• Journal of the Semiconductor & Display Technology
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• v.9 no.1
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• pp.17-21
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• 2010

Currently miniaturized electron-optical columns find their way into electron beam lithography systems. For better lithography process, it is required to make smaller spot size and longer working distance. But, the micro-columns of the multi-beam lithography system suffer from chromatic and spherical aberration, even when the electron beam is exactly on the symmetric axis of the micro-column. The off-axis error of the electron emitting source is expected to become worse with increasing off-axis distance of the focusing spot. Especially the electron beams far from the system optical axis have a non-negligible asymmetric intensity distribution in the micro-column. In this paper, the effect of the off-axis e-beam source is analyzed. To analyze this effect is to introduce a micro-column model of which the e-beam emitting source is aligned with the center of the electron beam by shifting them perpendicular to the system optical axis. The presented solution can be used to analysis the performance of the multi-electron-beam system. The performance parameters, such as the working distances and the focusing position are obtained by the computational simulations as a function of the off-axis distance of the emitting source.

• Journal of Radiation Industry
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• v.6 no.3
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• pp.267-272
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• 2012

This study evaluated the change in anti-allergy activity of ${\beta}-glucan$ by electron beam irradiation. ${\beta}-Glucan$ was irradiated at dose of 50 kGy and then orally pre-treated with electron beam irradiated and non irradiated ${\beta}-Glucan$ for 7 days. After pre-treatment, allergy was induced by injection of ovalbumin (OVA). Serum total immunoglobulin E (IgE) and OVA-specific IgE levels in the allergic mice was significantly increased but the mice pre-treated 50 kGy electron beam irradiated ${\beta}-glucan$ was significantly decreased the levels of total IgE and OVA-specific IgE, respectively. Moreover, cytokine production (interleukin-4) was also decreased in the 50 kGy electron beam irradiated ${\beta}-Glucan$ pre-treated mice. These results indicate that pre-treatment of 50 kGy electron beam irradiated ${\beta}-glucan$ may elevate the anti-allergy activity. Therefore, electron beam-irradiated ${\beta}-glucan$ could be used for nutraceutical foods in food industry.

• Applied Science and Convergence Technology
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• v.24 no.5
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• pp.162-166
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• 2015

Linear ion beams have been introduced for the ion beam treatments of flexible substrates in roll-to-roll web coating systems. Anode layer linear ion sources (300 mm width) were used to make the linear ion beams. Oxygen ion beams having an ion energy from 200 eV to 800 eV used for the adhesion improvement of Cu thin films on PET substrates. The Cu thin films deposited by a conventional magnetron sputtering on the oxygen ion beam treated PET substrates showed Class 5 adhesion defined by ASTM D3359-97 (tape test). Argon ion beams with 1~3 keV used for the ion beam sputtering deposition process, which aims to control the initial layer before the magnetron sputtering deposition. When the discharge power of the linear ion source is 1.2 kW, static deposition rate of Cu and Ni were 7.4 and $3.5{\AA}/sec$, respectively.

• Steel and Composite Structures
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• v.1 no.4
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• pp.441-458
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• 2001

We analyzed the experimental and theoretical behavior of a particular type of steel joint designed to connect beam to beam and able to transfer both shear forces and bending moments. This joint is characterized by the use of steel plates and bolts enclosed in the width of the beams. The experimental investigation was carried out characterizing the constituent materials and testing in flexure beams constituted by two portions of beams connected in the middle with the joint proposed. Connections having different characteristics in terms of thickness of plates, number and type of bolts were utilized. Flexure tests allow one to determine the loaddeflection curves of the beam tested and the moment-rotation diagrams of the connections, highlighting the strength and the strain capacity of the joints. The proposed analytical model allows one to determine the moment-rotation relationship of the connections, pointing out the influence of the principal geometrical and mechanic characteristics of single constituents on the full properties of the joint.

• Structural Engineering and Mechanics
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• v.4 no.6
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• pp.613-630
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• 1996

The homogenization method is used to develop a beam element in space for thermo-mechanical analysis of unidirectional composites. Local stress and temperature field in the microscale are described using the function of homogenization. The global (macroscopic) behaviour of the structure is supposed to be that of a beam. Beam-type kinematical hypotheses (including independent shear rotations) are hence applied and superposed on the microdescription. A macroscopic stiffness matrix for such a beam element is then developed which contains the microscale properties of the single cell of periodicity. The presented model enables us to analyse without too much computational effort complicated composite structures such as e.g. toroidal coils of a fusion reactor. We need only a FE mesh sufficiently fine for a correct description of the local geometry of a single cell and a few of the newly developed elements for the description of the global behaviour. An unsmearing procedure gives the stress and temperature field in the different materials of a single cell.

• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.906-909
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• 2006

The secondary electron emission coefficient $({\gamma})$ of the cathode is an important factor for improving the discharge characteristics of AC-PDPs because of its close relationship to discharge voltage. In AC-PDPs, MgO is most widely used as a surface protective layer. In this experimental, we have investigated the electronic structure of the energy band structure of the MgO layer responsible for the high ${\gamma}$. The MgO layers have been deposited by electron beam evaporation method, where the $O_2$ partial pressures have been varied as 0, $5.2{\times}10^{-5}$ torr, $1.0{\times}10^{-4}$ torr, and $4.1{\times}10^{-4}$ torr, in this experiment. It is noted that work function that is energy gap between surface and first defect level of MgO layer has the lowest value for the highest O2 partial pressure of $4.1^{\ast}10^{-4}$ Torr.

• Proceedings of the Korea Concrete Institute Conference
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• 1999.10a
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• pp.575-578
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• 1999

The main objective of this study was to examine structural behavior of reinforced concrete column and steel beam joint. composite specimens about 3/4 of the actual beam column connection assembly were tested by applying cyclic load through actuators. Test variables include face bearing plate(FBP), extended face bearing plate(E-FBP), VIR, U-bar and sub beam. There is not much differenced between specimens with sub beam and without sub beam. Test results also show that the joint strength of test specimen is close to the predicted strength by ASCE guideline.

• Proceedings of the Korea Concrete Institute Conference
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• 2006.05a
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• pp.398-401
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• 2006

This study investigates the behaviour of Hybrid Beam with reinforced concrete encased steel center and reinforced concrete end. Two types of encased steel shape and two sections are examined in this study. Test results showed that H-Hybrid beam is stronger than Honey-comb Hybrid beam, and the behaviour of composite beam embedded steel at the elastic state is same as that of simple beam.

• Proceedings of the Korean Vacuum Society Conference
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• 2003.08a
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• pp.220-220
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• 2003

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.268-269
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• 2008

Charging of spacecraft occurs in plasma and radiation environment. Especially, we focused on an accident caused by internal charging in a glass material that was used as the cover plate of solar panel array, and tried to measure the charge distribution in glass materials under electron beam irradiation by using a PEA (Pulsed Electro-Acoustic method) system. In the case of a quartz glass (pure $SiO_2$), no charge accumulation was observed either during or after the electron beam irradiation. On the contrary, positive charge accumulation was observed in glass samples containing metal-oxide components. It is found that the polarity of the observed charges depends on the contents of the impurities. To identify which impurity dominates the polarity of the accumulated charge, we measured charge distributions in several glass materials containing various metal-oxide components and calculated the trap energy depths from the charge decay characteristics of all glass samples.