Development of White Light Scanning Interferometry Autofocusing equipment for LCD part Inspection (LCD 부품 검사를 위한 백색광 주사 간섭계(White light Scanning Interferometry) autofocusing 장치 개발)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 2006.10a
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- pp.1-2
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- 2006