• Title/Summary/Keyword: dry ashing

Search Result 23, Processing Time 0.022 seconds

Selective Dry Etching of GaAs/AlGaAs Layer for HEMT Device Fabrication (HEMT 소자 제작을 위한 GaAs/AlGaAs층의 선택적 건식식각)

  • 김흥락;서영석;양성주;박성호;김범만;강봉구;우종천
    • Journal of the Korean Institute of Telematics and Electronics A
    • /
    • v.28A no.11
    • /
    • pp.902-909
    • /
    • 1991
  • A reproducible selective dry etch process of GaAs/AlGaAs Heterostructures for High Electron Mobility Transistor(HEMT) Device fabrication is developed. Using RIE mode with $CCl_{2}F_{2}$ as the basic process gas, the observed etch selectivity of GaAs layer with respect to GaAs/$Al_{0.3}Ga_{0.7}$As is about 610:1. Severe polymer deposition problem, parialy generated from the use of $CCl_{2}F_{2}$ gas only, has been significantly reduced by adding a small amount of He gas or by $O_{2}$ plasma ashing after etch process. In order to obtain an optimized etch process for HEMT device fabrication, we com pared the properties of the wet etched Schottky contact with those of the dry etched one, and set dry etch condition to approach the characteristics of Schottky diode on wet etched surface. By applying the optimized etch process, the fabricated HEMT devices have the maximum transconductance $g_{mext}$ of 224 mS/mm, and have relatively uniform distribution across the 2inch wafer in the value of 200$\pm$20mS/mm.

  • PDF

Asbestos and Non-Asbestos Fiber Content in Lungs of Autopsied Subjects in Pohang with no Known History of Occupational Asbestos Exposure (포항지역 부검 폐조직에서 석면과 비석면 섬유농도에 관한 연구)

  • Lim, Hyun-Sul;Kim, Dong-Hoon;Sakai, Kiyoshi;Hisanaga, Naomi;Kim, Ji-Yong
    • Journal of Preventive Medicine and Public Health
    • /
    • v.33 no.4
    • /
    • pp.477-483
    • /
    • 2000
  • Objectives : To obtain reference values for the pulmonary asbestos and non-asbestos fiber contents of residents in Korea and to compare them with similar results from Japan. Methods : The autopsied lung specimens from 22 deceased people (20 males and 2 females) in Pohang, without any known occupational history of asbestos exposure, were analyzed for incidence of asbestos and non-asbestos fibers by transmission electron microscopy with energy dispersive X-ray analysis after using low temperature ashing procedures. Results : Chrysotite fiber (46.2%) was the major fiber type found in the lungs of the subjects. The asbestos fiber concentrations found in males and females were $0.09\times10^6$ fiberss(g of dry lungs) and $0.30\times10^6$ fibers/(g of dry lungs), respectively, showing a geometric mean concentration $0.09\times10^6$ fibers/(g of dry lung tissue), due to the predominance of males in the sample. The non-asbestos fiber contents in males and females were $4.61\times10^6$ fibers/(g of dry lungs) and $17.79\times10^6$ fibers/(g of dry lungs), respectively, with a geometric mean concentration $5.21\times10^6$ fibers/(g of dry lung tissue). Conclusions : Residents in Pohang had significantly lower levels of both asbestos and non-asbestos fibers than urban residents in Korea. Furthermore, Koreans had significantly lower levels of both asbestos and non-asbestos fibers than Japanese.

  • PDF

Preparation Method for Atomic Absorption Spectrophotometry of Food Samples -Comparison of Dry, Wet and Aqua-regia Methods- (원자흡광분석(原子吸光分析)을 위한 식품시료(食品試料) 전처리방법(前處理方法) -왕수액(王水液) 처리법(處理法)과 건식(乾式) 및 습식분해법과(濕式分解法)의 비교(比較)-)

  • Woo, Soon-Ja;Ryoo, Si-Saeng
    • Korean Journal of Food Science and Technology
    • /
    • v.15 no.3
    • /
    • pp.225-230
    • /
    • 1983
  • Aqua-regia method is reported for simultaneous determination of potassium, sodium, calcium, magnesium, zinc, manganese, copper and iron in high-fat fish tissue. Samples are digested with conc nitric and conc hydrochloric acid in a volumetric flask. After digestion, aqua-regia extracts of samples are analyzed by direct flame atomic absorption spectrophotometry. The aqua-regia method is compared with dry ashing method and $H_{2}SO_{4}-HNO_{3}$ method. For quantiative determination of calcium, magnesium and zinc, the aqua-regia method and dry ashing method are superior to $H_{2}SO_{4}-HNO_{3}$ method. In case of the other elements-potassium, sodium, manganese, copper and iron-the three methods gave the similar results. Because samples can be processed by aqua-regia method easily, rapidily, cheaply and safely, aqua-regia method is suitable for the routine preparation of a large number of samples simultaneously.

  • PDF

Stripping of Ion-Implanted Photoresist Using Cosolvent-Modified Supercritical Carbon Dioxide (공용매로 변형된 초임계 이산화탄소를 이용한 이온 주입 포토레지스트 세정)

  • Jung, In-Il;Kim, Ju-Won;Lee, Sang-Yun;Kim, Woo-Sik;Ryu, Jong-Hoon;Lim, Gio-Bin
    • Korean Chemical Engineering Research
    • /
    • v.43 no.1
    • /
    • pp.27-32
    • /
    • 2005
  • We propose an effective and environmentally friendly dry stripping method using a supercritical carbon dioxide ($SCCO_2$) system modified by a single and multiple cosolvents to remove ion-implanted photoresist and residue from a wafer surface at three different temperatures (97, 148, $200^{\circ}C$) and pressures (200, 300, 400 bar). After high dose of ion implantation the photoresist was not easily removed by using pure $SCCO_2$, but swollen. The $SCCO_2$ system modified by single cosolvents and multiple cosolvents mixed with aprotic solvents could not effectively remove the heavy organics, but swell them. However, the $SCCO_2$ system modified with multiple cosolvent (5%, v/v) composed of DMSO and DIW showed high removal efficiency for ion-implanted photoresists at $97^{\circ}C$ and 200 bar for 30 min (about 80%). In this study it has been shown that the dry stripping method using $SCCO_2$ system modified with multiple cosolvents could replace either plasma ashing or acid and solvent wet bench method and dramatically reduce accompanied chemical usage and disposal.

Quantitative Analysis of Heavy Metals in Packaging Papers

  • Jo, Byoung-Muk;Jeong, Myung-Joon
    • Journal of Korea Technical Association of The Pulp and Paper Industry
    • /
    • v.39 no.5
    • /
    • pp.45-51
    • /
    • 2007
  • This study was carried out to investigate various heavy metal contents in packaging papers by pre-treatments for ICP-ES (Inductively Coupled Plasma Emission Spectrometry) analysis. Pre-treatment methods of heavy metals in this study include extraction, migration and decomposition methods (dry ashing, $HNO_3-HClO_4-HF,\;HNO_3,\;and\;H_2SO_4-HNO_3$). Test results were compared with conventional extraction (water) and migration (3% acetic acid) methods. The five representative heavy metals (Cd, As, Pb, Cr and Hg) were analyzed. For Cd, Hg, and As, the results were below detection limit of the instrumental technique. It was considered that the migration test was a better method compared to extraction test, but all the decomposition methods showed much higher detection values than the extraction or migration test. In case of recycled corrugated containers, 3% acetic acid solution extracted about 25% of chromium and 30% of lead compared to the content by decomposition methods. Among all decomposition methods, the nitric acid - perchloric acid - hydrofluoric acid treatment brought a slightly higher detection value than others, but there was no significant difference among them except sulfuric acid - nitric acid method.

Effect of Pre-treatments on the Content of Heavy Metals in Packaging Paper

  • Jo, Byoung-Muk;Jeong, Myung-Joon
    • Proceedings of the Korea Technical Association of the Pulp and Paper Industry Conference
    • /
    • 2006.06b
    • /
    • pp.465-469
    • /
    • 2006
  • Pre-treatment methods to determine various heavy metal contents in packaging papers were investigated by ICP-ES (Inductively Coupled Plasma Emission Spectrometry) analysis. Pre-treatment methods utilized in this study include dry ashing and decomposition methods ($HNO_{3-}HClO_{4-}HF,\;HNO_{3},\;and\;H_{2}SO_{4-}HNO_{3}$). They were compared with the conventional extraction (water) and migration (3% acetic acid) methods. The five representative heavy metals (Cd, As, Pb, Cr and Hg) were analyzed. For Cd, Hg, and As, the results were below detection limit of the instrument. In case of Cr and Pb, the migration test is considered to be a better method compared to the extraction test, but all pretreated methods showed much higher detection efficiency than the extraction or migration test. However, the detection ratio between the migration test and decomposition methods was different. Among all decomposition methods, the nitric acid - perchloric acid - hydrofluoric acid treatment brought a slightly higher detection value than others, but there was no significant difference among them except sulfuric acid - nitric acid method. Concerning Pb, the sulfuric acid - nitric acid method showed a low detection efficiency compared to other decomposition methods. The sulfuric acid - nitric acid method is, thus, not considered to be a suitable analysis method for Pb in packaging papers.

  • PDF

Study on the Mineral Contents of Commercial Baby Foods (시판 이유식류 제품의 무기질 함량에 관한 연구)

  • 양혜란;김을상;김연천;한선희
    • Journal of the Korean Society of Food Science and Nutrition
    • /
    • v.30 no.3
    • /
    • pp.388-394
    • /
    • 2001
  • This study was conducted ton investigate the mineral contents of commercial baby foods. Samples were classified into 4 groups; powdered formula, baby juice product (domestic), juice and paste products (imported) and soymilk-based formula. We analyzed Ca, P, Mg, Na, K, Fe, Cu, Zn contents by atomic absorption spectrophotometer after dry-ashing. The difference of analyzed value versus labeled value and Ca/P ratio of analyzed value were calculated. The difference (%) of analyzed value on the labeled value was Ca: 98.6, P: 121.8, Mg: 146.1, Na: 87.4, K: 104.3, Fe: 104.8, Cu: 120.2, Zn: 109.8 in powdered formula, Mg showed the highest difference among the elements. The Ca/P ratio of powdered formula was 1.41 (1.70-1.99). Baby juice products (domestic) were fortified Ca, Fe and the difference (%) of analyzed value on labeled value of Ca and Fe contents was 131.8, 110.2, respectively. The Ca/P ratio of these was 2.36 (1.64-3.71). Differently the domestic products, imported juice and paste products were not fortified Ca, Fe and its Ca/P ratio was 0.38(0.14-0.59). The difference (%) of analyzed value on the labeled value was Ca: 110.2, Mg: 179.5, Na: 83.7, K: 87.8, Cu: 107.8, Fe: 219.8, Zn: 100.5, P: 126.6 in soymilk-based formula, Fe showed the highest difference among the elements. The Ca/P ratio of soymilk-based formula was 1.17 (1.04-0.39).

  • PDF

A Study on Vitamin C Content of Nutrition Emphasized Products (영양강조표시제품 중 비타민 C 함량 조사)

  • Jeong, Da-un;Lee, Heon-Ok;Kim, Young-Kyoung;Om, Ae-Son
    • Korean Journal of Community Nutrition
    • /
    • v.21 no.6
    • /
    • pp.574-579
    • /
    • 2016
  • Objectives: Vitamin C has various functions such as antioxidative effect and supporting absorption of iron (Fe). Aim of this present study was to provide vitamin C nutrition information and to briefly evaluate absorption interaction of vitamin C and Fe content of vitamin C emphasized products. Methods: Vitamin C emphasized foods including beverages, cereal, snacks, chocolate products, other cocoa products, and sugary products were examined by HPLC. Fe contents in samples after dry-ashing were examined by ICP. Results: Vitamin C content ranges in various products tested were the following: beverages (n=11) $20.15{\pm}0.08{\sim}845.41{\pm}6.07mg$, cereal (n=11) $52.50{\pm}0.23{\sim}262.50{\pm}0.07mg$, snacks (n=1) $50.00{\pm}0.25mg$, chocolate products (n=1) $311.73{\pm}2.44mg$, other cocoa products (n=1) $311.73{\pm}2.44mg$, other sugary products (n=2) $52.50{\pm}0.23{\sim}262.50{\pm}0.07mg$. Vitamin C (n=27) analysis values ranged from 82 to 450% of the labeled value. Vitamin C content in vitamin C emphasized food (n=6) was estimated 7.7 times~56.6 times more than Fe content. Conclusions: Analyzed samples ranged more than 80% of the labeled value in vitamin C emphasized products, which complied with food labeling regulation. But, beverages (n=3), cereal (n=4), chocolate products (n=1) were 2 times more than the labeled value. To provide accurate nutrition information, food manufactures should supervise nutrition labeling and understand the interactions between nutrients. Also, consumer should decide about the adequate amount of nutrient intake by thoroughly checking nutrition labeling.

Evaluation of the Feasibility of Eliminating Non-point Source Pollution Using Waste Sewage Sludge Bio-blocks (하수슬러지를 이용한 Bio-block의 비점오염물질 제거 가능성 평가)

  • Han, Sang Moo;Kim, Do Hyeong;Jeong, Byung Gon
    • Journal of Korean Society on Water Environment
    • /
    • v.37 no.5
    • /
    • pp.363-368
    • /
    • 2021
  • On the assessment results of the non-point source pollutant removability of bio-block using waste sewage sludge, at the reactor's initial operation stage, the removal efficiency of COD was slightly unstable. However, after the reactor was stabilized, the COD removal efficiency was higher in the reactor filled with bio-blocks compared to the reactor filled with broken stones. In terms of nitrogen and phosphorus, their removal efficiency was unstable at the initial stage of the reactor operation. This phenomenon was investigated through the bio-block elution experiments. Results indicated that nitrogen and phosphorus were eluted from the bio-blocks affecting their removal at the initial operation. Furthermore, based on elution tests conducted after the dry ashing of the waste sewage sludge, part of the nitrogen and phosphorus was eluted similar to the bio-block elution test results, although considerable amounts of nitrogen and phosphorus were reduced compared to the sludge cake. Prior to the use of the waste sewage sludge bio-blocks as a filter medium to remove non-point source pollutants, a stabilization period of 10 days was required. After the stabilization process, results showed similar characteristics as general aggregates. Moreover, to use the bio-block as a filter medium for the non-point pollutant removal, the filling ratio of 75% was the most suitable as it resulted in the highest nitrogen removal efficiency after the stabilization. The results of this study suggested that waste sewage sludge can be suitably recycled as a mixed raw material for the bio-blocks, with satisfactory application as a filter medium in artificial wetlands, stormwater runoff problems, stream water pollutants to eliminate non-point source pollutants.

The Supplementation of Yam Powder Products Can Give the Nutritional Benefits of the Antioxidant Mineral (Cu, Zn, Mn, Fe and Se) Intakes

  • Shin, Mee-Young;Cho, Young-Eun;Park, Chana;Sohn, Ho-Yong;Lim, Jae-Hwan;Kwun, In-Sook
    • Preventive Nutrition and Food Science
    • /
    • v.17 no.4
    • /
    • pp.299-305
    • /
    • 2012
  • Yam has been recognized having the beneficial effects for the prevention of various diseases, such as cancer, immunity, infection and obesity etc. There is increasing consideration to supplement the antioxidant nutrients to make up the lack of the antioxidant nutrient intakes. No study has been reported for the analysis of antioxidant mineral contents and comparison to dietary recommended intake for the sense of health promotion. In our study, we analyzed the contents of antioxidant trace elements (Zn, Mn, Fe, Cu and Se) and Cr contents in cultivated Korean yam powders for evaluation of nutrient intake aspects. We collected the commercial yam powders from six different cultivated areas in the South Korea and measured antioxidant minerals (Zn, Mn, Fe, Cu and Se) and Cr contents using trace element-free plasma spectrometer (ICP) or atomic absorption spectrometer (AAS) after dry-ashing and then wet-acid digestion. The accuracy of mineral analysis method was confirmed by the mineral analysis of standard reference material. Each analyzed element contents in yam were compared to dietary reference intakes of Koreans (KDRIs). The average levels of trace elements (Zn, Mn, Fe, Cu, Se and Cr) in yam powders were 18.3, 11.9, 36.0, 3.7, 1.9 and 1.27 ${\mu}g/g$ yam powder, respectively. The intakes of Zn, Fe, Cu and Se of which KDRIs is determined, are accounted as being up to 23.8%, 55.6%, 32.5% and 236% recommended intake (RI) of KDRIs, if daily yam supplementation (50 g) of commercial instruction would be considered. The intake of Mn is about 25% adequate intake (AI) of KDRIs with the daily supplementation of yam powder. Most of mineral intakes from daily yam supplementation were with the range of non-detectable to <10% upper limit (UL) level, which is very much safe. The study results show that daily supplementation of Korean yam power is beneficial to provide the supplemental nutrient intake and also is safe, if the suggested dosage would be considered.