• Title, Summary, Keyword: fluxgate

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High Sensitivity Micro-fabricated Fluxgate Sensor with a Racetrack Shaped Magnetic Core

  • Choi, Won-Youl;Kim, So-Jung
    • Transactions on Electrical and Electronic Materials
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    • v.6 no.3
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    • pp.110-114
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    • 2005
  • We present a micro fluxgate magnetic sensor having solenoid coils and racetrack shaped magnetic core, which was designed to decrease the .operating power and magnetic flux leakage. Electroplated copper coils of $6\;{\mu}m$ thickness and the core of $3\;{\mu}m$ thickness were separated by benzocyclobutane (BCB) having a high insulation and good planarization characters. Permalloy $(Ni_{0.8}Fe_{0.2})$ as a magnetic core was also electroplated under 2000 gauss to induce the magnetic anisotropy. The core had the high DC effective permeability of $\~1,300$ and coercive field of $\~0.1$ Oe. The fabricated fluxgate sensor had the very small actual size of $3.0\times1.7\;mm^2$. The fluxgate sensor with a racetrack shaped core had the high sensitivity .of $\~350$ V/T at excitation condition of 3 $V_{P-P}$ and 2 MHz square wave. When two fluxgates were perpendicularly aligned in terrestrial field, their two-axis output signals were very useful to commercialize an electronic azimuth compass for the portable navigation system.

Development of Electronic Compass Using 2-Axis Micro Fluxgate Sensor (2축 마이크로 플럭스게이트 센서 제작을 통한 전자 나침반 개발)

  • 박해석;심동식;나경원;황준식;최상언
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.52 no.9
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    • pp.418-423
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    • 2003
  • This paper describes an electronic compass using micromachined X- and Y-axis micro fluxgate sensors which were perpendicularly aligned each other to measure X- and Y-axis magnetic fields respectively. The fluxgate sensor was composed of rectangular-ring shaped magnetic core and solenoid excitation(49 turns) and pick-up(46 turns) coils. Excitation and pick-up coil patterns which were formed opposite to each other wound the magnetic core alternatively to improve the sensitivity and to excite the magnetic core in an optimal condition with reduced excitation current. The magnetic core has DC effective permeability of ~1000 and coercive field of ~0.1 Oe. The magnetic core is easily saturated due to the low coercive field and closed magnetic path for the excitation field. To decrease the difference of induced second harmonic voltages from X- and Y-axis, excitation condition of 2.8 $V_{P-P}$ and 1.2 MHz square wave was selected. Excellent linear response over the range of -100 $\mu$T to +100 $\mu$T was obtained with 210 V/T sensitivity. The size of each micro fluxgate sensor excluding pad region was about 2.6${\times}$1.7 $mm^2$ and the power consumption was estimated to be 14 mW.W.

Optimization of Operation Frequency of Orthogonal Fluxgate Sensor Fabricated with Co Based Amorphous Wire

  • Kim, Young-Hak;Kim, Yongmin;Yang, Chang-Seob;Shin, Kwang-Ho
    • Journal of Magnetics
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    • v.18 no.2
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    • pp.159-162
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    • 2013
  • We present how to optimize the operation condition including frequency of the orthogonal fluxgate sensor in this paper. The orthogonal fluxgate sensor was fabricated with a Co-based amorphous wire with 10 mm long and 100 ${\mu}m$ in the diameter and a 270-turn pickup coil wound on the amorphous wire. In order to investigate the frequency dependence of the sensitivity, output spectra of the sensor which was connected by using a coaxial cable with various lengths of 0.5-5 m were measured with a RF lock-in amplifier. The maximum sensitivities were obtained at different frequencies according to coaxial cable lengths. It was found that the optimal operation frequencies, at which maximum sensitivities were appeared, were almost identical to the frequencies of impedance resonance. The maximum sensitivity and optimal operation frequency were 1.1 V/Oe (${\approx}$ 11000 V/T) and 1.25 MHz respectively.

Implementation of a Fluxgate Sensor using Ferrite Ring Core (페라이트 링 코어를 사용한 fluxgate 센서의 구현)

  • Park, Yong-Woo;Kim, Ki-Uk;Kim, Nam-Ho;Ryu, Ji-Goo
    • Journal of Sensor Science and Technology
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    • v.8 no.6
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    • pp.427-433
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    • 1999
  • In this paper, we have presented an one-axis fluxgate magnetic sensor with ferrite core, excitation, and pick-up coil. This magnetometer is consist of a sensing element, driving circuits for excitation coil and signal processing for detecting second harmonic frequency component which is proportional to the DC magnetic to be measured. The sensor core is excited by a square waveform of voltage through 82 turns of the excitation coil. The second harmonic output of pick-up coil(150 turns) is measured by a FFT spectrum analyzer. This result is compared to output of PSD(phase sensitive detector) unit for detecting a second harmonic component. The measured sensitivity is about 50 V/T at driving frequency of 2 kHz. The nonlinearity of fluxgate magnetic sensor is calculated about 2.0%.

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A Study on the Implementation of the 2-Dimension Magnetic Fluxgate Sensor (2차원 Magnetic Fluxgate센서의 구현에 관한 연구)

  • Park, Yong-Woo;Kim, Nam-Ho;Ryu, Ji-Goo
    • Journal of Sensor Science and Technology
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    • v.11 no.2
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    • pp.67-76
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    • 2002
  • We have presented a 2-dimensional fluxgate sensor with ferrite core, excitation, and pick-up coil. This fluxgate sensor system consists of a sensing element, driving circuits for excitation coil and signal processing for detecting second harmonic frequency component which is proportional to the DC magnetic to be measured. The sensor core is excited by a square waveform of voltage through the excitation coil of 80 turns. The second harmonic output of pick-up coil(x and y axis: 100 turns) is measured by FFT spectrum analyzer. This result is compared with output of PSD(phase sensitive detector) unit for detecting the second harmonic component. The measured maximum sensitivity is about 1580 V/T at driving frequency of 1.5 kHz and excitation current of 2 App. The nonlinearity of this system is measured about 2.3%(PSD) and about 1%(second harmonics of the pick-up). The angle error of the system is ${\pm}2$ %/FS.

The Performance of Micro Fluxgate Sensor with Magnetic Core Shape (자성체 코어 형상에 따른 마이크로 플럭스게이트 센서의 검출 특성)

  • 조중희;최원열
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.5
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    • pp.508-514
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    • 2004
  • A fluxgate magnetic sensor consists of a solenoid excitation coil, pick-up coil, and magnetic core. We presents the effect of magnetic core shape in a micromachined fluxgate sensor. To observe the performance of fluxgate sensor with magnetic core side width and gap, side width of 125 ${\mu}{\textrm}{m}$, 250 ${\mu}{\textrm}{m}$, and 500 ${\mu}{\textrm}{m}$ were designed in a rectangular-ring shaped core and the gaps of 0 ${\mu}{\textrm}{m}$, 50 ${\mu}{\textrm}{m}$, and 100 ${\mu}{\textrm}{m}$ were also fabricated in a racetrack shaped core. The solenoid coils and magnetic core were separated by benzocyclobutane(BCB) which had high insulation and good planarization characters. Copper coil patterns of 10 ${\mu}{\textrm}{m}$ width and 6${\mu}{\textrm}{m}$ thickness were electroplated on Ti(300 $\AA$) / Cu(1500 $\AA$) seed layers. 3 ${\mu}{\textrm}{m}$ thick N $i_{0.8}$F $e_{0.2.}$(permalloy) film for the magnetic core was also electroplated under 2000 gauss to induce the magnetic anisotropy. The magnetic core had the high DC effective permeability of ∼1,300 and coercive field of ∼0.1 Oe. Because the magnetic cores of 500 ${\mu}{\textrm}{m}$ side width and 0 gap had a low magnetic flux leakage, high sensitivity of ∼350 V/T were measured at excitation condition of 3 $V_{P-P}$ and 2 MHz square wave. The power consumption of ∼14 ㎽ was measured. The fabricated fluxgate sensor had the very small actual size of 3.0${\times}$1.7 $\textrm{mm}^2$. When two fluxgates were perpendicularly aligned in terrestrial field, their two-axis output signals were very useful to commercialize an electronic azimuth compass for the portable navigation system.m.m.m.

A MICRO FLUXGATE SENSOR IN PRINTED CIRCUIT BOARD (PCB) (인쇄회로 기판에 내장된 마이크로 플럭스게이트 센서)

  • 최원열;황준식;나경원;강명삼;최상언
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • pp.151-155
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    • 2002
  • This paper presents a micro fluxgate magnetic sensor in printed circuit board (PCB). The fluxgate sensor consists of five PCB stack layers including one layer magnetic core and four layers of excitation and pick-up coils. The center layer as a magnetic core is made of a micro patterned amorphous magnetic ribbon with extremely high DC permeability of ∼100,000 and the core has a rectangular-ring shape. The amorphous magnetic core is easily saturated due to the low coercive field and closed magnetic path for the excitation field. Four outer layers as an excitation and pick-up coils have a planar solenoid structure. The chip size of the fabricated sensing element is 7.3${\times}$5.7m㎡. Excellent linear response over the range of -100${\mu}$T to +100${\mu}$T is obtained with 540V/T sensitivity at excitation square wave of 3V$\_$P-P/ and 360kHz. The very low power consumption of ∼8mW was measured. This magnetic sensing element which measures the lower fields than 50${\mu}$T, is very useful for various applications such as: portable navigation systems, military research, medical research, and space research.

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Embedded Micro Fluxgate Sensor in Printed Circuit Board (PCB) (PCB 기판에 내장된 마이크로 플럭스게이트 센서)

  • 최원열;황준식;강명삼;최상언
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.15 no.8
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    • pp.702-707
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    • 2002
  • This paper presents a micro fluxgate sensor in printed circuit board (PCB). The fluxgate sensor consists of five PCB stack layers including one layer magnetic core and four layers of excitation and pick-up coils. The center layer as a magnetic core is made of a micro patterned amorphous magnetic ribbon and the core has a rectangular-ring shape. The amorphous magnetic core is easily saturated due to the low coercive field and closed magnetic path for the excitation field. Four outer layers as an excitation and pick-up coils have a planar solenoid structure. The chip size of the fabricated sensing element is 7.3$\times$5.7$\textrm{mm}^2$. Excellent linear response over the range of -100$\mu$T to +100$\mu$T is obtained with 540V/T sensitivity at excitation square wave of 3 $V_{p-p}$ and 360kHz. The very low power consumption of ~8mW was measured. This magnetic sensing element, which measures the lower fields than 50$\mu$T, is very useful for various applications such as: portable navigation systems, military research, medical research, and space research.h.

DESIGN OF A LOW-COST 2-AXES FLUXGATE MAGNETOMETER FOR SMALL SATELLITE APPLICATIONS

  • Kim, Su-Jeoung;Moon, Byoung-Young;Chang, Young-Keun;Oh, Hwa-Suk
    • Journal of Astronomy and Space Sciences
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    • v.22 no.1
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    • pp.35-46
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    • 2005
  • This paper addresses the design and analysis results of a 2-axes magnetometer for attitude determination of small satellite. A low-cost and efficient 2-axes fluxgate magnetometer was selected as the most suitable attitude sensor for LEO microsatellites which require a low-to-medium level pointing accuracy. An optimization trade-off study has been performed for the development of 2-axes fluxgate magnetometer. All the relevant parameters such as permeability, demagnetization factor, coil diameter, core thickness, and number of coil turns were considered for the sizing of a small satellite magnetometer. The magnetometer which is designed, manufactured, and tested in-house as described in this paper satisfies linearity requirement for determining attitude position of small satellites. On the basis of magnetometer which is designed in Space System Research Lab. (SSRL), commercial magnetometer will be developed.