• 제목/요약/키워드: hard carbon

검색결과 220건 처리시간 0.019초

분자 동역학 전산모사에 의한 비정질 탄소 필름의 합성거동 연구 (Investigation of Amorphous Carbon Film Deposition by Molecular Dynamic Simulation)

  • 이승협;이승철;이규환;이광렬
    • 한국진공학회지
    • /
    • 제12권1호
    • /
    • pp.25-34
    • /
    • 2003
  • 탄소 원자 간의 interaction potential로서 Tersoff에 의해 제안된 반 경험적인 potential을 이용하여 고경질 탄소박막의 합성 거동을 전산 모사하였다. 고에너지의 탄소익사를 diamond (100) 표면에 충돌시켜 고밀도의 비정질 탄소박막을 만들 수 있었으며, 전산모사에 의해 합성된 탄소 박막의 물성과 Shin 등이 발표한 filtered cathodic arc 공정에 의해 합성된 탄소의 물성을 비교하였다. ta-C 합성 실험에서 관찰된 바와 같이 최적의 에너지 영역에서 다이아몬드에 가장 유사한 물성의 필름이 합성되었으며, 이때의 입사원자 에너지인 50 eV 는 실험적으로 최적의 필름이 얻어지는 조건에서의 탄소이온 에너지와 유사하였다. 전산모사에 의해 합성된 박막은 비정질이었으며, 다이아몬드 lattice에 해당하는 short range order를 가지긴 있었다. 그러나, 최적의 에너지 조건에서는 2.1 $\AA$의 거리의 준안정 site에 탄소들이 많이 존재하는 것을 알 수 있었는데, 이는 필름 표면의 국부적 급냉효과가 최대가 되는 조건과 일치하였다. 이러한 결과는 다이아몬드상 카본필름의 합성에 있어서, 고 에너지의 탄소인자가 충돌하면서 발생하는 국소적인 열에너지의 증가가 가장 빨리 제거되는 조건에서 최적의 물성을 가지는 경질탄소 필름이 형성되는 것을 보여주고 있다.

하드디스크의 표면파손과 데이터 손실과의 관계 (Relationship between Hard Disk Surface Damage and Data Loss)

  • 이성창;박용식;전규찬;김대은
    • 한국정밀공학회지
    • /
    • 제17권2호
    • /
    • pp.35-42
    • /
    • 2000
  • In recent years the recording density of hard disks has increased significantly largely due to the decreasing flying height. As a result of decreased flying height, the reliability issue become more critical. In this work the relationship between hard disk surface damage and data loss was investigated by using an actual hard disk drive. The purpose of this research was to identify the key factor which leads to data loss. It was shown that data loss is directly related to the physical damage of the Co-magnetic layer and there was no data loss when only carbon protective coating was damaged by the diamond tip.

  • PDF

고밀도 식각 플라즈마에서 비정질 탄소 하드 마스크의 형상 변형 해석을 위한 다각형 모델 개발 (Development of Polygonal Model for Shape-Deformation Analysis of Amorphous Carbon Hard Mask in High-Density Etching Plasma)

  • 송재민;배남재;박지훈;유상원;권지원;박태준;이인규;김대철;김종식;김곤호
    • 반도체디스플레이기술학회지
    • /
    • 제21권4호
    • /
    • pp.53-58
    • /
    • 2022
  • Shape changes of hard mask play a key role in the aspect ratio dependent etch (ARDE). For etch process using high density and energy ions, deformation of hard mask shape becomes more severe, and high aspect ratio (HAR) etch profile is distorted. In this study, polygonal geometric model for shape-deformation of amorphous carbon layered hard mask is suggested to control etch profile during the process. Mask shape is modeled with polygonal geometry consisting of trapezoids and rectangles, and it provides dynamic information about angles of facets and etched width and height of remained mask shape, providing important features for real-time HAR etch profiling.

탄소비용이 CBP전력시장에 미치는 영향 (Impact of Carbon Costs on Wholesale Electricity Market)

  • 김욱;박종배;이주원
    • 전기학회논문지
    • /
    • 제59권4호
    • /
    • pp.700-706
    • /
    • 2010
  • Carbon costs, either in the form of a carbon tax or through permit prices in an emissions trading scheme, would ultimately be reflected in higher electricity prices. This price "pass-through" is very critical to the effective design of new policies to curb the amount of carbon emissions. This paper sets out in a structured way the factors that determine price pass-through and how carbon costs would impact on the electricity market and the existing coal-fired power plants. It is shown that pass-through can vary drastically if the underlying dispatch potential of generators varies significantly across alternative emissions reduction scenarios. It can also vary depending on the availability of competing cleaner forms of generation. Pass-through as a measure of business performance is therefore hard to generalize across different circumstances and should be interpreted carefully.

잠재적 이방성 핏치를 이용한 탄소성형체 제조 (Preparation of Carbon Solid from Dormant Mesophase Pitch without using a Binder)

  • 김제영;이성영;최재훈;박양덕
    • 한국세라믹학회지
    • /
    • 제29권5호
    • /
    • pp.396-402
    • /
    • 1992
  • Carbon solid was prepared from dormant mesophase pitch (DMPP) without using a binder and its properties were characterized. DMPP powder was stabilized with air or nitric acid in pretreatment stage so that it might not soften in later heat ttreatment stage. Optimum sintering properties were obtained from carbon powder with 2.36∼2.38 of C/H atomic ratio and 1.27∼1.40 of C/O atomic ration in air stabilization. In nitric acid stabilization, optimum sintering properties were obtained when 20∼40 vol.% of nitric acid solution was used. Compressive strength increased up to 1200$^{\circ}C$ of heat treatment temperature, and the highest compressive strength and bulk density of carbon solid from DMPP were 3000 kgf/㎤, respectively. The optical properties of carbon solid obtained was fine mosaic structure. Carbon solid after graphitization showed the properties of hard carbon due to stabilization and its shore hardness was 120.

  • PDF

The Compound Refractive Lens for Hard X-ray Focusing

  • Choi, J.;Jung, J.;Park, S.;Kwon, T.
    • Journal of the Optical Society of Korea
    • /
    • 제11권2호
    • /
    • pp.76-81
    • /
    • 2007
  • The compound refractive X-ray lens (CRL) for focusing hard X-rays is investigated to determine the parameters such as the focal length, the focal spot size, and spatial distribution at the focal spot using a simple theoretical calculations and CRLs fabricated by the self-assembly method. The number of individual compound lenses are defined for the given focal length of 1 m. The X-ray energy of 1 to 40 keV is used in the calculations. The CRL for focusing hard X-rays which generated from the X-ray tube is fabricated by nanoparticle-polymer composite in the form of circular concaves. The self-assembly method is applied to form the nanoaluminum-poly (methly meth-acrylate) composite and carbon-polymer composite CRL lenses. Aluminum nanoparticles of 100 nm and carbon microparticles are diffused in the polymer solution then the high gravity up to 6000G is applied in it to form the concave lens shape. X-ray energy at 8 keV is used for characterization of the composite CRLs. The FWHM of intensity for the fabricated nanoaluminium composite CRL system, N=10 is measured as 1.8 mm, which would give about $70{\mu}m$ in FWHM at 1 m of the focal length.

Deposition of hard coatings on polycarbonate substrate by high frequency ion beam

  • Kim, Sung-Ryong;Song, Jun-Seob;Choi, Young-Joon;Kim, Jong-Hun
    • Journal of Korean Vacuum Science & Technology
    • /
    • 제2권2호
    • /
    • pp.101-106
    • /
    • 1998
  • The poor wear and scratch properties of polycarbonate have limited its application in many fields. In order to improve the wear and scratch properties of polycarbonate we have deposited diamond like carbon (DLC) coatings. The diamond like carbon coatings were made using a high frequency ion beam gun by introducing H2 and CH4 gases. The coatings were characterized with Raman spectroscopy, scanning electron microscope, ellipsometer, microscratch tester and hazemeter. Polymeric hard coating was applied onto the polycarbonate substrate before depositing a DLC coating to investigate the effect of interlayer on the system's failure mode.

  • PDF

Investigation of Some Hard Coatings Synthesized by Ion Beam Assisted Deposition

  • He, Jian-Li;Li, Wen-Zhi;He, Xial-Ming;Liu, Chang-Hong
    • 한국진공학회지
    • /
    • 제4권S2호
    • /
    • pp.163-169
    • /
    • 1995
  • Ion beam assisted deposition(IBAD) technique was used to synthesize hard coatings including diamond-like carbon(DLC), carbon nitride(CN) and metal-ceramic multilayered films. It was found that DLC films formed at low energy ion bombardment possess more $Sp^3$ bonds and much higher hardness. The films exhibited an excellent wear resistance. Nanometer multialyered Fe/TiC films was deposited by ion beam sputtering. The structure and properties were strongly dependent on the thickness of the individual layers and modulation wave length. It was disclosed that both hardness and toughness of the films could be enhanced by adjusting the deposition parameters. The CN films synthesized by IBAD method consisted of tiny crystallites dispersed in amorphous matrix, which were identified by electron diffraction pattern to be $\beta -C_3N_4$.

  • PDF

Spectroscopic Studies on Cu$^{2+}$ and Ca$^{2+}$ Binding with Glycosaminoglycans$^*$

  • Lee, Ik-Choon;Yang, Ki-Yul
    • Bulletin of the Korean Chemical Society
    • /
    • 제1권3호
    • /
    • pp.83-87
    • /
    • 1980
  • The Murrell-Fueno type of the intermolecular perturbation approach was applied to the acid-catalyzed hydrolysis of diformamide. The results show that: (1) the attack of a water molecule on the protonated carbonyl carbon is favored over that on the unprotonated carbonyl carbon; (2) the ${\sigma}$-approach model of water is preferred to the ${\pi}$-approach model; (3) the major contributing term to the total energy is the Coulomb energy, $E_q$, especially in the ${\sigma}$-approach, while the contribution of $E_{ct}$ (and $E_k$) increases moderately in the ${\pi}$-approach; (4) the reaction is a charge-controlled one, a hard-hard type in the language of the HSAB principle.