• Journal of Magnetics
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• v.17 no.1
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• pp.61-67
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• 2012

The miniaturization of an electrostatic precipitator has become a key element in successfully constructing an efficient electrostatic precipitator because of the limited space allowed for installation in a subway tunnel. Therefore, the miniaturization of the rapping system of the electrostatic precipitator has also become important. This research proposes a resonant-type electromagnetic vibration exciter as a vibrating rapper for an electrostatic precipitator. The compact vibrating rapper removes collected dust from the collecting plates without direct impact on those collecting plates. To characterize the dynamic performance of the electromagnetic vibration exciter, finite element analysis was performed using a commercial electromagnetic analysis program, MAXEWLL. Moreover, we analyzed the resonant frequency of an electrostatic precipitator, to which the electromagnetic vibration exciter was applied, by ANSYS. Also, to measure the acceleration generated by the electromagnetic vibration exciter, we manufactured a prototype of the ESP and electromagnetic vibration exciter and measured its acceleration at the resonant frequency.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2004.03a
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• pp.271-277
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• 2004

As one of the concepts of the laser/electric hybrid propulsion system, a feasibility study on possibilities of electrostatic acceleration of a laser ablation plasma induced from a solid target was conducted. Energy distributions of accelerated ions were measured by a Faraday cup. A time-of-flight measurement was also conducted for ion velocity measurement. It was found that an average speed of ions from a pure laser ablation in this case was about 20 km/sec for pulse energy of 40 $\mu$J/pulse with pulse width of 250 psec. On the other hand, through an electrostatic field with a + I ,000 V electrode, the speed could be accelerated up to 40 km/sec. It was shown that the electrode with positive potential was more effective than that with negative potential for positive-ion acceleration in laser induced plasma, or pulsed plasma, in which ions were induced with the Coulomb explosion following electrons. In addition, the ion-acceleration or deceleration strongly depended on conditions of pairs of inner diameter and electrodes gap.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.9
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• pp.4136-4141
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• 2013

One of the most significant requisite that should be considered for effective rapping of the electrostatic precipitator using electromagnetic vibration exciter is vibration acceleration and resonance frequency of collecting plates. This vibration acceleration shows its peak points when natural frequencies of the system are corresponded with excitation frequency from the power source, and effective rapping performance can be expected. In this research, extend view of single electrostatic precipitator using one electromagnetic vibration exciter, the system was remodeled by arrangement of the exciters in view of multiple modules of the electrostatic precipitator in fields. And vibration acceleration measurement experiment is performed and measured values are compared with these remodeled systems. By this experimental comparison in series and parallel arrangement, effectiveness of arrangement methods for the electromagnetic vibration exciter, expected rapping performance, and power consumption are verified.

• Journal of Astronomy and Space Sciences
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• v.3 no.2
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• pp.71-79
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• 1986

According to recent satellite observations, strong ion transverse acceleration to the magnetic field(ion conics) has been known. The ion conics may be a result of electrostatic waves frequently observed on the auroral zone. Both linear and nonlinear theory of electrostatic instability driven by an electron current based on 1-dimensional particle simulation experiment have been considered. From the results of simulation strong ion transverse acceleration has been shown.

• 제어로봇시스템학회:학술대회논문집
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• 1996.10a
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• pp.311-314
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• 1996

In contactless disk handling systems based on electrostatic suspension in which the stator is to be transferred, the limited stiffness in lateral direction severely restricts the achievable translational acceleration. In existing stator electrode pattern designs, the magnitude of the lateral force is determined by the magnitude of the control voltages which are applied to the individual electrodes to levitate the disk stably. As a result, the lateral force cannot be set arbitrarily. A new stator electrode pattern is presented for the electrostatic levitation of disk-shaped objects, in particular silicon wafers and aluminum hard disks, which allows the lateral forces to be controlled independently from the levitation voltages. Therefore, greater lateral forces can be obtained, compared with the existing stator designs. Experimental results will be presented for a 4-inch silicon wafer that clearly reveal the increased lateral stiffness by using the proposed stator electrode compared to the conventional electrode pattern.

• Nuclear Engineering and Technology
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• v.21 no.1
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• pp.40-47
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• 1989

For the effective design of a beam forming structure of the negative-ion-based neutral beam injector, a computer program based on a particle simulation model is developed for the calculation of charged particle motions in the electrostatic fields. The motions of negative ions inside the acceleration tube of a multiple-aperture triode are computed at finite time steps. The electrostatic potentials are obtained from the Poisson's equation by the finite difference method. The successive overrelaxation method is used to solve the matrix equation. The particle and force weighting methods are used on a cloud-in-cell model. The optimum design of the beam forming structure has been studied by using this computer code for the various conditions of elctrodes. The effects of the acceleration-deceleration gap distance, the thickness of the deceleration electrode and the shape of the acceleration electrode on beam trajectories are exmined to find the minimum beam divergence. Some numerical illustrations are presented for the particle movements at finite time steps in the beam forming tubes. It is found in this particle simulation modelling that the shape of the acceleration electrode is the most significant factor of beam divergence.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.3
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• pp.520-528
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• 2001

This paper investigates a resonant microaccelerometer that measures acceleration using a built-in micromechanical resonator, whose resonant frequency is changed by the acceleration-induced axial force. A set of design equations for the resonant microaccelerometer has been developed, including analytic formulae for resonant frequency, sensitivity, nonlinearity and maximum stress. On this basis, the sizes of the accelerometer are designed for the sensitivity of 10$^3$Hz/g in the detection range of 5g, while satisfying the conditions for the maximum nonlinearity of 5%, the minimum shock endurance of 100g and the size constraints placed by microfabrication process. A set of the resonant accelerometers has been fabricated by the combined use of bulk-micromachining and surface-micromachining techniques. From a static test of the cantilever beam resonant accelerometer, a frequency shift of 860Hz has been measured for the proof-mass deflection of 4.3${\pm}$0.5$\mu\textrm{m}$; thereby resulting in the detection sensitivity of 1.10${\times}$10$^3$Hz/g. Uncertainty analysis of the resonant frequency output has been performed to identify important issues involved in the design, fabrication and testing of the resonant accelerometer.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.24 no.3
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• pp.270-277
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• 2015

In this paper, we describe the production of a specific electrostatic-type scanning electron microscope based on miniaturization for application in other types of vacuum equipment. The initial configuration of the SEM starts with a minimal configuration that allows people to view sample images. After improving the stability of the SEM operation and resolution, we conducted experiments on identifying the characteristics and development of an einzel-type condenser lens with reference to the demagnification lens system of an SEM. The experiments were conducted at an acceleration voltage of 5 kV and we found the shape of the lens to be more reliable than a conventional lens. The lens was then added to improve the resolution in the nanometer region. The current measured on the sample was approximately 40 pA and its magnification was 4,000 times.

• Resources Recycling
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• v.23 no.6
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• pp.30-39
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• 2014

The trajectories of PCB(Printed Circuit Board) particles in the corona discharge electrostatic separation was simulated. The PCB particles are prepared by crushing bare board, which disassembled from electronic components, consist mostly of copper and FR-4(Flame Retardant Level-4) Firstly, a model was established for calculating of detachment points of PCB particles from the rotating electrode in separator. The model of detachment points was derived from equilibrium of force such as gravity force, centrifugal force, electrostatic force. The trajectories of particles after detachment was calculated by acceleration derived from time-integrating method of motion equation. In this simulation, particle size, supplied voltage, rotation speed of rotating roll electrode and angle of induction electrode were adopted as variables. While the trajectories of FR-4 particles were affected by all variables, rotation speed of rotating roll electrode was dominant variables affecting trajectories of copper particles.

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.29-37
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• 2021

A 7 nm technology node using extreme ultraviolet lithography with a wavelength of 13.5 nm has been recently developed and applied to the semiconductor manufacturing process. Furthermore, the development of sub-3 nm technology nodes continues to be required. In this study, design factors of an electrostatic deflector for an ultra-miniaturized microcolumn system that can realize an electron wavelength of below 1.23 nm with an acceleration voltage of above 1 eV were investigated using a three-dimensional simulator. Particularly, the optimal design of the electrostatic octupole floating deflector was derived by optimizing the design elements and improving the driving method of the 1 keV low energy ultra-miniaturized microcolumn deflector. As a result, the entire wide field of view greater than 330 ㎛ at a working distance of 4 mm was realized with an ultra-high-resolution electron beam spot smaller than 10 nm. The results of this study are expected to be a basis technology for realizing a wafer-scale multi-array microcolumn system, which is expected to innovatively improve the throughput per unit time, which is the biggest drawback of electron beam lithography.