An Experiment on Performance Evaluation of Energy Consumption of an Exhaust Air Heat Recovery Type Air Washer for Semiconductor Manufacturing Clean Rooms (반도체 클린룸용 배기 열회수식 에어와셔의 에너지 소비량 성능평가 실험)
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- Proceedings of the SAREK Conference
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- 2008.06a
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- pp.844-849
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- 2008