• Title/Summary/Keyword: electroless copper

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Fabrication of Micro-Heatsink using Nanotemplate (나노 템플레이트를 이용한 마이크로 히트 싱크)

  • 함은주;손원일;홍재민
    • Journal of the Microelectronics and Packaging Society
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    • v.10 no.1
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    • pp.7-11
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    • 2003
  • The semiconductor chips or electronic components generate heat, which causes malfunction of the parts when it was not cooled properly. Bulky heat sink and cooling fan are used to get rid of the heat. However, with this bulky system, it is hard to integrate the electronics system in a small scale. The cooling efficiency of the system depends on the surface area of the heat sink, thermal conductivity of the material and the method of integration. In order to develop a novel cooling system, a micro-heatsink with a large surface area while retaining small volume was fabricated by electroless deposition of gold/copper inside a Track-etched membrane. The structure of the micro-heatsink was investigated using SEM or optical microscope. It was also found that the micro-heatsink is more efficient than a flat copper plate.

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Thermophysical Properties of Copper/graphite Flake Composites by Electroless Plating and Spark Plasma Sintering (무전해도금 및 방전 플라즈마 소결을 이용한 구리/흑연 복합재료 제조 및 열물성 특성 평가)

  • Lee, Jaesung;Kang, Ji Yeon;Kim, Seulgi;Jung, Chanhoe;Lee, Dongju
    • Journal of Powder Materials
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    • v.27 no.1
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    • pp.25-30
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    • 2020
  • Recently, the amount of heat generated in devices has been increasing due to the miniaturization and high performance of electronic devices. Cu-graphite composites are emerging as a heat sink material, but its capability is limited due to the weak interface bonding between the two materials. To overcome these problems, Cu nanoparticles were deposited on a graphite flake surface by electroless plating to increase the interfacial bonds between Cu and graphite, and then composite materials were consolidated by spark plasma sintering. The Cu content was varied from 20 wt.% to 60 wt.% to investigate the effect of the graphite fraction and microstructure on thermal conductivity of the Cu-graphite composites. The highest thermal conductivity of 692 W m-1K-1 was achieved for the composite with 40 wt.% Cu. The measured coefficients of thermal expansion of the composites ranged from 5.36 × 10-6 to 3.06 × 10-6K-1. We anticipate that the Cu-graphite composites have remarkable potential for heat dissipation applications in energy storage and electronics owing to their high thermal conductivity and low thermal expansion coefficient.

Study on the Thermal Properties of the Electroless Copper Interconnect in Integrated Circuits (집적회로용 무전해도금 Cu배선재료의 열적 특성에 관한 연구)

  • 김정식;이은주
    • Journal of the Microelectronics and Packaging Society
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    • v.6 no.1
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    • pp.31-37
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    • 1999
  • In this study, the thermal property and adhesion of the electroless-deposited Cu thin film were investigated. The multilayered structure of Cu /TaN /Si was fabricated by electroless-depositing the Cu thin layer on the TaN diffusion barrier which was deposited by MOCVD on the Si substrate. The thermal stability was investigated by measuring the resistivity as post-annealing temperature for the multilayered Cu /TaN /Si specimen which was annealed at atmospheres of $H_2$and Ar gases, respectively. The adhesion strength of Cu films was evaluated by the scratch test. The adhesion of the electroless-deposited Cu film was compared with other deposition methods of thermal evaporation and sputtering. The scratch test showed that the adhesion of electroless plated Cu film on TaN was better than that of sputtered Cu film and evaporated Cu film.

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Electromagnetic Wave Shielding Effect of Polyester Fabrics Chemically Plated with Copper and Nickel (무전해 금속 도금된 폴리에스테르 섬유의 전자파 차폐성)

  • Son, Ji-Hyun;Chun, Tae-Il
    • Proceedings of the Korean Society of Dyers and Finishers Conference
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    • 2004.11a
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    • pp.238-244
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    • 2004
  • In this study we have examined Copper and Nickel double metal layer on the synthetic fabrics by electroless chemical plating. We have focused on the shielding effect of the four kinds of woven and none-woven structure against electromagnetic fields. The shielding effectiveness of Copper and Nickel double metal layer showed between 90dB and 70dB, which are closely related to the fabric structure, that is cover factor and density. The more dense, The better shielding effect.

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Alternative Eletroless Copper Plating Process Utilizing Silver Catalyst on Poly(Ethylene Terephthalate) (PET위 Silver Catalyst를 이용한 무전해 구리 도금 대안 공정)

  • Lee, Hong-Gi;Heo, Jin-Yeong;Im, Yeong-Saeng;Lee, Geon-Hyeong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2014.11a
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    • pp.127-128
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    • 2014
  • 현재 기술 산업에서 PET위 무전해 도금을 실행하기 위해 다양한 전처리 공정과 Catalyst가 소개되고 있다. 그 중에서 가장 일반적으로 사용되고 있는 Catalyst는 Palladium으로서 Tin과 산화 환원 반응으로 Electroless Copper Deposition 단계에서 구리 도금의 Target으로 작용하고 있다. 하지만 상대적으로 Palladium은 생산 비용이 높으며 Tin은 쉽게 산화되는 문제점이 남아 있다. 이를 대체하기 위한 대안 공정으로서 Palladium 대신 Silver를 이용하여 Catalyst로서의 역할을 하는 공정이다. 이전에 PET위 전처리 공정으로 Ultra Violet을 사용하여 표면을 개질 시키는 방법을 연구했으며, 그 후 Potassium Permanganate와 Silver Catalyst의 Mechanism을 연구 했다. PET 표면 개질을 거치면서 화학 구조가 바뀌어 표면에 Carbon Carbon Double Bond를 형성한다. 이때 Permanganate ion이 새로이 형성된 이중 결합과 반응하여 두 개의 extra-OH functional group을 생성함과 동시에 $MnO_2$를 만들어 표면에 흡착 시킨다. $MnO_2$는 전위차에 의해 Silver Ion과 Redox Reaction을 일으키며 실질적인 Catalyst 역할을 하게 된다. Silver Catalyst는 무전해 구리 도금 용액 안에서 Copper의 Target으로 작용한다.

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Etchless Fabrication of Cu Circuits Using Wettability Modification and Electroless Plating (젖음성 차이와 무전해도금을 이용한 연성 구리 회로패턴 형성)

  • Park, Sang-Jin;Ko, Tae-Jun;Yoon, Juil;Moon, Myoung-Woon;Han, Jun Hyun
    • Korean Journal of Materials Research
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    • v.25 no.11
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    • pp.622-629
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    • 2015
  • Cu circuits were successfully fabricated on flexible PET(polyethylene terephthalate) substrates using wettability difference and electroless plating without an etching process. The wettability of Cu plating solution on PET was controlled by oxygen plasma treatment and $SiO_x$-DLC(silicon oxide containing diamond like carbon) coating by HMDSO(hexamethyldisiloxane) plasma. With an increase of the height of the nanostructures on the PET surface with the oxygen plasma treatment time, the wettability difference between the hydrophilicity and hydrophobicity increased, which allowed the etchless formation of a Cu pattern with high peel strength by selective Cu plating. When the height of the nanostructure was more than 1400 nm (60 min oxygen plasma treatment), the reduction of the critical impalement pressure with the decreasing density of the nanostructure caused the precipitation of copper in the hydrophobic region.