• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.11a
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• pp.342-345
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• 1996

This paper presents the basic characteristics of thin-film strain gauges using Cr thin-films, in which the Cr thin-films were deposited by DC magnetron sputtering. The optimized deposition conditions as a strain gauge were the input DC power was 7 W/$\textrm{cm}^2$ and the Ar vacuuming pressure was 9 mTorr. The characteristics of fabricated Cr thin-film strain gauge were the gauge factor(GF) was 5.86 in longitudinal strain and -2.04 in transverse one, the TCR was under 400 ppm/$^{\circ}C$ and the TCS was around 0 ppm/$^{\circ}C$.

• Science of Emotion and Sensibility
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• v.22 no.1
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• pp.89-100
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• 2019

Sleep apnea, a medical condition associated with a variety of complications, is generally monitored by standard sleep polysomnography, which is expensive and uncomfortable. To overcome these limitations, this study proposes an unconstrained wearable monitoring system with stretch-fiber sensors that integrate with the wearer's clothing. The system allows patients to undergo examinations in a familiar environment while minimizing the occurrence of skin allergies caused by adhesive tools. As smart clothing for adult males with sleep apnea, long-sleeved T-shirts embedding fibrous sensors were developed, enabling real-time monitoring of the patients' breathing rate, oxygen saturation, and airflow as sleep apnea diagnostic indicators. The gauge factor was measured as 20.3 in sample 4. The maximum breathing intake, measured during three large breaths, was 2048 ml. the oxygen saturation was measured before and during breath-holding. The oxygen saturation change was 69.45%, showing a minimum measurable oxygen saturation of 70%. After washing the garment, the gauge factor reduced only to 18.0, confirming the durability of the proposed system. The wearable sleep apnea monitoring smart clothes are readily available in the home and can measure three indicators of sleep apnea: respiration rate, breathing flow and oxygen saturation.

• Journal of Sensor Science and Technology
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• v.20 no.3
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• pp.213-218
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• 2011

The load cell is a force sensor and a transducer that is used to convert a physical force into a electrical signal for weighing equipment. Most conventional load cells are widely used a metal foil strain gauge for sensing element when force being applied spring element in order to converts the deformation to electrical signals. The sensitivity of a load cell is limited by its low gauge factor, hysteresis and creep. But silicon-based sensors perform with higher reliability. This paper presents the basic design and development of the silicon type load cell with an SUS630 diaphragm. The load cell consists of two parts the silicon strain gauge and the SUS630 structure with diaphragm. Structure analysis of load cell was researched by theory to optimize the load cell diaphragm design and to determine the position of peizoresistors on a silicon strain gauge. The piezo-resistors are integrated in the four points of silicon strain gauge processed by ion implantation. The thickness of the silicon strain gauge was polished by CMP under 100 ${\mu}M$. The 10 mm diameter SUS630 diaphragm was designed for loads up to 10 kg with 300 ${\mu}M$ of diaphragm thickness. The load cell was successfully tested, the variation of ${\Delta}$R(%) of four points on the silicon strain gauge is good linearity properties and sensitivity.

• Journal of Bio-Environment Control
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• v.7 no.3
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• pp.268-274
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• 1998

The mass flow of water in the stem of melon measured by Sap Flow Gauge was compared with the actual flow calculated by the difference between supply and drainage nutrient water to investigate the possibility and accuracy of estimation of melon's transpiration in rockwool culture. The Sap Flow Gauge which was made with copper-constantan theromocouple and nichrome fiber by our research team, was attached to the 3rd node of melon. The outdoor temperature, room temperature, solar radiation and relative humidity were continually measured. The amount of supply and drainage nutrient water were simultaneously measured for calculation of practical consumption of nutrient water to compare with mass flow of sap. The measuring errors of Sap Flow Gauge were 0.3 to 31.8%, which were small at solar radiation of 20MJ.m$^{2}$.d$^{-1}$ . The mass flow of water was lower for the measured value by Sap Flow Gauge than the actual value at higher solar intensity, however it was higher at lower solar intensity The variation of error rate of each Sap Flow Gauge was 0.1 to 13.0%. The measuring error with Sap Flow Gauge was negatively related with solar intensity and temperature. Therefore, to measure more exactly the mass flow of sap for estimation of melon's transpiration, the compensation factor must be calculated.

• Journal of Sensor Science and Technology
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• v.14 no.1
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• pp.56-61
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• 2005

This paper present characteristics of chromium oxide thin-film as piezoresistive sensors, which were deposited on Si substrates by DC reactive magnetron sputtering in an argon-Oxide atmosphere for high temperature applications. The chemical composition, physical and electrical properties and thermal stability ranges of the $CrO_{x}$ sensing elements have studied. $CrO_{x}$ thin films with a linear gauge factor(GF${\fallingdotseq}$15), high electrical resistivity (${\rho}$ = $340{\mu}{\Omega}cm$) and TCR<-55 ppm/$^{\circ}C$ have been obtained. These $CrO_{x}$ thin films may allow high temperature pressure sensor miniaturization to be achieved.

• Journal of Sensor Science and Technology
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• v.13 no.4
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• pp.303-308
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• 2004

This paper descibes on the characteristics of Ta-N(tantalum nitride) ceramic thin-film strain gauges which were deposited on Si substrates by DC reactive magnetron sputtering in an argon-nitrogen atmosphere (Ar-$(4{\sim}16%)N_{2}$) for high-temperature applications. These films were annealed in $2{\times}10^{-6}$ Torr vacuum furnace at the range of $500{\sim}1000^{\circ}C$. Optimum deposition atmosphere and annealing temperature were determined at $900^{\circ}C$ for 1 hr. in 8% $N_{2}$ gas flow ratio. Under optimum formation conditions, the Ta-N thin-film for strain gauges was obtained a high-resistivity of $768.93{\mu}{\Omega}{\cdot}cm$, a low temperature coefficient of resistance (TCR) of -84 ppm/$^{\circ}C$ and a good longitudinal gauge factor (GF) of 4.12.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.97-100
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• 2001

This paper presents the characteristics of Ta-N thin-film strain gauges as high-temperature strain gauges, which were deposited on Si substrate by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(4~16%)$N_2$). These films were annealed for 1 hour in $2{\times}10^{-6}$ Torr vaccum furnace range $500\sim1000^{\circ}C$. The optimized conditions of Ta-N thin-film strain gauges were annealing condition($900^{\circ}C$, 1 hr.) in 8% $N_2$ gas flow ratio deposition atmosphere. Under optimum conditions, the Ta-N thin-films for strain gauges is obtained a high resistivity, $\rho=768.93$ ${\mu}{\Omega}cm$, a low temperature coefficient of resistance, TCR=-84 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal gauge factor, GF=4.12.

• Journal of the Korean Society for Railway
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• v.5 no.3
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• pp.148-157
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• 2002

A health monitoring system becomes a useful tool to obtain information on long term behavior of the important railway structures such as very long span and special type bridges. The health monitoring system not only gives the direct measurement data of the railway bridges but also provides the basic data on the maintenance of the structures. Therefore, periodic calibrations of the health monitoring system will be a necessary step toward precise and accurate assessment of the railway bridges. In this study, the calibration and gauge factor readjustment process made for the health monitoring system installed in the railroad bridges is reviewed and some findings are explained in detail: specifically, the calibrators made for this purpose are illustrated and the regression processes of the calibration on long-term displacement using water level sensor, longitudinal displacement using LVDT sensor, instantaneous displacement using LVDT sensors and accelerometer are described in full length. Based on the regression results, it was found that the gauge factors need to be readjusted according to the regression equation but, since the deviation or shift is not serious so far, long-term observation on each sensor is also recommended. Future work will be concentrated on the long-term analysis of each sensor and on the database creation so that the assessment of the structures is possible.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.573-576
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• 2000

The physical, electrical and piezoresitive characteristics of CrN(chromium nitride) thin-films on silicon substrates have been investigated for use as strain gauges. The thin-film depositions have been carried out by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(5∼25 %)Na$_2$). The deposited CrN thin-films with thickness of 3577${\AA}$ and annealing conditions(300$^{\circ}C$, 48 hr) in Ar-10 % N$_2$deposition atmosphere have been selected as the ideal piezoresistive material for the strain gauges. Under optimum conditions, the CrN thin-films for the strain gauges is obtained a high electrical resistivity, $\rho$=1147.65 ${\mu}$$\Omega$cm, a low temperature coefficient of resistance, TCR=-186 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal gauge factor, GF=11.17.

• Water for future
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• v.25 no.3
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• pp.79-86
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• 1992

ARF(Areal Reduction Factor) have been developed and used to convert point I-D-F to areal I-D-F in many countries. In Korea, through ARF was calculated in Han river basin by several researchers, it has limit to apply to other regions \ulcorner 새 low density of rainfall gauge station and shortage of data. In this study ARF has developed in areas of high density of rainfall gauge station, Pyungchang river(han river), Wi stream(nakdong river), and Bochung stream(Guem river) basin by fixed-area method. And coefficient of variation of annual mean precipitation was presented to use ARF in othere areas and its applicability was analyzed.