• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.4
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• pp.391-398
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• 2010

In this paper, we propose a sensor design by using a polysilicon strain gauge bonded to a metal diaphragm. The fabrication process of the thin polysilicon strain gauges having thicknesses of $50\;{\mu}m$ was established using conventional MEMS technologies; further, the technique of glass frit bonding of the polysilicon strain gauge to the stainless steel diaphragm was established. Performance of the polysilicon strain gauge bonded to the metal cantilever beam was evaluated. The gauge factor, temperature coefficient of resistance (TCR), nonlinearity, and hysteresis of the polysilicon strain gauge were measured. The results demonstrate that the resistance increases linearly with tensile stress, while it decreases with compressive stress. The value of the gauge factor, which represents the sensitivity of strain gauges, is 34.0; this value is about 7.15 times higher than the gauge factor of a metal-foil strain gauge. The resistance of the polysilicon strain gauge decreases linearly with an increase in the temperature, and TCR is $-328\;ppm/^{\circ}C$. Further, nonlinearity and hysteresis are 0.21 % FS and 0.17 % FS, respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.1022-1025
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• 2001

This paper presents the characteristics of TaN thin-film as high-temperature strain gauges, which were deposited on Si substrate by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(4∼20%)N$_2$). The electrical and mechanical characteristics of these films investigated with the thickness range 1650∼1870${\AA}$ and room temperature resistivities in the range 178.3 ${\mu}$$\Omega$cm to 3175.7 ${\mu}$$\Omega$cm. The TaN thin-film strain gauge deposited in Ar-(20%)N$_2$atmosphere is obtained a temperature coefficient of resistance(TCR), 0∼-1357 ppm/$^{\circ}C$ in the temperature range 25∼275$^{\circ}C$ and a high temporal stability with a longitudinal gauge factor, 2.92∼3.47. Because of their high resistivity, low TCR and linear gauge factor, these cermet thin-film may allow high-temperature strain gauges miniaturization.

• Proceedings of the Safety Management and Science Conference
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• 2009.11a
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• pp.657-665
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• 2009

The paper reviews gauge R&R studies by two-factor mixed models including random and fixed factors. The two-factor mixed models include restricted models and unrestricted models considering the interaction of two factors. This study also classifies the models according to the number of factors, and the combination of various factors such as random factor, fixed factor, block factor and repetition type.

• Science of Emotion and Sensibility
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• v.25 no.3
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• pp.77-90
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• 2022

This study seeks to develop a stretch sensor for measuring the wrist movements of people using fishing lures. In order to confirm wrist movement, a stretch sensor was attached to the wrist band, and measurements of the dorsiflexion, plantar flexion, and fishing landing motion were measured using a scale to gauge factor, tensile strength, and elongation recovery rate. A conductive sensor using CNT dispersion was developed and applied to the E-band under the same conditions. A total of 15 sensors of the same size and five types of impregnation once, twice, and three times each were used to measure the gauge factor using UTM. The sensor that was impregnated twice had the best gauge rate, and the prototypes were manufactured with three sensors with high gauge rates and tensile strength. The results of the operation test conducted by connecting to the Arduino showed that Sample 1, which had the highest tensile strength and gauge factor, had a stable graph wavelength in three operations. Samples 2 and 3 showed stable wavelengths in the dorsiflexion and the plantar flexion; however, signal noise appeared in the fishing landing motion. This showed stable wavelengths in the two motions, but the wavelengths of the graphs differ depending on the tensile strength and gauge factor in the fishing landing motion. As a result, it was possible to identify the conditions necessary for manufacturing a stretch sensor for measuring wrist movement. This study will contribute to the development of smart wearable products for lure fishing.

• Proceedings of the Safety Management and Science Conference
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• 2009.11a
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• pp.557-563
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• 2009

The research develops measurement processes for estimating and evaluating the gauge R&R(Reproducibility & Repeatability) using ANOVA(Analysis of Variance) of experimental design tools. The ten-step processes developed include experimental goal setting, the selection of characteristics(factors, levels), data model, ANOVA, EMS(Expected Mean Square), estimation of gauge precisions, and evaluation indexes. The three-factor combined measurement models are presented to show the processes developed in this paper.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.04b
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• pp.134-138
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• 2000

The physical, electrical and piezoresitive characteristics of CrN(chromiun nitride) thin-films on silicon substrates have been investigated for use as strain gauges. The thin-film depositions have been carried out by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(5~25 %)$N_2$). The deposited CrN thin-films with thickness of $3500{\AA}$nd annealing conditions($300^{\circ}C$, 48 hr) in Ar-10 % $N_2$ deposition atmosphere have been selected as the ideal piezoresistive material for the strain gauges. Under optimum conditions, the CrN thin-films for the strain gauges is obtained a high electrical resistivity, $\rho=1147.65\;{\mu}{\Omega}cm$, a low temperature coefficient of resistance, TCR=-186 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal gauge factor, GF=11.17.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.05b
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• pp.135-141
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• 2000

The physical, electrical and piezoresitive characteristics of CrN(chromiun nitride) thin-films on silicon substrates have been investigated for use as strain gauges. The thin-film depositions have been carried out by OC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(5~25 %)$N_2$). The deposited CrN thin-films with thickness of $3500{\AA}$ and annealing conditions($300^{\circ}C$, 48 hr) in Ar-10 % $N_2$ deposition atmosphere have been selected as the ideal piezoresistive material for the strain gauges. Under optimum conditions, the CrN thin-films for the strain gauges is obtained a high electrical resistivity, $\rho=1147.65\;{\mu}{\Omega}cm$, a low temperature coefficient of resistance, TCR=-186 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal gauge factor, GF=11.17.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.97-100
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• 2001

This paper presents the characteristics of Ta-N thin-film strain gauges as high-temperature strain gauges, which were deposited on Si substrate by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(4∼16 %)N$_2$). These films were annealed for 1 hour in 2x10$\^$-6/ Torr vaccum furnace range 500∼1000$^{\circ}C$. The optimized conditions of Ta-N thin-film strain gauges were annealing condition(900$^{\circ}C$, 1 hr.) in 8% N$_2$ gas flow ratio deposition atmosphere. Under optimum conditions, the Ta-N thin-films for strain gauges is obtained a high resistivity, $\rho$=768.93 ${\mu}$Ω cm, a low temperature coefficient of resistance, TCR=-84 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal gauge factor, GF=4.12.

• Journal of Sensor Science and Technology
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• v.17 no.3
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• pp.162-167
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• 2008

In this paper we report on the electrical properties of carbon fiber which is an attractive material for strain gauges and can also be applied to resonating micro sensors. The carbon fibers used in this research was manufactured from polyactylonitrile (PAN). The fabricated carbon fibers had about $10\;{\mu}m$ in length and several centimeters in length. We employed a micro structure to measure electrical properties of the carbon fiber. The measured electrical resistivity of the carbon fibers were about $3{\times}10^{-3}{\Omega}{\cdot}cm$ A gauge factor of the carbon fiber is also observed with the same system and it was about 400, depending on the structure of the carbon fiber. For the sensor applications of the carbon fiber, it is selectively placed between the gap of Al electrodes using a dielectrophoresis method. When the carbon fiber is resonated by a piezoelectric ceramic, resistance change at a variety of resonance mode was observed through an electrical system.

• Journal of Sensor Science and Technology
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• v.32 no.6
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• pp.470-474
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• 2023

In this study, a diaphragm-type pressure sensor was developed using multi-layer(four-layer) graphene produced at 1 nm thickness by thermally transferring single-layer graphene produced by chemical vapor deposition (CVD) to a 6" silicon wafer. By measuring the gauge factor, we investigated whether it was possible to produce a pressure sensor of consistent quality. As a result of the measurement, the pressure sensor using multilayer graphene showed linearity and had a gauge factor of about 17.5. The gauge factor of the multilayer graphene-based pressure sensor produced through this study is lower than that of doped silicon, but is more sensitive than a general metal sensor, showing that it can be sufficiently used as a commercialized sensor.