• Bulletin of the Korean Chemical Society
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• v.23 no.8
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• pp.1127-1134
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• 2002

Fine ceramic particles of zirconia toughened alumina (ZTA), titania toughened alumina (TTA), and zirconia-titania toughened alumina (ZTTA) have been synthesized by ultrasonic spray pyrolysis (USP) at various temperatures from starting salt solutio ns of various compositions aiming for the development of catalytic material. These particles were characterized for properties such as shape, size and size distribution, diffraction pattern, and chemical and phase composition of elements by scanning electron microscopy (SEM), particle size analyzer (PSA), x-ray diffraction (XRD), and inductively coupled plasma-atomic emission spectroscopy (ICP-AES). Chemical compositions and sizes of ceramic composites have been controled by the stoichiometry of salt solutions and the flow rate of spraying solutions. The optimum experimental conditions for the various composite particle syntheses have been proposed.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.12a
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• pp.109-116
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• 2003

Amorphous GaN Quantum dots(a-GaN QDs) with particle diameters less than bohr radius(~11nm) were successfully fabricated at room temperature by a laser ablation of high densified GaN target. Transmission electron microscopy, SAED diffraction pattern and X-ray photoelectron spectroscopy confirmed the presence of a-GaN QDs with particle size of 7.9, 6.9, 4.4nm under the Ar gas pressures of 50, 100 and 200 Pa, respectively. The room temperature PL and absorbance spectra showed a strong band emission centered at 3.9 eV in a-GaN QDs made under the gas pressures of 100 and 200 Pa, which is nearly 0.5eV blueshifted with respect to the bulk crystal band gap.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2002.11a
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• pp.130-136
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• 2002

Device makers want to make higher density chips as devices shrink, especially WSix poly stack down is one of the key issues. However, EPD (End Point Detection) time delay was happened in DPS+ poly chamber which is a barrier to achieve device shrink because EPD time delay killed test pattern and next generation device. To investigate the EPD time delay, a test was done with patterned wafers. This experimental was carried out combined with OES(Optical Emission Spectroscopy) and SEM (Scanning Electron Microscopy). OES was used to find corrected wavelength in WSix stack down gate etching. SEM was used to confirm WSix gate profile and gate oxide damage. Through the experiment, a new wavelength (252nm) line of plasma is selected for DPS+ chamber to call correct EPD in WSix stack down gate etching for current device and next generation device.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.137-140
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• 2001

To improve structural properties and induce higher conductivity, we have annealed emitting layer, The temperature condition was investigated by various experiment. To observe the surface morphology of emitting layer, measured the AFM and the X-ray diffraction pattern of P3HT film is shown. It is move to slightly low angles and diffraction peaks also become much sharper. After annealing of emitting layer, EL intensity and Voltage-current-luminance curve is better as compared with untreated. But PL intensity was decreased. It is known that by emission principal. After annealing of emitting layer, EL devices enhances the interface adhesion between the emissive polymer and Indium-tin-oxide electrode, which takes a critical role to improve the emitting properties of EL devices.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.209-212
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• 2001

Polyimide(PI) films have been considered as the interlayer dielectric materials due to low dielectric constant, low water absorption, high gap-fill and planarization capability. The PI film was etched with using inductively coupled plasma (ICP). The etching characteristics such as etch rate and selectivity were evaluated to gas mixing ratio. High etch rate was 8300$\AA$/min and vertical profile was approximately acquired 90$^{\circ}$ at CF$_4$/(CF$_4$+O$_2$) of 0.2. The selectivies of polyimide to PR and SiO$_2$ were 1.2, 5.9, respectively. The etching profiles of PI films with an aluminum pattern were measured by a scanning electron microscope (SEM). The chemical states on the PI film surface were investigated by x-ray photoelectron spectroscopy (XPS). Radical densities of oxygen and fluorine in different gas mixing ratio of 07CF4 were investigated by optical emission spectrometer (OES).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.11a
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• pp.381-384
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• 1997

This paper describes the method of diagnosing the degradation by void defects of insulator inside in operation. Needle-shape void specimens, made from LDPE, were used to generate an electrical tree under ac voltage. The method uses a neural network system with input signal of AE patterns. AE pattern consists of the pulse count and average amplitude according to the phase angle. After the learning process was over, unknown emission patterns were put into the network. It was shown that the network discriminates the void deflects well. The effectiveness of the neural network system for partial discharge recognition was shown.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1659-1661
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• 2003

Recently, diagnostic techniques have been investigated to defect a partial discharge in high voltage electrical equipment. We have studied the characteristics of the acoustic partial discharge originating from the electrical defects in cubicle GIS(C-GIS). An acoustic emission(AE) sensor is used on the enclosure to detect partial discharge source because the sensor is sensitive to stress waves in its frequency range that may not be from a partial discharge source. AE signal is analyzed with phase-magnitude-frequency number(${\Phi}$-V-n) and pulse per second(PPS). Experience result has shown that the omitted acoustic signal has phase dependency and phase shift characteristic according to increase with applied voltage. These result will be helpful to the pattern recognition of the acoustic partial discharge in a C-GIS.

• Journal of the korean Society of Automotive Engineers
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• v.2 no.2
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• pp.31-39
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• 1980

복지사회적 목표에서의 도시계획 및 교통문제는 환경보전의 측면에서 상충되는 관계가 이루어 지고 있다. 특히 대도시에서 자동차의 배출가스에 의한 대기오염은 매우 심각한 관계에 이르고 있다. 우리나라에서도 앞으로 급증할 것으로 예상되는 자동차 증가율과 상대적으로 협조한 도 로의 점유율 및 이에 따른 자동차 주행 pattern의 불규칙성을 감안하면 외국과 같은 규제기준의 설정이 필요하다. 자동차 배출가스에 의한 대기오염의 심각성은 배출가스중에 들어있는, 일산 화탄소(CO), 탄화수소(HC), 질소산화물(NOx), 알데히드, 연화합물 및 발암성 방향족화합물 등 으로, 이것은 인체에 유해한 영향을 주고 있다. 이와 같은 실정에서 인간의 건강을 공해로부터 보호하기 위한 기준으로 세계보건기구 WHO 는 1972년 "WHO Technical Report Series, No.506" 에서 SO$_{2}$ 분진 일산화탄소 및 photochemical 에 대하여 기준 목표를 설치하였다.목표를 설치하였다.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11b
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• pp.1040-1043
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• 2001

This paper describes the principle behind Crank Angle Analysis, as implemented by Bruel ＆ Kjaer in the Non-Stationary Spatial Transformation of Sound Fields (NS-STSF) system. The NS-STSF system combines a Time Domain Holography measurement on for example an engine with two simultaneously recorded Tacho signals. The Tacho signals provide the crankshaft angle and the RPM at the instant of each instantaneous output (snap-shot) from Time Domain Holography. As a result, the system allows precise analysis of the temporal and spatial relation between the acoustical emission (or the vibration pattern) and the mechanical events during an engine cycle. Some results from a measurement on a DaimlerChrysler engine are presented.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.09a
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• pp.183-187
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• 2005

Thin films of diblock copolymers may be suitable for semiconductor device applications since they enable patterning of ordered domains with dimensions below photolithographic resolution over wafer-scale area. We obtained nanometer-scale cylindrical structure of dibock copolymer of polystyrene-block-poly(methylmethacrylate), PS-b-PMMA, also demonstrate pattern transfer of the nanoporous polymer using both reactive ion etching. The size of fabricated naonoholes were about 10 nm. Fabricated nanopattern surface was observed by field emission scanning electron microscope (FESEM).