• Title/Summary/Keyword: expected dimensions

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Etching Property of the TaN Thin Film using an Inductively Coupled Plasma (유도결합플라즈마를 이용한 TaN 박막의 식각 특성)

  • Um, Doo-Seung;Woo, Jong-Chang;Kim, Dong-Pyo;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.104-104
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    • 2009
  • Critical dimensions has rapidly shrunk to increase the degree of integration and to reduce the power consumption. However, it is accompanied with several problems like direct tunneling through the gate insulator layer and the low conductivity characteristic of poly-silicon. To cover these faults, the study of new materials is urgently needed. Recently, high dielectric materials like $Al_2O_3$, $ZrO_2$ and $HfO_2$ are being studied for equivalent oxide thickness (EOT). However, poly-silicon gate is not compatible with high-k materials for gate-insulator. To integrate high-k gate dielectric materials in nano-scale devices, metal gate electrodes are expected to be used in the future. Currently, metal gate electrode materials like TiN, TaN, and WN are being widely studied for next-generation nano-scale devices. The TaN gate electrode for metal/high-k gate stack is compatible with high-k materials. According to this trend, the study about dry etching technology of the TaN film is needed. In this study, we investigated the etch mechanism of the TaN thin film in an inductively coupled plasma (ICP) system with $O_2/BCl_3/Ar$ gas chemistry. The etch rates and selectivities of TaN thin films were investigated in terms of the gas mixing ratio, the RF power, the DC-bias voltage, and the process pressure. The characteristics of the plasma were estimated using optical emission spectroscopy (OES). The surface reactions after etching were investigated using X-ray photoelectron spectroscopy (XPS) and auger electron spectroscopy (AES).

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Industry in a Networked World: Globalization and Localization of Industry" (네트워크세계의 산업: 산업의 세계화와 국지화)

  • 박삼옥
    • Journal of the Korean Geographical Society
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    • v.37 no.2
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    • pp.111-130
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    • 2002
  • Major purposes of this stud? are to analyze Korean firms'innovation networks and sources of knowledge for innovation and to understand their spatial dimensions. In the innovation networks, parent firms are most important for subcontracting firms, while suppliers, customers and competitors are relatively important for independent firms. However, in the future innovation networks, it is expected that government-sponsored research institutions and university wilt become more important on the one hand, networks with foreign firms will become more important on the other hand. Regarding the process of innovation, distance does not matter for the acquisition of codified knowledge. Spatial proximity is, however, critical for the acquisition of tacit knowledge because discussions and researches in a research division within a firm, personal networks of CEO and workers who are responsible for innovation activity, and inter-firm relations with suppliers and customer in a region are regarded important as sources of tacit knowledge. Overall, the innovation networks are different between the Capital Region and non-Capital Region as well as between the industrial complex and non-industrial complex, suggesting that different regional innovation strategies and policies should be established and implemented by considering such regional specificities. Finally, based on the results of this study several policy implications are suggested.

An Inductive Study on the Service Quality Evaluation Model of Online Information Service : Focusing on the National Online Information Service NTIS and NDSL (온라인 정보 서비스 품질평가모델에 대한 귀납적 연구 : 국가 온라인 정보 서비스 NTIS와 NDSL을 중심으로)

  • Heo, Joo Yeun;Kim, Sang Kook
    • Journal of Information Technology Services
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    • v.19 no.1
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    • pp.71-87
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    • 2020
  • As diverse online information services are introduced and the use of them are increasing, the importance of the quality control over the online information services is also increasing. Therefore, studies are being attempted to derive quality evaluation models for online information services, but these showed many limitations. In order to overcome the limitations of the previous studies and create more appropriate quality evaluation model, this study analyzed 408 data collected through the interviews with the users of Korea national online information services (NDSL, NTIS) using content analysis and the coding method of ground theory. Through the analysis, we identified the quality evaluation model (13 elements, 6 dimensions) of online information services and the description and insights of each elements. And the priorities of the most significant element(amount of information) and other key elements(such as the usefulness of the information, the diversity of the field, etc.) were figured out through the frequency analysis. Through these inductive methods based on the responses of users, the quality control model could be derived, which is different from the previous researches. This study is the first study which derived the quality evaluation model of online information service through the inductive way based on 408 interview responses from users. Therefore, the results of this study will be helpful to the post researchers who conduct studies on the quality of online information service, etc. Moreover, the results of this study are expected to provide references of frame for decision-making of working-level officials who have to manage the quality of online information services.

The Structural Characteristics of Work Processes in Public Design Projects (공공디자인사업 수행 프로세스의 구조적 특성에 관한 연구)

  • Park, Su-Kyoung;Moon, Jeong-Min
    • Korean Institute of Interior Design Journal
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    • v.22 no.3
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    • pp.145-153
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    • 2013
  • Since a government design department office was set up in 2007, active design projects have been implemented. With this opportunity, each local self-governing organization has improved its administration and institutions, and are planning intensive research on public design for efficient execution of public design projects. However, recent public design projects have caused many problems due to unspecialized design processes, a lack of cooperation with relevant organizations, and unsatisfactory management systems after projects. Therefore, to overcome such problems in the execution of public design projects, a procedure-centered model should be developed. This study aims to analyse the process structures for the strategic execution of public design projects, and the methods and content of the execution process. For this purpose, this study looked into the process structures of public design projects based on design management strategies in order to draw suggestions needed for the execution process through advanced cases. The study is summed up as follows: First, when the process of public design projects was examined in terms of management strategies and design management strategies, it included two dimensions: the management structure of general projects and the design of development projects. Secondly, through the analysis of public design cases, this study discovered useful methodologies and the main programs used and drew suggestions needed for each step in public design projects. It is expected that the results of this study will be helpful for the development of a process model appropriate for national public design projects based on the current status of the project execution and to make a contribution to systematic development in national public design.

The Effect on Image Perception of Male Wearer with Chromatic-Achromatic Colors and Area-Radio of Stripe Necktie (스트라이프 넥타이의 유채-무채 배색과 면적비가 남성복 착용자의 이미지 지각에 미치는 영향)

  • Sung, Nam-Suk
    • Science of Emotion and Sensibility
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    • v.11 no.3
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    • pp.325-338
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    • 2008
  • This study aims to characterize the effect of different combinations of chromatic-achromatic colors and area-ratio of stripe necktie, and gender on the image of male wearer. The experimental materials developed for this study are a set of stimuli and response scales. The stimuli consist of 84 color pictures manipulated with every combination of 12 different colors and 7 different area-ratio. The 7-point scale designed for visual evaluation of image formation included 26 bipolar adjectives. The subjects were 2016 undergraduate students in Gyeongnam, Seoul, Busan, and Daegu areas. The results of this study were as follows.; The analyses of images of male wearer in terms of combinations of chromatic-achromatic colors and area-ratio of oblique stripe necktie reveal that the concerned factors are of five characteristic dimensions of youth-activity, ability, attractiveness, appeal, and warmness. In addition, it has been found that individual images of male wearer are affected by observer's gender as well as combinations of chromatic-achromatic colors and area-ratio of stripe neckties and that those images vary with every combination of each factor. The study results are highly expected to be used as useful sources in developing necktie designs.

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Internet Shopping Value, Store Image, Customer Satisfaction, and Re-Visit Intention - A Comparison by Product Types - (인터넷 쇼핑가치, 점포이미지와 고객만족 및 재방문의도 - 구매제품유형별 비교 -)

  • Kim, Kyung-Hee
    • The Journal of the Korea Contents Association
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    • v.8 no.3
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    • pp.173-181
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    • 2008
  • This study aims to prove the connection between satisfaction and re-visit intention of customers by examining shopping value and store image depending on product types purchased at Internet shopping malls. The finding of this study revealed that shopping value could be classified into hedonic and utilitarian value, while store image could be extracted into six dimensions such as reputation, product and information service, customer service after purchase, atmosphere, convenience, and safety. Both search goods and experience goods among store image factors were found to have stronger effect on utilitarian shopping value than hedonic shopping one. In addition, it was found that store image and shopping value had an effect on customer satisfaction and re-visit intention depending on product types, with a significant difference. These findings are expected to provide marketing complications for the understanding of differentiated market segments in the Internet shopping mall market, which is facing ever-growing market.

The Development of a Theoretical Model of Integrated Medical Humanity Curriculum Using Science, Technology, Engineering, Arts, and Mathematics Model (융합인재교육 이론모형 틀에 기반을 둔 통합의료인문학 교육과정 이론모형의 제안)

  • Kim, Jin Hee;Lee, Young Hwan;Park, Won Kyun;Park, Young Soon;Park, Hae Jin;Chun, Kyung Hee
    • Korean Medical Education Review
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    • v.17 no.1
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    • pp.39-48
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    • 2015
  • The purpose of this study was to propose a theoretical model for an integrated medical humanities curriculum based on a STEAM (science, technology, engineering, arts, and mathematics) education framework and to provide a guideline for curriculum integration. Three dimensions of integrated curriculum development are competencies, core contents, and elements of integration. Competencies imply the purpose of the medical humanities of a medical school and the exit outcomes of the curriculum. Core contents imply the goals and objectives of the curriculum. We compared the goals and themes of the medical humanities with core attributes of professionalism. Four elements of integration were proposed: units (cases, problem activities, core contents, disciplines/subjects), types (multidisciplinary, interdisciplinary, transdisciplinary), contexts of integration (life cycle of patients, scope of society), and stages of student development (from student to doctor). It is expected that this theoretical model for an integrated medical humanities curriculum can be used as a guideline for curriculum development and an evaluation criterion for instructional designers and subject matter experts.

Research on Diagnosis of Regional Science Culture and Plans for Improvement: Exploratory Case Study of Gyeonggi Region, Korea (지역 과학문화 현황 진단과 개선방안: 경기도 지역에 대한 탐색적 사례연구를 중심으로)

  • Lee, Jihoon;Lee, Yeonhee
    • Journal of Korea Technology Innovation Society
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    • v.16 no.1
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    • pp.230-251
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    • 2013
  • This research aims to diagnosis regional science as culture and propose plans for improvement. The study was performed based on a framework for analyses presented by existing literatures. Science culture is divided into two dimensions(individual and social), Each dimension is expected to represent citizen literacy of and regional infrastructure of science culture respectively. Gyeonggi region of Korean metropolitan area has been analyzed for the case study. As a result of the case study, the level of science culture of Gyeonggi region is weak compared with others areas. To improve, we propose some plans such as budget extension, long-term view on investments, strengthen network and organizational system for regional science culture.

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Preparation and characterization of PVDF/alkali-treated-PVDF blend membranes

  • Liu, Q.F.;Li, F.Z.;Guo, Y.Q.;Dong, Y.L.;Liu, J.Y.;Shao, H.B.;Fu, Z.M.
    • Membrane and Water Treatment
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    • v.7 no.5
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    • pp.417-431
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    • 2016
  • Poly(vinylidene fluoride) (PVDF) powder was treated with aqueous sodium hydroxide to obtain partially defluorinated fluoropolymers with expected properties such as improving hydrophilicity and fouling resistance. Raman spectrum and FT-IR results confirmed the existence of conjugated carbon double bonds after alkaline treatment. As the concentration increased, the degree of defluorination increased. The morphology and structure of membranes were examined. The permeation performance was investigated. The results showed that membrane's hydrophilicity increased with increase of the percentage of alkaline treated PVDF powder. Moreover, in terms of the water contact angle, it decreased from $92^{\circ}$ to a minimum of $68^{\circ}$; while water up take increased from 128 to 138%. Fluxof pure water and the cleaning efficiency increased with the increase of alkaline treated PVDF powder. The fouling potential also decreased with the increase of the percentage of alkaline treated PVDF powder. The reason that makes blending PVDF show different characteristics because of partial defluorination, which led the formation of conjugated C = C bonds and the inclusion of oxygen functionalities. The polyene structure followed by hydroxide attack to yield hydroxyl and carbonyl groups. Therefore, the hydrophilicity of blending membrane was improved. The SEM and porosity measurements showed that no obvious variations of the pore dimensions and structures for blend membranes were observed. Mechanical tests suggest that the high content of the alkaline treated PVDF result in membranes with less tolerance of tensile stress and higher brittleness. TGA results exhibited that the blend of alkaline treated PVDF did not change membrane thermal stability.

Safety Assessment on Long-term Radiological Impact of the Improved KAERI Reference Disposal System (the KRS+)

  • Ju, Heejae;Kim, In-Young;Lee, Youn-Myoung;Kim, Jung-Woo;Hwang, Yongsoo;Choi, Heui-joo;Cho, Dong-Keun
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.18 no.spc
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    • pp.75-87
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    • 2020
  • The Korea Atomic Energy Research Institute (KAERI) has developed geological repository systems for the disposal of high-level wastes and spent nuclear fuels (SNFs) in South Korea. The purpose of the most recently developed system, the improved KAERI Reference Disposal System Plus (KRS+), is to dispose of all SNFs in Korea with improved disposal area efficiency. In this paper, a system-level safety assessment model for the KRS+ is presented with long-term assessment results. A system-level model is used to evaluate the overall performance of the disposal system rather than simulating a single component. Because a repository site in Korea has yet to be selected, a conceptual model is used to describe the proposed disposal system. Some uncertain parameters are incorporated into the model for the future site selection process. These parameters include options for a fractured pathway in a geosphere, parameters for radionuclide migration, and repository design dimensions. Two types of SNF, PULS7 from a pressurized water reactor and Canada Deuterium Uranium from a heavy water reactor, were selected as a reference inventory considering the future cumulative stock of SNFs in Korea. The highest peak radiological dose to a representative public was estimated to be 8.19×10-4 mSv·yr-1, primarily from 129I. The proposed KRS+ design is expected to have a high safety margin that is on the order of two times lower than the dose limit criterion of 0.1 mSv·yr-1.