• 한국공작기계학회논문집
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• 제16권5호
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• pp.96-100
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• 2007

Condenser lens and objective lens are used to demagnify the image of the crossover to the final spot size. In lens, electrons are focused by magnetic fields. This fields is fringing field. It is important in electron focusing. Electron focusing occurs the radial component field and axial component field. Radial component produces rotational force and axial component produces radial force. Radial force causes the electron's trajectory to curve toward the optic axis and corss it. Focal length decreases as the current of lens increases. In this paper, we use the focal length for desiging the hardware of lens current control and present the results.

• 한국레이저가공학회지
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• 제12권2호
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• pp.26-30
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• 2009

Scanning Electron Microscopy (SEM) includes high voltage generator, electron gun, column, secondary electron detector, scan coil system and image grabber. Column includes electron lenses (condenser lens and objective lens). Condenser lens generates fringe field, makes focal length and control spot size. Focal length represents property of lens. Objective lens control focus. Most of the electrons emitted from the filament, are captured by the anode. The portion of the electron current that leaves the gun through the hole in the anode is called the beam current. Electron beam probe is called the focused beam on the specimen. Because of the lens and aperture, the probe current becomes smaller than the beam current. It generate various signals(backscattered electron, secondary electron) in an interaction with the specimen atoms. In this paper, we describe the result of research to develop the core elements for low-resolution SEM.

• 한국정밀공학회지
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• 제26권11호
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• pp.92-98
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• 2009

The scanning electron microscope (SEM) contains an electron optical system in which electrons are emitted and moved to form a focused beam, and generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system usually contains two condenser lenses and an objective lens. The condenser lenses generate a magnetic field that forces the electron beams to form crossovers at desired locations. The objective lens then focuses the electron beams on the specimen. The present study covers the design and analysis of an objective lens for a thermionic SEM. A finite element (FE) analysis for the objective lens is performed to analyze its magnetic characteristics for various lens designs. Relevant beam trajectories are also investigated by tracing the ray path of the electron beams under the magnetic fields inside the objective lens.

• 반도체디스플레이기술학회지
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• 제8권4호
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• pp.43-48
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• 2009

The aim of this paper is to describe the development of the electron-beam optic analysis algorithm for simulating the e-beam behavior concerned with electrostatic lenses and their focal properties in the micro-column of the multi-beam lithography system. The electrostatic lens consists of an array of electrodes held at different potentials. The electrostatic lens, the so-called einzel lens, which is composed of three electrodes, is used to focus the electron beam by adjusting the voltages of the electrodes. The optics of an electron beam penetrating a region of an electric field is similar to the situation in light optics. The electron is accelerated or decelerated, and the trajectory depends on the angle of incidence with respect to the equi-potential surfaces of the field. The performance parameters, such as the working distances and the beam diameters are obtained by the computational simulations as a function of the focusing voltages of the einzel lens electrodes. Based on the developed simulation algorithm, the high performance of the micro-column can be achieved through optimized control of the einzel lens.

• 한국공작기계학회논문집
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• 제16권6호
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• pp.163-167
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• 2007

A field emission electron gun including 3 electrodes including one cathode and two anodes is very important for high resolution electron microscope. To have functions to control the initially-emitted electron beam, two anodes act as an electrostatic lens according to equipotential lines by adjusting the spot size, intensity, and working distance. To verify the action of the electron beam by the electrostatic lens by changing several parameters such as electrode shape, displacement and applied voltage to the electrodes, the two lenses were design and simulated and then their performances were analyzed with angular beam intensity(distribution), electrical optic axis variation and their stability.

• 대한의생명과학회지
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• 제4권2호
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• pp.77-86
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• 1998

백내장 환자의 수정체낭에서 연령차이에 따른 아교질과 type IV 아교섬유의 면역화학 반응 양상, apoptosis현상 및 수정체 상피세포의 전자현미경적인 변화를 관찰하여 다음과 같은 결과를 얻었다. Van Gieson염색소견은 수정체낭의 앞층과 앞아래층에서 짙은 염색반응이 있었으나 나이가 많을수록 반응이 감소되었다. Type IV 아교섬유 면역화학반응은 수정체낭의 앞층과 상피세포 주위에서 현저하게 일어났으며 나이가 많을수록 반응이 감소되었다. Periodic acid skiff-alcian blue반응의 변화는 수정체낭의 앞층에서 나이가 많을수록 현저하게 감소되었다. 세포자연사 현상은 수정체낭 상피세포의 핵내에서 일어났으며 나이가 많을 수록 반응이 일어나는 세포의 수가 감소되는 경향을 보였다. 수정체 상피세포의 전자현미경적인 변화는 40대까지는 외측 세포막의 folding (이하 주름)과 세포질내 공포가 증가되고 골지복합체가 발달되었으나 60대에서는 부분적으로 돌기는 내지만 골지복합체는 관찰되지 않았다. 수정체 상피세포의 바닥막부분에서는 나이가 들수록 거친 섬유들이 수정체 상피세포와 수정체낭을 격리시키고 있었으며, 수정체낭와 중간층은 40대군은 특징적으로 과립상의 구조물들이 집단적으로 축적된 부분들이 관찰되었고 60대군에서는 선상의 섬유성구조들이 나타났으며 짙은 전자밀도를 가진 과립의 수가 감소하였다.

• 한국산학기술학회논문지
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• 제9권1호
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• pp.23-28
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• 2008

마이크로칼럼에 사용되는 전자렌즈는 MEMS 공정으로 정밀하게 가공되어 기존의 전자칼럼에 비하여 광학수차를 최소화 할 수 있으며, 이는 전자칼럼의 성능 향상에 주요한 요소로 작용한다. 습식 식각과 건식 식각에 의해 형성되는 전자렌즈의 모양과 배열조합에 따른 전자 광학계 연구는 중요한 의미가 있다. 마이크로칼럼은 전자방출원, source 렌즈, deflector, focus 렌즈(Einzel 렌즈)로 구성되는데, 전자빔의 특성에 가장 큰 영향을 주는 source 렌즈의 구성 요소 중 extractor와 limiting aperture의 모양에 따른 전자빔 특성을 조사하여 마이크로칼럼 제작에 있어서 최적화된 전자렌즈 조합을 도출하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.149-153
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• 2005

The electron beam machining provides very high resolution up to nanometer scale, hence the E-beam writing technology is rapidly growing in MEMS and nano-engineering areas. In the optical column of the e-beam writer, there are several lenses condensing and focusing electron beams from electron gun with fringing magnetic fields. The polepieces of these lenses are usually made with high purity iron which is hard to fabricate and very expensive. In this paper, the possibility of using polepiece of object lens composed with pure iron and low carbon steel was examined to reduce cost. The magnetic field at object lens was calculated with finite element method, and practical focusing qualities of SEM pictures were observed comparing for the object lens polepieces with pure iron and two type of composed with low carbon steel.

• 한국생산제조학회지
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• 제19권5호
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• pp.705-709
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• 2010

It is quite complex to draw the geometry of electron trajectories in electron optics because such trajectories have various aberrations that cannot be easily calculated. However, if we need to know roughly the geometry, the focal length and the principal planes in order to understand the properties of column, a simple numerical solution can be a useful method. We are developing the electron beam machining system based on SEM. In this paper, we show rough geometry, focal length and principal planes by a numerical solution for electron lens I in our column. These results will be utilized in developing a simulation program for electron optics.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.193-194
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• 2011