• Title/Summary/Keyword: fib 2010

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A Study on the Tribolayer using Focused Ion Beam (FIB) (FIB를 이용한 트라이보층에 대한 연구)

  • Kim, Hong-Jin
    • Tribology and Lubricants
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    • v.26 no.2
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    • pp.122-128
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    • 2010
  • Focused Ion Beam (FIB) has been used for site-specific TEM sample preparation and small scale fabrication. Moreover, analysis on the surface microstructure and phase distribution is possible by ion channeling contrast of FIB with high resolution. This paper describes FIB applications and deformed surface structure induced by sliding. The effect of FIB process on the surface damage was explored as well. The sliding experiments were conducted using high purity aluminum and OFHC(Oxygen-Free High Conductivity) copper. The counterpart material was steel. Pin-on-disk, Rotational Barrel Gas Gun and Explosively Driven Friction Tester were used for the sliding experiments in order to investigate the velocity effect on the microstructural change. From the FIB analysis, it is revealed that ion channeling contrast of FIB has better resolution than SEM and the tribolayer is composed of nanocrystalline structures. And the thickness of tribolayer was constant regardless of sliding velocities.

Study on Surface Damage of Specimen for Transmission Electron Microscopy(TEM) Using Focused Ion Beam(FIB) (집속 이온빔을 이용한 투과 전자 현미경 시편의 표면 영향에 관한 연구)

  • Kim, Dong-Sik
    • 전자공학회논문지 IE
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    • v.47 no.2
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    • pp.8-12
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    • 2010
  • TEM is a powerful tool for semiconductor material analyses in structure or biological sample in micro structure. TEM observation need to make to coincide specimens for special purpose. in this paper, we have experimented for minimum surface damage on bulk wafer and patterned specimen by various conditions such as accelerating energy, depth of ion beam, ion milling types, and etc. in various specimen preparation methods by FIB (Focus Ion Beam). The optimal qualified specimens are contain low mounts of surface damage(about 5 nm) on patterned specimen.

Applications of Focused Ion Beam for Biomedical Research (의생물 연구 분야에서 집속이온빔장치의 응용)

  • Kim, Ki-Woo;Baek, Saeng-Geul;Park, Byung-Joon;Kim, Hyun-Wook;Rhyu, Im-Joo
    • Applied Microscopy
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    • v.40 no.4
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    • pp.177-183
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    • 2010
  • A focused ion beam (FIB) system produces a beam of positive ions (usually gallium) which are heavier than electrons and can be focused by electrostatic lenses into a spot on the specimen. With its ability milling of the specimen material by 10 to 100 nm with each pass of the beam, FIB is widely adopted in materials science, semiconductor industry, and ceramics research. Recently, FIB has been increasingly employed in the field of biomedical sciences. Here we provide a brief introduction to FIB and its applications for a wide variety of biomedical research. The surface of specimen can be in situ processed and quasi-real time visualized by two beam combination of FIB and field emission scanning electron microscope (FESEM). Due to its milling process, internal structures can be exposed and analyzed: yeast cells, fungus-inoculated wheat leaf, mannitol particles in inhalation aerosols, and oyster shell. Serial blockface tomography with the system kindles 3-dimensional reconstruction researches in the realm of nervous system and life sciences. Two-beam system of FIB/FESEM is a versatile tool to be utilized in the biomedical sciences, especially in 3-dimensional reconstruction studies.

Effect of Bottom Ash Aggregate Contents on Mechanical Properties of Concrete (콘크리트의 역학적 특성에 대한 바텀애시 골재 양의 영향)

  • Ahn, Tae-Ho;Yang, Keun-Hyeok;Ha, Jung-Soo
    • Journal of the Korean Recycled Construction Resources Institute
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    • v.8 no.4
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    • pp.379-386
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    • 2020
  • The present study examined the effect of bottom ash aggregate contents on the compressive strength gain and mechanical properties(modulus of elasticity and rupture and splitting tensile strength) of concrete. Main test parameters were water-to-cement ratio and bottom ash aggregate contents for replacement of natural sand. Test results showed that the 28-days compressive strength of concrete and mechanical properties normalized by the compressive strength tended to decrease with the increase in bottom ash fine aggregate content. When compared with fib 2010 model equations, bottom ash aggregate concrete exhibited the following performances: lower rates of compressive strength gain at early ages but greater rates at long-term ages; slightly higher measurements for modulus of elasticity and rupture; and lower measurements for splitting tensile strength.

Improvement of Ion Beam Resolution in FIB Process by Selective Beam Blocking (선택적 빔 차단을 통한 집속이온빔 가공 정밀도 향상)

  • Han, Min-Hee;Han, Jin;Kim, Tae-Gon;Min, Byung-Kwon;Lee, Sang-Jo
    • Journal of the Korean Society for Precision Engineering
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    • v.27 no.8
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    • pp.84-90
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    • 2010
  • In focused ion beam (FIB) fabrication processes the ion beam intensity with Gaussian profile has a drawback for high resolution machining. In this paper, the fabrication method to modify the beam profile at substrate using silt mask is proposed to increase the machining resolution at high current. Slit mask is utilized to block the part of beam and transmit only high intensity portion. A nano manipulator is utilized to handle the silt mask. Geometrical analysis on fabricated profile through silt mask was conducted. By utilizing proposed method, improvement of machining resolution was achieved.

Characteristics of electric field in the liquid metal ion source with a suppressor

  • Cho, Byeong-Seong;Oh, Hyun-Joo;Song, Ki-Baek;Kang, Seung-Oun;Choi, Eun-Ha
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.88-88
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    • 2010
  • The liquid metal ion sources(LMIS) in FIB system have many advantages of high current density, high brightness, and low ion energy spread. Most FIB systems use LMIS because the beam spot size of LMIS is smaller than of gas field ionization sources(GFIS). LMIS basically consists of a emitter(needle, anode), a reservoir(gallium) and a extractor(cathode). But several LMIS have new electrode called the suppressor. We investigated characteristics of LMIS with a suppressor. The characteristics of the threshold voltage and current-voltage (I-V) were observed under the varying extracting voltage with floated suppressor voltage, and under the varying suppressor voltages with fixed extractor voltage. We also simulated LMIS with the suppressor through CST(Computer Simulation Technology). We can explain characteristics of LMIS with a suppressor using the electric field.

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Characteristics of electric field in the liquid metal ion source with a suppressor

  • Min, Boo-Ki;Cho, Byeong-Seong;Oh, Hyun-Joo;Kang, Seung-Oun;Choi, Eun-Ha
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.283-283
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    • 2010
  • The liquid metal ion sources(LMIS) in FIB system have many advantages of high current density, high brightness and low ion energy spread. Most FIB systems use LMIS because the ion beam spot size of LMIS is smaller than other ion sources. LMIS is basically emitted by an extractor but the new electrode called the suppressor is able to control the emission current. We investigated characteristics LMIS with a suppressor, the function of the suppressor in LMIS, the change of the electric field by the suppressor and the advantages of using the suppressor. The characteristics of the threshold voltage and current-voltage (I-V) were observed under the varying extracting voltage with floated suppressor voltage, and under the varying suppressor voltages with fixed extractor voltage. We also simulated LMIS with the suppressor through CST(Computer Simulation Technology). The emission current increases as the suppressor voltage decreases because the suppressor voltage which restrains the electric field goes down, The threshold voltage increases as the suppressor voltage increases. We can explain characteristics and functions of LMIS with a suppressor using the electric field.

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A Study on the Forward Momentum of a Soft Recoil System (연식주퇴 시스템의 전방운동량에 관한 연구)

  • Park, Sun-Young;Bae, Jae-Sung;Hwang, Jai-Hyuk;Kang, Kuk-Jeong;Ahn, Sang-Tae
    • Journal of the Korea Institute of Military Science and Technology
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    • v.13 no.6
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    • pp.976-981
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    • 2010
  • A soft-recoil or FOOB (Fire-Out-Of-Battery) system can reduce the recoil force considerably. Its firing sequency is different from that of a conventional or FIB (Fire-In-Battery) system. In FOOB system, the gun is latched and preloaded in its battery position prior to firing. When unlatched, the gun is accelerated to the forward direction and then the forward momentum of the recoil part is generated. Since this momentum reduces the recoil impulse, the recoil force will decrease significantly. When designing the soft-recoil system it is important to design the forward momentum profile of a recoiling part. In the present study, the method to determine the forward momentum has been studied and its optimum value has been obtained theoretically. The numerical simulation of the soft-recoil system is performed to show that the present soft-recoil system works functionally well.

$\gamma$-FIB를 이용한 Single Crystal MgO Energy Band Structure 측정

  • Choe, Jun-Ho;Lee, Gyeong-Ae;Son, Chang-Gil;Hong, Yeong-Jun;Choe, Eun-Ha
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.420-420
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    • 2010
  • AC PDP에서 유전체 보호막으로 사용되는 MgO 박막은 높은 이차전자방출계수($\gamma$)로 인해 방전전압을 낮춰주는 중요한 역할을 하고 있다. 이러한 MgO 보호막의 이차전자방출계수를 증가시키기 위해 MgO 의 Energy Band Structure 규명이 중요한 연구 주제가 되고 있다. MgO의 이차전자방출계수($\gamma$)는 Auger 중화 이론에 의해 방출 메커니즘이 설명이 되고, 그 원리는 다음과 같다. 고유의 이온화 에너지를 가진 이온이 MgO 표면에 입사 되면, Tunneling Effect에 의해 전자와 이온 사이에 중화가 일어나고, 중화가 되고 남은 에너지가 MgO Valance Band 내의 전자에게 전달되면 이때 남은 에너지(${\Delta}E$)가 MgO의 일함수(Work function) 보다 크게 되면 이차전자로 방출된다. 본 실험 에서는 $\gamma$-FIB System을 이용하여 결정 방향이 (100), (110), (111)을 갖는 Single Crystal MgO에 이온화 에너지가 24.58eV인 He Ion source를 주사 하였을 때 Auger self-convolution을 통해 이차전자의 운동 에너지 분포를 구하고, 이를 통해 MgO 내의 Energy Band Structure를 실험적으로 측정하였다. 이를 통해 MgO Single Crystal의 일함수 및 Defect Level의 분포를 확인하였다.

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