• Title/Summary/Keyword: e-Machining

Search Result 253, Processing Time 0.041 seconds

A Study on image noise removal of $2^{nd}$ electron detector for a E-Beam Lithography (전자빔 가공기를 위한 2 차 전자 검출기의 영상 노이즈 제거에 관한 연구)

  • Im Y.B.;Moon H.M.;Joe H.T.;Paek Y.J.;Lee C.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
    • /
    • 2005.06a
    • /
    • pp.1741-1744
    • /
    • 2005

  • The electron beam machining provides very high resolution up to nanometer scale, hence the E-Beam writing technology is rapidly growing in MEMS and nano-engineering areas. For E-Beam machining, $2^{nd}$ electron detector is required to see a machined sample at the stage. The $2^{nd}$ electron detector is composed of scintillator and photomultiplier with signal amplifier and high voltage power supplier. Since a photomultiplier tube is an extremely high-sensitivity photodetector, the signal light level to be detected is very low and therefore particular care must be exercised in shielding external light. In this paper, the design methodology of $2^{nd}$ electron detector and the image noise removal method are introduced.

  • PDF

Precision Grinding Characteristics of Hardened Steel (경화 열처리강의 정밀연삭가공)

  • Choi, Won Sik;Bae, Dae Won
    • Journal of the Korean Society for Heat Treatment
    • /
    • v.18 no.6
    • /
    • pp.355-361
    • /
    • 2005

  • In this study, the effects of the maximum undeformed chip thickness on grinding characteristics of hardened steel in down-grinding have been investigated. The meaured grinding forces become larger as the workpiece velocity increases. The specific energy, e decreases as the maximum undeformed chip thickness increase. When the maximum undeformed chip thickness is the same, the specific energy, e decreases as the grain size increases.

  • PDF KSCI