• 제목/요약/키워드: electron microscope analysis

검색결과 1,017건 처리시간 0.028초

자동차용 스틸휠 디스크부품의 성형불량 및 파손사례분석 (Analysis of Damaged Instance and Forming Fault for Disc Part in Automotive Steel Wheel)

  • 이성희;김무연;김태규;윤호영;강석우
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2006년도 춘계학술대회 논문집
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    • pp.234-238
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    • 2006
  • In this research, an analysis of damaged instance and forming fault for disc part in automotive steel wheel was performed. Rolled steel material, which had been used in the manufacturing of the damaged disc part, was prepared for tensile test, quantitative analysis of chemical component and acquirement of scanning electron microscope images. Although the results of mechanical properties and chemical component ratio for the material satisfied the suggested specification, some material inherent problem was found in the scanning electron microscope images. Finally, in an analysis of chemical component for the damaged disc part used in road condition, mismatching of chemical component ratio between the suggested specification and test result was found.

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열전자방사형 주사전자 현미경 전자광학계의 유한요소해석 (Finite Element Analysis for Electron Optical System of a Thermionic SEM)

  • 박근;정현우;김동환;장동영
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회A
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    • pp.1288-1293
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    • 2007
  • The present study covers the design and analysis of a thermionic scanning electron microscope (SEM) column. The SEM column contains an electron optical system in which electrons are emitted and moved to form a focused beam, and this generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system mainly consists of a thermionic electron gun as the beam source, the lens system, the electron control unit, and the vacuum unit. In the design process, the dimension and capacity of the SEM components need to be optimally determined with the aid of finite element analyses. Considering the geometry of the filament, a three-dimensional (3D) finite element analysis is utilized. Through the analysis, the beam emission characteristics and relevant trajectories are predicted from which a systematic design of the electron optical system is enabled. The validity of the proposed 3D analysis is also discussed by comparing the directional beam spot radius. As a result, a prototype of a thermionic SEM is successfully developed with a relatively short time and low investment costs, which proves the adoptability of the proposed 3D analysis.

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SEM용 전자검출기의 제작 및 성능평가 (Manufacture and Performance Estimation of Electron Detector for SEM)

  • 김지원;전종업;부경석
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회A
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    • pp.1282-1287
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    • 2007
  • The nature of the signal collected by an SEM(Scanning Electron Microscope) in order to form images are all dependent on the detector used to collect them, and the quality of an acquired images is strongly influenced by detector performance. Therefore, the development of detector with high performance is very important for improving on the resolution of SEM. This paper presents the manufacture of secondary electron detector and the optimal position of electron detector through numerical analysis in SEM.

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NANO-STRUCTURAL AND NANO-CHEMICAL ANALYSIS OF NI-BASE ALLOY/LOW ALLOY STEEL DISSIMILAR METAL WELD INTERFACES

  • Choi, Kyoung-Joon;Shin, Sang-Hun;Kim, Jong-Jin;Jung, Ju-Ang;Kim, Ji-Hyun
    • Nuclear Engineering and Technology
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    • 제44권5호
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    • pp.491-500
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    • 2012
  • The dissimilar metal joints welded between Ni-based alloy, Alloy 690 and low alloy steel, A533 Gr. B with Alloy 152 filler metal were characterized by using optical microscope, scanning electron microscope, transmission electron microscope, secondary ion mass spectrometry and 3-dimensional atom probe tomography. It was found that in the weld root region, the weld was divided into several regions including unmixed zone in Ni-base alloy, fusion boundary, and heat-affected zone in the low alloy steel. The result of nanostructural and nanochemical analyses in this study showed the non-homogeneous distribution of elements with higher Fe but lower Mn, Ni and Cr in A533 Gr. B compared with Alloy 152, and the precipitation of carbides near the fusion boundary.

Specimen Preparation for Scanning Electron Microscope Using a Converted Sample Stage

  • Kim, Hyelan;Kim, Hyo-Sik;Yu, Seungmin;Bae, Tae-Sung
    • Applied Microscopy
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    • 제45권4호
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    • pp.214-217
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    • 2015
  • This study introduces metal coating as an effective sample preparation method to remove charge-up caused by the shadow effect during field emission scanning electron microscope (FE-SEM) analysis of dynamic structured samples. During a FE-SEM analysis, charge-up occurs when the primary electrons (input electrons) that scan the specimens are not equal to the output electrons (secondary electrons, backscattered electrons, auger electrons, etc.) generated from the specimens. To remove charge-up, a metal layer of Pt, Au or Pd is applied on the surface of the sample. However, in some cases, charge-up still occurs due to the shadow effect. This study developed a coating method that effectively removes charge-up. By creating a converted sample stage capable of simultaneous tilt and rotation, the shadow effect was successfully removed, and image data without charge-up were obtained.

전계방출 투과전자현미경 분석기술을 이용한 Cu 입자 표면산화층의 정밀평가 (Precise Analysis of the Surface Oxidation Layer on Cu Powders Using FE-TEM Techniques)

  • 이태훈;유정호;현문섭;양준모;성미린;권진형;이선영;김정선;백경호
    • 대한금속재료학회지
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    • 제48권1호
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    • pp.57-61
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    • 2010
  • Nanosized surface structures of Cu powders were investigated at the atomic scale by field-emission transmission electron microscope techniques. The nanoscale surface oxide layer on the Cu powder was analyzed to be the $CU_2O$ phase by electron diffraction pattern and electron energy-loss spectroscopy. In addition, it was found from high-resolution transmission electron microscopy study that there are formed no surface oxide layers on the surface of alkanethiol coated Cu powders.

A Site Specific Characterization Technique and Its Application

  • Kamino, T.;Yaguchi, T.;Ueki, Y.;Ohnish, T.;Umemura, K.;Asayama, K.
    • 한국전자현미경학회:학술대회논문집
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    • 한국현미경학회 2001년도 제32차 추계학술대회
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    • pp.18-22
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    • 2001
  • A technique to characterize specific site of materials using a combination of a dedicated focused ion beam system(FIB), and Intermediate-voltage scanning transmission electron microscope(STEM) or transmission electron microscope(TEM) equipped with a scanning electron microscope(SEM) unit has been developed. The FIB system is used for preparation of electron transparent thin samples, while STEM or TEM is used for localization of a specific site to be milled in the FIB system. An FIB-STEM(TEM) compatible sample holder has been developed to facilitate thin sample preparation with high positional accuracy Positional accuracy of $0.1{\mu}m$ or better can be achieved by the technique. In addition, an FIB micro-sampling technique has been developed to extract a small sample directly from a bulk sample in a FIB system These newly developed techniques were applied for the analysis of specific failure in Si devices and also for characterization of a specific precipitate In a metal sample.

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수치해석을 통한 SEM 챔버내의 이차전자 거동해석 및 이차전자 검출기의 최적 장착 위치 선정 (The Behavior of Secondary Electrons and Optimal Mounting Position of a Secondary Electron Detector in SEM with a Numerical Analysis)

  • 부경석;전종업
    • 한국공작기계학회논문집
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    • 제17권4호
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    • pp.15-21
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    • 2008
  • Secondary electron detectors used in scanning electron microscope accept secondary electrons emitted from the specimen and convert them to an electrical signal that, after amplification, is used to modulate the gray-level intensities on a cathode ray tube, producing an image of the specimen. In order to acquire images with good qualities, as many secondary electrons as possible should be reached to the detector. To realize this it is very important to select an appropriate mounting position and angle of the detector inside the chamber of scanning electron microscope. In this paper, a number of numerical simulations are performed to explore the relationships between detection rates of secondary electrons and the values of some parameters, such as distances between the detector and sample, relative mounting positions of scintillator positioned inside the detector with respect to detector cover, two types of mounting angles of the detector. The relationships between detection rates and applied voltages to corona ring and faraday cage, and energies of secondary electrons are investigated as well.