• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.459-459
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• 2012

Recently, the discharge of global warming gases in dry etching process of TFT-LCD display industry is a serious issue because perfluorocarbon compound (PFC) gas causes global warming effects. PFCs including CF4, C2F6, C3F8, CHF3, NF3 and SF6 are widely used as etching and cleaning gases. In particular, the SF6 gas is chemically stable compounds. However, these gases have large global warming potential (GWP100 = 24,900) and lifetime (3,200). In this work, we chose C3F6O gas which has a very low GWP (GWP100 = <100) and lifetime (< 1) as a replacement gas. This study investigated the effects of the gas flow ratio of C3F6O/O2 and process pressure in dual-frequency capacitively coupled plasma (CCP) etcher on global warming effects. Also, we compared global warming effects of C3F6O gas with those of SF6 gas during dry etching of a patterned positive type photo-resist/silicon nitride/glass substrate. The etch rate measurements and emission of by-products were analyzed by scanning electron Microscopy (SEM; HITACI, S-3500H) and Fourier transform infrared spectroscopy (FT-IR; MIDAC, I2000), respectively. Calculation of MMTCE (million metric ton carbon equivalents) based on the emitted by-products were performed during etching by controlling various process parameters. The evaluation procedure and results will be discussed in detail.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.36 no.2
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• pp.99-108
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• 2023

Currently, semiconductor manufacturing industry heavily relies on a wide range of high global warming potential (GWP) gases, particularly during etching and cleaning processes, and their use and relevant carbon emissions are subject to global rules and regulations for achieving carbon neutrality by 2050. To replace high GWP gases in near future, dry etching using alternative low GWP gases is thus being under intense investigations. In this review, we report a current status and recent progress of the relevant research activities on dry etching processes using a low GWP gas. First, we review the concept of GWP itself and then introduce the difference between high and low GWP gases. Although most of the studies have concentrated on potentially replaceable additive gases such as C₄F₈, an ultimate solution with a lower GWP for main etching gases including CF₄ should be developed; therefore, we provide our own perspective in this regard. Finally, we summarize the advanced dry etch process research with low GWP gases and list up several issues to be considered in future research.

• 한국신재생에너지학회:학술대회논문집
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• 2009.06a
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• pp.711-711
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• 2009

Global warming has been widely recognized as a serious problem threatening the future of human beings. It is caused by the buildup in the atmosphere of greenhouse gases, such as carbon dioxide, methane, hydrofluorocarbons (HFCs), and sulfur hexafluoride (SF6). Particularly, SF6 has extremely high global warming potential compare to those of other global warming gases. One option for mitigating this greenhouse gas is the development of an effective process for capturing and separating these gases from anthropogenic sources. In general, gas hydrates can be formed under high pressure and low temperature. However, SF6 gas is known to form hydrate under relatively milder conditions. Therefore, technological and economical effects could be expected for the separation of SF6 gas from waste gas mixtures. In this study, we carried out morphological study for the SF6 hydrate crystals to understand its formation and growth mechanisms. The observations were made in high-pressure optical cell charged with liquid water and SF6 gas at constant pressure and temperature. Initially SF6 hydrate formed at the surface between gas and liquid regions, and then subsequent dendrite crystals grew at the wall above the gas/water interface. The visual observations of crystal nucleation, migration, growth and interference were reported. The detailed growth characteristics of SF6 hydrate crystals were discussed in this study.

• Solar Energy
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• v.11 no.1
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• pp.92-97
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• 1991

The greenhouse gases from fossil fuels and the global warming are discussed. In addition, a total clean energy system is conceptualized including the nuclear and renewable energies into a fossil fuel conversion stream to maintain the clean global environment while the increased energy demand is fulfilled.

• Journal of Science Education
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• v.35 no.2
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• pp.274-282
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• 2011

The purpose of this study was to investigate elementary and middle school (grade 5 and 7) students' perceptions of global warming and climate change. A total of 239 students completed opened-form questionnaire consisting of cartoons regarding global warming and climate change. The results showed that are as follows. Elementary and middle school students had low level of perception of global warming and climate change. A majority of students rightly believed that the global warming is related to greenhouse gases, glacier, environmental pollution, etc. Also, Many students had scientific concepts about the cause of global warming while some of the students had misconceptions that destruction of the ozone layer will cause an global warming. We have found that some of the students of elementary and middle school had confused between the cause of global warming and ozone depletions.

• Journal of Korea Water Resources Association
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• v.32 no.6
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• pp.617-625
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• 1999

Global warming has begun since the industrial revolution and it is getting worse recently. Even though the increase of greenhouse gases such as $CO_2$ is thought to be the main cause for global warming, its impact on global climate has not been revealed clearly in rather quantitative manners. However, researches using General Circulation Models(GCMs) has shown the accumulation of greenhouse gases increases the global mean temperature, which in turn impacts on the global water circulation pattern. This changes in global water circulation pattern result in abnormal and more frequent meteorological events such as severe floods and droughts, generally more severe than the normal ones, which are now common around the world and is referred as a indirect proof of global warming. Korean peninsula also cannot be an exception and have had several extremes recently. The main objective of this research is to analyze the impact of global warming on the change of flood and drought frequency. Based on the assumption that now is a point in a continuously changing climate due to global warming, we analyzed the observed daily rainfall data to find out how the increase of annual rainfall amount affects the distribution of daily rainfall. Obviously, the more the annual rainfall depth, the more frequency of much daily rainfall, and vice versa. However, the analysis of the 17 points data of Keum river basin in Korea shows that especially the number of days of under 10mm or over 50mm daily rainfall depth is highly correlated with the amount of annual rainfall depth, not the number of dry days with their correlation coefficients quite high around 0.8 to 0.9.

• Journal of Korean Elementary Science Education
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• v.34 no.1
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• pp.15-31
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• 2015

The purpose of this study was to investigate elementary student teachers' conceptions about the mechanism of the greenhouse effect, the greenhouse gases, the global warming, and their learning experiences of the greenhouse effect and the global warming. Participants were 82 student teachers in their second year of studies (science education: n=28, not science education: n=27) and in their fourth year of studies (science education: n=27). The open-ended questionnaire was used to examine the teachers' spontaneous ideas depicted by their drawings and/or writings. The results of this study are as follows: First, the student teachers' scientific response rate about key concepts related to the mechanism of the greenhouse effect was low (6.1%~28.0%); Second, although there are various greenhouse gases, it was only carbon dioxide that the student teacher's response rate was more than 80%; Third, only 17.1% of the student teachers clearly distinguished the greenhouse effect and the global warming; Fourth, there was a tendency that the student teacher group in the fourth year of studies and science education showed higher scientific response rate about the concepts than the other two groups.

• Journal of the Korean Society of Safety
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• v.9 no.1
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• pp.140-145
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• 1994

Contributions of global warming potentials on CFC(Chlorofluorocarbon) and Ozone were calculated by Stefan-Boltzmann's law and environmental effects of its were discussed. As the greenhouse effect on the unit volume of CFC is the most strong in the infrared gases and the destruction of Ozone in stratosphere is also depends on CFC, therefore release of CFC should be prohibited. But the effect of restriction on CFC will be appeared more than 10 years later. Eventhough the Ozone layer is related to global warming, It should be protected because of maitaining food chain mode of life, preventing human disease, for example, cataract, dermatics etc.

• International Journal of Railway
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• v.5 no.3
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• pp.117-123
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• 2012

According to the Intergovernmental Panel on Climate Change, combustion of petroleum-based and other fossil fuels results in the increasing atmospheric concentrations of $CO_2$ and other greenhouse gases (GHG's) and is a major contributing factor to global warming. This paper includes estimates of the energy and petroleum use and the GHG emissions caused by the transportation sector. It then examines the extent to which diversions to alternative modes may be possible. Estimates are made of the potential reductions in energy and petroleum use and GHG emissions resulting from diversions from conventional modes, to both low-speed urban and high-speed intercity maglev vehicle trips based on "well-to-wheel" (i.e. total-fuel-cycle) calculations.

• Membrane Journal
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• v.23 no.3
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• pp.189-203
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• 2013

F-gases, gases containing fluorine such as perfluorocarbons (PFCs), sulfurhexafluoride ($SF_6$), nitrogen trifluoride ($NF_3$) are known to have green house effects. Although the net emission rates of gases containing fluorine are much lower than those of $CO_2$, their contribution to global warming cannot be ignored because of their extremely high global warming potential (GWP). F-gases mainly have been used for a variaty of applications in the semiconductor/LCD processes and in the electric power distribution industry of the national key industry. One of practical solutions of controlling the emission rates of F-gases is to reuse by separation and recovery of F-gases of low concentration from the gases mixtures with nitrogen or air. This work investigates some methods for F-gases recovery and separation around the membrane-based process.