• Journal of Surface Science and Engineering
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• v.29 no.5
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• pp.371-378
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• 1996

An RF inductively coupled plasma (ICP) torch has been developed as a typical thermal plasma generator and reactor. It has been applied to various materials processings such as plasma flash evaporation, thermal plasma CVD, plasma spraying, and plasma waste disposal. The RF ICP reactor has been generally operated under one atmospheric pressure. Lately the characteristics of low pressure RF ICP is attracting a great deal of attention in the field of plasma application. In our researches of RF plasma applications, low pressure RF ICP is mainly used. In many cases, the plasma generated by the ICP torch under low pressure seems to be rather capacitive, but high density ICP can be easily generated by our RF plasma torch with 3 turns coil and a suitable maching circuiit, using 13.56 MHz RF generator. Plasma surface modification (surface hardening by plasma nitriding and plasma carbo-nitriding), plasma synthesis of AIN, and plasma CVD of BN, B-C-N compound and diamond were practiced by using low pressure RF plasma, and the effects of negative and positive bias voltage impression to the substrate on surface modification and CVD were investigated in details. Only a part of the interesting results obtained is reported in this paper.

• Transactions on Electrical and Electronic Materials
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• v.4 no.5
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• pp.15-18
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• 2003

The Cd$\_$1-x/Zn$\_$x/Te film was produced by thermal evaporation for the flat-panel X-ray detector. The crystal structure and the surface morphology of poly crystalline Cd$\_$1-x/Zn$\_$x/Te film were examined using XRD and SEM, respectively. The leakage current and X-ray sensitivity of the fabricated films were measured to analyze the X-ray response characteristic of Zn in a polycrystalline CdZnTe thin film. The leakage current and the output charge density of Cd$\_$0.7/Zn$\_$0.3/Te thin film were measured to 0.3 1nA/$\textrm{cm}^2$ and 260 pC/$\textrm{cm}^2$ at an applied voltage of 2.5 V/$\mu\textrm{m}$, respectively. Experimental results showed that the increase of Zn doping rates in Cd$\_$1-x/Zn$\_$x/Te detectors reduced the leakage current and improved the X-ray sensitivity significantly. The leakage current was drastically diminished by the formation of thin parylene layer in the Cd$\_$0.7/Zn$\_$0.3/Te detector.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.79-82
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• 2003

a-Se film is known as promising medical X-ray detector material but a-Se as dopanted Tellurium is not available in X-ray detectors. a-Se thick film was grown by vacuum thermal evaporator to $3{\mu}m$ thickness. The characteristics of thick films were analyzed by XRD, U-V Meter, and SEM measurements. Te composition is 0.1, 0.3, 0.5, 0.7g. This paper is fundmental data for phosphor layer's essential parameter that selenium have absorption wavelength along to various Te concentration rate.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.61-62
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• 2006

In this paper, it was demonstrated that organic thin- film transistors (OTFTs) were fabricated with the organic adhesion layer between an organic semiconductor and a gate insulator by vapor deposition polymerization (VDP) processing. In order to form polymeric film as an adhesion layer, VDP process was also introduced instead of spin-coating process, where polymeric film was co-deposited by high-vacuum thermal evaporation from 6FDA and ODA followed by curing. The saturated slop in the saturation region and the subthreshold nonlinearity in the triode region were c1early observed in the electrical output characteristics in our organic thin film transistors using the staggered-inverted top-contact structure. Field effect mobility, threshold voltage, and on-off current ratio in 15-nm-thick organic adhesion layer were about $0.5\;cm^2/Vs$, -1 V, and $10^6$, respectively. We also demonstrated that threshold voltage depends strongly on the delay time when a gate voltage has been applied to bias stress.

• Journal of the Korean Vacuum Society
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• v.12 no.4
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• pp.228-234
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• 2003

The velocity of gadolinium(Gd) atomic vapor vaporized by an electron beam was measured by a microbalance. The velocity of about 900 ㎧ was obtained at an evaporation surface temperature of 2400-2500 K. The measured value was approximately 100 ㎧ faster than the maximum velocity of an ideal monatomic gas in an adiabatic expansion. This phenomenon can be explained that the internal energy of Gd atoms populated in higher excited levels at the high temperature should be convened to kinetic energy during adiabatic expansion. The calculated velocity agrees with the measured one when 100 excited energy levels are included in an enthalpy term for the velocity calculation. The characteristics of vapor flow as a function of heated surface temperature are also reported.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.594-597
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• 2004

본 연구에서는 진공 인라인 실장 기술을 이용하여 제작한 플라즈마 디스플레이 패널(PDP)의 전기적 광학적 특성을 측정하여, 일반적인 실장 방법을 이용한 PDP의 특성과 비교 분석하였다. 본 실험에 사용된 패널은 Screen Printer를 이용한 상 하부전극과 하판 유전체, 상판 투명유전체, 격벽 및 E-Beam Evaporation 방법을 이용하여 증착한 MgO 보호막으로 이루어져 있으며, 분위기 온도 $430^{\circ}C$, Ne-Xe(4%) 400[torr]압력 하에서 실장하였다. 높은 분위기 온도로 인하여 MgO에 Crack이 발생하였으나 지속적인 연구를 진행하여 최적의 실장 조건을 확립할 수 있었다. 이러한 진공 인라인 실장 기술은 추가적인 Annealing 공정이 필요하지 않아 공정의 단축을 모색할 수 있으며, MgO의 수화를 제거함으로써 일반적인 실장 방법을 이용한 패널보다 더 우수한 전기적 광학적 특성을 얻을 수 있었다.

• Bulletin of the Korean Chemical Society
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• v.19 no.8
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• pp.830-835
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• 1998

The characteristics of the ablation plume generated by 532 nm Nd: YAG laser irradiation of a Pb(Zr0.52Ti0.48)O3 (PZT) target have been investigated using a pulsed-field time-of-flight mass spectrometer (TOFMS). The relative abundance of O+, Ti+, Zr+, Pb+, TiO+, and ZrO+ ions has been measured and discussed. TiO+ and ZrO+ ions were also found to be particularly stable within the laser ablation plasma with respect to PbO+ species. The behavior of the temporal distributions of each ionic species was studied as a function of the delay time between the laser shot and the ion extraction pulse. The most probable velocity of each ablated ion is estimated to be Vmp=1.1-1.6x 105 cm/s at a laser fluence of 1.2 J/cm2, which is typically employed for the thin film deposition of PZT. The TOF distribution of Ti+ and Zr+ ions shows a trimodal distribution with one fast and two slow velocity components. The fast velocity component (6.8x 10' cm/s) appears to consist of directly ablated species via nonthermal process. The second component, originated from the thermal evaporation process, has a characteristic velocity of 1.4-1.6 x 105 cm/s. The slowest component (1.2 x 105 cm/s) is composed of a dissociation product formed from the corresponding oxide ion.

• Bulletin of the Korean Chemical Society
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• v.18 no.6
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• pp.588-594
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• 1997

Gelation time, gel structure and volatility of by-products during gelation of PZT sol-gel processing were investigated by FT-IR spectroscopy. FT-IR spectroscopic study was performed on PZT gels with the various H₂O contents (1, 2 and 3 mol) and the several types (HNO₃, NH₄OH) and amounts (0.1, 0.2 mol) of catalysts, monitoring temporal (0, 1, 3, 10 weeks, 3 months and 3 years) and thermal (100-700 ℃) changes of FT-IR spectra. The interpretation of temporal change of the spectra revealed two trends. One is under the condition of 1 mol H₂O, 1 mol H₂O+0.1 mol HNO₃, 3 mol H₂O and the other is for 1 mol H₂O+0.1 mol NH₄OH, 2 mol H₂O, 1 mol H₂O+0.2 mol HNO₃. The gel structures and the gelation times for these conditions were discussed in comparison with the reported results of SiO₂, and we suggested the reaction mechanisms for these structural characteristics. Thermal variation of FT-IR spectra was interpreted as the evolution processes of gel by investigating the evaporation of solvent and the decomposition of organic residues.

• Proceedings of the Korea Water Resources Association Conference
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• 2018.05a
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• pp.146-146
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• 2018

Basin evapotranspiration is the result of water balance and energy balance, which is affected by climate and underlying surface characteristics, the process is complex, and spatial and temporal variability is large, the evapotranspiration estimation of river basin is an important but difficult problem in the field of hydrology, over the years, many scholars devoted to the basin actual evapotranspiration estimation and achieved excellent results. We discuss Budyko coupled water-energy balance theory and evaporation paradox, then use the Fu's equation to estimate actual evapotranspiration yearly in different areas with different dryness. The result shows that Fu's equation has high precision for estimating evapotranspiration yearly in our selected study area, and the estimation result has higher precision in the area with high dryness. Then, we propose an improved formula which can be used to estimate actual evapotranspiration monthly. Furthermore, we found that the parameter in the formula reflects general conditions of underlying surface and it is affected by several factors, at last, we tried to propose the calculation formula. The study indicates that Fu's equation provides a reliable method for evapotranspiration estimation in dry regions as well as semi-humid and semi-arid regions, which has great significance for forecasting river basin water resources and inquiring into ecological water requirement.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.16 no.12
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• pp.1134-1139
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• 2004

The evaporative heat transfer coefficient of $CO_2$ (R-744) in a horizontal tube was investigated experimentally. The experiments were conducted without oil in a closed refrigerant loop which was driven by a magnetic gear pump. The main components of the refrigerant loop are a receiver, a variable-speed pump, a mass flow meter, a pre-heater and evaporator (test section). The test section consists of a smooth, horizontal stainless steel tube of inner diameter of 7.75 mm. The experiments were conducted at mass flux of 200 to 500 kg/m$^2$s, saturation temperature of -5 to 5$^{\circ}C$, and heat flux of 10 to 40kW/m$^2$. The test results showed the heat transfer of $CO_2$ has a greater effect on nucleate boiling more than convective boiling. Mass flux of $CO_2$ does not affect nucleate boiling too much, and the effect of mass flux on evaporative heat transfer of $CO_2$ is much smaller than that of refrigerant R-22 and R-134a. In comparison with test results and existing correlations, correlations failed to predict the evaporative heat transfer coefficient of $CO_2$, therefore, it is necessary to develope reliable and accurate predictions determining the evaporative heat transfer coefficient of $CO_2$ in a horizontal tube.