• Journal of the Korean Vacuum Society
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• v.1 no.1
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• pp.32-36
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• 1992

An ECR plasma apparatus is designed and constructed. The gradient of magnetic field in microwave cavity was adjusted to provide an ECR plasma stream by electro magnetic lenz system. Employing a yoke arround the electro magnets, the magnetic field intensity was increased by 50% with the same electric current. Characteristics of the ECR plasma discharged in the apparatus were investigated by Langmuir probe method. The variations of electron temperature and electron density along chamber axis were analysed.