from the warm-chamber experiments can be utilized to predict an expected zone covered with remaining frosts, and this approach can also be adopted in the inspection process in order to economically guarantee optimized performance of the window heater. Finally, an analytical model based on one-dimensional, steady-state heat transfer theories was proposed and successfully predicted the outer surface temperature of the rear window surrounded by cold air($-20^{\circ}C$) for the given operating conditions(heater power, inside and outside heat transfer coefficients, and surrounding air temperature, etc.).

• 설비공학논문집
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• 제23권1호
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• pp.38-46
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• 2011

The hybrid defrost process combined with hot-gas bypass defrost and electric heater defrost was experimentally evaluated about its defrost performance in the fin-tube evaporators of household refrigerators. Also the hybrid defrost process was compared with only electric heater defrost process. The defrost efficiency of the hybrid defrost process was shown two times higher than electric heater defrost process. The defrost time of the hybrid defrost process was shorten about 10%~50% than electric heater defrost process. Thermal shock after defrost process was decreased about 50% for the case of the hybrid defrost. It was found that energy consumption ratio of defrost process was reduced up to 7.4% compared with 22.4% of electric heater defrost at the condition of $25^{\circ}C$ ambient temperature.

• Journal of Biosystems Engineering
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• 제31권6호
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• pp.529-534
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• 2006

The greenhouse heating system with far-infrared heater was built to analyze various thermal characteristics, such as greenhouse air temperature, soil temperature, energy flow, energy consumption in far-infrared heater, and other factors, which could be used in comparison with other greenhouse heating system in this study. The results showed that the inside air temperature of the far-infrared greenhouse heating system was $5^{\circ}C$ higher than that of hot air heating system. Heat loss of daytime was found to be larger than that of night time as much as 44.8% for the heating system with far-infrared heater. In the heating system with far-Infrared heater, when the lowest ambient temperature was -8 $\sim$ -7$^{\circ}C$, the air temperature of greenhouse was 12 $\sim$ 15$^{\circ}C$, thus the far-infrared heating system was shown to be feasible for heating system. Energy consumption of far-infrared heating system was shown to be less than that of hot air heating system.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 제37회 하계학술대회 논문집 D
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• pp.2039-2040
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• 2006

Persistent current switch (PCS) system in NMR, MRI, MAGLEV and SMES has many advantages, such as uniformity and durability of magnetic field and reducing a thermal loss, which enable many superconducting application to operate effectively. This paper deals with fabrication and test of heater trigger persistent current switch using coated conductor (CC) which has high n-index, critical current independency from external magnetic field and adaptable selectivity of stabilizer. PCS system consists of magnet power supply for energizing current to a magnet, heater, switch and magnet using coated conductor tape. Finite element method (FEM) is used to simulate thermal quench (switching) characteristic and design heater trigger. With FEM simulation, optimal length of heater is calculated by temperature and time analysis. Fabrication of PCS system and test of heater trigger characteristic were performed and compared with simulation result. This paper would be the foundation of researches of superconducting switching application.

• 전자공학회논문지A
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• 제31A권5호
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• pp.113-120
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• 1994

Silicon flow sensor that can detect the velocity and direction of air flow was designed and fabricated by integrated circuit process and bulk micromachining technique. The flow sensor consists of three-layered dielectric diaphragm, a heater at the center of the diaphragm, and four thermopiles surrounding the heater at each side of diaphragm as sensing elements. This diaphragm structure contributes to improve the sensitivity of the sensor due to excellent thermal isolation property of dielectric materials and their tiny thickness. The flow sensor has good axial symmetry to sense 2-D air flow with the optimized sensing position in the proposed structure. The sensor is fabricated using CMOS compatible process followed by the anisotropic etching of silicon in KOH and EDP solutions to form I$\mu$ m thick dielectric diaphragm as the last step. TCR(Temperature Coefficient of Resistance) of the heater of the fabricated sensors was measured to calculate the operating temperature of the heater and the output voltage of the sensor with respect to flow velocity was also measured. The TCR of the polysilicon heater resistor is 697ppm/K, and the operating temperature of the heater is 331$^{\circ}C$ when the applied voltage is 5V. Measured sensitivity of the sensor is 18.7mV/(m/s)$^{1/2}$ for the flow velocity of smaller than 10m/s.

• 대한기계학회논문집B
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• 제23권10호
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• pp.1347-1354
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• 1999

Recently, the markets of the air conditioner are enlarging. The market size will reach 2.0 billion won in 2000. Electric heat pumps have been utilized as main residential air conditioners. especially in Korea. They cause a surge up electric power demand during summer. Moreover, the use of HCFCs and HFCs causes serious problem to the global environment such as global warming and ozone layer destruction. Absorption chiller and heater could solve such problems. It was built and tested for analyzing the performance of the generator for absorption chiller and heater. Experiment was done with a high temperature generator, a low temperature generator, heat exchangers, a condenser and a solution tank. It was tested that the double effect series flow cycle with two kinds of solution cycle. Solution cycle B showed better than solution cycle A. Two kinds of heat exchanger were used, where one's heat transfer area is bigger than the other. Bigger one increased a little performance of absorption chiller and heater. But it was not economical. From this study, we got that the coefficient of performance(COP) is 0.82 and the capacity is 7.24 kW for an absorption chiller and heater.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2009년도 추계학술대회 논문집
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• pp.417-417
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• 2009

The application of solar energy, in the field of alternative energy, was on the increase tendency. In the case of advanced nations, through continuous R&D, solar hot water heater with high efficiency has been used for the house and the industrial process on business, advanced nations were reached up the experimental stage of solar generation system. But, the actual circumstance of the domestic has been not accomplished the popularization of solar hot water heater and the settlement of it which is the fundamental stage of the solar energy usage. This trouble, the domestic was flooded with small enterprise for producing solar hot water heater, was caused by the popularization and the production without verification of performance. To supply the monitoring program for evaluating solar hot water heater, this research was purpose to improve the technical development of the enterprise for producing solar-heat hot-water-boiler and served as an aid for the enlargement and the popularization on solar energy.