• 한국정보디스플레이학회:학술대회논문집
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• 2008.10a
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• pp.1272-1275
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• 2008

We present the development of dry etch process for the liquid crystal display (LCD) fabrication using a dielectric barrier discharge (DBD) system at atmospheric pressure. In this experimental work, the dry etch characteristics and the electrical properties of thin film transistor are evaluated by using the scanning electron microscopy and electric probe, and TFT-LCD panel ($300\;mm\;{\times}\;400\;mm$) is manufactured with the application of the amorphous silicon etch step in the 4 mask and 5 mask processes.

• Journal of the Korean institute of surface engineering
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• v.32 no.3
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• pp.253-256
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• 1999

Wet plating has been initiated and developed as a major surface finishing technology as of the long customized and highly productive process until now. As the external compression by virtue of the environmental preservation becomes stricter, there has been new move to adapt dry plating line instead of conventional wet plating one in domestic surface finishing industry. Dry plating, so-called, plasma surface technology has been developed in semiconducting industry and becomes a key technology to be useful as an alternative to wet plating in surface finishing industry. The historical progress of domestic surface finishing industry was outlined with the background on the adaptation of three dry plating processes-plasma spraying, plasma nitriding and ion plating. The present status of domestic industrial activity was covered on major alternative to wet plating.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09a
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• pp.491-492
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• 2006

The horizontal high energy rotor ball mill ($Simoloyer^{(R)}$) is used to break and activate dry solids. It is used for dry-milling and in the vertical mount for wet-milling in leaching processes. Technical electric arc furnace (EAF) dust with high contents of zinc oxide, zinc ferrite and magnetite is efficiently separated by ambient temperature leaching. The process shows promise for industrial application

• Nuclear Engineering and Technology
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• v.50 no.5
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• pp.717-723
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• 2018

Thermal analysis of accident conditions is an important problem during safety assessment of the dry spent nuclear fuel storage facilities. Thermal aspects of accident conditions with channel blockage of ventilated storage containers are considered in this article. Analysis of flow structure inside ventilated containers is carried out by numerical simulation. The main mechanisms of heat and mass transfer, which take part in spent nuclear fuel cooling, were detected. Classification of accidents on the basis of their influence on the maximum temperatures inside storage casks is proposed.

• Tribology and Lubricants
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• v.36 no.1
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• pp.1-10
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• 2020

Large-area two-dimensional (2D) materials synthesized by chemical vapor deposition on donor substrates are promising functional materials for conductors, semiconductors, and insulators in flexible and transparent devices. In most cases, 2D materials should be transferred from a donor substrate to a target substrate; however, 2D materials are prone to damage during the transfer process. The damages to 2D materials during transfer are caused by contamination, tearing, and chemical doping. For the commercialization of 2D materials, a damage-free, large-area, and productive transfer process is needed. However, a transfer process that meets all three requirements has yet to be developed. In this paper, we review the recent progress in the development of transfer processes for 2D materials, and discuss the principles, advantages, and limitations of each process. The future prospects of transfer processes are also discussed. To simplify the discussion, the transfer processes are classified into four categories: wet transfer, dry transfer, mechanical transfer, and electro-chemical transfer. Finally, the "roll-to-roll" and "roll-to-plate" dry transfer process is proposed as the most promising method for the commercialization of 2D materials. Moreover, for successful dry transfer of 2D materials, it is necessary to clearly understand the adhesion properties, viscoelastic behaviors, and mechanical deformation of the transfer film used as a medium in the transfer process.

• Journal of Korean Society for Atmospheric Environment
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• v.14 no.3
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• pp.191-208
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• 1998

Estimations of dry and wet depositions in Korea and the size distributions of yellow sand above Korea have been carried out using the Eulerian aerosol model with the simulated meteorological data from the SNU mesoscale meteorological model. The estimated particle size distribution in Korea shows a bimodal distribution with peak values at 0.6 pm and 7 pm and a minimum at 2 pm in the lower layer However, as higher up, the bimodal distribution becomes an unimodal distribution with a peak value at 4∼5mm. Among the total amount of yellow sand deflated in the source regions , the dry and wet deposition fluxes were about 92%, and about 1.3∼0.5%, repectively, and the rest(5∼6%) is suspended in the air, Most of dust lifted in the air during the clear weather is deposited in the vicinity of the source regions by dry deposition and the rest undergoes the long -range transport with a gradual removal by the wet deposition processes. Over Korean peninsula, the total amount of yellow sand suspended in the air was about 6∼8% of the emissions in the source region and the dry and wet deposition fluxes were about 0.005∼0.7% and 0.003∼0.051% of the total emitted amount, repectively. It is estimated that 2.7∼8.9 mesa-tons of yellow sand is transported annually over the Korean peninsula with the annual mean dry deposition of 2.1∼490 kilo-tons and the annual mean wet deposition of 1.5∼65 kilo-tons.

• Journal of environmental and Sanitary engineering
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• v.23 no.3
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• pp.9-22
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• 2008

This study was conducted to develop a system that processes harmful gases and dust, which being generated in the production of micro-inorganic fabric. This can be obtained by melt spinning raw materials such as agalmatolite, fluorspar, limestone, silica under high temperature at $1500-1600^{\circ}C$ in a glass recuperator using a dry method by Cyclone Reactor or Envelope Type (ET) type Bag Filter. If the number of the members of Korea Glass Industry Association reaches up to 45, the damage of the harmful gas being generated in recuperator should not be small. In addition, research of existing facilities showed the most of harmful gas treatment facilities which adopt wet treatment or semi-dry treatment process. This was caused the problems for wastewater and the second pollutive materials. Moreover, in the dust collecting facility behind recuperator, it is also problematic that electric dust collector requires enormous initial investment. We have researched various methods to show both economic and efficient new processes for the preventive facilities of recuperator. As the result of the experiments, the removal efficiencies of HF and SOx were 99% and 87%, respectively. Although it was insignificant reaction, a pretty much interesting result that NOx showed an absorption reaction with $Ca(OH)_2$(removal efficiency was more than 25%) was obtained.

• Transactions of the Korean Society of Pressure Vessels and Piping
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• v.19 no.2
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• pp.84-92
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• 2023

As temporary storage facilities for spent nuclear fuels in domestic nuclear power plants are expected to be saturated, external intermediate storage facilities would be required in the future. Spent nuclear fuels are stored in metal canisters and then placed in a dry environment within concrete or metal casing for operation. In the United States, the dry storage method for spent nuclear fuels has been operated for an extended period. Based on the corrosion experiences of dry storage canisters in chloride environments, numerous studies have been conducted to reduce corrosion in welds. With the construction of intermediate storage facilities in Korea for spent nuclear fuels expected near coastal areas adjacent to nuclear power plants, there is a need for research on the corrosion occurrence of welds and mitigation methods for canisters in chloride environments. In this paper, we measured and compared the residual stresses in the Heat-Affected Zones (HAZ) after electron beam welding (EBW) and gas tungsten arc welding (GTAW) processes for candidate materials such as 304L, 316L, and duplex stainless steel(DSS). We investigated the possibility of microstructure control through the application of surface modification processes using friction stir processing (FSP). Corrosion tests on each welded specimen revealed a higher corrosion rate in EBW welds compared to GTAW. Furthermore, it was confirmed that corrosion resistance improved due to phase refinement and redistribution of precipitates when FSP was applied.

• Journal of the Korean Society of Marine Environment & Safety
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• v.25 no.2
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• pp.244-250
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• 2019

We investigated the relationship between morphological characteristics and individual dry weight to develop a method for estimating the individual dry weight of sheet form macroalgae: Ulva australis, Ulva linza, Pachymeniopsis lanceolata, and Pyropia yezoensis. In Total, 319 thalli of various sizes were collected at six sites from February 2017 to December 2018. An interspecific allometric exponent of 0.28 was found for length-biomass allometry in four sheet form macroalgae, corresponding to a 1/4-power law for primary producers. The relationships between surface area and individual dry weight, as well as between individual fresh weight and individual dry weight, were found to fit significantly using linear regression equations. This explained 94-99 % of individual dry weight, indicating that surface area and individual fresh weight can be used to accurately estimate individual dry weight. We propose the use of this method when experimental processes do not allow individual dry weight to be measured directly, so researchers can save both time and expense.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 1999.10a
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• pp.56-56
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• 1999

For advanced TFT-LCD manufacturing processes, dry etching of thin-film layers(a-Si, $SiN_x$, SID & gate electrodes, ITO etc.) is increasingly preferred instead of conventional wet etching processes. To dry etch Al gate electrode which is advantageous for reducing propagation delay time of scan signals, high etch rate, slope angle control, and etch uniformity are required. For the Al gate electrode, some metals such as Ti and Nd are added in Al to prevent hillocks during post-annealing processes in addition to gaining low-resistivity($<10u{\Omega}{\cdot}cm$), high performance to heat tolerance and corrosion tolerance of Al thin films. In the case of AI-Nd alloy films, however, low etch rate and poor selectivity over photoresist are remained as a problem. In this study, to enhance the etch rates together with etch uniformity of AI-Nd alloys, magnetized inductively coupled plasma(MICP) have been used instead of conventional ICP and the effects of various magnets and processes conditions have been studied. MICP was consisted of fourteen pairs of permanent magnets arranged along the inside of chamber wall and also a Helmholtz type axial electromagnets was located outside the chamber. Gas combinations of $Cl_2,{\;}BCl_3$, and HBr were used with pressures between 5mTorr and 30mTorr, rf-bias voltages from -50Vto -200V, and inductive powers from 400W to 800W. In the case of $Cl_2/BCl_3$ plasma chemistry, the etch rate of AI-Nd films and etch selectivity over photoresist increased with $BCl_3$ rich etch chemistries for both with and without the magnets. The highest etch rate of $1,000{\AA}/min$, however, could be obtained with the magnets(both the multi-dipole magnets and the electromagnets). Under an optimized electromagnetic strength, etch uniformity of less than 5% also could be obtained under the above conditions.