• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.26 no.3
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• pp.270-280
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• 2016

This paper investigates the evolution of EM admittance of piezoelectric transducers mounted on a notched beam from wave propagation perspective. A finite element analysis is adopted to obtain numerical solutions for Lamb waves reverberating on the notched beam. The mode-converted Lamb wave signals due to a notch are extracted by using the polarization characteristics of piezoelectric transducers collocated on the beam. Then, a series of temporal spectrums are computed to demonstrate the evolution of EM admittance through fast Fourier transform of the mode-converted Lamb wave signals which are consecutively truncated in the time domain. When truncation time is relatively small, the corresponding temporal spectrum is governed by the characteristics of the input driving frequency. As truncation time becomes large, however, the modal characteristics of the notched beam play a crucial role in the temporal spectrum within the input driving frequency band. This implies that mode-converted Lamb waves reverberating on the beam contributes to the resonance of the beam. The root mean square values are computed for the temporal spectrums in the vicinity of each resonance frequency. The root mean square values increase monotonically with respect to truncation time for any resonance frequencies. Finally the implications of the numerical observation are discussed in the context of damage detection of a beam.

• Journal of the Microelectronics and Packaging Society
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• v.12 no.3 s.36
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• pp.267-274
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• 2005

This paper presents the fabrication of surface acoustic wave (SAW)-based pressure sensor for long-term stable mechanical compression force measurement. SAW pressure sensor has many attractive features for practical pressure measurement: no battery requirement, wireless pressure detection especially at hazardous environments, and easy other functionality integrations such as temperature, humidity, and RFID. A $41^{\circ}$ YX $LiNbO_3$ piezoelectric substrate was used because of its high SAW propagation velocity and large values of electromechanical coupling factors $K^2$. A silicon substrate with $\~200{\mu}m$ deep cavity was bonded to the diaphragm with epoxy, in which gold was covered all over the inner cavity in order to confine electromagnetic energy inside the sensor, and provide good isolation of the device from its environment. The reflection coefficient $S_{11}$ was measured using network analyzer. High S/N ratio, sharp reflected peaks, and clear separation between the peaks were observed. As a mechanical compression force was applied to the diaphragm from top with extremely sharp object, the diaphragm was bended, resulting in the phase shifts of the reflected peaks. The phase shifts were modulated depending on the amount of applied mechanical compression force. The measured $S_{11}$ results showed a good agreement with simulated results obtained from equivalent admittance circuit modeling.