• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.146-147
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• 2011

Processing a large area substrate for liquid crystal display (LCD) or solar panel applications in a capacitively coupled plasma (CCP) reactor is becoming increasingly challenging because of the size of the substrate size is no longer negligible compared to the wavelength of the applied radio frequency (RF) power. The situation is even worse when the driving frequency is increased to the Very High Frequency (VHF) range. When the substrate size is still smaller than 1/8 of the wavelength, one can obtain reasonably uniform process results by utilizing with methods such as tailoring the precursor gas distribution by adjustingthrough shower head hole distribution or hole size modification, locally adjusting the distance between the substrate and the electrode, and shaping shower head holes to modulate the hollow cathode effect modifying theand plasma density distribution by shaping shower head holes to adjust the follow cathode effect. At higher frequencies, such as 40 MHz for Gen 8.5 (2.2 m${\times}$2.6 m substrate), these methods are not effective, because the substrate is large enough that first node of the standing wave appears within the substrate. In such a case, the plasma discharge cannot be sustained at the node and results in an extremely non-uniform process. At Applied Materials, we have studied several methods of modifying the standing wave pattern to adjusting improve process non-uniformity for a Gen 8.5 size CCP reactor operating in the VHF range. First, we used magnetic materials (ferrite) to modify wave propagation. We placed ferrite blocks along two opposing edges of the powered electrode. This changes the boundary condition for electro-magnetic waves, and as a result, the standing wave pattern is significantly stretched towards the ferrite lined edges. In conjunction with a phase modulation technique, we have seen improvement in process uniformity. Another method involves feeding 40 MHz from four feed points near the four corners of the electrode. The phase between each feed points are dynamically adjusted to modify the resulting interference pattern, which in turn modulate the plasma distribution in time and affect the process uniformity. We achieved process uniformity of <20% with this method. A third method involves using two frequencies. In this case 40 MHz is used in a supplementary manner to improve the performance of 13 MHz process. Even at 13 MHz, the RF electric field falls off around the corners and edges on a Gen 8.5 substrate. Although, the conventional methods mentioned above improve the uniformity, they have limitations, and they cannot compensate especially as the applied power is increased, which causes the wavelength becomes shorter. 40 MHz is used to overcome such limitations. 13 MHz is applied at the center, and 40 MHz at the four corners. By modulating the interference between the signals from the four feed points, we found that 40 MHz power is preferentially channeled towards the edges and corners. We will discuss an innovative method of controlling 40 MHz to achieve this effect.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.1
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• pp.13-17
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• 2005

The Pb(Zr/sub 0.52/Ti/sub 0.48/)O₃/(Ba/sub 0.6/Sr/sub 0.4/)TiO₃[PZT/BST] heterolayered thin films were deposited on Pt/Ti/SiO₂/Si substrates by using the RF sputtering method with different RF power. The PZT/BST heterolayered thin films had the tetragonal structure of the PZT phase and BST phase. Increasing the RF power. the intensity of the PZT (100), (110) peaks and BST (111) peaks were decreased and the intensity of the BST (100), (110) peaks were increased. The thickness ratio of the top layered BST thin film and the bottom layered PZT thin film was 2 to1. The atomic concentration of the Ba, Sr, Pb. Zr, Ti atoms were constant in the PZT thin films and BST thin films, respectively. The Pt atom was diffused to the PZT region in the PZT/BST heterolayered thin films deposited at condition of 60[W] RF power. Increasing the frequency, dielectric constant and loss of the PZT/BST heterolayered thin films were decreased. The dielectric constant and loss of the PZT/BST heterolayered thin films deposited with RF power of 90[W] were 406 and 3%, respectively.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.9
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• pp.2294-2303
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• 1993

This paper investigated the characteristics of the turbulent incompressible flow past the orifice ring in an axi-symmetric pipe. The flow field was the turbulent pulsatile flow for Reynolds number of $2{\times}10^{5}$ which was defined based on the maximum velocity and the pipe diameter at the inlet, with oscillating frequence $(f_{os})=1/4{\pi}$ which was considered as quasi-steady state frequence. In the present investigation, finite analytic method was used to solve the governing equations in Navier Stokes and turbulent transport formulations. Particularly at high Reynolds number and low oscillation frequency, the effects of orifice ring on the flow were numerically investigated. The separation zone behind the orifice ring during the acceleration phase was found to be decreased. However, during the deceleration phase, the separation behind the orifice ring for pulsatile flow continuously grow to a size even larger than that in steady flow. The pressure drop in steady flow was found to be constant and always positive while for pulsatile flow the pressure drop change with time. And large turbulent kinetic energy, dissipation rate were found to be located in the region where the flow passes through the orifics ring. The maximum turbulent kinetic energy, generally occurs along the shear layer where the velocity gradient is large.

• The Journal of the Korea institute of electronic communication sciences
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• v.9 no.10
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• pp.1175-1180
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• 2014

In this paper, the open ring type DGS(Defected Ground Structure) resonator, applicable to MMIC(Monolithic Microwave Integrated Circuit), is proposed to improve phase noise characteristics of RF oscillator. This resonator is planar type, therefore, it easy to design miniaturrized., and takes relatively high Q value. Modeling the equivalent parameter of resonator is needed, when designing the RF oscillator with resonator. The mathematical method to solve the equivalent parameter of the resonator from the measured results of resonator is introduced in this paper. To verify the method, DGS resonator with 5.8 GHz center frequency is fabricated, for measuring characteristics and calculating the equivalent parameter. The result from this process is compared with the data of the ADS simulation, and as a result both were identical.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.11a
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• pp.687-692
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• 2008

In a nuclear power plant, loose part monitoring and its diagnostic technique is one of the major issues for ensuring the structural integrity of the reactor system. Typically, accelerometers are mounted on the surface of a reactor vessel to localize impact location caused by the impact of metallic substances on the reactor system. However, in some cases, the number of the accelerometers is not enough to estimate the impact location precisely. In such a case, one of alternative plan is to utilize another type sensors that can measure the vibration of the reactor structure even though the measuring frequency ranges are different from each others. The AE sensors installed on the reactor structure can be utilized as additional sensors for loose part monitoring. In this paper, we proposed a new method to estimate impact location by using both accelerometer signal and AE signal, simultaneously. The feasibility of the proposed method is verified by an experiment. The experimental results demonstrate that we can enhance the reliability and precision of the loose part monitoring.

• Journal of Korean Society for Atmospheric Environment
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• v.19 no.1
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• pp.57-66
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• 2003

TiO$_2$ sol was prepared by sol-gel method, and this sol was coated in ceramic and glass bead by dip-coating method. The coated catalyst was applied to degrade benzene in the gas phase by exposing to UV -lamp (365 nm) in a batch reactor. The removal efficiency of the benzene was compared by changing various conditions such as the kind of chemical additives, the coating beads (ceramic and glass), solution pH, the initial concentration of TiO$_2$ sol, UV intensity, and benzene concentration. The physical structure of TiO$_2$ sol used in this study was found to be pu-rely anatase type from XRD analysis. The results showed that ceramic bead was effective as the coating agent rath-er than glass bead. The significant change in the benzene removal efficiency of benzene did not occur with chang-ing coating frequency and the initial concentration of TiO$_2$ sol. The removal efficiency of benzene increased with increasing UV intensity, and with acidic treatment of TiO$_2$-coated ceramic bead.

• The Transactions of the Korean Institute of Power Electronics
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• v.10 no.5
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• pp.501-507
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• 2005

This paper proposes a Hybrid Random PWM(HRPWM) technique using a LF2407 DSP board in order to spread the power spectra of an induction motor. The proposed method is composed to the PRBS (Pseudo-Random Binary Sequence) with the Lead-Lag random bit and the random triangular carrier for the logical comparison. Also, a DSP generates the random number, the PRBS and the three-phase reference signal, a MAX038 chip operating as frequency modulator generates the random triangular carrier. For verification of the proposed method, the experiments were conducted with a three-phase adjustable speed a.c drives, and the results of simulations and experiments are presented.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.4 no.2
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• pp.417-426
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• 2000

In this paper, CE-CPSK(Constant Envelope Continuous Phase Shift Keying) modulated DS/SS(Direct Sequence Spread Spectrum) transceiver with 908 MHz carrier frequency and 1.5 MHz PN clock rate is proposed. To overcome the effect of nun-linear power amplifier, CE-CPSK modulation method which has the constant envelope and continuous phase characteristics is proposed. To analyze the DS/SS receiver performance with respect to code tracking loop, multipath fading channel is characterized as a two-ray Rayleigh fading channel. To compensate the demerit of analog delay locked loop, digital delay locked loop is employed for code tracking loop. Simulation and experimental examination has been carried out in AWGN(Additive White Gaussian Noise) and Rayleigh fading channel environment in order to prove validity of the proposed method.

• Proceedings of the KIEE Conference
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• 1989.11a
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• pp.296-300
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• 1989

The paper proposes a method to eliminate harmonics of PWM inverter fed induction motor system using Walsh series. In other words, this paper presents technique of the selective harmonics elimination(SHE) by W-FT series in three phase PWM inverter output waveform. A microprocessor(8086 CPU) - controlled three phase induction motor system in order to verify this algorithm is present. It is designed for a three output voltage in the 1$\sim$60 Hz inverter with the 5th and 7th harmonics, 5th, 7th, 11th, and 13th, harmonics eliminated, and with the fundamental wave amplitude proportional to the output frequency. In the PWM inverter, dead time circuit is inserted in the switching si gnats to prevent the de link shortage. This paper is deals with quantative prediction of dead-time effect and its compensation in PWM inverters. The performance of the compensation circuits is confirmed by the experiment.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.719-722
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• 2003

Ferroelectric $Pb(Zr_{1-x}Ti_x)O_3$ (PZT) films were deposited on (001) MgO single crystals using sol-gel method. Structural properties and surface morphologies of PZT films were investigated using an X-ray diffractometer and a scanning electron microscopy, respectively. The dielectric properties of PZT films were investigated with the dc bias field using interdigitated capacitors (IDC) which were fabricated on PZT films using a thick metal layer by photolithography and dry etching process. The small signal dielectric properties of PZT films were calculated by a modified conformal mapping method with low and high frequency data, such as capacitance measured by an impedance gain/phase analyzer at 100 kHz and reflection coefficient (S-parameter) measured by a HP 8510C vector network analyzer at 1 -20 GHz. The IDC on PZT films exhibited about 67% of capacitance change with an electric field of 135 kV/cm at 10 GHz. These PZT thin films can be applied to tunable microwave devices such as phase shifters, tunable resonators and tunable filters.