• 제목/요약/키워드: electrochemical behavior

검색결과 803건 처리시간 0.025초

Cu ECMP 공정에서 전해액이 연마거동에 미치는 영향 (The Effect of Electrolytes on Polshing Behavior in Cu ECMP)

  • 권태영;김인권;김태곤;조병권;박진구
    • 한국재료학회지
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    • 제18권6호
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    • pp.334-338
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    • 2008
  • The purpose of this study is to characterize various electrolytes on electrochemical mechanical planarization (ECMP). The ECMP system was modified from conventional CMP system to measure the potentiodynamic curve and removal rate of Cu. The potentiodynamic curves were measured in static and dynamic states in investigated electrolytes using a potentiostat for the evaluation of the polishing behavior on ECMP. KOH (alkaline) and $NaNO_3$ (salt) were selected as electrolytes which have high conductivity. In static and dynamic states, the corrosion potential decreased and the corrosion current increased as a function of the electrolyte concentration. But, the electrochemical reaction was prevented by mechanical polishing effect in the dynamic state. The static etch and removal rate were measured as functions of concentration and applied voltage. When $NaNO_3$ was used, the dissolution was much faster than that of KOH. It was concluded that the removal rate was strongly depended on electrochemical dissolution. The removal rate increased up to 350 nm/min in $NaNO_3$ based electrolyte.

Electrochemical Study of [Ni63-Se)2μ4-Se)3(dppf)3] Cluster and Its Catalytic Activity towards the Electrochemical Reduction of Carbon Dioxide

  • Park, Deog-Su;Jabbar, Md. Abdul;Park, Hyun;Lee, Hak-Myoung;Shin, Sung-Chul;Shim, Yoon-Bo
    • Bulletin of the Korean Chemical Society
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    • 제28권11호
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    • pp.1996-2002
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    • 2007
  • The redox behavior of a [Ni6(μ3-Se)2(μ4-Se)3(Fe(η 5-C5H4P-Ph2)2)3] (= [Ni-Se-dppf], dppf = 1,1-bis(diphenylphosphino) ferrocene) cluster was studied using platinum (Pt) and glassy carbon electrodes (GCE) in nonaqueous media. The cluster showed electrochemical activity at the potential range between +1.6 and ?1.6 V. In the negative region (0 to ?1.6 V), the cluster exhibited two-step reductions. The first step was one-electron reversible, while the second step was a five-electron quasi-reversible process. On the other hand, in the positive region (0 to +1.6 V), the first step involved one-electron quasi-reversible process. The applicability of the cluster was found towards the electrocatalytic reduction of CO2 and was evaluated by experiments using rotating ring disc electrode (RRDE). RRDE experiments demonstrated that two electrons were involved in the electrocatalytic reduction of CO2 to CO at the Se-Ni-dppf-modified electrode.

용사 도막의 내식성에 관한 전기화학적 평가 (An Electrochemical Evaluation on the Corrosion Property of Metallizing Film)

  • 신중하;문경만
    • Corrosion Science and Technology
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    • 제9권6호
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    • pp.325-330
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    • 2010
  • Many surface protection methods have been developed to apply for constructional steels used under severe corrosive environment. Thermal spray coating has been known to be an attractive technique due to its relatively high coating speed. Furthermore high corrosion resistance of coated film with thermal spray is required to expand its application. Four types of coated films(DFT:300 um) such as pure zinc, pure aluminum and two Al-Zn alloy (Al:Zn=85:15 and Al:Zn=95:5) onto the carbon steel (SS401) were prepared with arc spray, and the corrosion behavior of their samples were evaluated by electrochemical method in this study. Pure aluminum sample showed high corrosion resistance behavior exposed to sea water solution and pure zinc and alloy (Al:Zn=95:5) samples followed pure aluminum sample. The other alloy(Al:Zn=85:15) so called galvalume coated onto the carbon steel ranks the 4th corrosion resistance in this study. The results of porosity ratio of those samples by observation are well matched with the electrochemical data.

소금용액에 포함된 글루코오스 농도의 전기화학적 측정 (Electrochemical Determination of Glucose Concentration Contained in Salt Solution)

  • 김영한
    • 한국항만학회지
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    • 제14권4호
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    • pp.475-479
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    • 2000
  • A possibility of the implementation of a quartz crystal sensor to the determination of chemical oxygen demand is examined by checking the electrochemical behavior of the sensor in a glucose solution. Since the surface of a quartz crystal has to be oxidized, a relatively active metal is coated on the surface of a usual 9 MHz AT-cut crystal. The electrochemical behavior is investigated by measuring the changes of current, resonant frequency and resonant resistance while a constant potential is applied. The crystal is installed in a specially designed container, and a quartz crystal analyzer is utilized to measure the frequency and resistance simultaneously. The variations of the measurements are examined at different concentrations of glucose solution, and a proper relation between the concentrations of glucose solution, and a proper relation between the concentration and the measurements is analyzed. As a result, it is found that a linear relation between the concentration of less than 900 ppm and the peak current when a constant potential of -180 mV (SSCE) is applied. The relation can be utilized for the determination of glucose concentration in sea water, and considering a direct relation between gluose concentration and chemical oxygen demand tells a possibility of the measurement of chemical oxygen demand using quartz crystal oscillators.

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천연해수 용액에서 STS 304와 용융 알루미늄 도금된 STS 304의 캐비테이션-침식 환경 하에서의 전기화학적 특성 (Electrochemical Characteristics under Cavitation-Erosion Environment of STS 304 and Hot-Dip Aluminized STS 304 in Sea Water Solution)

  • 정상옥;김성종
    • 한국표면공학회지
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    • 제49권1호
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    • pp.26-31
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    • 2016
  • In this paper, the characteristics of a cavitation-erosion damage behavior on the STS 304 and hot-dip aluminized STS 304 under cavitation environment in sea water solution was investigated. The electrochemical experiments were carried out by potential measurement, anodic/cathodic polarization test, Tafel analysis, and also galvanostatic experiment in current density variables for the samples. The apparatus of cavitation-electrochemical experiment was manufactured in compliance with modified ASTM G-32 standard, with the conditions of sea water temperature of $25^{\circ}C$ and the measurement, amplitude of $30{\mu}m$. The damage behavior was analyzed by an observation of surface mophologies and a measurement of damage depth by a scanning electron microscope(SEM) and a 3D microscope, respectively, after electrochemical test. After polarization experiment under cavitation environment, much higher damage depths for the hot-dip aluminized STS 304 were observed comparing to the untreated STS 304. In addition, higher corrosion current density in hot-dip aluminized STS 304 presented than that of untreated STS 304 as a result of Tafel analysis.

산성비 환경을 모사한 수용액에서 염화물 농도에 따른 전기자동차 배터리 하우징용 재료의 전기화학적 특성 연구 (Investigation on Electrochemical Characteristics of Battery Housing Material for Electric Vehicles in Solution Simulating an Acid Rain Environment with Chloride Concentrations)

  • 신동호;김성종
    • Corrosion Science and Technology
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    • 제21권2호
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    • pp.147-157
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    • 2022
  • Electrochemical characteristics and damage behavior of 6061-T6 aluminum alloy used as a battery housing material for electric vehicles were investigated in solution simulating the acid rain environment with chloride concentrations. Potentiodynamic polarization test was performed to analyze electrochemical characteristics. Damage behavior was analyzed through Tafel analysis, measurement of damage area, weight loss, and surface observation. Results described that corrosion current density was increased rapidly when chloride concentration excceded 600 PPM, and it was increased about 7.7 times in the case of 1000 PPM compared with 0 PPM. Potentiodynamic polarization experiment revealed that corrosion damage area and mass loss of specimen increased with chloride concentrations. When chloride concentration was further increased, the corrosion damage area extended to the entire surface. To determine damage tendency of pitting corrosion according to chloride concentration, the ratio of damage depth to width was calculated. It was found that the damage tendency decreased with chloride concentrations. Thus, 6061-T6 aluminum alloy damage becomes larger in the width direction than in the depth direction when a small amount of chloride is contained in an acid rain environment.

산화제 및 연마제 첨가를 통한 Nickel CMP 특성 개선 연구 (Improvement of Chemical Mechanical Polishing (CMP) Performance of Nickel by Additions of Abrasive and Various Oxidizers)

  • 최권우;김남훈;서용진;이우선
    • 한국전기전자재료학회논문지
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    • 제18권7호
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    • pp.605-609
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    • 2005
  • Chemical mechanical polishing (CMP) of Ni was performed by the various ratios of four kinds of oxidizers and an addition of alumina powders as an abrasive in each slurry with the different oxidizers. Moreover, the interaction between the Ni and the each oxidizer was discussed by potentiodynamic polarization measurement, in order to compare the effects of Ni-CMP and electrochemical characteristics on the Ni with the different oxidizers. As an experimental result, the removal rate of Ni reached a maximum at 1 $vol\%$ of $H_2O_2$. Also the removal rates of Ni increased with the audition of alumina abrasives in each slurry. The potentiodynamic polarization of Ni under dynamic condition showed a significant difference in electrochemical behavior by addition of $H_2O_2$ in solutions. Ni showed the perfect passivation behavior in solution without $H_2O_2$ under potentiodynamic polarization condition, while active dissolution dominates in solution with the addition of $H_2O_2$. The results indicate that the surface chemistry and electrochemical characteristics of Ni play an important role in controlling the polishing behavior of Ni.

희토류금속(III) 착물들의 합성과 전자적 구조와 전기화학적 거동에 관한 연구 (II) (A Study on the Synthesis, Electronic Structure, and Electrochemical Behavior of Rare Earth Metal(III) Complexes (II))

  • 최칠남;김세봉;박면용
    • 대한화학회지
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    • 제37권10호
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    • pp.895-902
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    • 1993
  • 란탄나이드 3가($Pr^{3+}$$Dy^{3+}$)와 유기 리간드를 (phen', terpy') 착물들의 거동을 UV/vis 분광분석, 자기화 그리고 전기화학적 방법에 의해 조사하였다. 착물들의 결정장 갈라짐 에너지 크기와 짝지움에너지 그리고 스핀상태는 착물들의 스펙트라로부터 얻었다. 이들 착물들에 대한 전지화학적 거동은 비수용매속에서 순환 전압전류법에 의해 관찰하였다. 이들 환원피크는 전자 전이에 의한 비가역적인 2단계의 환원 과정이었다.

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조밀한 표면조직을 갖는 탄소재료의 Impedance Spectroscopy를 통한 전기화학적 거동의 해석 (A Study on the Electrochemical Behavior of Carbon Material with Compact Surface Using Impedance Spectroscopy)

  • 오한준;이종호;이영훈;고영신
    • 대한화학회지
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    • 제40권5호
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    • pp.308-316
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    • 1996
  • Impedance Spectroscopy를 통하여 조밀한 표면조직을 갖는 glassy carbon과 PVDF 합성흑연의 표면에 대한 전기화학적 거동을 조사하였다. 이들 두 탄소재료는 모두 전압에 대한 높은 Faraday-임피던스의존성이 나타났으며, 이를 평가하기 위한 등가회로는 PVDF 흑연의 경우 lassy carbon의 등가회로에 소수성 결합제에 의한 저항과 축전용량이 추가된 형태로 나타났다. 또한 디들 재료는 표면의 차이로 인한 전기화학적 거동의 차이도 나타났다.

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오스뮴-쿠페론의 전기화학적 행동 및 응용 (Electrochemical behavior and Application of Osmium-Cupferron Complex)

  • 권영순;정미영
    • 분석과학
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    • 제16권3호
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    • pp.198-205
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    • 2003
  • 쿠페론은 nitrosophenylhydroxylamine의 ammonium salt로서 흡착촉매 벗김법 (AdCtSV)에서 리간드의 역할을 하고 동시에 촉매 역할을 한다고 알려져 있다. 순환 전압전류법을 이용하여, 1 mM 인산염 완충용액에서 오스뮴-쿠페론 착물의 전기화학적 행동을 살펴보았다. 오스뮴 정량의 최적 조건은 1 mM 인산염 완충용액 (pH 6.0), 0.1 mM 쿠페론의 용액에서 주사속도는 100 mV/s 이었다. 이 조건에서 농도 변화에 따른 선형 주사 전압곡선의 환원 봉우리 전류변화를 이용하여 얻은 오스뮴의 검출 한계 ($3{\sigma}$)는 $1.0{\times}10^{-7}M$이다.