• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 유기절연재료 방전 플라즈마연구회
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• pp.77-80
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• 2003

MEMS(Micro Electro Mechanical System) 기술에서 실리콘 식각기술의 중요성으로 플라즈마 식각기술의 개발이 꾸준히 진행되고 있다. 이중에서 ICP(Inductive Coupled Plasma)는 기존의 증착장치에 유도결합식 플라즈마를 추가로 발생시켜 증착막의 특성을 획기적으로 개선시키는 가장 최근에 개발된 기술이며, 이용에너지를 증가시키지 않고도 이용밀도를 높이고 이용업자들에 방향성을 가할 수 있는 새로운 플라즈마 기술로, 주로 MEMS 제조공정에 응용되고 있다. 본 연구에서는 STS-ICP $ASE^{HR}$을 이용하여 식각과 증착공정을 반복하여 식각을 하는 Bosch 식각에 관하여 연구하였다 STS-ICP $ASE^{HR}$ 장비의 Platen power, Coil power 및 Process pressure에 다양한 변화를 주어 각 변수에 따른 식각속도를 관찰하였다. 각 공정별 변수를 변화시킨 결과 Platen power 12W, Coil power 500W, 식각/Passivation Cycle 6/7sec 일 경우 식각속도는 $1.2{\mu}m$/min 이었고, Sidewall profile은 $90{\pm}0.7^{\circ}$로 나타나 매우 우수한 결과를 보였다.

• International Journal of Aeronautical and Space Sciences
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• 제11권3호
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• pp.234-239
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• 2010

The utilization of micro-electro-mechanical system (MEMS) gyros and accelerometers in low-level inertial measurement unit (IMU) influences cost effectiveness in a positive way under the condition that device error characteristics are fully calibrated. The conventional calibration process utilizes a rate table; however, this paper proposes a new method for achieving reference calibration data from the natural motion of pendulum to which the IMU undergoing calibration is attached. This concept was validated with experimental data. The pendulum angle measurements correlate extremely well with the solutions acquired from the pendulum equation of motion. The calibration data were computed using the regression method. The whole process was validated by comparing the measurement from the 6 sensor components with the measurements reconstructed using the identified calibration data.

• 소음진동
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• 제11권2호
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• pp.301-306
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• 2001

Electro-Rheological (ER) fluid is applied to a controllable squeeze film damper (SFD) for stabilizing a flexibly supported rotor system. ER fluid is a class of functional fluid whose yield stress varies according to the applied electric field strength, which is observed as viscosity variation of the fluid. In applying ER fluid to a SFD, a pair of rings of the damper can be used as electrodes. When the electrodes are divided into a horizontal pair and a vertical one, the SFD can produce damping force in each direction independently. A prototype of the directionally controllable SFD was constructed and its performance was experimentally and numerically investigated in the present work.

• 전기학회논문지
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• 제63권8호
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• pp.1075-1079
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• 2014

In this paper, we describe the analysis and the compensation method of the g-sensitivity error for MEMS vibratory gyroscopes. Usually, the g-sensitivity error has been ignored in the commercial MEMS gyroscope, but it deserves our attention to apply for the missile application as a tactical grade performance. Thus, it is necessary to compensate for the g-sensitivity error to reach a tactical grade performance. Generally, the g-sensitivity error seems intuitively to be a gyroscope bias error proportional to the linear acceleration. However, we assert that the g-sensitivity error mainly causes not a bias error but a scale-factor error. And we verify that the g-sensitivity scale-factor error occurs due to the non-linearity of parallel plate electrodes. Therefore, we propose the compensation method to remove the g-sensitivity scale-factor error. The experimental result showed that a proposed compensation method improved successfully the performance of the MEMS vibratory gyroscope.

• 전기학회논문지
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• 제56권4호
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• pp.641-644
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• 2007

The electro-mechanical mercury relay is used as an auxiliary relay of power facility because it is superior to operating time and no-bounce. So the KEPCO had used the mercury relay for operating HVDC(High Voltage Direct Current) system. But it has many problems with facility operation by occurrence of mercury evaporation, held contact point and malfunction according to long term use, furthermore it is forbidden to produce for fear of environmental pollution in 2002. This paper presents the no-mercury relay development, comparison test and application.

• 한국자동차공학회논문집
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• 제18권3호
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• pp.8-18
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• 2010

According to the needs of change to hybrid, fuel cell and electric vehicle, and to the increasing demand for safety and eco-friendliness, the necessity of Electro-Mechanical Brake(EMB) is being increased. But, one of the most important problems for realizing EMB to the practical use is that the required motor power for braking is too high. So the high braking efficient EMB is required. In recent years, the Electronic Wedge Brake(EWB) is noticeable for the high braking efficiency. In this research, we examine the improvable matter of the recent published EWB, and we propose the improved mechanism and the cost effective control method using this mechanism. And we test these feasibility by experiment and discuss these meaning and effect.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 제37회 하계학술대회 논문집 A
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• pp.250-251
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• 2006

현대 전력산업은 IEC61850의 표준화작업이 한창 진행중이다. IEC61850-7-4는 전력설비 요소마다 Logical Node를 선언해 놓았다. 현재의 Logical Node는 보호, 제어, 인터페이스, 기록, 자동, 측정, 센서 & 모니터링, 변전기기 등의 그룹으로 나뉘어져 있다. 그러나 본 논문에서 대상으로 하는 GIS 예방진단 시스템에 관한 Logical Node와 공통 데이터 클레스(CDC: Common Data Class)가 명확히 선언되지 않았다. 1993년 IEC61850의 객체모델이 제안될 때부터 변전소의 다양한 설비를 완벽하게 객체화 할 수 있는가에 대한 의문이 있었으며 현재에서 이런 의문점을 개선하기 위하여 TC57위원회에서는 지속적인 모델 수정 및 정비 작업을 수행하였다. 실제로 현재에도 전력품질에 대한 logical node가 'Q'그룹으로 새롭게 제시되고 있고 풍력발전이나 분산전원에 대한 logical node가 추가되거나 기존의 IEC61850-7-4의 내용이 수정되고 있는 실정이다. 본 연구는 이와 같이 변전설비 자동화에 필요하지만 IEC TC57에서 표준화되지 않은 온라인 GIS 예방진단용 설비에 대한 표준모델을 제시하였고 모델에 대한 logical node나 CDC를 구성하였다.

• 소성∙가공
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• 제15권9호
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• pp.692-696
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• 2006

Micro fabrication of polymeric materials becomes increasingly important. And it is considered as a low-cost alternative to the silicon or glass-based Micro Electro-Mechanical System(MEMS) technologies. In the present study, micro channels were fabricated via LiGA(Lithographie, Galvanoformung, Abformung) process used for Capillary Electrophoresis(CE) chip. Taguchi method was applied to investigate the effects of process conditions in injection molding(melt temperature, injection speed, mold temperature and packing pressure) on the transcription characteristics of the micro channel. It was found that the skin layer disturbs a formation of micro channel. Furthermore, mold temperature and injection speed were two important factors to affect the replication characteristics of micro channel.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 C
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• pp.1369-1371
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• 2001

This paper describes on thinning SDB SOI substrates by SDB technology and Electro-chemical etch-stop. The surface of the fabricated SDB SOI substrates is more uniform than that grinding or polishing by mechanical method, and this process is possible to accurate SOI thickness control. During Electrochemical etch-stop, leakage current versus voltage curves were measured for analysis of the open current potential (OCP) point and the passivation potential (PP) poin and determinated to anodic passivation potential. The surface roughness and selectively controlled thickness of the fabricated SOI substrates were analyzed by using AFM and SEM, respectively.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1992-1997
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• 2003

This study is to develop the pretreatment for the excess and digested sludge by electro-coagulation and dewatering. Electrocoagulation is applied to excess and digested sludge before transferring to the piston type press for dewatering. Piston type filter press as a laboratory scale plant was used to estimate the dewaterability. MMD of excess sludge was increased from initial diameter of particles(34.16 ${\mu}m$) to the 87%(64.01 ${\mu}m$) after electrocoagulation. AI electrode is more effective than Fe electrode for the dewaterability of excess sludge. Electrodewatering after electrocoagulation as pretreatment makes the water content of sludge cake $50{\sim}60$ wt%.