• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.4
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• pp.309-313
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• 2006

Pad surface characteristics such as roughness, groove and wear rate of pad have a effect on the within wafer non-uniformity(WIWNU) in chemical mechanical polishing(CMP). Although WIWNU increases as the uniformity of roughness(Rpk: Reduced peak height) becomes worse in an early stage of polishing time, WIWNU decreases as non-uniformity of the Rpk value. Also, WIWNU decreases with the reduction of the pad stiffness, though original mechanical properties of pad are unchanged by the grooving process. In addition, conditioning process causes the inequality of pad wear during in CMP. The profile of pad wear generated by the conditioning process has a significant effect on the WIWNU. These experiments results could help to understand the effect of pad surface characteristics in CMP.

• Proceedings of the Korea Concrete Institute Conference
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• 2003.11a
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• pp.461-464
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• 2003

Portland Cement Concrete (PCC) pavements have the advantage of durability and superior surface friction when compared to most dense-graded asphalt. However, data collected to date generally show PCC pavements to create more noise than asphaltic surfaces. As the results of research, surfaces of exposed aggregate, tining and grooving concrete pavements appear to provide better noise quality characteristics as well as good frictional characteristics and durability. In this paper, several methods of texturing were considered to reduce tire/pavement noise. As the results of this paper, PCC pavements with special texturing have superior surface friction as well as noise reductions when compared to conventional PCC pavement. Especially, Exposed Aggregate Concrete (EAC) surface appears to provide better noise quality characteristics. Conclusively, if overall noise and safety are considered simultaneously, EAC pavement that provides satisfactory friction as well as better noise reductions is suggested.

• Journal of the Korean Ceramic Society
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• v.26 no.1
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• pp.51-58
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• 1989

Wear and wear transition mechanisms during sliding as a function of time in Al2O3 have been studied to understand the wear behaviour of brittle ceramic materials. Commercial Si3N4 ball was rotated against flat Al2O3 specimens which were hot pressed and polished using upto 1${\mu}{\textrm}{m}$ diamond paste. Paraffin oil was used as a lubricant. Experimental data show that wear of Al2O3 is separated into distinct two stages, i.e., initial stage of slow wear and final stage of rapid wear. Microstructural observations at worn surface show that wear occurs through grooving and grain pull-out in the initial and final stage respectively. TEM observations beneath the worn surfaces show that grain pull-out starts to occur by the propagation of grain boundary cracks induced by dislocation pile-up throughthe surface.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.10 no.5
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• pp.110-116
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• 2011

Water on a road surface can lower the coefficient of friction of vehicle tires and it involves lots of risks. One way to prevent water from staying is to cut many "rain grooves" into the edges of the pavement parallel. Such grooves, however, can exert unwanted side forces, particularly on passenger tires, which cause "Groove Wander" making the drivers uncomfortable. The "Groove Wander" is somewhat related to vehicle geometry, but is more strongly related to interaction between road grooves and tire tread's longitudinal grooves. This thesis tries to examine principles to estimate "Groove Wandering" effect focusing on the design of longitudinal groove. Additionally, it studied how to reduce pipe resonance longitudinal grooves form in the contact patch.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.53-57
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• 1996

The side burrs and shape distortion resulting from the micromachining of an array of V-shape microgrooves in optical components were experimentally invesigated and a simplified model for their formation is proposed. Burr/shpae distortion should be kept to a minimum level since they degrade the characteristics and performance of these parts. The focus of this study is on the influence of depth of cut and workpiece material. The workpiece materials use were brass, bronze and copper. From the obsevation of the chip shape and burr/shape distortion, the proposed model, that the compressive force at the cutting edge causess the ductile uncut chip material to flow plastically outward toward the free surface to result in a burr, was verified.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.739-742
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• 2000

Micro machining technology has been studied to fabricate small size and high accuracy milli-structure products. To perfectly overcome the conventional mechanical machining methods, the chemical mechanical micro machining(C3M) process was developed. The mechanism of C3M process is that chemical solution etches the material and results in the generation of the chemical reacted layer, and the mechanical micro tool subsequently removes the layer. From the fundamental experiments, the C3M process has been founded to have the advantages of lower machining resistance, tool wear, and higher surface quality and form accuracy than conventional methods. This study focuses on the micro grooving of both the metallic material(SKDII, A1) and hard brittle silicon oxide.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.366-370
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• 1997

This paper descibes a micro groove machining process on the polyurethane biopolymer by KrF excimer laser. To investigate the etch charcteristics of polyurethane biopolymer quantitatively,laser system for ablation was installed with high precison moter and then polymer ablation experiment, in which paramteters were fluence,pulse repetition rate,numbers of pulses and assist gas, was carred out. In this experiment, we found out that the value of critical energy density for ablation is 30mJ/cmsup2/ and the etching rate is more dependent on the pulse number and fluence than any other pamameter. Finally, we machined micro grooves for fiexibility as width 300.mu.m depth 100.mu.m and port for micro-devices mounting as length 100.mu.m width 300.mu.m depth .mu.m on the outer wallof polyurethane biopolymer tube which is used as medical device.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.1
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• pp.82-88
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• 2009

Ultra-precision turning is highly needed to manufacture molds for precision lens. In this study, micro-turning combined with elliptical vibration cutting (EVC), which is known to enhance micro- machining quality, was investigated by installing a rotary stage into the micro-grooving machine. From machining experiments involving materials of copper, brass, and aluminum and single and poly crystalline diamond tools, it was found that EVC produced thinner and curlier chips and that better surface finish could be achieved, compared with conventional turning, owing to prohibition of formation of burrs and built-up edges. Therefore, we found EVC micro turning could be readily utilized to manufacture precision mold.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1995.06a
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• pp.11-17
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• 1995

본 연구에서는 SiC 및 SiC-TiB$_{2}$복합재료의 마모 및 마모천이기구를 비교 실험한 결과 다음과 같은 결론을 얻었다. 두 재료의 마모천이현상은 각각의 하중이 200N(SiC)과 80N(SiC-TiB$_{2}$)이상에서 나타나게 되었다. 마모기구는 임계미끄럼시간에서 두 단계로 나뉘어진다. 소성변형에 의한 grooving과정과 잔류응력에 의한 grain pull-out과정들로써 미세 구조를 통해 관찰할 수 있었다. grain pull-out과정은 초기단계에서 부터 생성된 전위가 축적되어 잔류응력을 발생시키므로 일어난 과정이다. SiC에 TiB$_{2}$를 첨가하므로 마모는 더욱 심하게 일어나게 되었다. 입계의 강도를 더 약하게 하였기 때문이다. 그러나, 파괴인성은 입계강도가 약할수록 증가하였다. 결국 파괴인성이 큰 재료가 마모는 더 심하게 일어남으로 서로 상반된 관계를 갖고 있슴을 결론지을 수 있었다.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.2
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• pp.7-12
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• 2012

In order to cope with the requirements of smaller patterns, larger surfaces and lower costs in the fields of displays, optics and energy, greater attentions are now being paid to the development of micro-pattern machining technology. Compared with flat moulds, large drums with micro patterns (roll moulds) have the advantages of short delivery, ease of manufacturing larger surfaces, and continuous moulding. This paper introduced the machining process technology of the roll moulds for display industry. The environmental effects were discussed and the importance of temperature maintenance was experimentally emphasized. The real time monitoring system for micro machining was introduced. A commercial solution was used to simulate the micro grooving and a deformation model of micro machined pattern was finally introduced.