Electrical characteristics of low-k SiOCH thin film deposited by BTMSM/$O_2$ high flow rates
(BTMSM/$O_2$ 고유량으로 증착된 low-k SiOCH 박막의 전기적인 특성)
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- Journal of the Semiconductor & Display Technology
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- v.7 no.1
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- pp.41-45
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- 2008