• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.434-437
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• 2003

Evaluation or the patterning accuracy of e-beam lithography machines requires a high precision inspection system that is capable of measuring the true xy-locations of fiducial marks generated by the e-beam machine under test. Fiducial marks are fabricated on a single photo mask over the entire working area in the form of equally spaced two-dimensional grids. In performing the evaluation, the principles of self-calibration enable to determine the deviations of fiducial marks from their nominal xy-locations precisely, not being affected by the motion errors of the inspection system itself. It is. however, the fact that only repeatable motion errors can be eliminated, while random motion errors encountered in probing the locations of fiducial marks are not removed. Even worse, a random error occurring from the measurement of a single mark propagates and affects in determining locations of other marks, which phenomenon in fact limits the ultimate calibration accuracy of e-beam machines. In this paper, we describe an uncertainty analysis that has been made to investigate how random errors affect the final result of self-calibration of e-beam machines when one uses an optical inspection system equipped with high-resolution microscope objectives and a precision xy-stages. The guide of uncertainty analysis recommended by the International Organization for Standardization is faithfully followed along with necessary sensitivity analysis. The uncertainty analysis reveals that among the dominant components of the patterning accuracy of e-beam lithography, the rotationally symmetrical component is most significantly affected by random errors, whose propagation becomes more severe in a cascading manner as the number of fiducial marks increases

• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.4
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• pp.402-409
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• 2013

An innovative application of voltage-contrast (VC) inspection allowed inline detection of NMOS leakage in dense SRAM cells is presented. Cell sizes of SRAM are continual to do the shrinkage with bit density promotion as semiconductor technology advanced, but the resulting challenges include not only development of smaller-scale devices, but also intra-devices isolation. The NMOS leakage caused by the underneath n+/P-well shorted to the adjacent PMOS/N-well was inspected by the proposed electron-beam (e-beam) scan in which VC images were compared during the in-line process step of post contact tungsten (W) CMP (Chemical Mechanical Planarization) instead of end-of-line electrical test, which has a long response time. A series of experiments based on the mechanism for improving the intra-well isolation was performed and verified by the inline VC inspection. An optimal process-integration condition involved to the tradeoff between the implant dosage and photo CD was carried out.

• Journal of the Korea institute for structural maintenance and inspection
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• v.27 no.4
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• pp.11-22
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• 2023

In this study, a structural concrete square beam was developed using the centrifugal molding technique. In order to secure the bending stiffness of the cross section, the hollow rate of the cross section was set to 10% or less. Instead of using the current poor mixture of concrete, a special formwork for producing a centrifugal square beam was manufactured, and a concrete mixing ratio with a high slump (150-200) and a design strength of 100 MPa or more was developed and applied. The produced centrifugally formed rectangular beams were subjected to performance tests according to the standard bending and shear test standards for centrifugally formed members. The static load test results for the four specimens exceeded both the nominal bending strength and nominal shear strength, which are design values through structural design, proving the structural reliability of the ultra-high-strength centrifugally formed square beam.

• Journal of the Korea institute for structural maintenance and inspection
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• v.28 no.1
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• pp.61-69
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• 2024

An ultra-high strength prestressed prismatic beam of 100 MPa in compressive strength was developed by increasing the water-tightness of concrete by utilizing centrifugal molding processes without adding expensive admixtures. The centrifugal prismatic PSC beam developed as the superstructure of the avalanche tunnel was constructed on a rahmen bridge in a small local river. In this study, the centrifugal prismatic beam was compared and analyzed based on the results of measurements made through static load tests and the results of numerical analysis of the target structure. The common load-carrying capacity and safety of the rahmen bridge were evaluated. The static·dynamic load tests and finite element analysis results of this bridge were similar, and it was confirmed that the behavior of the centrifugal prismatic beam was well simulated. All centrifugally formed square beams that make up the composite rahmen bridge were evaluated to secure sufficient load carrying capacity under the design live load, and structural reliability was proven by ensuring safety.

• Journal of the Korea institute for structural maintenance and inspection
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• v.23 no.4
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• pp.8-14
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• 2019

In Korean traditional wooden architecture, joint performance varies with the material characteristics of timber, the form of joint, the precision of timber-trimming and the like. Case studies prove that the beam-to-column joint type has large influence on the degrees of deformation and spacing. This is not only true of single-story buildings, but also of large-scale multi-story buildings more apparently. Therefore, this study followed the process of examining to joint types, producing their specimens and testing their structural performance. As a consequence of structural test, the dovetail joint specimen showed the best outcomes of the maximum load and rigidity. Synthesizing the structural performances by respective forms of joints, the Doraegeoji dovetail joint specimen showed the higher performance, followed in order by the Doraegeoji mortise joint specimen and the Tongneoko dovetail joint specimen. The structural performance of a building varies with the characteristics by the shouldering forms of penetrating beams and with the joint types within the columns. This should be considered for the new construction or restoration of multi-story buildings, and be continuously researched henceforth.

• Journal of the Korea institute for structural maintenance and inspection
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• v.26 no.6
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• pp.128-138
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• 2022

In this study, in order to apply ultra-high-strength concrete beams of 100 MPa or more manufactured by centrifugal molding as the superstructure of the avalanche tunnel, the purpose is to verify the structural safety of the corner rigid joint in which the centrifugal molded beam is integrated with the substructure, which is the negative moment area. A full-size specimen was manufactured, and loading tests and analysis studies were performed. In order to expect the same effect that the maximum moment occurs in the corner joint part of the upper slab end when the standard model of the avalanche tunnel is designed with a load combination according to the specification, a modified cantilever type structural model specimen was manufactured and the corner rigid joint was fixedly connected. A study was performed to determine the performance of the method and the optimal connection construction method. The test results demonstrated that the proposed connection system outperforms others. Despite having differences in joint connection construction type, stable flexural behavior was shown in all the tested specimens. The proposed method also outperformed the behavior of centrifugally formed beams and upper slabs. The behavior of the corner rigid joint analysis model according to the F.E. analysis showed slightly greater stiffness compared to the results of the experiment, but the overall behavior was almost similar. Therefore, there is no structural problem in the construction of the corner rigid joint between the centrifugally formed beam and the wall developed in this study.

• Journal of the Korea institute for structural maintenance and inspection
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• v.23 no.1
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• pp.171-178
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• 2019

Fiber-reinforced polymer (FRP) composites have proved to be reliable as strengthening materials. Most of existing studies used single types of FRP composites. Therefore, in this experimental study, carbon FRP sheet, aramid FRP sheet, and hybrid FRP plate including glass fibers were fabricated, and the effect of pre-stressed FRP composites on flexural strengthening of reinforced concrete (RC) beams was investigated. In total, eight RC beam specimens were fabricated, including one control beam (specimen N) without FRP composites and seven FRP-strengthened beams. The main parameters were type of FRP composite, the number of anchors used for pre-stressing, and thickness of FRP plates. As a result, the beam strengthened with pre-stressed FRP plate showed superior performance to the non-strengthened one in terms of initial strength, strength and stiffness at yielding, and ultimate strength. As the number of anchors and thickness of FRP plate (i.e., amount of FRP plates) increased, the strengthening effect increased as well. When hybrid FRP plates were pre-stressed, the strengthening effect was higher in comparison with pre-stressed single type FRP plate.

• Journal of the Korea institute for structural maintenance and inspection
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• v.25 no.5
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• pp.24-31
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• 2021

The soundproof tunnels have been generally designed with H-beam girders, and the high weight of H-beam may cause the excessive design of the substructure. To solve this problem, this paper proposes a new soundproof tunnel girder design composed of pipes and discontinuous plates. First, the structural behavior of the straight girder according to the design parameters was examined through finite element analysis. The arrangement and shape of the plates were determined as the design parameter, to obtain the optimal design of girder. After then, the structural behavior and buckling stability of the arched girder were subsequently evaluated. As a result of the parameter analysis, it was confirmed that the axial force acting on the girder increased and the moment decreased as the ratio of unsupported sections decreased or the number of supporting plates increased. The stress concentration on the pipe member was relieved by increasing the long axis length of the elliptical plate. Arched girder analysis showed that the structural efficiency increase as the long axis of elliptical plate increase. As a result of the buckling evaluation, the buckling threshold load of the three connected girders was about 3.7 times higher than the design load. Consequently, it was confirmed that the proposed soundproof tunnel structure design satisfies both light weight and structural safety.

• Journal of the Korea institute for structural maintenance and inspection
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• v.28 no.1
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• pp.12-23
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• 2024

In this study, a structural concrete square beam was developed using the centrifugal molding technique. In order to secure the bending stiffness of the cross section, the hollow rate of the cross section was set to 10% or less. Instead of using the current poor mixture of concrete and a concrete mixing ratio with a high slump (150-200) and a design strength of 100 MPa or more was developed and applied. In order to investigate the durability of centrifugally formed PSC square beams to be used as the superstructure of the avalanch tunnel or ramen bridge, the durability performance of ultra-high-strength centrifugally formed concrete with a compressive strength of 100 MPa was evaluated in terms of deterioration and chemical resistance properties.Concrete durability tests, including chloride penetration resistance, accelerated carbonation, sulfate erosion resistance, freeze-thaw resistance, and scaling resistance, were performed on centrifugally formed square beam test specimens produced in 2022 and 2023. Considering the information verified in this study, the durability of centrifugally molded concrete, which has increased watertightness in the later manufacturing stage, was found to be superior to that of general concrete.

• 한국지구물리탐사학회:학술대회논문집
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• 2005.05a
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• pp.15-20
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• 2005

Defects of dam body which can be induced in seepage or leakage procedure can directly affect dam safety. Therefore, a proper inspection method should be carried out in the first place to find out their positions and sizes, After that, some reinforcement works such as grouting and the corresponding assessment could be taken in a proper way. The dam(center core type earth dam) issued in this study has been in need for intensive diagnosis and reinforcement work, because a lot of slumps similar to cracks, seepage and some boggy area have been observed on the downstream slope. High resolution seismic reflection method was performed on the crest profile twice before and after grouting work(Aug. 2001 and Nov. 2004) aimed at the dam inspection and the assessment of grouting efficiency as well. To enhance the data resolution, P-beam energy radiation technique which can reduce the surface waves and hence to reinforce the reflection events was used. Strong reflection events were recognized in the stack section before grouting work, It seems that the events would be caused by e.g. horizontal cracks with a considerable aperture, Meanwhile such strong reflection events were not observed in the section after grouting. That is, the grouting work was dear able to reinforce the defects of dam body. Hence, the section showed an well arranged picture of dam inner structure. In this sense, seismic reflection method will be a desirable technique for dam inspection and for monitoring dam inner structure as well.