• Title/Summary/Keyword: electron microscope

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Nano-scale pattern delineation by fabrication of electron-optical lens for micro E-beam system (마이크로 전자빔 시스템을 위한 전자광학렌즈의 제작에 의한 나노 패턴 형성)

  • Lee, Yong-Jae;Park, Jung-Yeong;Chun, Kuk-Jin;Kuk, Young
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.35D no.9
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    • pp.42-47
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    • 1998
  • We have fabricated electron-optical lens for micro E-beam system that can overcome the limitation of current E-beam lithography. Our electron-optical lens consists of multiple silicon electrodes which were fabricated by micromachining technology and assembled by anodic bonding. The assembled system was installed in UHV chamber to observe the emission characteristics of focused electrons by the electro-optical lens. We used STM(Scanning Tunneling Microscope) tip for electron source. By performing lithography with the focused electrons with PMMA(poly-methylmethacrylate) as E-beam resist. We could draw 0.13${\mu}{\textrm}{m}$ nano-scale lines.

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A Scanning Electron Microscopic Study on Korean Rhus Lacquer Coats (한국산(韓國産) 옻칠도막(漆塗膜)에 관한 주사전자현미경적(走査電子顯微鏡的) 고찰(考察))

  • Lee, Phil-Woo;Kim, Hyun-Joong
    • Journal of the Korean Wood Science and Technology
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    • v.15 no.3
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    • pp.24-33
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    • 1987
  • This study was executed to investigate scanning electron microscopic characteristics of Korean Rhus lacquer coats. With the unrefined coat, distilled water, sodium hydroxide, acetic acid, ethyl alcohol, cold-check test, and accelerated weathering were performed after refining treatment. These treated lacquer coats were discussed through observation by scanning electron microscope and the obtained results were summarized as follows: 1. Compared with unrefined coat, the refined coat of Korean Rhus lacquer showed more even surface with regular distribution of dispression. 2. Korean Rhus lacquer coat heated at $120^{\circ}C$ for 3 hours revealed no observable difference irrespective of refining and unrefining. 3. Korean Rhus lacquer coat treated by distilled water, sodium hydroxide, acetic acid. ethyl alcohol, cold-check test. and ultraviolet radiation showed significant characteristics compared with untreated coat. Especially. large deformation and checkings were observed by cold-check test and ultraviolet radiation respectively. 4. The Korean Rhus lacquer coat radiated by ultraviolet ray showed 0.11 duller and 1.41 brighter than non-radiated coat through color difference calculator.

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Comparison of Yittria Stabilized Zirconia Electrolytes(YSZ) for Thin Film Solid Oxide Fuel Cell by Atomic Layer Deposition and Sputtering (원자층 증착법과 스퍼터링을 이용한 고체산화물 연료전지용 YSZ 전해질에 관한 연구)

  • Tanveer, Waqas Hassan;Ha, Seung Bum;Ji, Sanghoon;Cha, Suk Won
    • 한국신재생에너지학회:학술대회논문집
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    • 2011.11a
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    • pp.84.2-84.2
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    • 2011
  • In this research, two thin film deposition techniques, Atomic Layer Deposition and Sputtering are carried out for the fabrication of Yittria Stabilized Zirconia electrolyte for thin film Solid Oxide Fuel Cell. Zirconium to Yittrium ratio for both cases is about 1/8. Scanning Electron Microscope(SEM) image shows that the growth rate per hour for Atomic Layer Deposition is faster than for sputtering. X-ray Photo-electron Spectroscopy(XPS) shows that the peaks of both Zirconia and Yittria shift towards higher bending energy for the case of Atomic Layer deposition and thus are more strongly attached to the substrate. Later, Nyquist plot was used to compare the conductivity of Yittria Stabilized Electrolyte for both cases. The conductivity at $300^{\circ}C$ for Atomic Layer Deposited Yittria Stabilized Zirconia is found to be $5{\times}10^{-4}S/cm$ while that for sputtered Yittria Stabilized Zirconia is $2{\times}10^{-5}S/cm$ at the same temperature. The reason for better performance for Atomic Layered YSZ is believed to be the Nano-structured layer fabrication that aids in along the plane conduction as compared to the columnarly structured Sputtered YSZ.

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Application on Microwave Energy in the Preparation of Fish Samples for Electron Microscopic Observation

  • Kim Soo Jin;Oh Hae Keun;Song Young-Hwan;Chung Hyun-Do;Kim Young-Tae;Park Nam-Kyu;Choi Tae-Jin
    • Fisheries and Aquatic Sciences
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    • v.1 no.2
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    • pp.187-191
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    • 1998
  • Chemotherapy can not be applied for the control of fish viral diseases because viruses depend on host machinery for their replication. Although new control strategies including vaccination are under development, avoidance of virus introduction by rapid and correct diagnosis is the best way of fish viral disease control. Although observation of virus particles with an electron microscope is an easy method for virus detection, it take a few days for the sample preparation. In order to shorten the sample preparation time, microwave radiation was applied in the procedure. With this method, 15 seconds was enough for fixation of virus infected fish samples or cultured cells inoculated with infectious hematopoietic necrosis virus, which takes 2-4 hours with routine methods. Also four minutes was enough for polymerization of embedding resin which takes 24-48 hours with routine methods. Samples prepared with microwave were good enough for direct electron microscopic observation and immunogold labeling assay.

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