• 대한전자공학회논문지
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• 제26권9호
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• pp.1348-1358
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• 1989

We analyzed electrostatic lens with axi-symmetic configurations using the analytic equation for a single apertured lens. The developed computer code afforded to estimate ion optical properties such as ion trajectories, aberrations and ion beam diameters, and was found to have advantages of a shorter calculation time. The calculated ion optical properties for several types of electrostatic lens were in good agreement with Burghard's ones and it was seem that 20% reduction of ion beam diameter could be obtained by the change of aperture diameters.

• 한국공작기계학회논문집
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• 제16권6호
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• pp.163-167
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• 2007

A field emission electron gun including 3 electrodes including one cathode and two anodes is very important for high resolution electron microscope. To have functions to control the initially-emitted electron beam, two anodes act as an electrostatic lens according to equipotential lines by adjusting the spot size, intensity, and working distance. To verify the action of the electron beam by the electrostatic lens by changing several parameters such as electrode shape, displacement and applied voltage to the electrodes, the two lenses were design and simulated and then their performances were analyzed with angular beam intensity(distribution), electrical optic axis variation and their stability.

• 반도체디스플레이기술학회지
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• 제8권4호
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• pp.43-48
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• 2009

The aim of this paper is to describe the development of the electron-beam optic analysis algorithm for simulating the e-beam behavior concerned with electrostatic lenses and their focal properties in the micro-column of the multi-beam lithography system. The electrostatic lens consists of an array of electrodes held at different potentials. The electrostatic lens, the so-called einzel lens, which is composed of three electrodes, is used to focus the electron beam by adjusting the voltages of the electrodes. The optics of an electron beam penetrating a region of an electric field is similar to the situation in light optics. The electron is accelerated or decelerated, and the trajectory depends on the angle of incidence with respect to the equi-potential surfaces of the field. The performance parameters, such as the working distances and the beam diameters are obtained by the computational simulations as a function of the focusing voltages of the einzel lens electrodes. Based on the developed simulation algorithm, the high performance of the micro-column can be achieved through optimized control of the einzel lens.

• 한국생산제조학회지
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• 제24권3호
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• pp.270-277
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• 2015

In this paper, we describe the production of a specific electrostatic-type scanning electron microscope based on miniaturization for application in other types of vacuum equipment. The initial configuration of the SEM starts with a minimal configuration that allows people to view sample images. After improving the stability of the SEM operation and resolution, we conducted experiments on identifying the characteristics and development of an einzel-type condenser lens with reference to the demagnification lens system of an SEM. The experiments were conducted at an acceleration voltage of 5 kV and we found the shape of the lens to be more reliable than a conventional lens. The lens was then added to improve the resolution in the nanometer region. The current measured on the sample was approximately 40 pA and its magnification was 4,000 times.

• 전자공학회논문지D
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• 제35D권9호
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• pp.48-53
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• 1998

실리콘 벌크 마이크로머시닝과 표면 마이크로머시닝기술을 혼합하여 새로운 구조의 정전렌즈를 제작하였다. 표면 마이크로머시닝을 위한 구조층과 희생층으로는 폴리실리콘을 사용하였으며 구조층을 열산화막으로 보호하여 실리콘 습식 식각시 손상되지 않도록 하였다. 이전의 마이크로컬럼에 사용되던 정전렌즈에 비하여 이 구조가 갖는 장점은 1) 양극 접합의 수를 줄일 수 있어 구멍간 정렬, 렌즈의 생산성, 신뢰도, 손상 면에서 우수하고, 2) 마이크로컬럼의 집적화를 통한 arrayed lithography에도 유리하다는 것이다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.779-780
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• 2013

• 한국광학회지
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• 제16권5호
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• pp.428-432
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• 2005

마이크로칼럼에 사용되는 전자렌즈는 MEMS 공정으로 정밀하게 가공되어 기존의 전자칼럼에 비하여 광학수차를 최소화 할 수 있으며, 이는 전자칼럼의 성능 향상에 주요한 요소로 작용한다. 따라서 반도체 공정 방식(습식식각과 건식식각)에 의해 형성되는 렌즈구조에 따른 전자 광학계 연구는 중요한 의미가 있다. 마이크로칼럼을 구성하고 있는 전자방출원, 소스렌즈, 디플렉터, 포커스렌즈(Einzel lens) 중에서 전자빔의 특성에 가장 큰 영향을 주는 것은 소스렌즈이다. 본 연구에서는 소스렌즈의 extractor와 limiting aperture의 구조에 따른 전자빔 특성을 조사하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.653-654
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• 2012

• 한국기계가공학회지
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• 제18권7호
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• pp.63-70
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• 2019

An electro-aerodynamic lens for improving the performance of virtual impactor has been proposed in this study. ANSYS FLUENT Release 16.1 was used for numerical analysis of virtual impactor with and without the electro-aerodynamic lens, used to collimate the incoming aerosol particles into a particle beam before injecting the particles into the virtual impactor. Particles supplied to the electro-aerodynamic lens were assumed to be highly charged. By using an aerodynamic lens before the virtual impactor, without any electrostatic effect, it was found that the cut-off diameter of the virtual impactor was reduced from $4.2{\mu}m$ to $0.68{\mu}m$ and that the fine particle contamination problem became more serious. However, by employing the combined electrostatic and aerodynamic effects, that is, by applying electric voltage potential to the electro-aerodynamic lens, the cut-off diameter was found to be further reduced to $0.45{\mu}m$ and the fine particle contamination was eliminated.

• 한국정밀공학회지
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• 제26권4호
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• pp.128-133
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• 2009

Focused-ion-beam (FIB) system is capable of both machining and measuring in nano-scale; hence nano-scale focusing quality is important. This paper investigates design parameters of two electrostatic lenses in order to achieve the best ion beam focusing performance. Commercial SIMION simulator is used to optimize the dimensions of the condenser and objective lenses and investigate the influence of assembly error on focusing quality The simulation results show that the beam focusing quality is not influenced by angle deviation within ${\pm}0.02\;deg$ and geometrical eccentricity within ${\pm}50$ micrometers.