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New Approaches for Overcoming Current Issues of Plasma Sputtering Process During Organic-electronics Device Fabrication: Plasma Damage Free and Room Temperature Process for High Quality Metal Oxide Thin Film

  • Hong, Mun-Pyo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.100-101
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    • 2012
  • The plasma damage free and room temperature processedthin film deposition technology is essential for realization of various next generation organic microelectronic devices such as flexible AMOLED display, flexible OLED lighting, and organic photovoltaic cells because characteristics of fragile organic materials in the plasma process and low glass transition temperatures (Tg) of polymer substrate. In case of directly deposition of metal oxide thin films (including transparent conductive oxide (TCO) and amorphous oxide semiconductor (AOS)) on the organic layers, plasma damages against to the organic materials is fatal. This damage is believed to be originated mainly from high energy energetic particles during the sputtering process such as negative oxygen ions, reflected neutrals by reflection of plasma background gas at the target surface, sputtered atoms, bulk plasma ions, and secondary electrons. To solve this problem, we developed the NBAS (Neutral Beam Assisted Sputtering) process as a plasma damage free and room temperature processed sputtering technology. As a result, electro-optical properties of NBAS processed ITO thin film showed resistivity of $4.0{\times}10^{-4}{\Omega}{\cdot}m$ and high transmittance (>90% at 550 nm) with nano- crystalline structure at room temperature process. Furthermore, in the experiment result of directly deposition of TCO top anode on the inverted structure OLED cell, it is verified that NBAS TCO deposition process does not damages to the underlying organic layers. In case of deposition of transparent conductive oxide (TCO) thin film on the plastic polymer substrate, the room temperature processed sputtering coating of high quality TCO thin film is required. During the sputtering process with higher density plasma, the energetic particles contribute self supplying of activation & crystallization energy without any additional heating and post-annealing and forminga high quality TCO thin film. However, negative oxygen ions which generated from sputteringtarget surface by electron attachment are accelerated to high energy by induced cathode self-bias. Thus the high energy negative oxygen ions can lead to critical physical bombardment damages to forming oxide thin film and this effect does not recover in room temperature process without post thermal annealing. To salve the inherent limitation of plasma sputtering, we have been developed the Magnetic Field Shielded Sputtering (MFSS) process as the high quality oxide thin film deposition process at room temperature. The MFSS process is effectively eliminate or suppress the negative oxygen ions bombardment damage by the plasma limiter which composed permanent magnet array. As a result, electro-optical properties of MFSS processed ITO thin film (resistivity $3.9{\times}10^{-4}{\Omega}{\cdot}cm$, transmittance 95% at 550 nm) have approachedthose of a high temperature DC magnetron sputtering (DMS) ITO thin film were. Also, AOS (a-IGZO) TFTs fabricated by MFSS process without higher temperature post annealing showed very comparable electrical performance with those by DMS process with $400^{\circ}C$ post annealing. They are important to note that the bombardment of a negative oxygen ion which is accelerated by dc self-bias during rf sputtering could degrade the electrical performance of ITO electrodes and a-IGZO TFTs. Finally, we found that reduction of damage from the high energy negative oxygen ions bombardment drives improvement of crystalline structure in the ITO thin film and suppression of the sub-gab states in a-IGZO semiconductor thin film. For realization of organic flexible electronic devices based on plastic substrates, gas barrier coatings are required to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency flexible AMOLEDs needs an extremely low water vapor transition rate (WVTR) of $1{\times}10^{-6}gm^{-2}day^{-1}$. The key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required (under ${\sim}10^{-6}gm^{-2}day^{-1}$) is the suppression of nano-sized defect sites and gas diffusion pathways among the grain boundaries. For formation of high quality single inorganic gas barrier layer, we developed high density nano-structured Al2O3 single gas barrier layer usinga NBAS process. The NBAS process can continuously change crystalline structures from an amorphous phase to a nano- crystalline phase with various grain sizes in a single inorganic thin film. As a result, the water vapor transmission rates (WVTR) of the NBAS processed $Al_2O_3$ gas barrier film have improved order of magnitude compared with that of conventional $Al_2O_3$ layers made by the RF magnetron sputteringprocess under the same sputtering conditions; the WVTR of the NBAS processed $Al_2O_3$ gas barrier film was about $5{\times}10^{-6}g/m^2/day$ by just single layer.

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Analysis of the Lipid Components in Chestnut (Castanea crenata) -Part I. Composition of lipid fraction of inner and outer part of chestnut- (밤 지질(脂質) 성분(成分)의 분석(分析) -제1보. 내과육(內果肉) 및 외과육(外果肉)의 지질조성(脂質組成)-)

  • Rhee, Chong-Ouk;Kim, Ze-Uook
    • Applied Biological Chemistry
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    • v.25 no.4
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    • pp.239-247
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    • 1982
  • Free and bound lipids of both inner and outer part in the edible portion of 3 varieties of chestnuts(Castanea crenata) were extracted and fractionated into neutral lipid, glycolipid and phospholipid, by silicic acid column chromatography. Fatty acid composition of each fraction was examined with gas chromatography. Lipid contents in chestnut on dry weight basis were 1.84% in inner part(1.26%-free lipid and 0. 58% bound lipid) and 1.95% in outer part (1.63%-free lipid and 0.32%-bound lipid). Free lipid content was $2{\sim}5$ times higher than bound lipid content and was more abundant in the outer part. Neutral lipid content of the free lipid in the inner part was 39.5%, approximately 10 times as much as that of the bound lipid, but in the outer part, the former was 56.6%. Glycolipid content was 22. 0% in the free lipid and 17.0% in the bound lipid. Phospholipid content was 6.9% in the free lipid and 10.5% in the bound lipid. The predominant fatty acids were linoleic acid, palmitic acid and linolenic acid in the free lipid, and palmitic acid, linoleic arid and linolenic acid in the bound lipid, Therefore, saturated fatty acid content in the bound lipid was 2 times higher than in the free lipid.

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Analysis of Three-Pad Gas Foil Journal Bearing for Increasing Mechanical Preloads (3 패드 가스 포일 저널 베어링의 프리로드 증가에 따른 성능 해석)

  • Lee, Jong Sung;Kim, Tae Ho
    • Tribology and Lubricants
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    • v.30 no.1
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    • pp.1-8
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    • 2014
  • In this study, a three-pad gas foil journal bearing with a diameter of 40 mm and an axial length of 35 mm was modeled to predict the static and dynamic performances with regard to an increasing mechanical preload. The Reynolds equation for an isothermal and isoviscous ideal gas was coupled with a simple elastic foundation foil model to calculate the hydrodynamic pressure solution iteratively. In the prediction results, the journal eccentricity, journal attitude angle, and minimum film thickness decreased, but the friction torque increased with the preload. A quick comparison implied a lower load capacity but higher stability for a three-pad gas foil bearing compared to a one-pad gas foil journal bearing. The direct stiffness coefficients increased with the preload, but the cross-coupled stiffness coefficients decreased. The direct damping coefficient increased in the horizontal direction but decreased in the vertical direction as the preload increased. These model predictions will be useful as a benchmark against experimental test data.

Development of the Micro Gas Turbine Engine (마이크로 가스터빈 엔진 개발)

  • Kim, Seung-Woo;Kwon, Gii-Hun;Jang, Il-Hyeong
    • 유체기계공업학회:학술대회논문집
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    • 2001.11a
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    • pp.361-366
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    • 2001
  • A mim turbo-shaft engine of 50HP for UAV, which can be easily modified to turbo-prop and turbo-jet engine by sharing the core engine and has many applications to civilian demands and munitions, will be developed This kind of micro gas turbine engine has been developed mostly by the corporations which have special technology but are small in its scale. Especially, the gas turbine engine can be easily applied to other fields and developed by domestic technology, so that the sharing of technology is planed to realize through the cooperations with academies and research institutes. In this paper, the gas turbine engine, which has the compressor ratio of 3.8, the turbine inlet temperature of l180K and the engine speed higher than 100,000 rpm, is composed of centrifugal compressor, combustor, gas generator turbine, free power turbine and gear box. The competitiveness of the gas turbine engine can be obtained from minimizing its cost by the utilization of domestic infrastructure for the performance test and the decisive outsourcing.

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Mechanical Properties of The CO2 Free Vacuum Carburized in SCM415H (CO2 무 배출 침탄 열처리된 SCM415H 소재의 기계적 성질)

  • Byun, Jae-Hyuk;Ro, Seung-Hoon;Lee, Jong-Hyung;Lee, Chang-Hun;Yang, Seong-Hyeon
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.36 no.9
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    • pp.971-978
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    • 2012
  • Vacuum carburizing is supposed to be the superior process to the gas carburizing. However, the vacuum carburizing has the stage in which hydrocarbon gas is supplied into the furnace to be pyrolysis, and consequently the stable heat treatment is hard to achieve due to the soot from the hydrocarbon pyrolysis. Recently, many studies have been made which utilize acetylene gas to overcome this defects. In this paper, the carburizing and the diffusion periods have been selected based on the Harris experimental formula, and the mechanical properties of the vacuum carburized specimen have been compared with those of the gas carburized SCM415H specimen to identify the feasibility of the $CO_2$ free vacuum carburizing process. The result showed that the vacuum carburized materials used have no oxidization of the grain boundaries, and show the 29.8% higher effective hardness depth and the acceptable tensile strength.

Study on Gas Concentration Measurement of O2 and NO Using Calibration-free Wavelength Modulation Spectroscopy in Visible and Mid-Infrared Region (가시광선과 중적외선 영역의 무보정 파장 변조 분광법을 이용한 O2와 NO 가스 농도 측정에 관한 연구)

  • Aran Song;Geunhui Ju;Kanghyun Kim;Jungho Hwang;Daehae Kim;Changyeop Lee
    • Journal of the Korean Institute of Gas
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    • v.27 no.1
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    • pp.70-77
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    • 2023
  • Air environment regulations have been strengthened due to increasing air pollutant emissions, the target of reducing emissions has increased and interest in gas measurement methods is also increasing. The sampling method is mainly used, but due to the spatial and temporal measurement limitations, the laser absorption spectroscopy which is a real-time and in-situ method is in the spotlight. In this study, we studied the wavelength modulation spectroscopy and described the calibration-free algorithm. The developed algorithm was modified to reflect 46 multi-absorption lines and was applied to light absorption signal analysis in visible and mid-infrared regions. In addition, the difference between the modulation parameters of laser was analyzed. As a result of reviewing the performance through O2 and NO gas measurement experiments of various concentration conditions, the linearity was R2O2=0.99999 and R2NO=0.99967.

Numerical Simulation on the Free Surface using implicit boundary condition (내재적 경계 조건을 이용한 자유표면 유동 수치해석)

  • Lee G. H.;Baek J. H.
    • Journal of computational fluids engineering
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    • v.4 no.1
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    • pp.19-26
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    • 1999
  • This paper describes a numerical method for predicting the incompressible unsteady laminar three-dimensional flows with free-surface. The Navier-Stokes equations governing the flows have been discretized by means of finite-difference approximations, and the resulting equations have been solved via the SIMPLE-C algorithm. The free-surface is defined by the motion of a set of marker particles and the interface behaviour was investigated by means of a "Lagrangian" technique. Using the GALA concept of Spalding, the conventional mass continuity equation is modified to form a volumetric or bulk-continuity equation. The use of this bulk-continuity relation allows the hydrodynamic variables to be computed over the entire flow domain including both liquid and gas regions. Thus, the free-surface boundary conditions are imposed implicitly and the problem formulation is greatly simplified. The numerical procedure is validated by comparing the predicted results of a periodic standing waves problems with analytic solutions. The results show that this numerical method produces accurate and physically realistic predictions of three-dimensional free-surface flows.

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NUMERICAL ANALYSIS OF VENTILATED CAVITATION WITH FREE SURFACE EFFECTS (자유표면 영향을 고려한 환기공동 전산유동해석)

  • Jin, M.S.;Kim, H.Y.;Ha, C.T.;Park, W.G.
    • Journal of computational fluids engineering
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    • v.18 no.1
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    • pp.13-21
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    • 2013
  • Cavitating flow is usually formed on the surface of a high speed underwater object. When a object moves near a free surface at very high speed, the cavity signature becomes one of the major factors to be overcome by sensors of military satellite. The present work was to study the free surface effect on the ventilated cavitation. The governing equations were Navier-Stokes equations based on a homogeneous mixture model. The multiphase flow solver used an implicit preconditioning method in the curvilinear coordinate system. The cavitation model used here was the one first presented by Merkle et al.(2006) and redeveloped by Park & Ha(2009). Computations considered the free surface effects were carried out with a NACA0012 hydrofoil and the corresponding results were compared with the experimental data to have a good agreement. Calculations were then performed considering the ventilated cavitation, including the effect of non-condensable gas under the free surface effects.

Identification of Defect Type by Analysis of a Single PD Pulse in Gas Insulated Structure (가스절연 구조에서 단일 부분방전펄스 분석에 의한 결함 판별)

  • Jo, Hyang-Eun;Kim, Sun-Jae;Jeong, Gi-Woo;Kil, Gyung-Suk
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.28 no.5
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    • pp.320-325
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    • 2015
  • This paper dealt with a defect identification algorithm which is based on single partial discharge (PD) pulse analysis in gas insulated structure. Four types of electrode systems such as a needle-plane, a plane-needle, a free particle and a crack inside spacer were fabricated to simulate defects in gas insulated switchgear (GIS). We measured single PD pulse by an oscilloscope with a sampling rate of 5 GS/s and a frequency bandwidth of 1 GHz. Data aquisition and signal processing were controlled by a LabVIEW program. Physical shapes of PD pulses were compared with kurtosis, skewness and time-based parameters as rising time, falling time and pulse-width. These parameters were analysed by an algorithm with a back propagation algorithm (BPA). By applying the algorithm, the identification rate was 97% for the needle-plane electrode, 96% for the plane-needle electrode, 91% for the free particle and 93% for the crack inside spacer. The results verified that the algorithm could identify the type of defects in GIS.

Design and Output Characteristic Analysis of Electro-Mechanical Ignition Safety Device (전기-기계식 점화안전장치 설계 및 출력 특성 해석)

  • Jang, Seung-Gyo;Lee, Hyo-Nam;Oh, Jong-Yun;Oh, Seok-Jin
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.39 no.12
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    • pp.1166-1173
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    • 2011
  • Electro-Mechanical Ignition Safety Device(EMISD) for solid rocket motor is designed and manufactured. The EMISD utilizes a true rotary solenoid for arming mechanism and an electric squib(initiator) for generating ignition energy. In order to prove the ignition capability of the EMISD, 10-cc Closed Bomb Test(CBT) is performed, which measures the pressure built by high temperature and high pressure gas generated by operating EMISD. The pressure built in the free volume of 10-cc closed bomb and the opening time of the ignition gas outlet are calculated using one dimensional gas dynamic model which is composed of the ideal gas equation and mass-energy conservation equation. Comparing the test result with model prediction, it is realized that the pressure built in the free volume of closed bomb due to the firing of EMISD, has the efficiency ratio of about 34%.