Orientation Characteristics of AIN Thin Film using RF Magnetron Sputtering wish Incident Angle (입사각을 가진 RF 마그네트론 스퍼터링법으로 증착한 AIN 박막의 배향 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2000.07a
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- pp.395-398
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- 2000