• Title/Summary/Keyword: equivalent length

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An Experimental Study on Multiple ICP & Helicon Source for Oxidation in Semiconductor Process

  • Lee, Jin-Won;Na, Byoung-Keun;An, Sang-Hyuk;Chang, Hong-Young
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.271-271
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    • 2012
  • Many studies have been investigated on high density plasma source (Electron Cyclotron Resonance, Inductively Coupled Plasma, Helicon plasma) for large area source after It is announced that productivity of plasma process depends on plasma density. In this presentation, we will propose the new concept of the multiple source, which consists of a parallel connection of ICP sources and helicon plasma sources. For plasma uniformity, equivalent power (especially, equivalent current in ICP & Helicon) should distribute on each source. We design power feeding line as coaxial transmission line with same length of ground line in each source for equivalent power distribution. And we confirm the equivalent power distribution with simulation and experimental result. Based on basic study, we develop the plasma source for oxidation in semiconductor process. we will discuss the relationship between the processing parameters (With or WithOut magnet, operating pressure, input power ). In ICP, plasma density uniformity is uniform. In ICP with magnet (or Helicon) plasma density is not uniform. As a result, new design (magnet arrangement and gas distributor and etc..) are needed for uniform plasma density in ICP with magnet and Helicon.

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Stress Analysis with respect to the change of the Shape of Screw Blade and the Hole for Centrifuge (원심분리기용 스크류의 블레이드 및 원공형상변화에 따른 음력해석)

  • 이성욱;심재준;한동섭;한근조;안찬우;김태형
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.749-752
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    • 2002
  • In this study, we carried out the finite element analysis about screw that is the weakest part of the centrifuge for sewage management. Structural analysis was done with respect to the change of outer radius and thickness of screw blade and screw with sewage discharge hole. If the area of circular hole is equal to that of extended holes, maximum equivalent stress was compared between hole and extended hole. Centrifugal force on account of rotation of 4000 rpm was applied the screw. The results are as follows : 1 . When the larger radius and thickness of screw blade was used, the higher maximum equivalent stress is occurred. 2. When the larger radius of sewage discharge hale was used, the higher maximum equivalent stress is occurred. 3. When the longer parallel part length of extended hole was used, the higher maximum equivalent stress is occurred. 4. If the extended hole with the same discharging area which circular hole uses, the maximum equivalent stress is lower.

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Equivalent Vehicle Load Factors for Girder and Beam of Parking Garage Structure (주차장 구조물의 보와 거더의 등가차량 하중계수에 관한 연구)

  • 곽효경;송종영
    • Computational Structural Engineering
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    • v.10 no.3
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    • pp.203-216
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    • 1997
  • The Equivalent vehicle load factors of Beams and Girders on parking garage structure are proposed in this study. Without taking the sophisticated numerical analysis for the concentrated wheel loads, the design member forces of beam and girder can be easily calculated only with those for the distributed load by using the constructed relationships between the equivalent vehicle load factor and the length of member. Besides, the standard vehicle with total weight of 2.4ton is designed based on the review of many foreign design codes for parking garage and the investigation of small to medium vehicles made in Korea. Finally the efficiency and the reliability of the proposed equivalent vehicle load factors are demonstrated through the application of the typical beam and girder.

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Generalized lens group conversion to their equivalent lenses (렌즈군의 일반화된 등가렌즈 변환)

  • 이종웅;박성찬
    • Korean Journal of Optics and Photonics
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    • v.9 no.4
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    • pp.251-257
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    • 1998
  • The equivalent lens conversion is extended to lens group conversion, and the more generalized conversion method is developed. The new conversion method can be used for hte direct thick-to-thick lens conversion. By using the equivalent lens conversion, a thin lens system can be converted into various thick lens system which have different axial thicknesses, but those converted lens systems have identical paraxial property and similar aberration characteristic. For an example, the equivalent lens conversion technique is applied to modification of a thelephoto lens design. The axial thicknesses of the front group elements of the system are reduced to 75% of their original values. The modified design by using the equivalent lens conversion has same focal length with original, and it has smaller aberration changes than the other design of which axial thicknesses are changed only.

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Analysis on Ocular Components Variation with the Difference of Both Refractive Errors (양안 굴절이상 차이에 의한 안광학상수 변화도 분석)

  • Lee, Hae-Jung;Lee, Eun-Hee;Jung, Mi-A
    • Journal of Digital Convergence
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    • v.14 no.11
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    • pp.435-440
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    • 2016
  • The aim of study was to provide the preliminary data to find out characteristics of the difference between both refractive errors through analysis of ocular components variation. We measured spherical equivalent power and corneal radius with KR-8800, and axial length and anterior chamber depth with IOL Master, and the difference of measuring values between the right eye and left eye was applied as the absolute values in 100 adults aged 20~59 years. In all participants, the most common results showed that spherical equivalent power was $-1.83{\pm}2.17D$, axial length was 23.00~24.99mm, corneal radius was 7.50~7.89mm, and anterior chamber depth was 3.60~4.09mm. There are significant correlations between both eyes in axial length and anterior chamber depth with the difference of both spherical equivalent power. The difference of both axial lengths was the biggest with the difference of both refractive errors, and shown the highest correlation. The convergence complex study through classification by aspects is needed since the difference of both refractive errors is closely related with ocular components variation, and poor visual function would be caused by the difference of both refractive errors.

Numerical Study to Develop Low-NOx Multi-nozzle Burner in Rotary Kiln (로터리 킬른용 Low-NOx 다공노즐버너 개발을 위한 수치해석적 연구)

  • Ahn, Seok-Gi;Kim, Jin-Ho;Hwang, Min-Young;Kim, Gyu-Bo;Jeon, Chung-Hwan
    • Journal of Energy Engineering
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    • v.23 no.4
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    • pp.130-140
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    • 2014
  • Rotary kiln burner has been developed continuously to improve process efficiency and exhaust emission. In this study, the characteristics of the flame and exhaust emission were numerically analyzed according to the diameter of primary air nozzle, equivalent ratio of burner, and equivalent ratio at center and side nozzle for development of multi-nozzle burner in the COG(Coke Oven Gas) rotary kiln for sintering iron ore. The results indicated that the flame length and $NO_x$ emission increase, as the diameter of primary air nozzle and equivalent ratio of burner increase. And according to the change of equivalent ratio at the center and the side of the nozzle, the flame length and average temperature in the kiln show very little change but the $NO_x$ emission shows obvious difference. In conclusion, the best design conditions which have satisfying flame length, average temperature and $NO_x$ emission are as follows: $D_2/D_1$ is 1.33, equivalent ratio of burner is 1.25 and center nozzle conditions are Rich.

Transmission Characteristics & Analysis of Ignition Voltage According to Its Conductor Length from the Ballast to the HID Lamp (HID램프와 안정기 사이의 전선 길이에 따른 이그니션 전압 전달특성 분석)

  • Bang, Sun-Bae;Kim, Chong-Min;Han, Woon-Ki;Im, Byeong-No;Jang, Mog-Soon
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.56 no.3
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    • pp.148-154
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    • 2007
  • In this paper, characteristics of ignition voltage and current by wire length of HID(High Intensity Discharge) lamp circuit are analyzed. In the construction field, decision of the wire thickness for HID lamp circuit has the problems, and these are presented. Through transmit parameters, equivalent model of the ballast and HID lamp circuit was derived. The graph of voltage reduction about length between the ballast and the lamp is shown. The simulation of proposed model and experimental results are presented in order to validate the proposed method. The proposed model and graph can use to choose the proper length of wire between the ballast and the lamp in the field.

Life Comparision of 2$\frac{1}{2}$ Ton Truck Considering The Operation Terrains (운행지형형태에 따른 2$\frac{1}{2}$톤 트럭의 수명비교)

  • Kim Jang-Hyeon;Ha Seok-Tae
    • Journal of the military operations research society of Korea
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    • v.16 no.2
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    • pp.1-13
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    • 1990
  • The life of an equipment depends upon its operating characteristics and physical environment factors. This paper presents the economic life length of 2 1/2 ton truck considering the operation terrains. For this specific research, the operation terrains are categorized into seacoast area, mountain area and plain area. To compute the life length, the method of equivalent annual cost is employed. The sample vehicles from each corresponding area are randomly selected from those vehicles whose ages exceed 9 years. This research finds the following results : (1) The life length operated at seacoast area is 9.75 years, (2) The life length operated at mountain area is 11.25 years, (3) The life length operated at plain area is 14 years. This research argues that the key factor such as characteristics of operating enviroment for allocation of operating and maintaining cost should be considered.

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Fabrication of the focal length and distortion measurement system (초점길이 및 왜곡수차 측정장치 제작)

  • 조현모
    • Proceedings of the Optical Society of Korea Conference
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    • 1990.02a
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    • pp.82-86
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    • 1990
  • A camera type optical bench system equipped with a lens collimator and an image analyzer is fabricated to measure the equivalent focal length and distortion of lenses. This system is automatized by the computer which controls stepping motors. A nodal slide optical bench system equipped with an off axis reflective collimator is fabricated and improved by using rotating arms and air bearing system. distortion measurement on a wide angle lens using the camera method and the nodal slide method is reported. Defocusing error in the distortion measurement with the nodal slide optical bench is analyzed and improved by iteration method to search the correct image point.

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Optimum Design of Uniform Circular Fins (원통형 휜의 최적설계)

  • ;Cho, Sung Hwan
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.2 no.1
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    • pp.27-30
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    • 1978
  • Conditions for increasing heat transfer by increasing uniform circular fin length are investigated. When free end of the fin is not thermally insulated, correction fin length, which gives equal heat transfer from an insulated end fin, is given. Optimum design of a uniform circular fin based on the equivalent fin with insulated end is given.