• 한국생산제조학회지
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• 제9권3호
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• pp.9-17
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• 2000

The use of ceramic inserts in steel forging tools offers significant technical and economic advantages over other materi-als of manufacture. These potential benefits can however only be realised by optimal design of the tools so that the ceramic insert are not subjected to stresses that led to their premature failure. In this paper the data on loading of the tools is determined from a commercial forging simulation package as the contact stress distribution on the die-workpiece interface and as temperature distributions in the die. This data can be processed as load input data for a finite-element die-stress analysis. Process simulation and stress analysis are thus combined during the design and a data exchange program has been developed that enables optimal design of the dies taking into account the elastic detections generated in shrink fitting the die inserts and that caused by the stresses generated in the forging process. The stress analysis of the dies is used to determine the stress conditions on the ceramic insert by considering contact and interference effects under both mechanical and thermal loads. Simulation results have been validated as a result of experimental investigation. Laboratory tests on ceramic insert dies have verified the superior performance of the Zirconia and Silicon Nitride ceramic insert in order to prolong maintenance life.

• JSTS:Journal of Semiconductor Technology and Science
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• 제13권4호
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• pp.395-401
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• 2013

In-situ optical emission spectroscopy (OES) is employed for leak detection in plasma etching system. A misprocessing is reported for significantly reduced silicon etch rate with chlorine gas, and OES is used as a supplementary sensor to analyze the gas phase species that reside in the process chamber. Potential cause of misprocessing reaches to chamber O-ring wear out, MFC leaks, and/or leak at gas delivery line, and experiments are performed to funnel down the potential of the cause. While monitoring the plasma chemistry of the process chamber using OES, the emission trace for nitrogen species is observed at the chlorine gas supply. No trace of nitrogen species is found in other than chlorine gas supply, and we found that the amount of chlorine gas is slightly fluctuating. We successfully found the root cause of the reported misprocessing which may jeopardize the quality of thin film processing. Based on a quantitative analysis of the amount of nitrogen observed in the chamber, we conclude that the source of the leak is the fitting of the chlorine mass flow controller with the amount of around 2-5 sccm.

• 전자공학회논문지A
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• 제32A권3호
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• pp.68-77
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• 1995

Characteristics of electron cyclotron resonance (ECR) plasma thermal oxide grown at low-temperature have been investigated. The effects of several process parameters such as substrate temperature, microwave power, gas flow rate, and process pressure on the growth rate of the oxide have been also investigated. It was found that the plasma density, reactive ion species, is strongly related to the growth rate of ECR plasma oxied. It was also found that the plasma density increases with microwave power while it decreases with decreasing O2 flow rate. The oxidation time dependence of the oxide thichness showed parabolic characteristics. Considering ECR plasma thermal oxidation at low-temperature, the linear as well as parabolic rate constants calculated from fitting data by using the Deal-Grove model was very large in comparison with conventional thermal oxidation. The ECR plasma oxide grown on (100) crystalline-Si wafer exhibited good electrical characteristics which are comparable to those of thermal oxide: fixed oxide charge(N$_{ff}$)= 7${\times}10^{10}cm^{-2}$, interface state density(N$_{it}$)=4${\times}10^[10}cm^{-2}eV^{-1}$, and breakdown field > 8MV/cm.

• 산업공학
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• 제22권3호
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• pp.252-262
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• 2009

It is crucial to prevent low yields in the semiconductor industry. Since many factors affect variation in yield and they are deeply related, preventing low yield is difficult. There have been substantial researches in the field of yield prediction. Many researchers had used the statistical methods. Many studies have shown that artificial neural network (ANN) achieved better performance than traditional statistical methods. However, despite ANN's superior performance some problems such as over-fitting and poor explanatory power arise. In order to overcome these limitations, a relatively new machine learning technique, support vector machine (SVM), is introduced to classify the yield. SVM is simple enough to be analyzed mathematically, and it leads to high performances in practical applications. This study presents a new efficient classification methodology, Stepwise-SVM (SSVM), for detecting high and low yields. SSVM is step-by-step adjustment of parameters to be precisely the classification for actual high and low yield lot. The objective of this paper is to examine the feasibility of SVM and SSVM in the yield classification. The experimental results show that SVM and SSVM provides a promising alternative to yield classification for the field data.

• 기술경영경제학회:학술대회논문집
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• 기술경영경제학회 2004년도 제24회 동계학술대회 논문집
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• pp.222-245
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• 2004

This paper has an intention of proposing useful parametric tables of each industry group within Korea. These parametric tables can be insightful criteria for those who are dealing with the exact valuation of company, technology or industry through Real Option Analysis (ROA) since the identification of the movement of underlying asset is the very first step to be done. To give the exact estimations of parameters and the most preferred model in each industry group, we cover topics on ROA, stochastic process, and parametric estimation method like Generalized Method of Moments (GMM) and Maximum Likelihood Estimation (MLE). Additionally, specific industry groups, such as, Internet service group and mobile telecommunication service group defined independently in this paper are also examined in terms of its property of movement with the suggesting of the most fitting stochastic model.

• 소성∙가공
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• 제18권3호
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• pp.268-273
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• 2009

Ultraviolet nanoimprint lithography (UV-NIL), which is performed at a low pressure and at room temperature, is known as a low cost method for the fabrication of nano-scale patterns. In the patterning process, maintaining the uniformity of the residual layer is critical as the pattern transfer of features to the substrate must include the timed etch of the residual layer prior to the etching of the transfer layer. In pursuit of a thin and uniform residual layer thickness, the initial volume and the position of each droplet both need to be optimized. However, the monomer mixtures of resin had a tendency to evaporate. The evaporation rate depends on not only time, but also the initial volume of the monomer droplet. In order to decide the initial volume of each droplet, the accurate prediction of evaporation behavior is required. In this study, the theoretical model of the evaporation behavior of resin droplets was developed and compared with the available experimental data in the literature. It is confirmed that the evaporation rate of a droplet is not proportional to the area of its free surface, but to the length of its contact line. Finally, the parameter of the developed theoretical model was calculated by curve fitting to decide the initial volume of resin droplets.

• 디지털산업정보학회논문지
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• 제7권4호
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• pp.81-88
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• 2011

Mini Double Gears Frame is critical part of PDP and also produces couple hundred thousand every month. In the process of mass production, product inspection is very important process. Double Gear, one of the part of machine, was inspected by human eyes which caused mistakes and slow progress. To achieve the speed and accuracy the system was compensated by vision system which is inspecting automatically. The focus value is measured based on the fact that high contrast images have much high frequency edge information. High frequency term of the image is extracted using the high-pass filter and the sum of the high frequency term is used as the focus value. We used a Gaussian smoothing filter to reduce the noise and then measures the focus value using the modified Laplacian filter called a Sum modified Laplacian Focus values for the various lens positions are calculated and the position with the maximum focus value is decided as the focused position. The focus values calculated in various lens position showed the Gaussian distribution. We proposed a method to estimate the best focus position using the Gaussian curve fitting. Focus values of the uniform interval lens positions are calculated and the values are used to estimate the Gaussian distribution parameters to find the best focus position.

• 방사성폐기물학회지
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• 제16권1호
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• pp.65-82
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• 2018

With the significant increase in spent ion-exchange resin generation, to meet the requirements of Waste Acceptance Criteria (WAC) of the Wolsong disposal facility in Korea, blending is considered as a method for enhancing disposal options for intermediate level waste from nuclear reactors. A mass balance formula approach was used to enable blending process with an appropriate mixing ratio. As a result, it is estimated around 44.3% of high activity spent resins can be blended with the overall volume of low activity spent resins at a 1:7.18 conservative blending ratio. In contrast, the reduction of high activity spent resins is considered a positive solution in reducing the amount of spent resins stored. In an economic study, the blending process has been proven to lower the disposal cost by 10% compared to current APR1400 treatment. Prior to commencing use of this blending method in Korea, coordinated discussion, and safety and health assessment should be undertaken to investigate the feasibility of fitting this blending method to national policy as a means of waste predisposal processing and management in the future.

• 한국실내디자인학회논문집
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• 제39호
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• pp.62-71
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• 2003

This research alms to understand the residents' actual conditions and reasons for remodeling in order to search for the desirable participation design methods, under the assumption that the remodeling of apartments by their current residents is a problem. The subjects of this research are residents of mixed-used apartments supplied via the fitting form housing supply methods recently. The results are shown below. First, the reasons for remodeling by the current residents we expansion of Interior space and change in interior atmosphere. Positive participation of the residents in the design decision is high and this remodeling problem is easily solved. Second, based on the Habraken's SAR theory, supports units and variable units were separated and in each process rational and systematic design methodologies according to the role and responsibility of the residents were observed. Third, considering the great level of remodeling right before moving in, there is a need for the variable housing supply methods of residents to easily participate in the design, construction, and supply of the apartments. Through the participation of the residents In the apartment design process will not only solve the problem of repeated apartment remodeling, but also accommodate the various needs of the residents.

• International Journal of Aeronautical and Space Sciences
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• 제3권1호
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• pp.9-18
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• 2002

Thermal humidity characteristics were considered theoretically and experimentally. A Simply well-fitted correlation of a saturated vapor pressure-temperature curve of water was introduced based on Antoine equation to make theoretical prediction of relative humidity according to temperature variation. Characteristics of dew point were also examined theoretically and its relation with temperature and humidity was evaluated. The exact mass of water vapor in a specified humidity and temperature condition was estimated to provide useful insight into the idea about how much amount of water corresponds to a specified humidity and temperature condition in a confined system. A simple but well-fitting model of dehumidification process was introduced to anticipate the trend of relative humidity level during GN2(gaseous nitrogen) purge process in a humidity chamber. Well-suitedness of this model was also verified by comparison with experimental data. The overall appearance and specification of two thermal humidity chambers were introduced which were used to perform various thermal humidity tests in order to yield useful data necessary to support validity of theoretical models.