• Title/Summary/Keyword: finite-element modeling

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Fluid-Structure Interaction Modeling and Simulation of CMP Process for Semiconductor Manufacturing

  • Sung, In-Ha;Yang, Woo-Yul;Kwark, Ha-Slomi;Yeo, Chang-Dong
    • Transactions of the Society of Information Storage Systems
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    • v.7 no.2
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    • pp.60-64
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    • 2011
  • Chemical mechanical planarization is one of the core processes in fabrication of semiconductors, which are increasingly used for information storage devices like solid state drives. For higher data capacity in storage devices, CMP process is required to show ultimate precision and accuracy. In this work, 2-dimensional finite element models were developed to investigate the effects of the slurry particle impact on microscratch generation and the phenomena generated at pad-particle-wafer contact interface. The results revealed that no plastic deformation and corresponding material removal could be generated by simple impact of slurry particles under real CMP conditions. From the results of finite element simulations, it could be concluded that the pad-particle mixture formed in CMP process would be one of major factors leading to microscratch generation.

Finite Element Modeling and Parameter Measurements of Synchronous Reluctance Motor (자기저항 동기전동기의 유한요소 모델링 및 정수 측정)

  • Hong, J.P.;Hahn, S.C.;Joo, S.W.
    • Proceedings of the KIEE Conference
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    • 1998.07a
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    • pp.22-24
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    • 1998
  • The Synchronous reluctance motor is a sinewave ac motor and it has cylindrical surfaces on both sides of the air gap. The stator is a conventional polyphase ac stator, while the rotor has internal flux barriers shaped to maximize the ratio of d-axis to g-axis reactance. This paper presents the finite element analysis and parameter measurement of the synchronous reluctance motor(SRM). The model motor is a 3-phase SRM with the segmental rotor and its rating is 0.175kw. The torque characteristic is analysed by finite element method and compared with that from measurement.

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Modeling of transient temperature distribution in multilayer asphalt pavement

  • Teltayev, Bagdat B.;Aitbayev, Koblanbek
    • Geomechanics and Engineering
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    • v.8 no.2
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    • pp.133-152
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    • 2015
  • Mathematical model has been developed for determination of temperature field in multilayer pavement and subgrade, which considers transfer of heat by conduction and convection, receiving of heat from total solar radiation and atmosphere emission, output of heat due to the emission from the surface of pavement. The developed model has been realized by the finite element method for two dimensional problem using two dimensional second order finite element. Calculations for temperature field have been made with the programme realized on the standard mathematical package MATLAB. Accuracy of the developed model has been evaluated by comparison of temperatures, obtained theoretically and experimentally. The results of comparison showed high accuracy of the model. Long-term calculation (within three months) has been made in pavement points in accordance with the data of meteorological station for air temperature. Some regularities have been determined for variation of temperature field.

Analysis of Bulk Metal Forming Process by Reproducing Kernel Particle Method (재생커널입자법을 이용한 체적성형공정의 해석)

  • Han, Kyu-Taek
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.8 no.3
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    • pp.21-26
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    • 2009
  • The finite element analysis of metal forming processes often fails because of severe mesh distortion at large deformation. As the concept of meshless methods, only nodal point data are used for modeling and solving. As the main feature of these methods, the domain of the problem is represented by a set of nodes, and a finite element mesh is unnecessary. This computational methods reduces time-consuming model generation and refinement effort. It provides a higher rate of convergence than the conventional finite element methods. The displacement shape functions are constructed by the reproducing kernel approximation that satisfies consistency conditions. In this research, A meshless method approach based on the reproducing kernel particle method (RKPM) is applied with metal forming analysis. Numerical examples are analyzed to verify the performance of meshless method for metal forming analysis.

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Ρ-Version Finite Element Analysis for Material Nonlinearity (재료적 비선형을 고려한 Ρ-Version 유한요소해석)

  • 정우성;홍종현;우광성;신영식
    • Proceedings of the Computational Structural Engineering Institute Conference
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    • 1997.04a
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    • pp.71-78
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    • 1997
  • The high precision analysis by the p-version of the finite element method are fairly well established as highly efficient method for linear elastic problems, especially in the presence of stress singularity. It has been noted that the merits of p-version are accuracy, modeling simplicity, robustness, and savings in user's and CPU time. However, little has been done to exploit their benefits in elasto-plastic analysis. In this paper, the p-version finite element model is proposed for the materially nonlinear analysis that is based on the incremental theory of plasticity, the associated flow rule, and von-Mises yield criteria. To obtain the solution of nonlinear equation, the Newton-Raphson method and initial stiffness method, etc are used. Several numerical examples are tested with the help of the square plates with cutout, the thick-walled cylinder under internal pressure, and the center cracked plate under tensile loading. Those results are compared with the there cal solutions and the numerical solutions of ADINA software.

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Flexural Modeling of Strengthened Reinforced Concrete Beam with Nonlinear Layered Finite Element Method

  • Kim, Min-Kyung;Lee, Cha-Don
    • KCI Concrete Journal
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    • v.11 no.3
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    • pp.115-126
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    • 1999
  • An analytical method based on the nonlinear layered finite element method is developed to simulate an overall load-deflection behavior of strengthened beams. The developed model distinguishes itself by its capability to trace residual flexural behavior of a beam after the fracture of brittle strengthening materials at peak load. The model. which uses a rather advanced numerical technique for iterative convergence to equilibrium, can be regarded as superior to the two models based on load control and displacement control The model predictions were compared with the experimental results and it was observed that there was good agreement between them.

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Analysis of the Induction Heating for Moving Inductor Coil

  • Yun J.O.;Yang Young-Soo
    • Journal of Mechanical Science and Technology
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    • v.20 no.8
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    • pp.1217-1223
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    • 2006
  • Induction heating is a process that is accompanied with magnetic and thermal situation. This paper presents a simulation of a magneto-thermal coupled problem of an induction heating process for moving inductor coil. In the magnetic and thermal analyses, temperature-dependent magnetic and thermal material properties were considered. As the inductor coil moves in the process, solution domains corresponding to inductor changes into those of the air, and the solution domains of air change into those of the inductor. For these reasons, modeling of induction heating process is very difficult with general purpose commercial programs. In this paper, induction heating process for moving coil was simulated with the concept of traveling the position of the heating planes. Finite element program was developed and finite element results were compared with the experimental results.

Child Occupant Safety According to the ISOFIX Type of CRS (CRS의 부착방식에 따른 어린이 탑승자 안전도 비교)

  • 이재완;윤영한;박경진
    • Transactions of the Korean Society of Automotive Engineers
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    • v.11 no.4
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    • pp.86-93
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    • 2003
  • These days, automobile industry pays considerable attention to child occupant safety. As the US adopted requirements for universal and uniform anchor systems for child restraints, manufacturers for child seats put an enormous effort to improve the protective properties of Child Restraint System (CRS). Various standards have been studied and announced by different countries. The anchorage system is the most important in the CRS and the rules of universal anchor are to provide devices which are independent of safety belts. A new concept called International Standard Organization Fixture (ISOFIX) has been announced. It suggests some designs for the CRS. In this study, the suggested designs are evaluated with domestic products. Tests are performed and the results are incorporated into a finite element modeling process. As the finite element model is established, various numerical tests are conducted and the numerical results are discussed. A commercial software system is utilized for the nonlinear finite element analysis.

A study on Optimum Design of the Frame for Mechanical Press (기계식 프레스 Frame의 최적설계에 관한 연구)

  • Jo, Baek-Hui;Ryu, Byeong-Sun
    • 연구논문집
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    • s.22
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    • pp.65-74
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    • 1992
  • This paper aims at calculating optimum design dimensions to minimize the weight satisfied strain and stress intensity of the frame while loading maximum weight into a mechanical press in the static condition. Analysis of the frame was carried out by using the FEM, then the optimum condition was obtained by using these data. As modeling in the finite element analysis has great impact on the reliablity of analysis results, the analyzed object was selected a 150-ton mechanical press of J Company, the part little affected to structural rigidity was simplified, the load condition was considered in the only maximum load, the boundary condition was used by giving symmetric displacement due to symmetric boundary condition, the finite element was applied a linear membrane element. An intermediate processor program applied the normal ANSYS to analyze finite elements was developed, and the design sensitivity was calculated. This program was applied to the optimum design.

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Detection of Subsurface Defects in Metal Materials Using Infrared Thermography; Image Processing and Finite Element Modeling

  • Ranjit, Shrestha;Kim, Won Tae
    • Journal of the Korean Society for Nondestructive Testing
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    • v.34 no.2
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    • pp.128-134
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    • 2014
  • Infrared thermography is an emerging approach to non-contact, non-intrusive, and non-destructive inspection of various solid materials such as metals, composites, and semiconductors for industrial and research interests. In this study, data processing was applied to infrared thermography measurements to detect defects in metals that were widely used in industrial fields. When analyzing experimental data from infrared thermographic testing, raw images were often not appropriate. Thus, various data analysis methods were used at the pre-processing and processing levels in data processing programs for quantitative analysis of defect detection and characterization; these increased the infrared non-destructive testing capabilities since subtle defects signature became apparent. A 3D finite element simulation was performed to verify and analyze the data obtained from both the experiment and the image processing techniques.