• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.210-210
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• 2011

The effects of CH2F2 and N2 gas flow rates on the etch selectivity of silicon nitride (Si3N4) layers to extreme ultra-violet (EUV) resist and the variation of the line edge roughness (LER) of the EUV resist and Si3N4 pattern were investigated during etching of a Si3N4/EUV resist structure in dual-frequency superimposed CH2F2/N2/Ar capacitive coupled plasmas (DFS-CCP). The flow rates of CH2F2 and N2 gases played a critical role in determining the process window for ultra-high etch selectivity of Si3N4/EUV resist due to disproportionate changes in the degree of polymerization on the Si3N4 and EUV resist surfaces. Increasing the CH2F2 flow rate resulted in a smaller steady state CHxFy thickness on the Si3N4 and, in turn, enhanced the Si3N4 etch rate due to enhanced SiF4 formation, while a CHxFy layer was deposited on the EUV resist surface protecting the resist under certain N2 flow conditions. The LER values of the etched resist tended to increase at higher CH2F2 flow rates compared to the lower CH2F2 flow rates that resulted from the increased degree of polymerization.

• 한국염색가공학회지
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• 제21권1호
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• pp.30-37
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• 2009

Studies on plants such as lotus leaf suggested that dual-scale structure could contribute to super-hydrophobicity. We introduced super-hydrophobicity onto poly(ethylene terephthalate)(PET) fabric with dual-scale structure by assembling $TiO_2$ nano sol. PET fabric was treated with $TiO_2$ sol, water-repellent agent using various parameters such as particle size, concentration. Morphological changes by particle size were observed using field emmission scanning electron microscopy(FE-SEM) and AFM measurement, contact angle measurement equipment. The contact angle of water was about 138.5$^{\circ}$, 125.8$^{\circ}$, 125.5$^{\circ}$ and 108.9$^{\circ}$ for PET fabric coated with 60.2nm, 120.1nm, 200nm and 410.5nm $TiO_2$ particles, compared with about 111.5$^{\circ}$ for PET fabric coated with water repellent. When we mixed particle sizes of 60.2nm and 120.1nm by 7:3 volume ratio, the contact angle of water was about 132.5$^{\circ}$. And we mixed particle sizes of 60.2nm and 200nm by 7:3 volume ratio, the contact angle of water was about 141.8$^{\circ}$. Also we mixed particle sizes of 60.2nm and 410.5nm by 7:3 volume ratio, the best super-hydrophobicity was obtained. In this paper, we fabricated various surface structures to the water-repellent surfaces by using four types of $TiO_2$ nano-particles, and we found that the nanoscale structure was very important for the super-hydrophobicity.

• 대한지리학회지
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• 제41권2호
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• pp.227-243
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• 2006

이 글은 전자 미디어 기술이 기하 공간에서 시공간 차원을 어떻게 수반하고 생산하는지를 네 가지 이론적 관점에 초점을 두면서 고찰한다: 반 딕의 규모의 확장과 수축으로서 네트워크의 이중구조; 라투어의 유동적이고 혼종적 네트워크로서 행위자-네트워크; 비릴리오의 지구적 미디어 벡터로서 속도권 시간; 그리고 카스텔의 비순차적 흐름으로서 초월적 시간. 이들 네 가지 이론적 관점에서, 우리는 전자 미디어 기술이 기하 미디어 공간에서 상이하고 다중적인 시공간 차원을 수반한다는 것을 알 수 있다: 동심원의 이차원 공간 (면), 행위자-네트워크의 일차원 공간 (선), 속도권 시간의 영차원 공간 (점), 그리고 초월적 시간의 다중차원 공간 (하이퍼텍스트). 전자 미디어 공간이 지리적 공간에서 탈/토착화되는 방식을 이해하기 위해서는 우리는 전자 미디어 공간을 기하 미디어공간뿐만 아니라 지리 미디어 공간에서 설명할 필요가 있음을 제시하면서 이 글은 끝맺는다.

• Composites Research
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• 제25권3호
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• pp.76-81
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• 2012

대기압 플라즈마 처리를 통해 탄소나노튜브(CNT) 표면은 개질 되며 개질된 입자의 표면과 탄소섬유 강화 CNT 페놀 복합재료간에 계면접착력에 변화를 확인하였다. CNT 표면에 플라즈마 처리에 따라 표면 변화가 발생되고 표면 개질의 결과를 확인하기 위해 FT-IR을 사용하였다. 또한, 정적 접촉각 실험법을 통해 플라즈마 처리에 따른 CNT의 젖음성을 비교 평가하였다. 순수 CNT 입자의 접촉각은 $118^{\circ}$ 였으나, 플라즈마 처리를 할 경우 $60^{\circ}$도로 표면 개질을 통해 젖음성이 향상됨을 확인하였다. 탄소섬유와 CNT-페놀복합재료 간 계면접착력은 플라즈마 처리에 따라 겉보기 강성도가 증가되는 결과를 확인하였으며, 음향방출 실험법과 전기저항 측정법을 병행한 이중기지평가법을 통해 계면전단강도 (IFSS)를 계산하여 계면접착력 향상을 확인하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.458-458
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• 2010

The process window for the etch selectivity of silicon nitride ($Si_3N_4$) layers to extreme ultra-violet (EUV) resist and variation of line edge roughness (LER) of EUV resist were investigated durin getching of $Si_3N_4$/EUV resist structure in a dual-frequency superimposed capacitive coupled plasma (DFS-CCP) etcher by varying the process parameters, such as the $CH_2F_2$ and $N_2$ gas flow rate in $CH_2F_2/N_2$/Ar plasma. The $CH_2F_2$ and $N_2$ flow rate was found to play a critical role in determining the process window for infinite etch selectivity of $Si_3N_4$/EUV resist, due to disproportionate changes in the degree of polymerization on $Si_3N_4$ and EUV resist surfaces. The preferential chemical reaction between hydrogen and carbon in the hydrofluorocarbon ($CH_xF_y$) polymer layer and the nitrogen and oxygen on the $Si_3N_4$, presumably leading to the formation of HCN, CO, and $CO_2$ etch by-products, results in a smaller steady-state hydrofluorocarbon thickness on $Si_3N_4$ and, in turn, in continuous $Si_3N_4$ etching due to enhanced $SiF_4$ formation, while the $CH_xF_y$ layer is deposited on the EUV resist surface. Also critical dimension (and line edge roughness) tend to decrease with increasing $N_2$ flow rate due to decreased degree of polymerization.

• 항공우주시스템공학회지
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• 제16권5호
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• pp.86-93
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• 2022

우주용 전개형 메쉬 안테나는 궤도 운용 시 RF 성능을 보장하기 위해 극한의 궤도 열 환경 하에서 극심한 온도변화에 의한 열변형을 최소화할 수 있는 열설계가 필수적이다. 일반적으로 궤도 상에서 전력 생성을 위해 전개형 태양전지판이 주로 적용되고 있으나, 태양전지판으로 인한 그림자로 인해 안테나 표면에 극심한 온도구배가 발생할 수 있다. 본 논문에서는 전개형 메쉬 안테나 후면부에 멤브레인 시트를 적용하고, 시트 후면부에 유연 태양전지셀을 부착하여 전개형 태양전지판으로 인한 온도구배를 최소화할 수 있는 이중막 구조의 설계 방식을 제안하였다. 제안된 안테나 열설계의 유효성을 검증하기 위해 궤도 열해석을 통해 안테나 표면에서 발생하는 온도구배 분석을 수행하였다.

• 한국식물병리학회:학술대회논문집
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• 한국식물병리학회 2003년도 정기총회 및 추계학술발표회
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• pp.93.2-94
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• 2003

In our previous studies, we selected three antagonistic bacteria, KJ1R5, KJ2C12, and KJ9C8 against Phytophthora capsici, the casual agent of Phytophthora blight of pepper. For elucidating production, root colonization, and total microbial activity were investigated. The dual culture assay was accomplished to elucidate existence of antibiotics. In this assay, any antagonistic bacteria did not inhibit growth of six important fungal plant pathogens, suggesting that these antagonists do not produce antibiotics. root surface or rhizosphere soil colonizations were examined with spontaneous rifampicin-resistant mutants equal to antagonistic ability of wild types. KJ2C12 colonized consistently rhizosphere soil while yellowish colonies of KJ1R5 and KJ9C8 well colonized root surfaces and rhizosphere soil. Total microbial activity in pots treated with the antagonistic bacteria was measured using fluorescein diacetate hydrolysis. total microbial activity of three antagonistic bacteria treatments was significantly higher than that of buffer-treated control until 4days after treatment. However, total microbial activity of treatment of three antagonistic bacteria decreased after 7 days. These results indicate that the antagonistic bacteria, KJ1R5 and KJ9C8 colonized and protected roots well against Phytophthora blight of pepper through competition of infection courts, especially competitions.

• 한국전기전자재료학회논문지
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• 제29권11호
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• pp.725-728
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• 2016

We investigated the characterizations of carbon films fabricated by dual magnetron sputtering under various film thickness for the electrodes in TCO-less DSSC (dye-sensitized solar cells). Carbon films prepared at various conditions were exhibited smooth and uniform surfaces without defects. Also, the rms surface roughness of carbon films was decreased from 2.25 nm to 1.0 nm with the increase of film thickness. The sheet resistance as the electrical properties are improved from $11.2{\times}10^{-3}$ to $2.28{\times}10^{-3}$ with the increase of film thickness. In the results, the performance of TCO-less DSSC critically depended on the film thickness of working electrodes, indicating the conductivity of carbon films.

• 한국표면공학회지
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• 제45권6호
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• pp.284-288
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• 2012

A study on microstructure control of multi-phase steel have been implemented to higher strength with improved formability. However, it is well known that the high strength of steel are susceptible to hydrogen embrittlement. The mechanisms of hydrogen embrittlement is caused by complex interactions. In this paper, the test specimens were fabricated to 5 type of 590DP steels at different levels of volume faction. The hydrogen charging was conducted by electrochemical hydrogen-charge method with varying charging time. The relationship between hydrogen concentration and volume fraction of 590DP steel was established by SP test and SEM-fractography. It was shown that the hydrogen amounts charged in 590DP steels increased with increasing the volume faction of austenite. The maximum loads of the 590DP steels in SP test were sharply decreased with increasing hydrogen charging time. The results of SEM-fractography investigation showed typical brittle-fracture surfaces for hydrogen-charged 590DP steels.

• 항공우주기술
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• 제12권1호
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• pp.207-212
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• 2013

스월 제트 전단층 제어에 관한 인공적 방법의 가능성을 연구하기 위해 전단 자극장치가 제안되었다. 주요 구성품으로는 두개의 동심 아음속 노즐 그리고 유동 자극 생성을 위한 내부 돌기 등이다. 돌기의 숫자는 방위각 방향의 다양한 모드를 유도 할 수 있도록 변화가 가능하다. 획득된 속도 결과는 평면 contour plot과 공간 입자 궤적으로 표현하였다. 다양한 자극 모드에서의 결과 값들이 기준 값(무자극)과 비교되었다. 결과적으로, 새로 고안된 기법이 스월 유동 와류 구조 제어에 있어 효과적인 방법임이 입증되었다.