• 한국표면공학회지
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• 제50권5호
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• pp.345-351
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• 2017

A double-layered anti-reflective coating with hydrophilic/abrasion-resistant properties was studied using anatase titanium dioxide($TiO_2$) and silicon oxycarbide($SiO_xC_y$) thin film. $TiO_2$ and $SiO_xC_y$ thin films were sequentially deposited on a glass substrate by DC sputtering and PECVD, respectively. The optical properties were measured by UV-Vis-NIR spectrophotometer. The abrasion-resistance and the hydrophilicity were observed by a taber abrasion tester and a contact angle analyzer, respectively. The $TiO_2/SiO_xC_y$ double-layer thin film had an average transmittance of 91.3%, which was improved by 10% in the visible light region (400 to 800 nm) than that of the $TiO_2$ single-layer thin film. The contact angle of $TiO_2/SiO_xC_y$ film was $6.9^{\circ}$ right after UV exposure. After 9 days from the exposure, the contact angle was $10.2^{\circ}$, which was $33^{\circ}$ lower than that of the $TiO_2$ single-layer film. By the abrasion test, $SiO_xC_y$ film showed a superior abrasion-resistance to the $TiO_2$ film. Consequently, the $TiO_2/SiO_xC_y$ double-layer film has achieved superior anti-reflection, hydrophilicity, and abrasion resistance over the $TiO_2$ or $SiO_xC_y$ single-layer film.

• 한국재료학회지
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• 제8권11호
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• pp.1048-1054
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• 1998

Pt 상부 전극 증착온도가 Pb(Zr,Ti)$O_3$(PZT) 박막의 전기적 특성에 미치는 영향에 대하여 연구하였다. Pt 상부 전극을 $200^{\circ}C$이상의 고온에서 증착하는 경우, Pt 전극의 하부에 위치한 PZT 박막은 강유전 특성이 심하게 저하되었으나, Pt 전극이 증착되지 않았던 부분은 강유전 특성이 저하되지 않았다. 이와 같은 현상이 발생된 것은 진공 chamber 내의 수증기가 Pt 상부전극의 촉매 작용에 의해 수소 원자로 분해되고, 이 분해된 수소 원자가 고온에서 Pt 하부의 PZT 박막 내로 확산해 들어가 PZT박막에 산소 공공을 만들어 내기 때문이다. Pt의 촉매 작용이 없이는 수증기의 수소 원자로의 분해가 어려우므로 Pt 전극이 덮여져 있지 않는 PZT 박막은 강유전 특성이 저하되지 않는다. 이러한 강유전 특성의 저하는 산소 분위기의 RTA(rapid thermal annealing)처리에 의해 회복이 되었다. 한편, 누설전류 특성은 Pt 상부 전극의 증착온도가 증가함에 따라 향상되는 특성을 보였다.

• 비파괴검사학회지
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• 제36권3호
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• pp.188-194
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• 2016

본 연구에서는 Pt/Ti 박막과 기판 사이 계면의 접합특성을 비파괴적으로 평가하는 acousto-optic 기법을 제안한다. 현재 상용화된 기술만으로 마이크로/나노 스케일의 박막을 평가하는데 많은 어려움이 있기 때문에 미세구조 변화에 민감한 광학기술과 음향기술이 결합된 간섭계를 적용하여 연구를 수행하였다. 사용한 기법은 마이켈슨 간섭계를 기반으로 하며, 거울에 의한 광 경로차 대신 박막시험편 계면의 진동 영향에 따라 발생하는 간섭현상을 분석하였다. 박막시험편은 특정 주파수에서 공진과 유사한 현상을 보이고 이로 인해 프린지 패턴의 콘트라스트가 낮아지므로, 각 주파수 대역별 프린지 패턴 변화를 스펙트럼 결과로 정량화하여 제안된 기법을 이용한 박막의 접합특성 평가 가능성을 확인하였다.

• 열처리공학회지
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• 제31권4호
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• pp.187-193
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• 2018

In this study, the electrical conductivity, transmittance and gas barrier properties of diamond-like carbon (DLC) thin films were studied. DLC is an insulator, and has transmittance and oxygen gas barrier properties varying depending on the thickness of the thin film. Recently, many researchers have been trying to apply DLC properties to specific industrial conditions. The DLC thin films were deposited by PECVD (Plasma Enhanced Chemical Vapor Deposition) process. The doping gas was used for the DLC film to have electrical conductivity, and the optimum conditions of transmittance and gas barrier properties were established by adjusting the gas ratio and DLC thickness. In order to improve the electrical conductivity of the DLC thin film, $N_2$ doping gas was used for $CH_4$ or $C_2H_2$ gas. Then, a heat treatment process was performed for 30 minutes in a box furnace set at $200^{\circ}C$. The lowest sheet resistance value of the DLC film was found to be $18.11k{\Omega}/cm^2$. On the other hand, the maximum transmittance of the DLC film deposited on the PET substrate was 98.8%, and the minimum oxygen transmission rate (OTR) of the DLC film of $C_2H_2$ gas was 0.83.

• 한국염색가공학회지
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• 제33권2호
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• pp.72-78
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• 2021

The purpose of this study, the purpose of this study is to activate the antibacterial effect on the Chlorinated polyvinyl chloride film by using Octadecyldimethyl (3-triethoxy silylpropyl) ammonium chloride antibacterial agent with Chlorinated polyvinyl chloride polymer, which is inexpensive and has excellent properties such as heat resistance and chemical resistance. The Chlorinated polyvinyl chloride polymer was dissolved in a dimethylacetamide solvent, and film samples were prepared by varying the ratio of Octadecyldimethyl (3-triethoxy silylpropyl) ammonium chloride to study the antibacterial performance. A Scanning Electron Microscope-Energy Dispersive X-ray Spectrometer and X-ray photoelectron spectroscopy were employed to confirm the elements in the samples. According to the initial decomposition temperature of the Chlorinated polyvinyl chloride film and the Chlorinated polyvinyl chloride/Octadecyldimet hyl (3-triethoxy silylpropyl) ammonium chloride(10%) film using a Thermogravimetric analyzer(TA-DTA), it was confirmed that the initial decomposition temperature was lowered due to the influence of Octadecyldimethyl (3-triethoxy silylpropyl) ammonium chloride. In addition, in order to measure the mechanical properties, Universal testing machine was used and the result showed that a strength of Chlorinated polyvinyl chloride/Octadecyldimethyl (3-triethoxy silylpropyl) ammonium chloride(10%) was 36.8 MPa. The antimicrobial properties of the Chlorinated polyvinyl chloride/Octadecyldimethyl (3-triethoxy silylpropyl) ammonium chloride(10%) film showed 99.9% antimicrobial properties.

• 한국염색가공학회지
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• 제34권1호
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• pp.68-75
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• 2022

The breathable film refers to a high-functional film that allows gas and water vapor to pass through very fine and sophisticated pores but not liquid. In this research, the breathable film was prepared based on linear low-density polyethylene (LLDPE) and CaCO₃ particles by extrude method. The LLDPE composite film containing CaCO₃ particles had excellent mechanical properties and functionalties. The drawing is a technologically simple and excellent method for improving the mechanical properties of composite films. In this work, the effects of draw ratio on morphology, crystallinity, pore size distribution, mechanical properties, and water vapor permeability of the films were examined. The results revealed that both surface morphology and breathability were affected by the influence of chain orientation and crystal growth with increasing the draw ratio. The mechanical properties were improved with increasing the draw ratio.

• Transactions on Electrical and Electronic Materials
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• 제16권2호
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• pp.95-98
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• 2015

Organic polymer dielectric thin films of styrene and vinyl acetate were prepared by the plasma polymerization deposition technique and applied for the fabrication of an organic thin film transistor device. The structural properties of the plasma polymerized thin films were characterized by Fourier-transform infrared spectroscopy, X-ray diffraction, atomic force microscopy, and contact angle measurement. Investigation of the electrical properties of the plasma polymerized thin films was carried out by capacitance-voltage and current-voltage measurements. The organic thin film transistor device with gate dielectric of the plasma polymerized thin film revealed a low operation voltage of −10V and a low threshold voltage of −3V. It was confirmed that plasma polymerized thin films of styrene and vinyl acetate could be applied to functional organic thin film transistor devices as the gate dielectric.

• 한국재료학회지
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• 제13권3호
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• pp.150-154
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• 2003

Amorphous carbon nitride films were deposited on Si(001) substrates by a plasma enhanced chemical vapor deposition technique (PECVD) using $CH_4$and $N_2$as reaction gases. The growth and film properties were investigated while the gas ratio and the working pressure were changed systematically. At 1 Torr working pressure, an increase in the $N_2$partial pressure results in a significant increase of the deposition rate as well as an apparent presence of C ≡N bonding, while little affecting the microstructure and amorphus nature of the films. In the case of changing the working pressure at a fixed $N_2$partial pressure of 98%, a film grown at a medium pressure of $1${\times}$10^{-2}$ Torr shows the most prominent C=N bonding nature and photoluminescent property.

• 한국진공학회지
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• 제4권S1호
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• pp.113-117
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• 1995

MOCVD of Cu films were carried out on gold-TiN(1000$\AA$)/Ti/Si wafers from hexafluoroacetylacetonate-Cu(l) vinyltrimethylsilane, Cu(l)(hafac)(vtms), in a small cold-wall type reactor. Effects of the substrate and bubbler temperatures on the film growth rate were studied, and a film with $\rho$=1.8$\pm$0.1$\mu$$\Omega$.cm could be deposited 150nm/min at Ts=200 and Tb=$30^{\circ}C$, respectively. The initial stage of the film formation was also investigated by in-situ laser reflectivity monitoring combined with SEM observations, based on which variations in the film properties depending on the growth conditions were discussed in terms of the nucleation rate and grain size.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.177-179
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• 2011

The purpose of this study is to enhance an adhesion between substrate and Diamond-like Carbon (DLC) film. DLC has many outstanding properties such as low friction, high wear resistance and corrosion resistance. However, it is difficult to achieve enough adhesion because of weak bonding between DLC film and the substrate. For improvement adhesion, a layer between DLC film and the substrate was prepared by dual post plasma. DLC film was deposited on nitrided layer by linear ion source. The composed compound layer between substrate and DLC film was investigated by Glow Discharge Spectrometer (GDS) and Scanning Electron Microscope (SEM). The synthesized bonding structure of DLC film was analyzed using a micro raman spectrometer. Mechanical properties were measured by nano-indentation. In order to clarify the mechanism for improvement in adhesive strength, it was observed by scratch test.