• 제목/요약/키워드: electrochemical analysis

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Sodium Periodate 기반 Slurry의 pH 변화가 Ru CMP에 미치는 영향 (Effect of pH in Sodium Periodate based Slurry on Ru CMP)

  • 김인권;조병권;박진구
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.117-117
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    • 2008
  • In MIM capacitor, poly-Si bottom electrode is replaced with metal bottom electrode. Noble metals can be used as bottom electrodes of capacitors because they have high work function and remain conductive in highly oxidizing conditions. In addition, they are chemically very stable. Among novel metals, Ru (ruthenium) has been suggested as an alternative bottom electrode due to its excellent electrical performance, including a low leakage of current and compatibility to high dielectric constant materials. Chemical mechanical planarization (CMP) process has been suggested to planarize and isolate the bottom electrode. Even though there is a great need for development of Ru CMP slurry, few studies have been carried out due to noble properties of Ru against chemicals. In the organic chemistry literature, periodate ion ($IO_4^-$) is a well-known oxidant. It has been reported that sodium periodate ($NaIO_4$) can form $RuO_4$ from hydrated ruthenic oxide ($RuO_2{\cdot}nH_2O$). $NaIO_4$ exist as various species in an aqueous solution as a function of pH. Also, the removal mechanism of Ru depends on solution of pH. In this research, the static etch rate, passivation film thickness and wettability were measured as a function of slurry pH. The electrochemical analysis was investigated as a function of pH. To evaluate the effect of pH on polishing behavior, removal rate was investigated as a function of pH by using patterned and unpatterned wafers.

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Effect of Niobium on the Electronic Properties of Passive Films on Zirconium Alloys

  • Kim, Bo Young;Kwon, Hyuk Sang
    • Corrosion Science and Technology
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    • 제2권2호
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    • pp.68-74
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    • 2003
  • The effects of Niobium on the structure and properties(especially electric properties) of passive film of Zirconium alloys in pH 8.5 buffer solution are examined by the photo-electrochemical analysis. For Zr-xNb alloys (x = 0, 0.45, 1.5, 2.5 wt%), photocurrent began to increase at the incident energy of 3.5 ~ 3.7 eV and exhibited the $1^{st}$ peak at 4.3 eV and the $2^{nd}$ peak at 5.7 eV. From $(i_{ph}hv)^{1/2}$ vs. hv plot, indirect band gap energies $E_g{^1}$= 3.01~3.47 eV, $E_g{^2}$= 4.44~4.91 eV were obtained. With increasing Nb content, the relative photocurrent intensity of $1^{st}$ peak significantly increased. Compared with photocurrent spectrum of thermal oxide of Zr-2.5Nb, It was revealed that $1^{st}$ peak in photocurrent spectrum for the passive film formed on Zr-Nb alloy was generated by two types of electron transitions; the one caused by hydrous $ZrO_2$ and the other created by Nb. Two electron transition sources were overlapped over the same range of incident photon energy. In the photocurrent spectrum for passive film formed on Zr-2.5Nb alloy in which Nb is dissolved into matrix by quenching, the relative photocurrent intensity of $1^{st}$ peak increased, which implies that dissolved Nb act as another electron transition source.

Effect of Aluminum and Silicon on Atmospheric Corrosion of Low-alloying Steel under Containing NaHSO3 Wet/dry Environment

  • Chen Xinhua;Dong Junhua;Han Enhou;Ke Wei
    • Corrosion Science and Technology
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    • 제7권6호
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    • pp.315-318
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    • 2008
  • The atmospheric corrosion performance of Al-alloying, Si-alloying and Al-Si-alloying steel were studied by wet/dry cyclic corrosion tests (CCT) at $30^{\circ}C$ and 60% relative humidity (RH). The corrosion electrolyte used for CCT was 0.052 wt% $NaHSO_{3}$ (pH~4) solution. The result of gravimetry demonstrated that Al-Si-bearing steels showed lower corrosion resistance than other rusted steels. But the rusted 0.7%Si-alloying steel showed a better corrosion resistance than rusted mild steel. Polarization curves demonstrated that Al-/Si-alloying and Al-Si-alloying improved the rest potential of steel at the initial stage; and accelerated the cathodic reduction and anodic dissolution after a rust layer formed on the surfaces of steels. XRD results showed that Al-Si-alloying decreased the volume fraction of $Fe_{3}O_{4}$ and $\alpha-FeOOH$. The recycle of acid accelerated the corrosion of steel at the initial stage. After the rust layer formed on the steel, the leak of rust destabilized the rust layer due to the dissolution of compound containing Al (such as $FeAl_{2}O_{4}$, $(Fe,\;Si)_{2}(Fe,\;Al)O_{4}$). Al-Si-alloying is hence not suitable for improving the anti-corrosion resistance of steel in industrial atmosphere.

The Influence of Hydrotalcite Intercalated with Benzoate on UV Stability of Acrylic Coating

  • Nguyen, Thuy Duong;Nguyen, Anh Son;Thai, Thu Thuy;Pham, Gia Vu;To, Thi Xuan Hang;Olivier, Marie-Georges
    • Corrosion Science and Technology
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    • 제19권1호
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    • pp.16-22
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    • 2020
  • It is important to realize that benzoate was intercalated into hydrotalcite (HTC-Bz) by the co-precipitation method. In this case, acrylic coating with 0.5 wt% HTC-Bz was deposited on carbon steel using the spin coating method. Next, the HTC-Bz structure was characterized by Field emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), and Fourier transform infrared spectroscopy (FT-IR). In fact, an ultraviolet vision spectroscopy (UV-Vis) was used to determine the benzoate content in HTC-Bz, and the UV absorption ability of HTC-Bz. Using electrochemical techniques, water contact angle measurement, and thermal-gravimetric analysis, we compared the protective properties before and after QUV test, hydrophobicity and the thermal stability of acrylic coating containing HTC-Bz. The obtained results showed that HTC-Bz with a plate-like structure was successfully synthesized; benzoate was intercalated into the interlayer of hydrotalcite with a concentration of 28 wt%. Additionally, it was noted that HTC-Bz has an UV absorption peak at 225 nm. In conclusion, the addition of HTC-Bz enhanced the UV stability, hydrophobicity and the thermal stability of acrylic coating.

Highly Efficient Red Emissive Heteroleptic Cyclometalated Iridium(III) Complexes Bearing Two Substituted 2-Phenylquinoxaline and One 2-Pyrazinecarboxylic Acid

  • Sengottuvelan, Nallathambi;Yun, Seong-Jae;Kim, Dae-Young;Hwang, In-Hye;Kang, Sung Kwon;Kim, Young-Inn
    • Bulletin of the Korean Chemical Society
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    • 제34권1호
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    • pp.167-173
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    • 2013
  • A series of highly efficient red phosphorescent heteroleptic iridium(III) complexes 1-6 containing two cyclometalating 2-(2,4-substitued phenyl)quinoxaline ligands and one chromophoric ancillary ligand were synthesized: (pqx)$_2Ir$(mprz) (1), (dmpqx)$_2Ir$(mprz) (2), (dfpqx)$_2Ir$(mprz) (3), (pqx)$_2Ir$(prz) (4), (dmpqx)$_2Ir$(prz) (5), (dfpqx)$_2Ir$(prz) (6), where pqx = 2-phenylquinoxaline, dfpqx = 2-(2,4-diflourophenyl)quinoxaline, dmpqx = 2-(2,4-dimethoxyphenyl)quinoxaline, prz = 2-pyrazinecarboxylate and mprz = 5-methyl-2-pyrazinecarboxylate. The absorption, emission, electrochemical and thermal properties of the complexes were evaluated for potential applications to organic light-emitting diodes (OLEDs). The structure of complex 2 was also determined by single-crystal X-ray diffraction analysis. Complex 2 exhibited distorted octahedral geometry around the iridium metal ion, for which 2-(2,4-dimethoxyphenyl)quinoxaline N atoms and C atoms of orthometalated phenyl groups are located at the mutual trans and cis-positions, respectively. The emission spectra of the complexes are governed largely by the nature of the cyclometalating ligand, and the phosphorescent peak wavelengths can be tuned from 588 to 630 nm with high quantum efficiencies of 0.64 to 0.86. Cyclic voltammetry revealed irreversible metal-centered oxidation with potentials in the range of 1.16 to 1.89 V as well as two quasi-reversible reduction waves with potentials ranging from -0.94 to -1.54 V due to the sequential addition of two electrons to the more electron-accepting heterocyclic portion of two distinctive cyclometalated C^N ligands.

A Study on the Post-Weld Heat Treatment Effect to Mechanical Properties and Hydrogen Embrittlement for Heating Affected Zone of a RE 36 Steel

  • Moon, Kyung-Man;Lee, Myung-Hoon;Kim, Ki-Joon;Kim, Jin-Gyeong;Kim, Seong-Jong
    • Corrosion Science and Technology
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    • 제2권6호
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    • pp.283-288
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    • 2003
  • The cathodic protection method is being widely used in marine structural steel, however a high tensile steel like RE 36 steel for marine structural steel is easy to get hydrogen embrittlement due to over protection during cathodic protection as well as preferential corrosion of HAZ(Heating Affected Zone) part. In this paper, corrosion resistance and mechanical properties such as elongation and hydrogen embrittlement were investigated with not only in terms of electrochemical view but also SSRT(Slow Strain Rate Test) method with applied constant cathodic potential, analysis of SEM fractography in case of both As-welded and PWHT(Post-Weld Heat Treatment) of $550^{\circ}C$. The best effect for corrosion resistance was apparently indicated at PWHT of $550^{\circ}C$ and elongation was increased with PWHT of $550^{\circ}C$ than that of As-welded condition. On the other hand. Elongation was decreased with applied potential shifting to low potential direction which may be caused by hydrogen embrittlement, however the susceptibility of hydrogen embrittlement was decreased with PWHT of $550^{\circ}C$ than that of As-welded condition and Q.C(quasi cleavage) fracture mode was also observed significantly according to increasing of susceptibility of hydrogen embrittlement. Eventually it is suggested that an optimum cathodic protection potential range not causing hydrogen embrittlernent is from -770 mV(SCE) to -850 mV(SCE) in As-welded condition while is from -770 mV(SCE) to -875 mV(SCE) in PWHT of $550^{\circ}C$.

슈퍼 오스테나이트계 스테인리스강의 시그마상 특성에 따른 부식거동 분석 (Analysis of the Corrosion Behavior According to the Characteristics of Sigma Phase Formed in Super Austenitic Stainless Steel)

  • 김예은;박진성;조동민;홍승갑;김성진
    • Corrosion Science and Technology
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    • 제19권4호
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    • pp.203-210
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    • 2020
  • The corrosion behavior of super austenitic stainless steel was studied by examining the characteristics of the sigma phase formed in the steel. A range of experimental and analytical methods was employed, including potentiodynamic polarization tests, critical pitting temperature tests, transmission electron microscopy, and energy-dispersive spectroscopy. Three steel samples with different sigma phase levels were obtained by intentionally adjusting the manufacturing process. The results showed that the corrosion resistance of the samples was strongly dependent upon the size and distribution of the sigma phase precipitated in the samples. The larger the size of the sigma phase, the higher the Mo content in the sigma phase and the higher the depletion level of Mo at the interface between the matrix/sigma phase, the more samples with a coarse-sized sigma phase were susceptible to localized pitting corrosion at the interface. These results suggest that various manufacturing processes, such as welding and the post-heat treatment of the steel, should be optimized so that both the size and fraction of the sigma phase precipitated in the steel are small to improve the resistance to localized corrosion.

다중벽 탄소 나노 튜브에 담지한 PtxM(1-x)(M = Co, Cu, Ni) 합금촉매의 제조 및 고분자 전해질 연료전지에서 산소환원 특성 (Synthesis and Oxygen Reduction Reaction Characteristics of Multi-Walled Carbon Nanotubes Supported PtxM(1-x) (M = Co, Cu, Ni) Alloy Catalysts for Polymer Electrolyte Membrane Fuel Cell)

  • 정동원;박순;안치영;최성호;김준범
    • 한국재료학회지
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    • 제19권12호
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    • pp.667-673
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    • 2009
  • The electrocatalytic characteristics of oxygen reduction reaction of the $PtxM_{(1-x)}$ (M = Co, Cu, Ni) supported on multi-walled carbon nanotubes (MWNTs) have been evaluated in a Polymer Electrolyte Membrane Fuel Cell (PEMFC). The $Pt_xM_{(1-x)}$/MWNTs catalysts with a Pt : M atomic ratio of about 3 : 1 were synthesized and applied to the cathode of PEMFC. The crystalline structure and morphology images of the $Pt_xM_{(1-x)}$ particles were characterized by X-ray diffraction and transmission electron microscopy, respectively. The results showed that the crystalline structure of the Pt alloy particles in Pt/MWNTs and $Pt_xM_{(1-x)}$/MWNTs catalysts are seen as FCC, and synthesized $Pt_xM_{(1-x)}$ crystals have lattice parameters smaller than the pure Pt crystal. According to the electrochemical surface area (ESA) calculated with cyclic voltammetry analysis, $Pt_{0.77}Co_{0.23}$/MWNTs catalyst has higher ESA than the other catalysts. The evaluation of a unit cell test using Pt/MWNTs or $Pt_xM_{(1-x)}$/MWNTs as the cathode catalysts demonstrated higher cell performance than did a commercial Pt/C catalyst. Among the MWNTs-supported Pt and $Pt_xM_{(1-x)}$ (M = Co, Cu, Ni) catalysts, the $Pt_{0.77}Co_{0.23}$/MWNTs shows the highest performance with the cathode catalyst of PEMFC because they had the largest ESA.

Ethanol Extract of Fermented Soybean, Chungkookjang, Inhibits the Apoptosis of Mouse Spleen, and Thymus Cells

  • Kim, Han-Bok;Lee, Hye-Sung;Kim, Sook-Jin;Yoo, Hyung-Jae;Hwang, Jae-Sung;Chen, Gang;Youn, Hyun-Joo
    • Journal of Microbiology
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    • 제45권3호
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    • pp.256-261
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    • 2007
  • Apoptosis is a step of the cell cycle which is important in the regulation of immune cell populations. Chungkookjang is a Korean traditional fermented soybean containing microorganisms, enzymes, and bioactive compounds which was used in the treatment of mouse spleen as well as thymus cells (CH1-fermented soybean containing barley, wormwood, and sea tangle; CH2-fermented soybean) and was found to exhibit substantially reduced small DNA fragmentation. An MTT assay showed that the treatment of CH1 and CH2 into the mouse splenocytes and thymocytes sharply increased their survival. Moreover, a FACS analysis also showed that CH1 and CH2 are effective at suppressing the apoptosis of splenocytes and thymocytes. The fermented soybean isoflavone concentrations, which are implicated in lowering breast and prostate cancers, lowering the risk of cardiovascular diseases, and improving bone health, were determined using Capillary Electrophoresis-Electrochemical Detection (CE-ED). The amount of Daidzein in fermented soybean significantly increased by 44-fold dramatically, compared with those in unfermented soybean. In this study, we demonstrated that ethanol extracts of Chungkookjang promote the survival of the mouse spleen and thymus cells in culture by suppressing their apoptotic death. Future studies should investigate which genes are related to apoptosis of the immune cells.

리튬이온 커패시터의 음극도핑 및 전기화학특성 연구 (Study on the Electrochemical Characteristics of Lithium Ion Doping to Cathode for the Lithium Ion Capacitor)

  • 최성욱;박동준;황갑진;유철휘
    • 한국수소및신에너지학회논문집
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    • 제26권5호
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    • pp.416-422
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    • 2015
  • Lithium Ion capacitor (LIC) is a new storage device which combines high power density and high energy density compared to conventional supercapacitors. LIC is capable of storing approximately 5.10 times more energy than conventional EDLCs and also have the benefits of high power and long cycle-life. In this study, LICs are assembled with activated carbon (AC) cathode and pre-doped graphite anode. Cathode material of natural graphite and artificial graphite kinds of MAGE-E3 was selected as the experiment proceeds. Super-P as a conductive agent and PTFE was used as binder, with the graphite: conductive agent: binder of 85: 10: 5 ratio of the negative electrode was prepared. Lithium doping condition of current density of $2mA/cm^2$ to $1mA/cm^2$, and was conducted by varying the doping. Results Analysis of Inductively Coupled Plasma Spectrometer (ICP) was used and a $1mA/cm^2$ current density, $2mA/cm^2$, when more than 1.5% of lithium ions was confirmed that contained. In addition, lithium ion doping to 0.005 V at 10, 20 and $30^{\circ}C$ temperature varying the voltage variation was confirmed, $20^{\circ}C$ cell from the low internal resistance of $4.9{\Omega}$ was confirmed.