• Title/Summary/Keyword: film heater

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Tunable bragg filter of $Si_3N_4-SiO_2$ waveguide using thermooptic effect (열광학 효과를 이용한 $Si_3N_4-SiO_2$ 도파로 가변 브래그필터)

  • 이형종;정환재
    • Korean Journal of Optics and Photonics
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    • v.3 no.4
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    • pp.244-251
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    • 1992
  • Buried Bragg filters of single mode $Si_{3}N_{4}$ rib waveguide with a cover layer of $SiO_{2}$ and grating at the interface of $Si_{3}N_{4}$ and $SiO_{2}$ are designed and fabricated. Etching of the grating on $Si_{3}N_{4}$ waveguide core by buffered HF showed uniform etching with good control up to 1 nm. This buried type of Bragg filters are immune to contamination of the surface of device. The mode index and bandwidth of filters are determined by measurements of the transmission spectrum of Bragg filters and compared with that of calculation. Waveguide Bragg filters loaded with the micro-heater of Cr film and the cladding of silicone rubber are made to control the Brag wavelength of the filter. As a result the filter wavelength of the device moved by 0.41 nm for 10 mA current to the shorter side of wavelength proportional to the square of the current.

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A thermal properties of micro hot plate and the characteristics of Pt/Cr bilayers due to annealing temperature (미세 발열체의 발열특성과 열처리 온도에 따른 Pt/Cr 이중층의 특성)

  • Yi, Seung-Hwan;Suh, Im-Choon;Sung, Yong-Kwon
    • Journal of Sensor Science and Technology
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    • v.5 no.5
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    • pp.69-77
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    • 1996
  • In this paper, we fabricated the micro hotplate which consisted of a thin film heater(Pt/Cr bilayers) sandwiched with the thermal oxide and E-beam evaporated oxide. And we studied the electrical and the structural properties of Pt/Cr bilayers due to annealing temperature. When we compared the temperature measured from type k thermocouples with the temperature acquired from I.R. thermo-vision system according to the variations of emissivity, the emissivity of I-beam evaporated oxide was 0.5. The sheet resistance of Pt/Cr bilayers didn't depend on the Cr layer thickness, and it was considered as the existence of CrO between the Pt and the Cr layer. When the annealing temperature was increased from $500^{\circ}C$ to $700^{\circ}C$, the out-diffusions of Cr were increased(which was confirmed by AES depth profile) and the grain size of Pt(220) phase was enlarged also(analyzed by XRD and SEM photographs). From the results of XRD analysis and AES depth profile, the Pt/Cr bilayers annealed at $500^{\circ}C$ were more stable than any other cases in structural properties.

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Experimental Analysis of Bubble Dynamics Induced by Pulsed-Laser Heating of Absorbing Liquid (흡광 액체의 펄스 레이저 가열에 의해 생성된 기포 거동의 실험적 해석)

  • Jang Deok-Suk;Hong Jong-Gan;Choa Sung-Hoon;Kim Dong-Sik
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.30 no.5 s.248
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    • pp.413-421
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    • 2006
  • The bubble dynamics induced by direct laser heating is experimentally analyzed as a first step to assess the technical feasibility of laser-based ink-jet technology. To understand the interaction between laser light and ink, the absorption spectrum is measured for various ink colors and concentrations. The hydrodynamics of laser-generated bubbles is examined by the laser-flash photography. When an Ar ion laser pulse (wavelength 488 nm) with an output power up to 600 mW is incident on the ink solution through a transparent window, a hemispherical bubble with a diameter up to ${\sim}100{\mu}m$ can be formed with a lifetime in a few tens of microsecond depending on the laser power and the focal-spot size. Parametric study has been performed to reveal the effect of laser pulse width, output power, ink concentration, and color on the bubble dynamics. The results show that the bubble generated by a laser pulse is largely similar to that produced by a thin-film heater. Consequently, the present work demonstrates the feasibility of developing a laser-actuated droplet generation mechanism for applications in ink-jet print heads. Furthermore, the results of this work indicate that the droplet generation frequency is likely to be further increased by optimizing the process parameters.

Optical Property of Super-RENS Optical Recording Ge2Sb2Te5 Thin Films at High Temperature (초해상 광기록 Ge2Sb2Te5 박막의 고온광물성 연구)

  • Li, Xue-Zhe;Choi, Joong-Kyu;Lee, Jae-Heun;Byun, Young-Sup;Ryu, Jang-Wi;Kim, Sang-Youl;Kim, Soo-Kyung
    • Korean Journal of Optics and Photonics
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    • v.18 no.5
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    • pp.351-361
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    • 2007
  • The samples composed of a GST thin film and the protective layers of $ZnS-SiO_2$ or $Al_2O_3$ coated on c-Si substrate were prepared by using the magnetron sputtering method. Samples of three different structures were prepared, that is, i) the GST single film on c-Si substrate, ii) the GST film sandwiched by the protective $ZnS-SiO_2$ layers on c-Si substrate, and iii) the GST film sandwiched by $Al_2O_3$ protective layers on c-Si substrate. The ellipsometric constants in the temperature range from room temperature to $700^{\circ}C$ were obtained by using the in-situ ellipsometer equipped with a conventional heating chamber. The measured ellipsometric constants show strong variations versus temperature. The variation of ellipsometric constants at the temperature region higher than $300^{\circ}C$ shows different behaviors as the ambient medium is changed from in air to in vacuum or the protective layers are changed from $ZnS-SiO_2$ to $Al_2O_3$. Since the long heating time of 1-2 hours is believed to be the origin of the high temperature variation of ellipsometric constants upon the heating environment and the protective layers, a PRAM (Phase-Change Random Access Memory) recorder is introduced to reduce the heating time drastically. By using the PRAM recorder, the GST samples are heated up to $700^{\circ}C$ decomposed preventing its partial evaporation or chemical reactions with adjacent protective layers. The surface image obtained by SEM and the surface micro-roughness verified by AFM also confirmed that samples prepared by the PRAM recorder have smoother surface than the samples prepared by using the conventional heater.

투명 면상 발열체 응용을 위한 하이브리드 스퍼터 ITO / Ag / ITO 박막의 물성평가

  • Kim, Jae-Yeon;Park, So-Yun;Song, Pung-Geun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.252-252
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    • 2016
  • 최근 학계나 산업계에서 indium tin oxide (ITO)의 높은 전기 전도도 및 광투과율을 이용하여 줄 발열을 기초로 하는 투명 면상 발열체에 대한 연구가 활발히 진행 되고 있다. 하지만 단일 ITO 박막으로 제작한 투명 면상 발열체는 온도가 상승함에 따라 균일하게 발열 되지 않으며, 글라스의 곡면 부분에서 유연성이 부족하여 크랙이 발생하는 다양한 문제점들을 가지고 있다. 이를 해결하기 위해 ITO의 결정화 온도 $160^{\circ}C$ 이상의 고온공정 또는 증착 후 열처리가 필요 하는 추가적인 공정이 필요하다. 따라서 본 연구에서는 단일 ITO 박막의 단점을 개선하는 ITO/Ag/ITO 하이브리드 구조의 투명 면상 발열체를 제작하여 전기적, 광학적 특성을 비교하고 발열량, 온도 균일성, 발열 유지 안정도를 조사하였다. 본 연구에서는 $50{\times}50mm$ 크기의 non-alkali glass (Corning E-2000) 기판 상에 마그네트론 스퍼터링 공정으로 상온에서 ITO/Ag/ITO 박막을 연속적으로 증착 하여 다층구조의 하이브리드 형 투명 면상 발열체를 제조하였다. 박막 증착 파워는 DC (Ag) power 100 W, RF (ITO) power 200 W로 하였으며 ITO박막두께는 40 nm로 고정 시키고 Ag박막 두께는 10 ~ 20 nm로 변화를 주었다. 증착원은 3인치 ITO 단일 타깃(SnO2, 10 wt.%)과 Ag 금속 타깃 (순도 99.99%)을 사용하였으며, 고순도 Ar을 이용하여 방전하였으며 총 주입량은 20 sccm, working pressure는 1.0 Pa을 유지하였다. 증착전 타깃 표면의 불순물 제거와 방전의 안정성을 유지하기 위해 10분간 pre-sputtering을 진행하고 증착하였다. 증착한 박막의 전기적, 광학적 특성은 각각 Hall-effect measurements system (ECOPIA, HMS3000), UV-Vis spectrophotometer (UV-1800, SHIMADZU)으로 측정하였으며, 하이브리드 표면의 구조 및 형상은 field emission-scanning electron microscopy (FE-SEM, Hitachi S-4800)으로 관찰하였다. 또한 투명 면상 발열체의 성능은 0.5 ~ 3 V/cm의 다양한 전압을 power supply (Keithly 2400, USA)를 통해서 시편 양 끝단에 인가한 후 시간에 따른 투명면상 발열체의 표면 온도변화를 infrared thermal imager (IR camera, Nikon)를 이용하여 관찰하였다. 하이브리드 구조를 가진 ITO박막의 두께는 40 nm로 고정 시키고 Ag박막의 두께는 10, 15, 20 nm로 변화를 주었다. 이들 박막의 면저항 값은 각각 5.3, 3.2, $2.1{\Omega}/{\Box}$였으며, 투과도는 각각 86.9, 81.7, 66.5 %였다. 이에 비해 두께 95 nm의 단일 ITO박막의 면저항 값은 $59.5{\Omega}/{\Box}$였으며, 투과도는 89.1 %였다. 하이브리드 구조의 전기적특성은 금속층의 두께가 증가할수록 캐리어 농도 값이 증가함에 따라 비저항 값이 감소되어 면저항 값도 감소된 것이며, 금속 삽입층의 전도특성이 비저항에 큰 영향을 주고 있음을 보여준다. 하지만 금속 층의 두께가 증가할수록 Ag층이 연속적인 막을 형성하여 반사율이 증가함에 따라 투과도가 감소하였다. 따라서 하이브리드 구조를 가진 투명 면상 발열체에 금속 삽입층의 두께 조절은 매우 중요한 인자임을 확인 할 수 있었다. 또한 발열성능을 평가 하기 위해 시편 양 끝단에 3 V전압을 인가한 결과, 금속 삽입층의 두께가 10 nm에서 5 nm씩 증가한 하이브리드 구조를 가진 투명면상 발열체의 최고 온도는 각각 98, 150, $167^{\circ}C$ 였으며, 단일 ITO의 최고 온도는 $32^{\circ}C$였다. 이 것은 동일한 두께 (95 nm)의 단일 ITO 박막과 비교하여 면저항이 낮은 하이브리드 박막의 발열량은 약 $120^{\circ}C$로 발열효율이 매우 우수한 것을 확인 할 수 있었다.

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Electrically Controllable Asymmetric Split-Loop Terahertz Resonator with Outer Square Loop (전기적 제어 가능한 외곽 사각 고리 추가형 테라헤르츠 비대칭 분리고리공진기)

  • Park, Dae-Jun;Ryu, Han-Cheol
    • Korean Journal of Optics and Photonics
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    • v.28 no.2
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    • pp.59-67
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    • 2017
  • This paper proposes an asymmetric split-loop resonator with an outer square loop (ASLR-OSL), which can actively control terahertz wave transmission properties while maintaining a high-Q-factor of the asymmetric split-loop resonator (ASLR). An added outer square loop is designed to play the roles of both a metamaterial and a micro-heater, which can control the temperature through a directly applied bias voltage. A vanadium dioxide ($VO_2$) thin film, which exhibits an insulator-metal phase transition with temperature change, is used to control the transmission properties. The proposed ASLR-OSL shows transmission properties similar to those of the ASLR, and they can be successfully controlled by directly applying bias voltage to the outer square loop. Based on these results, an electrically controllable terahertz high-Q metamaterial could be achieved simply by adding a square loop to the outside of a well-known high-Q metamaterial.

Processing of Water Activity Controlled Fish Meat Paste by Dielectric Heating 2. Storage Stability of the Product (내부가열을 이용한 보장성어육(고등어) 연제품의 가공 및 제품개발에 관한 연구 2. 제품저장중의 품질변화)

  • LEE Kang-Ho;LEE Byeong-Ho;You Byeong-Jin;SUH Jae-Soo;JO Jin-Ho;JEONG In-Hak;JEA Yoi-Guan
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.17 no.5
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    • pp.361-367
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    • 1984
  • In previous paper(Lee et al., 1984), preparation formula and processing conditions of the fish meat (mackerel) paste using dielectric heating were described, that included the proper shape and size of product and the conditions of dielectric heating, hot air dehydration, and heating with electric heater to yield the minimum expansion and case hardening during heating and to controll the final rater activity of 0.86 to 0.83 accompanying with a complete reduction of viable cells and good texture. In present study, changes in VBN, pH, total plate count, water activity, texture, the loss of available lysine, color indexes, TBA value, and the content of TI were determined to assess the quality stability and shelf-life of the product during the storage for 35 days at $5^{\circ}C\;and\;25^{\circ}C$, respectively. And the effect of vacuum sealing and hot water treatment before storage on the storage stability of product was also mentioned. As the product was vacuum packed in K-flex film bag, heat treated in boiling water for 6 minutes, and stored, water activity was maintained 0.86 to 0.84 for 35 days regardless of storage temperature, and the increase of total plate count was negligible in case of $5^{\circ}C$ storage while tended to gain slightly after 25 days at $25^{\circ}C$ storage. Changes in VBN was also minimum with an increase of 1.5 mg/100g at $5^{\circ}C$ and 7.0mg/100g at $25^{\circ}C$, but in case of unpacked sample, it was 24.5mg/100g at $5^{\circ}C$ and 42.4 mg/100g at $25^{\circ}C$ even after 7 days. In textural property hardness tended to increase after 28 days and folding test score was down to A or B from AA grade. The loss of available lysine was $7.5\%\;at\;5^{\circ}C$ and $17.0\%\;at\;25^{\circ}C$ but brown color was not deeply developed as the color index score indicated. TBA value was not increased at $5^{\circ}C$ while it tended to increase rapidly after 30 days at $25^{\circ}C$. Changes in TI content was not obvious except that it showed a tendency of increase at the end of storage as well as in the change of lysine and TBA value. It is concluded from the results that the quality of the product, pasteurized and water activity controlled by dielectric heating, and vacuum packed in K-flex film would be stable for more than 35 days at $5^{\circ}C$ and at least 25 days even at room temperature.

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Integrated Rotary Genetic Analysis Microsystem for Influenza A Virus Detection

  • Jung, Jae Hwan;Park, Byung Hyun;Choi, Seok Jin;Seo, Tae Seok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.88-89
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    • 2013
  • A variety of influenza A viruses from animal hosts are continuously prevalent throughout the world which cause human epidemics resulting millions of human infections and enormous industrial and economic damages. Thus, early diagnosis of such pathogen is of paramount importance for biomedical examination and public healthcare screening. To approach this issue, here we propose a fully integrated Rotary genetic analysis system, called Rotary Genetic Analyzer, for on-site detection of influenza A viruses with high speed. The Rotary Genetic Analyzer is made up of four parts including a disposable microchip, a servo motor for precise and high rate spinning of the chip, thermal blocks for temperature control, and a miniaturized optical fluorescence detector as shown Fig. 1. A thermal block made from duralumin is integrated with a film heater at the bottom and a resistance temperature detector (RTD) in the middle. For the efficient performance of RT-PCR, three thermal blocks are placed on the Rotary stage and the temperature of each block is corresponded to the thermal cycling, namely $95^{\circ}C$ (denature), $58^{\circ}C$ (annealing), and $72^{\circ}C$ (extension). Rotary RT-PCR was performed to amplify the target gene which was monitored by an optical fluorescent detector above the extension block. A disposable microdevice (10 cm diameter) consists of a solid-phase extraction based sample pretreatment unit, bead chamber, and 4 ${\mu}L$ of the PCR chamber as shown Fig. 2. The microchip is fabricated using a patterned polycarbonate (PC) sheet with 1 mm thickness and a PC film with 130 ${\mu}m$ thickness, which layers are thermally bonded at $138^{\circ}C$ using acetone vapour. Silicatreated microglass beads with 150~212 ${\mu}L$ diameter are introduced into the sample pretreatment chambers and held in place by weir structure for construction of solid-phase extraction system. Fig. 3 shows strobed images of sequential loading of three samples. Three samples were loaded into the reservoir simultaneously (Fig. 3A), then the influenza A H3N2 viral RNA sample was loaded at 5000 RPM for 10 sec (Fig. 3B). Washing buffer was followed at 5000 RPM for 5 min (Fig. 3C), and angular frequency was decreased to 100 RPM for siphon priming of PCR cocktail to the channel as shown in Figure 3D. Finally the PCR cocktail was loaded to the bead chamber at 2000 RPM for 10 sec, and then RPM was increased up to 5000 RPM for 1 min to obtain the as much as PCR cocktail containing the RNA template (Fig. 3E). In this system, the wastes from RNA samples and washing buffer were transported to the waste chamber, which is fully filled to the chamber with precise optimization. Then, the PCR cocktail was able to transport to the PCR chamber. Fig. 3F shows the final image of the sample pretreatment. PCR cocktail containing RNA template is successfully isolated from waste. To detect the influenza A H3N2 virus, the purified RNA with PCR cocktail in the PCR chamber was amplified by using performed the RNA capture on the proposed microdevice. The fluorescence images were described in Figure 4A at the 0, 40 cycles. The fluorescence signal (40 cycle) was drastically increased confirming the influenza A H3N2 virus. The real-time profiles were successfully obtained using the optical fluorescence detector as shown in Figure 4B. The Rotary PCR and off-chip PCR were compared with same amount of influenza A H3N2 virus. The Ct value of Rotary PCR was smaller than the off-chip PCR without contamination. The whole process of the sample pretreatment and RT-PCR could be accomplished in 30 min on the fully integrated Rotary Genetic Analyzer system. We have demonstrated a fully integrated and portable Rotary Genetic Analyzer for detection of the gene expression of influenza A virus, which has 'Sample-in-answer-out' capability including sample pretreatment, rotary amplification, and optical detection. Target gene amplification was real-time monitored using the integrated Rotary Genetic Analyzer system.

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Recent Progress in Air-Conditioning and Refrigeration Research : A Review of Papers Published in the Korean Journal of Air-Conditioning and Refrigeration Engineering in 2013 (설비공학 분야의 최근 연구 동향 : 2013년 학회지 논문에 대한 종합적 고찰)

  • Lee, Dae-Young;Kim, Sa Ryang;Kim, Hyun-Jung;Kim, Dong-Seon;Park, Jun-Seok;Ihm, Pyeong Chan
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.26 no.12
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    • pp.605-619
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    • 2014
  • This article reviews the papers published in the Korean Journal of Air-Conditioning and Refrigeration Engineering during 2013. It is intended to understand the status of current research in the areas of heating, cooling, ventilation, sanitation, and indoor environments of buildings and plant facilities. Conclusions are as follows. (1) The research works on the thermal and fluid engineering have been reviewed as groups of fluid machinery, pipes and relative parts including orifices, dampers and ducts, fuel cells and power plants, cooling and air-conditioning, heat and mass transfer, two phase flow, and the flow around buildings and structures. Research issues dealing with home appliances, flows around buildings, nuclear power plant, and manufacturing processes are newly added in thermal and fluid engineering research area. (2) Research works on heat transfer area have been reviewed in the categories of heat transfer characteristics, pool boiling and condensing heat transfer and industrial heat exchangers. Researches on heat transfer characteristics included the results for general analytical model for desiccant wheels, the effects of water absorption on the thermal conductivity of insulation materials, thermal properties of Octadecane/xGnP shape-stabilized phase change materials and $CO_2$ and $CO_2$-Hydrate mixture, effect of ground source heat pump system, the heat flux meter location for the performance test of a refrigerator vacuum insulation panel, a parallel flow evaporator for a heat pump dryer, the condensation risk assessment of vacuum multi-layer glass and triple glass, optimization of a forced convection type PCM refrigeration module, surface temperature sensor using fluorescent nanoporous thin film. In the area of pool boiling and condensing heat transfer, researches on ammonia inside horizontal smooth small tube, R1234yf on various enhanced surfaces, HFC32/HFC152a on a plain surface, spray cooling up to critical heat flux on a low-fin enhanced surface were actively carried out. In the area of industrial heat exchangers, researches on a fin tube type adsorber, the mass-transfer kinetics of a fin-tube-type adsorption bed, fin-and-tube heat exchangers having sine wave fins and oval tubes, louvered fin heat exchanger were performed. (3) In the field of refrigeration, studies are categorized into three groups namely refrigeration cycle, refrigerant and modeling and control. In the category of refrigeration cycle, studies were focused on the enhancement or optimization of experimental or commercial systems including a R410a VRF(Various Refrigerant Flow) heat pump, a R134a 2-stage screw heat pump and a R134a double-heat source automotive air-conditioner system. In the category of refrigerant, studies were carried out for the application of alternative refrigerants or refrigeration technologies including $CO_2$ water heaters, a R1234yf automotive air-conditioner, a R436b water cooler and a thermoelectric refrigerator. In the category of modeling and control, theoretical and experimental studies were carried out to predict the performance of various thermal and control systems including the long-term energy analysis of a geo-thermal heat pump system coupled to cast-in-place energy piles, the dynamic simulation of a water heater-coupled hybrid heat pump and the numerical simulation of an integral optimum regulating controller for a system heat pump. (4) In building mechanical system research fields, twenty one studies were conducted to achieve effective design of the mechanical systems, and also to maximize the energy efficiency of buildings. The topics of the studies included heating and cooling, HVAC system, ventilation, and renewable energies in the buildings. Proposed designs, performance tests using numerical methods and experiments provide useful information and key data which can improve the energy efficiency of the buildings. (5) The field of architectural environment is mostly focused on indoor environment and building energy. The main researches of indoor environment are related to infiltration, ventilation, leak flow and airtightness performance in residential building. The subjects of building energy are worked on energy saving, operation method and optimum operation of building energy systems. The remained studies are related to the special facility such as cleanroom, internet data center and biosafety laboratory. water supply and drain system, defining standard input variables of BIM (Building Information Modeling) for facility management system, estimating capability and providing operation guidelines of subway station as shelter for refuge and evaluation of pollutant emissions from furniture-like products.