• KSTLE International Journal
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• v.4 no.2
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• pp.66-72
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• 2003

This paper presents the hydrodynamic effect by the journal speed, eccentricity and source positions in order to overcome the defects of air bearing such as low stiffness and damping coefficient. Choosing the two row source position of air bearing is different from existing investigations in the side of pressure distribution of air film because of the high speed of journal and the wedge effects by the eccentricity. These optimal choices of the two row source positions enable us to improve the performance of the film reaction force and loading force as making the high-speed spindle. In this paper, The pressure behavior in theory of air film in high speed region of journal according to the eccentricity of journal and the source positions analyzed. The theoretical analysis has been identified by experiments. The results of investigated characteristics may be applied to precision devices like ultra-precision grinding machine and ultra high-speed milling.

• Tribology and Lubricants
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• v.17 no.6
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• pp.476-481
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• 2001

This paper has been presented the hydrodynamic effect by the journal speed, eccentricity and source positions in order to overcome the defects of air bearing such as low stiffness and damping coefficient. Choosing the two row source position of air bearing is different from existed investigations in the side of pressure distribution of air film because of the high speed of journal and the wedge effects by the eccentricity. These optimal chooses of the two row source positions enable us to improve the performance of the film reaction force and loading force as making the high speed spindle. In this paper, The pressure behavior in theory of air film according to the eccentricity of journal and the source positions analyzed. The theoretical analysis have been identified by experiments. The results of investigated characteristics may be applied to precision devices like ultra-precision grinding machine and ultra high speed milling.

• Tribology and Lubricants
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• v.17 no.5
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• pp.365-372
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• 2001

This paper has been presented the hydrodynamic effect by the journal speed, eccentricity and source positions in order to overcome the defects of air bearing such as low stiffness and damping coefficient. Choosing the two row source position of air bearing is different from existed investigations in the side of pressure distribution of air film because of the high speed of journal and the wedge effects by the eccentricity. These optimal chooses of the two row source positions enable us to improve the performance of the film reaction force and loading force as making the high speed spindle. In this paper, The pressure behavior in theory of air film according to the eccentricity of journal and the source positions analyzed. The results of investigated characteristics may be applied to precision devices like ultra-precision grinding machine and ultra high speed milling.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2001.06a
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• pp.231-235
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• 2001

This paper has been presented the dynamic effect by the journal speed. eccentricity and source positions in order to overcome the defects of air bearing such as low stiffness and damping coefficient. Choosing the two row source position of air bearing is different from previous investigations in the side of pressure distribution of air film by the wedge effects. These optimal chooses of the two row source positions enable us to improve the performance of the film reaction force and loading force as making the high speed spindle. The results of investigated characteristics may be applied to precision devices like ultra-precision grinding machine and ultra high speed milling.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.10a
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• pp.243-249
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• 2001

This paper has been presented the hydrodynamic effect by the journal speed, eccentricity and source positions in order to overcome the defects of air bearing such as low stiffness and damping coefficient. Choosing the two row source position of air bearing is different from existed investigations in the side of pressure distribution of air film because of the high speed of journal and the wedge effects by the eccentricity. These optimal chooses of the two row source positions enable us to improve the performance of the film reaction force and loading force as making the high speed spindle. In this paper, the pressure behavior in theory of air film according to the eccentricity of journal and the source positions analyzed. The theoretical analysis have been identified by experiments. The results of investigated characteristics may be applied to precision devices like ultra-precision grinding machine and ultra high speed milling.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.10
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• pp.747-751
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• 2010

In the study, the characteristics of the etched Zinc oxide (ZnO) thin films surface, the etch rate of ZnO thin film in $Cl_2/BCl_3/Ar$ plasma was investigated. The maximum ZnO etch rate of 53 nm/min was obtained for $Cl_2/BCl_3/Ar$=3:16:4 sccm gas mixture. According to the x-ray diffraction (XRD) and atomic force microscopy (AFM), the etched ZnO thin film was investigated to the chemical reaction of the ZnO surface in $Cl_2/BCl_3/Ar$ plasma. The field emission auger electron spectroscopy (FE-AES) analysis showed an elemental analysis from the etched surfaces. According to the etching time, the ZnO thin film of etched was obtained to The AES depth-profile analysis. We used to atomic force microscopy to determine the roughness of the surface. So, the root mean square of ZnO thin film was 17.02 in $Cl_2/BCl_3/Ar$ plasma. Based on these data, the ion-assisted chemical reaction was proposed as the main etch mechanism for the plasmas.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.9-14
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• 2001

A new model utilizing a transfer function is introduced in the present paper for analizing motion errors of hydrostatic tables. Relationship between film reaction force in a single hydrostatic pad and form error of a guide rail is derived at various spacial frequencies by finite element analysis, and it is expressed as a transfer function. This transfer function clarifies so called averaging effect of the oil film quantitively. For example, it is found that the amplitide of the film reaction force is reduced as the spacial frequency increases or relative width of the pocket is reduced. Motion errors of a multiple pad table is estimated from transfer function, geometric relationship between each pads and form errors of a guide rail, which is named as Transfer Function Method. Calculated motion errors by TFM show good agreement with motion errors calculated by Multi Pad Method, which is considered entire table as an analysis object. From the results, it is confirmed that the proposed TFM is very effective to analyze the motion errors of hydrostatic tables.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.395-395
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• 2012

We fabricate organic-inorganic hybrid thin film for the purpose of encapsulation by molecular layer deposition (MLD) using Trimethylaluminium (TMA) and Adipoyl Chloride (AC). Ellipsometry was employed to verify self limiting reaction of ALD. Linear relationship between number of cycle and thickness was obtained. We found that desirable organic thin film fabrication is possible by MLD surface reaction in nanoscale. Purging was carried out after dosing of each precursor to form monolayer in each sequence. We also confirmed roughness of the organic thin film by atomic force microscopy. We deposit TMA and AC at $70^{\circ}C$ and that 1.78A root mean square was obtained which indicates that uniform organic thin film was formed. We confirmed precursor's functional group by IR spectrum. We calculated WVTR of organic-inorganic hybrid super-lattice epitaxial layer using Ca test. WVTR indicates superlattice film can be possibly use as encapsulation in flexible devices.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.274-274
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• 2013

We fabricate encapsulation-layer of OLED panel from organic-inorganic hybrid thin film by atomic layer deposition (ALD) molecular layer deposition (MLD) using Al2O3 as ALD process and Adipoyl Chloride (AC) and 1,4-Butanediamine as MLD process. Ellipsometry was employed to verify self-limiting reaction of MLD. Linear relationship between number of cycle and thickness was obtained. By such investigation, we found that desirable organic thin film fabrication is possible by MLD surface reaction in monolayer scale. Purging was carried out after dosing of each precursor to eliminate physically adsorbed precursor with surface. We also confirmed roughness of the organic thin film by atomic force microscopy (AFM). We deposit AC and 1,4-Butanediamine at $70^{\circ}C$ and investigated surface roughness as a function of increasing thickness of organic thin film. We confirmed precursor's functional group by IR spectrum. We calculated WVTR of organic-inorganic hybrid super-lattice epitaxial layer using Ca test. WVTR indicates super-lattice film can be possibly use as encapsulation in flexible devices.

• Tribology and Lubricants
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• v.17 no.6
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• pp.426-434
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• 2001

The hermetic reciprocating compressor driven by the BLDC motor rotating with variable speeds, is modelled and analyzed for dynamic characteristics. The governing equations of piston, connecting rod and crank-shaft of the reciprocating compression mechanism and characteristics of driving torque of the motor are obtained. Dynamic behavior of the crankshaft supported on 2 journal bearings is analyzed considering compression load and eccentric unbalance for the 4 rotating speeds of crankshaft. And. reaction forces generated from oil film in the journal bearings are analyzed under transient condition using Reynolds' equation. To take into account the dynamic characteristics depending on the variable rotating speeds, comparison on the dynamic behavior of crank-shaft is made for the 4 operating modes of the compressor. Results show that the magnitude of crankshaft locioperating on the lower rotating speeds is more larger than the higher ones due to reduction of inertia force of the reciprocating piston.